JPH1089724A - Air conditioner - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate the execution of the equipment, to save the space, and to simplify a fan filter unit by regulating the temperature of the air to be supplied to an objective room by a temperature regulator provided with a second fan filter unit among the fan filter units which are continuously arranged on a ceiling part. SOLUTION: An air supply chamber 4 is formed in a space above the ceiling of a clean room 1, and a first fan filter unit 5A and a second fan filter unit 5B to suck the air for supply from the air supply chamber 4 by a fan (a), and remove the dust from the sucked air by a filter (c) and supply the air to an objective room 1 are densely installed in a matrix shape over the whole ceiling surface part. In addition, a temperature regulator (d) is provided only on the second fan filter unit 5, and the temperature of the supplied air to the objective room 1 is regulated by the temperature regulator (d). The execution of the equipment is facilitated, the space is saved, and the fan filter units 5A, 5B are simplified.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air conditioner in which fan filter units for supplying purified air to a target room are juxtaposed on a ceiling surface of the target room.

[0002]

2. Description of the Related Art Conventionally, this type of air conditioning equipment has been
As shown in JP-A-48256 (see FIG. 4), a fan a that suctions air from the space 4 above the ceiling of the target room 1 and supplies the suctioned air to the target room 1 and purifies the supplied air. Fan filter unit 5 including filter c
Are arranged side by side on the ceiling surface of the target room 1, and as a means for adjusting the temperature of the target room 1, the air is returned from the target room 1 to the space above the ceiling 4 (specifically, From the underfloor space 7 of the target room 1 or the ceiling or lower floor of the air passage 2 using a part of the target room 1 or the target room 1 provided between the fan filter units 5 to the space above the ceiling 4 Air path) is provided with a temperature controller D.

As shown in Japanese Patent Application Laid-Open No. 62-155455 (see FIG. 5), air is sucked from a return air area 1a in a target chamber 1 and supplied to a clean area 1b in the target chamber 1. A fan a, a filter c for purifying the supplied air, and a fan filter unit 5 ′ equipped with a temperature controller equipped with a temperature controller d for regulating the temperature of the supplied air are juxtaposed on the ceiling surface of the target room. is there.

[0004]

However, in the former conventional equipment shown in FIG. 4, the installation work of the temperature controller D is required separately from the installation work in which the fan filter unit 5 is juxtaposed on the ceiling surface. It takes time and effort, and although the underfloor space and the ceiling are used, it is necessary to secure a space for installing the temperature controller D separately from the ceiling, which is the juxtaposed part of the fan filter unit 5. There was a problem that the equipment space increased.

On the other hand, in the latter conventional equipment shown in FIG. 5, in addition to determining the number of juxtaposed fan filter units 5 'equipped with a temperature controller according to the required air supply amount to the clean area 1b of the target room 1, In order to obtain an appropriate temperature adjustment capacity (cooling capacity or heating capacity) corresponding to the heat load (cooling load or heating load) of the target room 1, as a whole of the juxtaposed number of temperature controller equipped fan filter units 5 ', According to the heat load of the target room 1,
It is necessary to select the temperature controller d of which degree of temperature control capability is provided in each fan filter unit 5 ′. Therefore, the temperature controllers d having different temperature control capabilities for each target room 1 are required.
Therefore, fan filter units 5 ′ having different specifications must be prepared, which causes a problem that the production efficiency of the fan filter unit 5 ′ is reduced and the production cost is increased.

[0006] In view of the above circumstances, the main problem of the present invention is to adopt a rational system for juxtaposing the fan filter units, thereby facilitating facility construction, saving space, and manufacturing the fan filter units. The point is to simplify the operation.

[0007]

[Means for Solving the Problems]

[1] According to the first aspect of the present invention, a first fan filter unit (1) including a fan that sucks in air for supply and supplies the intake air to a room to be air-conditioned, and a filter that purifies the supply air. That is, a fan filter unit without a temperature controller, and a second fan filter unit (fan filter with a temperature controller) including, in addition to these fans and filters, a temperature controller for adjusting the temperature of air supplied to the target chamber. Units) are arranged side by side on the ceiling surface of the target room.

That is, of the fan filter units arranged side by side on the ceiling surface, the temperature of the air supplied to the target room is adjusted by the temperature controller provided in the second fan filter unit, whereby the temperature of the target room is adjusted. This eliminates the need to install a temperature controller for room temperature adjustment elsewhere apart from juxtaposing the fan filter unit on the ceiling surface of the target room, or supplementing another temperature controller Even if the temperature controller is installed in another place, it is easy to install the temperature controller, and the temperature controller can be small in size without increasing the installation space.

In addition, the first and second fan filter units whose number of juxtaposed units on the ceiling surface are determined in accordance with the required air supply amount to the target room, as a whole, have an appropriate temperature adjustment capability corresponding to the heat load of the target room. In order to achieve this, by appropriately selecting the number of the second fan filter units in the total number of juxtaposed units, it is possible to obtain an appropriate temperature adjustment capability corresponding to the heat load of the target room. It is not necessary to prepare different fan filter units having different specifications equipped with temperature controllers having different temperature adjustment capabilities for each target room.

Therefore, according to the first aspect of the present invention, it is possible to facilitate the installation of the equipment and to effectively save the space, and to simplify the production of the fan filter unit, thereby improving the production efficiency. In addition, the manufacturing cost can be reduced.

[2] In the invention according to claim 2, a plurality of the first fan filter units are arranged on the ceiling surface of the target room in a state of being uniformly distributed, and a plurality of the second fan filter units are It is placed on the ceiling surface of the subject room in an evenly dispersed state.

That is, a plurality of first fan filter units (fan filter units without a temperature controller),
In addition, by arranging each of the plurality of second fan filter units (fan filter units equipped with a temperature controller) on the ceiling surface of the target room in a state of being evenly distributed, air supply to the target room can be entirely performed in the room. And the second fan filter unit alone among the fan filter units is arranged on the ceiling surface of the subject room in a state where the plurality of second fan filter units are evenly dispersed. The supply of temperature-regulated air is also made uniform throughout the room, thereby making it possible to effectively achieve a uniform indoor environment.

[3] In the invention according to claim 3, the outer shape of the first fan filter unit in plan view and the second fan filter unit are different from each other.
By making the external shape of the fan filter unit in a congruent shape in plan view, even if the number ratio or relative arrangement relationship between the first fan filter unit and the second fan filter unit is selected, The first and second fan filter units can be juxtaposed and arranged side by side on the ceiling surface of the target room in a state where they are neatly arranged, thereby improving the design and making the indoor environment more uniform.

[4] According to the fourth aspect of the present invention, each of the first fan filter unit and the second fan filter unit is configured to suck air in the space above the ceiling of the target room from the upper surface thereof. Accordingly, when the first and second fan filter units are juxtaposed on the ceiling surface of the target room, the first and second fan filter units are densely integrated over the entire ceiling surface in a state where adjacent ones are close to each other. So that they can be placed,
Purified air by a filter is stably supplied to the room from the entire ceiling surface in a uniform state so that a high degree of indoor cleanliness can be secured in a target room such as a clean room.

[5] According to a fifth aspect of the present invention, in the above-described fourth aspect of the present invention, a space for a user side adjacent to the target room (for example, an adjacent room or an adjacent passage).
A return air passage for returning air from the target room to the space above the ceiling, thereby saving space by using the adjacent space as a return air passage in addition to its original user side use, and the above-mentioned claim. As an effect of the invention described in 1 above, space saving can be achieved more effectively, in combination with space saving by eliminating or miniaturizing a temperature controller provided separately from the fan filter unit.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an air conditioner of a clean room facility. Reference numeral 1 denotes a clean room as a room to be air-conditioned.
Manufacturing of semiconductor integrated circuits and manufacturing of medicines and foods). Numeral 2 denotes an adjacent space which is separated from the clean room 1 by a partition 3. The adjacent space 2 is a passage for traffic of workers and carrying in / out of various things to / from the clean room 1 or the clean room 1.
This is a space for use by the user, such as an auxiliary work room attached to the device or a room for arranging equipment that contributes to work in the clean room 1.

The space behind the ceiling of the clean room 1 is an air supply chamber 4, and air is supplied from the air supply chamber 4 to the ceiling surface of the clean room 1 as shown in FIGS. 1 and 2. ,
A large number of fan filter units 5A and 5B are supplied to the target room 1 after the suction air is subjected to dust removal processing and arranged densely in a matrix over the entire ceiling surface.

The floor 6 of the clean room 1 is a perforated plate-like or grid-like ventilable floor, and the underfloor space of the clean room 1 is
As a return air chamber 7 for receiving air exhausted from the floor 6 through the floor 6.

That is, the fan filter units 5A and 5A
By means of the side-by-side group B, clean air can be stably supplied from the entire ceiling surface to the clean room 1 in a uniform state, and room air in the clean room 1 can be discharged from the floor 6 to the return air chamber 7 under the floor. As a result, the entirety of the clean room 1 is made into a laminar downdraft region of clean air, so that the clean room 1 is maintained at a high degree of indoor cleanliness.

The adjoining space 2 has a return air passage R for returning air from a return air chamber 7 below the floor to an air supply chamber 4 above the ceiling.
Basically, the fan a provided in each of the fan filter units 5A, 5B circulates air through the air supply chamber 4, the clean room 1, the return air chamber 7, and the return air passage R.

Reference numeral 8 denotes an exhaust passage for discharging a part of the circulating air from the clean room 1 to the return air chamber 7 to the outside of the system. Air (usually outside air) whose temperature and humidity have been adjusted in a pretreatment
This is a fresh air introduction path in which the clean room 1 is kept in a fresh atmosphere by partially discharging the circulating air and introducing the fresh air.

In each of the fan filter units 5A and 5B, an inlet i for air in the air supply chamber 4 is formed on the upper surface, and an opening on the lower surface is an air outlet o for the clean room 1. A fan a that sucks air from a suction port i into a square box-shaped unit casing b and supplies the suction air from an air outlet o to the clean room 1 and a filter c that purifies the supply air (for example, a HEPA filter) And ULPA filters).

The fan filter unit 5
A and 5B, some of the fan filter units 5B have the clean room 1 in addition to the fan a and the filter c.
A temperature controller d for adjusting the temperature of the supply air to the unit by cooling or heating is provided inside the unit casing b.

The unit casings b of the first fan filter unit 5A without the temperature controller d and the second fan filter unit 5B with the temperature controller d
Has a structure in which at least the outer shape in plan view is congruent (square in the present embodiment), and when the first and second fan filter units 5A and 5B are juxtaposed on the ceiling surface, the first fan filter unit 5A
Of the first fan filter unit 5A and the second fan filter unit 5B as an example of an arrangement form in which the first fan filter unit 5B and the second fan filter unit 5B are uniformly distributed and distributed over the entire ceiling surface. An arrangement is adopted in which the fan filter unit 5B is adjacent to and adjacent to each other in the vertical and horizontal directions of the matrix arrangement.

That is, a part of the fan filter units 5A and 5B juxtaposed on the ceiling surface is provided with a temperature controller, and the air whose temperature has been adjusted by the temperature controller d is supplied to the clean room 1, whereby the clean room 1 is provided. 1 is kept at a desired temperature atmosphere, and the first and second fan filter units 5A, 5B are densely juxtaposed over the entire ceiling surface portion, so that the entire clean room 1 is made as described above. In addition to the uniform laminar downdraft area of the clean air, only the second fan filter unit 5B equipped with the temperature controller is evenly spread by spreading the second fan filter unit 5B over the entire ceiling surface. By dispersing and disposing, a uniform temperature atmosphere can be formed throughout the clean room 1.

[Another Embodiment] Next, another embodiment of the present invention will be listed. As the temperature controller d provided in the second fan filter unit 5B, various cooling types or heating types such as a cold water coil, a direct expansion coil, a hot water coil, a steam coil, and an electric heater can be adopted.

As in the above-described embodiment, the first and second fan filter units 5A and 5B may be densely juxtaposed over the entire ceiling surface, and in some cases, the first and second fan filter units 5A and 5B may be arranged. , 5B may be sparsely juxtaposed with an interval.

The number of fan filter units 5A and 5B juxtaposed on the ceiling surface to be used as the second fan filter unit 5B equipped with a temperature controller is appropriately determined according to the heat load condition of the target room 1 and the like. The number may be determined as appropriate.

A plurality of the first fan filter units 5A are arranged on the ceiling surface in a state of being uniformly distributed, and
When a plurality of the second fan filter units 5B are arranged on the ceiling surface in a state of being evenly dispersed, as a specific arrangement form, the first fan filter unit 5A and the second fan filter In addition to the arrangement in which the units 5B are adjacent to each other in the vertical and horizontal directions of the matrix arrangement, for example, as shown in FIG.
One first fan filter unit 5A is arranged between them, and two first fan filter units 5 are arranged vertically between the second fan filter units 5B.
Various arrangement forms can be adopted, such as an arrangement form in which A is arranged.

The outer shape of the first fan filter unit 5A in plan view and the second fan filter unit 5B
When the outer shape in a plan view is a congruent shape,
The shape is not limited to a square, but may be a rectangle, a circle or a polygon such as a quadrangle or more.

As shown by the broken line in FIG. 1, the air circulation between the air supply chamber 4, the clean room 1, the return air chamber 7, and the return air passage R is provided to the air supply chamber 4 above the ceiling and the return air chamber 7 below the floor. A fan F may be provided.

In the above-described embodiment, an example has been described in which the clean room 1 in the clean room facility is set as a room to be air-conditioned.
The purpose of the room to be air-conditioned in which the fan filter units 5A and 5B are juxtaposed on the ceiling surface may be any.

[Brief description of the drawings]

FIG. 1 is a side view showing a configuration of an air conditioner.

FIG. 2 is a plan view showing an arrangement of a fan filter unit.

FIG. 3 is a plan view showing an arrangement of a fan filter unit according to another embodiment.

FIG. 4 is a side view showing a conventional equipment configuration.

FIG. 5 is a side view showing another conventional equipment configuration.

[Explanation of symbols]

 Reference Signs List 1 target room a fan c filter 5A first fan filter unit d temperature controller 5B second fan filter unit 4 ceiling space 2 adjacent space

Claims (5)

[Claims] A first fan filter unit including a fan for sucking air for supply and supplying the suction air to a target room for air conditioning; a first fan filter unit including a filter for purifying the supplied air; and the fan and the filter. In addition to the above, a second fan filter unit including a temperature controller for adjusting the temperature of air supplied to the target room and a second fan filter unit are juxtaposed on a ceiling surface of the target room. 2. A plurality of the first fan filter units are arranged on the ceiling surface in a state of being uniformly dispersed, and a plurality of the second fan filter units are arranged on the ceiling in a state of being uniformly dispersed. 2. The device according to claim 1, wherein the device is disposed on the surface.
Air conditioning equipment as described. 3. The air conditioner according to claim 1, wherein the outer shape of the first fan filter unit in plan view and the outer shape of the second fan filter unit in plan view are the same. 4. The air conditioner according to claim 1, wherein each of the first fan filter unit and the second fan filter unit is configured to suck air in a space above a ceiling of the target room from an upper surface thereof. An air conditioner according to any one of the preceding claims. 5. The air conditioning system according to claim 4, wherein the space for the user side adjacent to the target room is a return air passage for returning air from the target room to the space above the ceiling.