JP3963660B2 - Clean room air conditioning system - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an air conditioning system for a clean room, and relates to air conditioning technology in a clean room in which a production line for semiconductors, liquid crystals, and the like is installed.
[0002]
[Prior art]
For example, as shown in FIGS. 6 to 7, in the conventional clean room air conditioning system 1, the outside air OA supplied through the outside air processing air conditioner (not shown) flows into the air supply passage 3 through the floor-standing dry coil unit 2. Then, it flows into the clean room 5 through the fan / filter unit 4 provided on the ceiling surface in a vertical laminar flow, flows into the return air flow path 7 through the perforated floor 6, and circulates to the floor-mounted dry coil unit 2. Part of the air flowing into the return air flow path 7 flows out of the system through a scrubber (not shown) that is an exhaust treatment device.
[0003]
Further, as another configuration, as shown in FIG. 8, there is one using a dry coil unit 8 with a floor-standing fan.
An outside air processing air conditioner (not shown) removes dust and gas from the outside air, adjusts the outside air to a predetermined temperature and humidity, and adjusts the amount of air to control the inside of the clean room 5 to a predetermined pressure. The scrubber (not shown) removes harmful gases generated in the process of manufacturing semiconductors and liquid crystals in order to discharge the air in the clean room 5 to the outside. The floor-mounted dry coil unit 2 and the floor-mounted fan-equipped dry coil unit 8 process semiconductors, liquid crystal manufacturing / inspection equipment, and other thermal loads generated inside the clean room 5. The fan / filter unit 4 circulates air in the clean room 5 and removes dust and polluted gas generated in the clean room.
[0004]
[Problems to be solved by the invention]
In the above-described configuration, the entire area of the clean room 5 is handled as one control target area, and the temperature control is unified in the outside air processing air conditioner, the floor-mounted dry coil unit 2 or the floor-mounted fan-equipped dry coil unit 8. Is going.
[0005]
By the way, in the clean room 5, the heat load (generated heat amount) is different for each place (zone) due to the arrangement configuration of manufacturing equipment and inspection equipment such as semiconductor and liquid crystal. Moreover, the thermal load of each place of the clean room 5 changes with the change of arrangement of each facility accompanying the change of the line configuration.
[0006]
However, as described above, conventionally, the temperature of the entire area of the clean room 5 is controlled as one control target area, and the circulating air flow path system formed inside the clean room 5 is a fixed arrangement in one form. For this reason, in the clean room 5, each place where the heat load is different cannot be individually maintained at the optimum predetermined temperature.
[0007]
This invention solves an above-described subject, and it aims at providing the air conditioning system for clean rooms which can perform optimal temperature control according to the thermal load of each place in a clean room.
[0008]
In order to solve the above-described problems, the clean room air conditioning system of the present invention according to claim 1 has an air supply channel above the ceiling surface, a return air channel below the floor surface, and a ceiling surface. A fan / filter unit is placed, a perforated floor is placed on the floor, and the air flowing into the air supply passage flows into the room in a vertical laminar flow through the fan / filter unit provided on the ceiling surface. In a clean room air conditioning system in which air flows out from the return air flow path to the supply air flow path through the perforated floor, a circulating air duct that communicates the return air flow path with the supply air flow path is installed in the room. forming a plurality of circulating air channel system into the room by installing a predetermined range, and a plurality of fans with dry coil units to correspond to each predetermined range of room air supply channel arranged, dry coil unit with fan Circulate in each indoor range Suction part of the air from the inlet to, toward the air inlet to the air intake passage of the lower, or is to ejected toward the top surface of the air supply channel.
[0009]
With the configuration described above, air flows in a vertical laminar flow from the air supply passage through the fan / filter unit on the ceiling surface to each predetermined range in the room, flows out through the perforated floor on the floor surface, and flows out to the return air passage. By returning to the air supply flow path through the air duct, the air circulates in each predetermined range in the room, and the air circulating in each predetermined range in the room is circulated in the air supply flow path by each fan dry coil unit. Adjusted to temperature.
[0010]
In this way, a circulating air flow path system is formed by the air supply flow path, the fan-equipped dry coil unit, the fan / filter unit, the return air flow path, and the circulating air duct for each predetermined range in the room. An independent atmosphere can be maintained in each predetermined range in the room, and each predetermined range in the room can be controlled to a different temperature. Therefore, in a clean room, the arrangement configuration of manufacturing equipment and inspection equipment for semiconductors, liquid crystals, etc. Even if the heat load is different for each predetermined range in the room, each predetermined range in the room can be maintained at an optimum temperature.
[0011]
The fan-equipped dry coil unit is installed between the ceiling ceiling beams on the top of the air supply flow path, so that it does not require any special space and effectively uses the space between the ceiling under beams, which was a wasteful space in the past. Can be installed.
[0012]
The clean room air conditioning system of the present invention according to claim 2 is configured such that a plurality of fan / filter units arranged on a ceiling surface are detachably arranged, and a hole of the same size as the fan / filter unit is provided directly below each fan / filter unit. A floor deck that forms a perforated floor is detachably disposed, and an optional fan / filter unit and a floor deck are detached and a circulating air duct is detachably disposed.
[0013]
With the configuration described above, the size of each predetermined range in the room corresponding to each fan-equipped dry coil unit can be arbitrarily changed by rearranging the circulating air duct to an arbitrary position and flexibly changing the circulating air flow path system. The air conditioning capacity can be flexibly changed with respect to the change in the thermal load at each location of the clean room caused by the change of the arrangement of each facility due to the change of the line configuration in the clean room.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 to 3, in the clean room air conditioning system, an outside air processing air conditioner 51 is disposed outside the structural wall 50, an air supply passage 53 is formed above the ceiling surface 52, and a plurality of fans are provided on the ceiling surface 52. A filter unit 54 is disposed. The clean room 55 is formed between the ceiling surface 52 and the perforated floor 56 on the floor, and a return air passage 57 is formed below the perforated floor 56, and an exhaust treatment device (scrubber) 58 is connected to the return air passage 57. is doing.
[0017]
Each fan / filter unit 54 disposed on the ceiling surface 52 is detachably disposed. The perforated floor 56 includes a plurality of floor decks 56a having the same dimensions as the fan / filter unit 54, and each floor deck 56a is connected to each fan. -It is detachably arranged directly under the filter unit 54. A circulating air duct 59 that communicates the return air flow path 57 and the air supply flow path 53 is detachably disposed in each predetermined range by removing an optional fan / filter unit 54 and a floor deck 56a.
[0018]
A plurality of fan-equipped dry coil units 60 are arranged in the air supply passage 53 so as to correspond to each predetermined range in the room. Each of the fan-equipped dry coil units 60 is installed between the ceiling under beams 53a on the top surface of the air supply channel 53, and does not require a special space, and between the conventional ceiling under beams, which is a wasteful space. It can be installed using the space effectively.
[0019]
As shown in FIG. 3, the dry coil unit 60 with a fan has a suction port 62 on one side surface of the casing 61, an air supply port 63 on the lower surface, and a cooling coil 64 disposed inside. A blower fan 65 is disposed at the port 63. A flexible heat medium pipe 66 for supplying cold water as a heat medium is detachably connected to the cooling coil 64.
[0020]
The outside air processing air conditioner 51 sucks outside air OA by an air blower 71 and sends the air, and a prefilter 72 that removes coarse dust, a medium performance filter 73 that removes fine dust, and precooling that cools or heats. A preheating coil 74, an air washer 75 for removing and humidifying water-soluble pollutant gases, a cooling coil 76 for cooling, a reheating coil 77 for heating, an activated carbon filter, an adsorbent-impregnated mat, etc. It consists of a chemical filter 78 that removes polluted gas and an ultra-high performance air filter (HEPA filter) 79 that removes fine dust, and supplies outside air as clean air with appropriate temperature and humidity.
[0021]
Hereinafter, the operation of the above-described configuration will be described. The outside air OA flows into the air supply passage 53 through the outside air processing air conditioner 51, flows into the clean room 55 through a plurality of fans and filter units 54 provided on the ceiling surface, and flows through the perforated floor 56. The air flows into the return air flow path 57 and returns to the supply air flow path 53 through the circulation air ducts 59 to circulate in each predetermined range in the room. A part of the air flowing into the return air flow path 57 is exhausted. It flows out of the system through a device (scrubber) 58.
[0022]
A part of the air circulating in each predetermined range in the room flows into each dry coil unit 60 with a fan in the air supply passage 53 from the suction port 62 and is adjusted to a target temperature in each predetermined range in the room by the cooling coil 64. Then, the air is blown downward from the air supply port 63 by the blower fan 65 and flows in a vertical laminar flow into each predetermined range in the room through the fan / filter unit 54 on the ceiling surface 52.
[0023]
In this way, a circulation air passage system is formed by the air supply passage 53, the fan-equipped dry coil unit 60, the fan / filter unit 54, the return air passage 57, and the circulation air duct 59 for each predetermined range in the room. Therefore, it is possible to maintain an independent atmosphere in each predetermined range in the clean room 55 and to control each predetermined range in the room at different temperatures. In the clean room 55, manufacturing equipment for semiconductors, liquid crystals, etc. Even if the heat load is different for each predetermined range in the room due to the arrangement configuration of the inspection equipment, each predetermined range in the room is optimized by processing each heat load with each dry coil unit 60 with a fan. Temperature can be maintained.
[0024]
In the dry coil unit 60 with a fan, the flexible heat medium pipe 66 is detachably connected to the cooling coil 64. Therefore, when the line configuration in the clean room 55 is changed, the connection structure of the heat medium pipe 66 is changed. Thus, the air conditioning capability can be flexibly changed following the change in the thermal load at each location of the clean room 55 resulting from the change in the arrangement of the facilities.
[0025]
As shown in FIGS. 4 to 5, the fan-equipped dry coil unit 60 can be arranged so as to eject air toward the top surface of the air supply flow path 53. It flows into the filter unit 54.
[0026]
【The invention's effect】
As described above, according to the present invention, the air adjusted to the target temperature in each predetermined range in the room by each fan dry coil unit in the air supply passage passes through each fan in the ceiling surface through the fan / filter unit. The air that flows into the return air flow path through the perforated floor returns to the supply air flow path through the circulation air duct, and the air circulates in the circulation air flow path system formed in each predetermined range in the room. Therefore, it is possible to maintain an independent atmosphere in each predetermined range in the clean room, and to control each predetermined range in the room to different temperatures, and to arrange semiconductor and liquid crystal manufacturing equipment and inspection equipment. Even if the heat load is different for each predetermined range in the room due to the configuration, each predetermined range in the room can be maintained at an optimum temperature.
[0027]
By re-arranging the circulating air duct to an arbitrary position and flexibly changing the circulating air flow path system, the width of each predetermined range in the room corresponding to each dry coil unit with a fan can be arbitrarily set again. The air conditioning capability can be flexibly changed with respect to the change in the thermal load at each place in the clean room caused by the change in the arrangement of each facility due to the change in the line configuration in the clean room.
[0028]
By connecting the heating medium piping flexibly and detachably to the cooling coil of each fan / filter unit, the heat load at each location in the clean room is changed as the equipment is relocated as the line configuration in the clean room changes. Even if the air temperature changes, it is possible to flexibly change the air conditioning capacity by operating any fan-equipped dry coil unit.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing an air conditioning system for a clean room according to an embodiment of the present invention.
FIG. 2 is an enlarged view of a main part in the clean room air conditioning system.
FIG. 3 is a cross-sectional view showing a fan-equipped dry coil unit in the clean room air conditioning system.
FIG. 4 is a schematic diagram showing an air conditioning system for a clean room according to another embodiment of the present invention.
FIG. 5 is a cross-sectional view showing a fan-equipped dry coil unit in the clean room air conditioning system.
FIG. 6 is a schematic diagram showing a conventional clean room air conditioning system.
FIG. 7 is an enlarged view of a main part of the clean room air conditioning system.
FIG. 8 is a schematic diagram showing another conventional clean room air conditioning system.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 50 Structure wall body 51 Outside air processing air conditioner 52 Ceiling surface 53 Air supply flow path 53a Ceiling under beam 54 Fan filter unit 55 Clean room 56 Perforated floor 56a Floor deck 57 Return air flow path 58 Exhaust treatment device (scrubber)
59 Duct for circulating air 60 Dry coil unit with fan 61 Casing 62 Suction port 63 Air supply port 64 Cooling coil 65 Blower fan 66 Heat medium pipe 71 Blower 72 Prefilter 73 Medium performance filter 74 Precooling / preheating coil 75 Air washer 76 Cooling Coil 77 Reheating coil 78 Chemical filter 79 Ultra-high performance air filter (HEPA filter)

Claims (2)

It has an air supply channel above the ceiling surface, a return air channel below the floor surface, a fan / filter unit on the ceiling surface, a perforated floor on the floor surface, and flows into the air supply channel Air flows into the room in a vertical laminar flow through the fan / filter unit provided on the ceiling surface, and the room air flows through the perforated floor to the return air flow path, and then flows from the return air flow path to the supply air flow path. In a clean room air conditioning system that circulates, a circulating air duct that communicates the return air channel and the air supply channel is installed for each predetermined range in the room to form a plurality of circulating air channel systems in the room, and the air supply channel A plurality of dry coil units with a fan are arranged corresponding to each predetermined range in the room, and the dry coil unit with a fan sucks a part of the air circulated in each predetermined range in the room from the intake port and from the air supply port. Toward the lower air supply channel or supply air Air-conditioning system for a clean room, which comprises ejected toward the top surface of the road. A plurality of fan / filter units arranged on the ceiling surface are detachably arranged, and a floor deck that has a perforated floor with the same dimensions as the fan / filter unit is detachably arranged directly under each fan / filter unit, 2. The air conditioning system for a clean room according to claim 1, wherein an optional fan / filter unit and a floor deck are removed and a circulating air duct is detachably disposed.

Images