JPH1082827A - Ic evaluating jig - Google Patents

Ic evaluating jig

Info

Publication number
JPH1082827A
JPH1082827A JP8239299A JP23929996A JPH1082827A JP H1082827 A JPH1082827 A JP H1082827A JP 8239299 A JP8239299 A JP 8239299A JP 23929996 A JP23929996 A JP 23929996A JP H1082827 A JPH1082827 A JP H1082827A
Authority
JP
Japan
Prior art keywords
chip
transmission line
lead
evaluation jig
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8239299A
Other languages
Japanese (ja)
Inventor
Tatsuya Koketsu
達也 纐纈
Yasushi Hatta
康 八田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8239299A priority Critical patent/JPH1082827A/en
Publication of JPH1082827A publication Critical patent/JPH1082827A/en
Pending legal-status Critical Current

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  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To accurately evaluate the electric characteristic of an IC by bringing the IC lead portion of the IC chip into pressure-contact with a transmission line on a printed board with a press section made of a transparent material, and electrically connecting them. SOLUTION: A printed board 8 is stored at the bottom of a metal case 7, and a transmission line 9 constituted of a power wire and a signal wire is arranged on it. An IC chip 1 is mounted on a recess 10 on the printed board 8 so that an IC lead 4 is nearly overlapped on the tip section of the transmission line 9. The other end section of the transmission line 9 is connected to an external measuring device via a connector 11 provided on the wall of the metal case 7. The cover 12 of the metal case 7 is made of a transparent material so that the IC lead 4 and the tip section of the transmission line 9 can be seen from the outside. A press section constituted of a transparent lug 13 pressing the IC lead is provided inside the cover 12, and the position of the IC chip 1 can be adjusted by a rod 15 inserted through a hole 14 at the center section of the cover 12. The IC chip 1 and the transmission line 9 can be simply positioned.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、IC評価治具、更
に詳しく言えば、半導体集積回路チップ(以下ICチッ
プと略称)の電気的特性評価を行う場合に、ICチップ
を載置し、ICチップに電源を供給したり、入力を加え
たり、ICチップからの出力を取り出す線路をもつ装置
(以下IC評価治具と略称)に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an IC evaluation jig, and more particularly, to a method for evaluating the electrical characteristics of a semiconductor integrated circuit chip (hereinafter abbreviated as an IC chip), mounting the IC chip on the IC chip. The present invention relates to an apparatus (hereinafter, abbreviated as an IC evaluation jig) having a line for supplying power to a chip, applying an input thereto, and extracting an output from an IC chip.

【0002】[0002]

【従来の技術】ICの電気的特性を評価するために、I
C評価治具が広く用いられている。
2. Description of the Related Art In order to evaluate the electrical characteristics of ICs, I
C evaluation jigs are widely used.

【0003】IC評価治具では、評価される多数、多種
のICチップを迅速に取り替えたり、測定装置の電源
線、入出力線路に接続する必要がある。そのため、従来
のIC評価治具は、図1に示すように、通常、上記電源
線、入出力線(ソケット電極)3をもつ台座2にICチ
ップ1の接続ピン(ICリード)4が上記電源線、入出
力線3の所定の位置にくる様に載せ、その接続部が計測
中、ずれないように、蓋5によって上から圧力を加える
手段を設けている。また、ICチップ1の大体の位置決
め、ずれの防止を行うため、台座2のICチップ1を載
置する部分には、ICチップ1の形状の窪みの様な位置
設定手段を設けている。
In an IC evaluation jig, it is necessary to quickly replace a large number and various kinds of IC chips to be evaluated, or to connect to a power supply line and an input / output line of a measuring device. For this reason, as shown in FIG. 1, a conventional IC evaluation jig usually includes a connection pin (IC lead) 4 of the IC chip 1 on the pedestal 2 having the power supply line and the input / output line (socket electrode) 3. A means for applying pressure from above by means of a lid 5 is provided so that the wire and the input / output wire 3 are placed at predetermined positions and the connection portion does not shift during measurement. Further, in order to roughly position the IC chip 1 and prevent the displacement, a position setting means such as a depression of the shape of the IC chip 1 is provided in a portion of the pedestal 2 on which the IC chip 1 is placed.

【0004】[0004]

【発明が解決しようとする課題】超高周波で動作するI
Cの電気的特性を評価する場合、伝送線路のインピーダ
ンスの影響を受けやすいので、ICを実際の装置に組み
込んだ状態と同等な条件で評価することが要求される。
図1に示すIC評価治具を用いて接続する場合、ICリ
ード4と電気的接続を取る部分の誘導成分(インダクタ
ンス)が大きく(通常5nH以上)なり、ICの超高周
波での電気特性を正しく評価する事が難しくなる。その
ため、入出力部分や電源部分の伝送線路が設けられたプ
リント基板上に、ICを実装して評価することになる。
IC評価治具の入出力信号を伝える部分の伝送線路に
は、図2に示す様な、広いグランド電極、誘電体のプリ
ント基板、狭いリボン導体からなるマイクロストリップ
線を使用する場合が多い。
SUMMARY OF THE INVENTION I operating at very high frequencies
When evaluating the electrical characteristics of C, it is liable to be affected by the impedance of the transmission line, so it is required to evaluate it under the same conditions as when an IC is incorporated in an actual device.
When the connection is made using the IC evaluation jig shown in FIG. 1, the inductive component (inductance) of the portion electrically connected to the IC lead 4 becomes large (usually 5 nH or more), and the electrical characteristics of the IC at the ultra-high frequency are correctly adjusted. It is difficult to evaluate. For this reason, an IC is mounted on a printed circuit board provided with a transmission line for an input / output portion and a power supply portion, and evaluation is performed.
As shown in FIG. 2, a microstrip line composed of a wide ground electrode, a dielectric printed board, and a narrow ribbon conductor is often used as a transmission line for transmitting an input / output signal of an IC evaluation jig.

【0005】しかし、IC評価治具の入出力信号を伝え
る部分にマイクロストリップ線路を使用した場合、IC
評価治具のICチップ1の形状の窪みとICチップ1の
形状に差があるため、マイクロストリップ線路の導体に
ICリード4が正確に一致させる調整が必要となるが、
従来の装置では、ICチップ1の位置決めが困難又は複
雑な調整機構を必要とした。
However, when a microstrip line is used in a portion for transmitting an input / output signal of an IC evaluation jig, an IC
Since there is a difference between the depression of the shape of the IC chip 1 of the evaluation jig and the shape of the IC chip 1, it is necessary to adjust the IC lead 4 to exactly match the conductor of the microstrip line.
In the conventional device, the positioning of the IC chip 1 is difficult or a complicated adjustment mechanism is required.

【0006】本発明の目的は、簡単な機構で、高周波の
特性を劣化させずにICの電気特性を正確に評価するこ
とができるIC評価治具を提供することである。
SUMMARY OF THE INVENTION An object of the present invention is to provide an IC evaluation jig that can accurately evaluate the electrical characteristics of an IC with a simple mechanism without deteriorating high-frequency characteristics.

【0007】[0007]

【課題を解決するための手段】上記目的を達成するた
め、本発明のIC評価治具は、ICチップを載置する窪
みをもち、上記窪みの周囲に上記ICチップのICリー
ド部分と電気的接続を直接行う伝送線路部分をもつプリ
ント基板と、上記ICリード部分を上記伝送線路に圧接
する押圧部を有して構成され、上記押圧部が透明な材質
で構成される。上記押圧部は上記ICチップ、プリント
基板を収納する蓋に固定的に取り付けてもよく、また、
上記押圧部を別に設けられたアライメント調整機構で移
動できるようにしてもよい。
In order to achieve the above object, an IC evaluation jig according to the present invention has a recess for mounting an IC chip, and electrically connects an IC lead portion of the IC chip around the recess. The printed circuit board includes a printed circuit board having a transmission line portion for directly connecting, and a pressing portion for pressing the IC lead portion against the transmission line, and the pressing portion is formed of a transparent material. The pressing portion may be fixedly attached to a lid that stores the IC chip and a printed circuit board.
The pressing portion may be movable by an alignment adjustment mechanism provided separately.

【0008】本発明のIC評価治具は、複雑な位置合わ
せ機構をプリント基板上に備えることでも実現は可能で
あるが、蓋の押さえつけ部分を透明にしてICリードと
プリント基板上の伝送線路部分を上部から見えるように
することで、マイクロストリップ線のような規定の形状
の狭い伝送線路上に、ICチップのICリード部分を正
確、かつ容易に一致させ、押圧することができる。ま
た、マイクロストリップ線を使用すればインダクタンス
成分を大幅に低減でき、高周波ICの特性を劣化させる
ことがなく、ICの電気特性を正しく評価することが可
能となる。
The IC evaluation jig of the present invention can be realized by providing a complicated positioning mechanism on a printed circuit board. However, the cover pressing portion is made transparent so that the IC lead and the transmission line portion on the printed circuit board can be realized. Is visible from above, it is possible to accurately and easily match and press the IC lead portion of the IC chip on a narrow transmission line having a predetermined shape such as a microstrip line. In addition, if a microstrip line is used, the inductance component can be greatly reduced, and the electrical characteristics of the IC can be correctly evaluated without deteriorating the characteristics of the high-frequency IC.

【0009】[0009]

【発明の実施の態様】以下、本発明を採用した場合の実
施例を図により説明する。 <実施例1>図3及び図4は、それぞれ本発明によるI
C評価治具の一実施例の構成を示す斜視図及び側断面を
示す。図に示されるように、金属函体7の底にプリント
基板8を内蔵し、プリント基板8上に電源配線及び信号
配線の伝送線路9が配置される。プリント基板8のIC
チップ配置部には、ICチップ1の形状より若干大きな
形状をもつ窪み10が設けられている。ICチップ1
が、窪み10に載置されたとき、ICチップ1のICリ
ード4が伝送線路9の先端部分で大略重なるように、窪
み10及び伝送線路9は配置されている。伝送線路9の
他方の先端部は金属函体7の壁に設けられたコネクタ1
1を介して外部の計測装置(図示せず)に接続される。
Embodiments of the present invention will now be described with reference to the drawings. <Embodiment 1> FIGS. 3 and 4 show an embodiment of the present invention, respectively.
1A and 1B show a perspective view and a side cross section showing the configuration of an embodiment of a C evaluation jig. As shown in the figure, a printed circuit board 8 is built in the bottom of a metal box 7, and transmission lines 9 for power supply wiring and signal wiring are arranged on the printed circuit board 8. IC of printed circuit board 8
The chip arrangement portion is provided with a depression 10 having a shape slightly larger than the shape of the IC chip 1. IC chip 1
The recess 10 and the transmission line 9 are arranged such that the IC leads 4 of the IC chip 1 substantially overlap at the tip of the transmission line 9 when placed in the recess 10. The other end of the transmission line 9 is a connector 1 provided on the wall of the metal box 7.
1 is connected to an external measuring device (not shown).

【0010】本実施例では金属函体7の蓋12を透明な
材質で構成し、蓋12外部より、ICチップ1のICリ
ード4が伝送線路9の先端部分が見える様にしている。
更に、蓋12の内側には、少なくとも、ICチップ1の
ICリード4部を押圧する透明材質の突起13(本実施
例では四角筒)からなる押圧部が設けられている。蓋1
2の中央部、すなわち、ICチップ1の上部には孔14
が設けられ、孔14を通した棒14によって、ICチッ
プ1の位置が手動で調整できるようになっている。IC
チップ1のICリード4部が、伝送線路9の先端部分の
所定の位置にきたとき、蓋12をねじ16によって、金
属函体7に固定する。
In this embodiment, the lid 12 of the metal box 7 is made of a transparent material so that the IC lead 4 of the IC chip 1 can see the tip of the transmission line 9 from outside the lid 12.
Further, on the inside of the lid 12, at least a pressing portion made of a transparent material projection 13 (a square tube in this embodiment) for pressing the IC lead 4 portion of the IC chip 1 is provided. Lid 1
2, that is, a hole 14 in the upper part of the IC chip 1.
Is provided, and the position of the IC chip 1 can be manually adjusted by the rod 14 passing through the hole 14. IC
When the IC lead 4 of the chip 1 reaches a predetermined position at the tip of the transmission line 9, the lid 12 is fixed to the metal box 7 with the screw 16.

【0011】上記実施例では蓋12全体を透明材料とし
たが、ICチップ1のICリード4部を見るために必要
な部分のみを透明材料として、周囲を金属として、機械
強度を強めるようにしてもよい。
In the above embodiment, the entire lid 12 is made of a transparent material. However, only the portions necessary for viewing the IC leads 4 of the IC chip 1 are made of a transparent material, and the surroundings are made of metal so that the mechanical strength is enhanced. Is also good.

【0012】<実施例2>図5は本発明によるIC評価
治具の他の実施例の構成を示す側断面図である。本実施
例は、押圧部13が、蓋、又は函体7とは独立に構成さ
れ、アライメント機構17によって、押圧部13の位置
を調整することによって同時にICチップ1の位置を調
整する。図3及び図4の構成部分と実質的に同じ部分に
ついては同じ番号を付して説明を省く。アライメント機
構17の構成は、透明な押圧部13と通して見れるIC
リード4とストリップライン導体の状態を見て手動的に
駆動するように構成してもよく、また、ICリード4と
ストリップライン導体の状態を光学的に検出して、パタ
ーンマッチングによる自動制御を行うようにしてもよ
い。
<Embodiment 2> FIG. 5 is a side sectional view showing the configuration of another embodiment of an IC evaluation jig according to the present invention. In the present embodiment, the pressing portion 13 is formed independently of the lid or the box 7, and the position of the IC chip 1 is simultaneously adjusted by adjusting the position of the pressing portion 13 by the alignment mechanism 17. 3 and 4 are denoted by the same reference numerals and will not be described. The configuration of the alignment mechanism 17 is an IC that can be seen through the transparent pressing portion 13.
It may be configured to be manually driven while observing the state of the lead 4 and the strip line conductor, or to perform automatic control by pattern matching by optically detecting the state of the IC lead 4 and the strip line conductor. You may do so.

【0013】[0013]

【発明の効果】ICチップ1のICリードをマイクロス
トリップラインの様な伝送線を介して外部の計測装置と
接続する際に、ICリードとマイクロストリップライン
の相互の位置決めの制御を簡易に行うことができる。特
に、マイクロストリップ線をもつプリント基板の上に単
にICチップ1を載せ、ICリードとマイクロストリッ
プラインの導体とを圧力によって、電気的に接続する治
具に有効である。
When the IC lead of the IC chip 1 is connected to an external measuring device via a transmission line such as a microstrip line, the mutual positioning of the IC lead and the microstrip line is easily controlled. Can be. In particular, the present invention is effective for a jig in which the IC chip 1 is simply mounted on a printed board having a microstrip line, and the IC lead and the conductor of the microstrip line are electrically connected by pressure.

【図面の簡単な説明】[Brief description of the drawings]

【図1】従来のIC評価治具の構造を示す側断面図。FIG. 1 is a side sectional view showing the structure of a conventional IC evaluation jig.

【図2】IC評価治具に使用される伝送線路(マイクロ
ストリップ線)の斜視図。
FIG. 2 is a perspective view of a transmission line (microstrip line) used for an IC evaluation jig.

【図3】本発明によるIC評価治具の一実施例の構成を
示す斜視図。
FIG. 3 is a perspective view showing a configuration of an embodiment of an IC evaluation jig according to the present invention.

【図4】本発明によるIC評価治具の一実施例の構成を
示す側断面図。
FIG. 4 is a side sectional view showing a configuration of an embodiment of an IC evaluation jig according to the present invention.

【図5】本発明によるIC評価治具の他の実施例の構成
を示す側断面図。
FIG. 5 is a side sectional view showing the configuration of another embodiment of the IC evaluation jig according to the present invention.

【符号の説明】[Explanation of symbols]

1:ICチップ、2:台座、3:ソケット電極、4:I
Cリード、5:蓋、6:回転軸、7:函体、8:プリン
ト基板、9:伝送線路、10:窪み、11:コネクタ、
12:棒、13:透明突起、14:孔、15:棒、1
6:ねじ、17:アライメント機構。
1: IC chip, 2: pedestal, 3: socket electrode, 4: I
C lead, 5: lid, 6: rotating shaft, 7: box, 8: printed circuit board, 9: transmission line, 10: depression, 11: connector,
12: rod, 13: transparent projection, 14: hole, 15: rod, 1
6: screw, 17: alignment mechanism.

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】被評価ICチップを収納し、上記ICチッ
プのICリード線と外部とを接続する伝送線路をもつI
C評価治具であって、上記ICチップを搭載する台座
と、上記台座に載置された上記ICチップのICリード
線と上記伝送線路の上記ICチップ側先端部とを電気的
に接触させるために押圧する透明固体の押圧部をもつこ
とを特徴とするIC評価治具。
1. An IC having a transmission line for accommodating an IC chip to be evaluated and connecting an IC lead wire of the IC chip to the outside.
A C evaluation jig for electrically contacting a pedestal on which the IC chip is mounted, an IC lead wire of the IC chip mounted on the pedestal, and an end of the transmission line on the IC chip side. An IC evaluation jig characterized by having a transparent solid pressing portion for pressing the IC.
【請求項2】上記台座が金属函体の底面であり、上記押
圧部が上記金属函体の蓋に取り付けられ、上記蓋の少な
くとも上記透明な固体が取り付けられた部分が透明であ
る材質であることを特徴とする請求項1記載のIC評価
治具。
2. The base is a bottom surface of a metal box, the pressing portion is attached to a cover of the metal box, and at least a portion of the cover to which the transparent solid is attached is made of a transparent material. The IC evaluation jig according to claim 1, wherein:
【請求項3】上記蓋の一部に上記ICチップの位置制御
器具を挿入する孔が設けられたことを特徴とする請求項
2記載のIC評価治具。
3. An IC evaluation jig according to claim 2, wherein a hole is provided in a part of said lid for inserting a position control device of said IC chip.
【請求項4】上記押圧部を介して上記ICリード線と上
記伝送線路の位置を検出する検出手段と、上記検出手段
の出力によって上記透明な固体の位置を制御するアライ
メント機構とをもつことを特徴とする請求項1記載のI
C評価治具。
4. The apparatus according to claim 1, further comprising: detecting means for detecting the positions of the IC lead wire and the transmission line via the pressing portion; and an alignment mechanism for controlling the position of the transparent solid by an output of the detecting means. I according to claim 1, characterized in that:
C evaluation jig.
【請求項5】上記伝送線路がプリント基板状に形成され
たマイクロストリップ線路であることを特徴とする請求
項1ないし4のいずれか一つに記載のIC評価治具。
5. The IC evaluation jig according to claim 1, wherein said transmission line is a microstrip line formed in a printed circuit board shape.
JP8239299A 1996-09-10 1996-09-10 Ic evaluating jig Pending JPH1082827A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8239299A JPH1082827A (en) 1996-09-10 1996-09-10 Ic evaluating jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8239299A JPH1082827A (en) 1996-09-10 1996-09-10 Ic evaluating jig

Publications (1)

Publication Number Publication Date
JPH1082827A true JPH1082827A (en) 1998-03-31

Family

ID=17042669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8239299A Pending JPH1082827A (en) 1996-09-10 1996-09-10 Ic evaluating jig

Country Status (1)

Country Link
JP (1) JPH1082827A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6281697B1 (en) 1998-12-04 2001-08-28 Nec Corporation Semiconductor device evaluation apparatus
JP2006126138A (en) * 2004-11-01 2006-05-18 Anritsu Corp Test fixture
JP2009176535A (en) * 2008-01-23 2009-08-06 Mitsubishi Electric Corp Connecting device and connecting method for flexible substrate
JP2010127817A (en) * 2008-11-28 2010-06-10 Murata Mfg Co Ltd Method and device for measuring high frequency wave

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6281697B1 (en) 1998-12-04 2001-08-28 Nec Corporation Semiconductor device evaluation apparatus
JP2006126138A (en) * 2004-11-01 2006-05-18 Anritsu Corp Test fixture
JP2009176535A (en) * 2008-01-23 2009-08-06 Mitsubishi Electric Corp Connecting device and connecting method for flexible substrate
JP2010127817A (en) * 2008-11-28 2010-06-10 Murata Mfg Co Ltd Method and device for measuring high frequency wave

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