JPH1075056A - Method for manufacturing laminated board for printed wiring board - Google Patents

Method for manufacturing laminated board for printed wiring board

Info

Publication number
JPH1075056A
JPH1075056A JP22907596A JP22907596A JPH1075056A JP H1075056 A JPH1075056 A JP H1075056A JP 22907596 A JP22907596 A JP 22907596A JP 22907596 A JP22907596 A JP 22907596A JP H1075056 A JPH1075056 A JP H1075056A
Authority
JP
Japan
Prior art keywords
copper
copper circuit
silane compound
printed wiring
wiring board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22907596A
Other languages
Japanese (ja)
Inventor
Shuji Kitagawa
修次 北川
Yasufumi Fukumoto
恭文 福本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP22907596A priority Critical patent/JPH1075056A/en
Publication of JPH1075056A publication Critical patent/JPH1075056A/en
Pending legal-status Critical Current

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Landscapes

  • Manufacturing Of Printed Wiring (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PROBLEM TO BE SOLVED: To improve bonding characteristics between a copper circuit and a thermosetting resin, acid-resistance and moisture-absorption insulation reliability related to surface treatment, by processing the copper circuit with an acid aqueous solution containing pseudo-acid, copper ion and chelate material of copper ion for roughening, and coating the copper circuit with a silane compound of specific formula, for heating under specific conditions. SOLUTION: A copper circuit formed on a substrate is treated in an acid aqueous solution containing pseudo-acid, copper ion and chelate material of copper ion, for roughening the surface of the copper circuit. A silane compound expressed by the formula is applied to the surface of copper circuit, and the surface is treated by heating treatment at 105-200 deg.C for 5-90 minutes, and then the copper circuit and thermosetting resin are bonded together for manufacturing a laminated board for a printed wiring board. In the formula, R<1> represents a divalent hydrocarbon radical having 1-12 carbon atoms, and R<2> represents a monovalent hydrocarbon radical or hydrogen having 1-12 carbon atoms. Thereby, the surface of copper circuit and the silane compound are bonded rigidly, to obtain a processed surface wherein the bonding characteristics to a thermosetting resin and acid-resistance are superior.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、電気・電子機器等
に使用される、プリント配線板用積層板の製造方法に関
するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a laminated board for a printed wiring board, which is used for electric / electronic equipment and the like.

【0002】[0002]

【従来の技術】電気・電子機器等に使用される多層のプ
リント配線板は、内層用基板の銅箔をエッチングして銅
回路を形成し、その銅回路に接着強度を高めるために表
面処理を行った後、内層用基板と、熱硬化性樹脂をガラ
スクロスに含浸して製造したプリプレグを積層し、さら
にその積層物の外層に銅箔を積層し、加熱加圧成形して
多層の積層板を作製し、次いで、この多層の積層板に穴
あけをし、この穴に内層及び外層の銅箔を導通するスル
ホールメッキを施した後、外層の銅箔をエッチングして
外層回路を形成し、次いで、電子部品と接続する外層回
路以外の部分の表面に、ハンダが付着しないようにソル
ダーレジスト膜を形成する方法により製造されている。
2. Description of the Related Art A multilayer printed wiring board used in electric and electronic equipment is formed by etching a copper foil of an inner layer substrate to form a copper circuit, and a surface treatment is applied to the copper circuit to increase the adhesive strength. After that, the substrate for the inner layer and the prepreg manufactured by impregnating the thermosetting resin into the glass cloth are laminated, and further, the copper foil is laminated on the outer layer of the laminate, and the laminate is formed by heating and pressing. Then, a hole is punched in the multilayer laminate, the hole is subjected to through-hole plating for conducting the inner layer and the outer layer copper foil, and then the outer layer copper foil is etched to form an outer layer circuit. It is manufactured by a method of forming a solder resist film on a surface of a portion other than an outer layer circuit connected to an electronic component so that solder does not adhere.

【0003】近年の電子機器の高機能化に伴い、プリン
ト配線板に要求される品質は、非常に高いものとなって
おり、外層回路とソルダーレジスト膜との接着性向上の
ために、外層回路にも内層用基板の回路の場合と同様な
表面処理を行って接着強度を高める方法も検討されてい
る。
In recent years, the quality required for printed wiring boards has become extremely high with the advancement of the functions of electronic devices. In order to improve the adhesion between the outer layer circuit and the solder resist film, the outer layer circuit is required. In addition, a method of increasing the bonding strength by performing the same surface treatment as in the case of the circuit of the substrate for the inner layer is also being studied.

【0004】上記表面処理は、黒化処理と呼ばれる化学
的酸化処理が一般に行われている。この黒化処理は、銅
回路に対して施して、表面に微細な凹凸を形成し、銅回
路の接着性を向上させる処理であり、銅回路の表面が酸
化銅となるため黒色に変化する処理である。
The above surface treatment is generally performed by a chemical oxidation treatment called a blackening treatment. This blackening treatment is a treatment that is performed on a copper circuit to form fine irregularities on the surface and improve the adhesiveness of the copper circuit, and the surface of the copper circuit is turned into black because it becomes copper oxide. It is.

【0005】この黒化処理で形成される処理皮膜の特性
としては、接着性と並び、スルホールメッキ工程で用い
られているメッキ液等の酸が穴の周囲の処理皮膜を溶か
し、黒色がピンク色に変色し、ハローイングと呼ばれる
現象が発生する場合があるという問題があり、耐酸性に
ついても重要な特性となっている。
[0005] The characteristics of the treated film formed by this blackening treatment are, in addition to the adhesiveness, an acid such as a plating solution used in the through-hole plating process, which dissolves the treated film around the hole, and the black color is pink. There is a problem that a phenomenon called haloing may occur, and acid resistance is also an important characteristic.

【0006】そのため、このハローイング発生の対策と
して、例えば特開平7−115275号に記載されてい
るような、内層用基板に形成された内層パターンを、酸
化処理で表面に酸化銅皮膜を形成して表面粗化した後、
その表面粗化した状態を残しながら酸に弱い酸化銅の部
分を除去して耐酸性を向上させる方法が検討されてい
る。また、酸化処理を行わず酸及び過酸化水素を含有す
る液で銅箔を粗化する方法や、酸化処理を行わずギ酸、
銅イオン及び銅イオンのキレート剤を含有する液で銅箔
を粗化する方法等も検討されている。
Therefore, as a countermeasure against the occurrence of the haloing, for example, a copper oxide film is formed on the surface of an inner layer pattern formed on an inner layer substrate by an oxidation treatment as described in JP-A-7-115275. After roughening the surface,
A method of improving acid resistance by removing a portion of copper oxide that is weak to acid while leaving the surface roughened has been studied. Also, a method of roughening a copper foil with a solution containing an acid and hydrogen peroxide without performing an oxidation treatment, formic acid without performing an oxidation treatment,
A method of roughening a copper foil with a solution containing copper ions and a chelating agent for copper ions has been studied.

【0007】しかし、この特開平7−115275号に
記載されているような、酸化処理した後酸化銅の部分を
除去する方法の場合、酸化処理の工程と酸化銅の部分を
除去する工程が必要なため設備が複雑になるという問題
があり、また、酸及び過酸化水素を含有する液で銅箔を
粗化する方法の場合、銅箔の粗化の程度が低く接着性が
不十分であるという問題があった。また、ギ酸、銅イオ
ン及び銅イオンのキレート剤を含有する液で銅箔を粗化
する方法の場合、酸化処理と比較すると良好であるが、
依然として耐酸性が不足しているという問題があった。
そのため、酸化処理を行わなくても、接着性及び耐酸強
度が優れた処理をすることができる銅回路の処理方法が
求められている。
However, in the method described in Japanese Patent Application Laid-Open No. Hei 7-115275 for removing the copper oxide portion after the oxidation treatment, an oxidation treatment step and a copper oxide removal step are required. Therefore, there is a problem that the equipment becomes complicated, and in the case of the method of roughening the copper foil with a solution containing an acid and hydrogen peroxide, the degree of roughening of the copper foil is low and the adhesiveness is insufficient. There was a problem. Further, in the case of a method of roughening a copper foil with a solution containing a chelating agent of formic acid, copper ions and copper ions, the method is better as compared with the oxidation treatment,
There was a problem that the acid resistance was still insufficient.
Therefore, there is a need for a copper circuit processing method capable of performing a process having excellent adhesiveness and acid resistance strength without performing an oxidation process.

【0008】そのため発明者らは、ギ酸、銅イオン及び
銅イオンのキレート剤を含有する酸性水溶液で銅回路を
処理して銅回路の表面を粗化した後、特定の構造のシラ
ン化合物を銅回路の表面に塗布し、次いで加熱処理する
方法を検討し、この方法であれば、接着性及び耐酸強度
が優れた処理をすることができることを見い出した(特
願平8−74951号)。
Therefore, the inventors of the present invention have roughened the surface of a copper circuit by treating the copper circuit with an acidic aqueous solution containing formic acid, copper ions and a chelating agent for copper ions, and then converted the silane compound having a specific structure into a copper circuit. A method of applying the composition to the surface and then performing a heat treatment was examined, and it was found that this method could provide a treatment having excellent adhesiveness and acid resistance (Japanese Patent Application No. 8-79951).

【0009】しかしその後の検討により、上記方法で処
理を行った積層板を用いたプリント配線板は、処理条件
によっては銅回路間の吸湿絶縁信頼性が低下する場合が
あることが判明した。
However, subsequent studies have revealed that the reliability of the moisture absorption insulation between copper circuits may be reduced in a printed wiring board using a laminate processed by the above method, depending on the processing conditions.

【0010】[0010]

【発明が解決しようとする課題】本発明は、上記問題点
を改善するために成されたもので、その目的とするとこ
ろは、基板に形成された銅回路を、ギ酸、銅イオン及び
銅イオンのキレート剤を含有する液で表面処理した後、
その銅回路と熱硬化性樹脂を接着して製造するプリント
配線板用積層板の製造方法であって、銅回路と熱硬化性
樹脂の接着性及び耐酸強度が優れ、かつ、吸湿絶縁信頼
性が優れたプリント配線板用積層板の製造方法を提供す
ることにある。
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide a copper circuit formed on a substrate with formic acid, copper ions and copper ions. After surface treatment with a liquid containing a chelating agent,
A method for manufacturing a laminate for a printed wiring board, which is manufactured by bonding a copper circuit and a thermosetting resin, wherein the copper circuit and the thermosetting resin have excellent adhesiveness and acid resistance, and have high moisture absorption insulation reliability. An object of the present invention is to provide an excellent method for manufacturing a laminate for a printed wiring board.

【0011】[0011]

【課題を解決するための手段】本発明の請求項1に係る
プリント配線板用積層板の製造方法は、基板に形成され
た銅回路を表面処理した後、その銅回路と熱硬化性樹脂
を接着して製造するプリント配線板用積層板の製造方法
において、表面処理の方法が、ギ酸、銅イオン及び銅イ
オンのキレート剤を含有する酸性水溶液で銅回路を処理
して銅回路の表面を粗化した後、下記式(a)で表され
るシラン化合物を銅回路の表面に塗布し、次いで105
〜200℃で5〜90分加熱処理する方法であることを
特徴とする。
According to a first aspect of the present invention, there is provided a method of manufacturing a laminated board for a printed wiring board, comprising the steps of: subjecting a copper circuit formed on a substrate to a surface treatment; In a method of manufacturing a laminated board for a printed wiring board manufactured by bonding, a surface treatment method comprises treating a copper circuit with an acidic aqueous solution containing formic acid, copper ions and a chelating agent for copper ions to roughen the surface of the copper circuit. After that, a silane compound represented by the following formula (a) is applied to the surface of the copper circuit,
It is a method of performing a heat treatment at a temperature of 200 ° C. for 5 to 90 minutes.

【0012】[0012]

【化3】 Embedded image

【0013】本発明の請求項2に係るプリント配線板用
積層板の製造方法は、請求項1記載のプリント配線板用
積層板の製造方法において、上記式(a)で表されるシ
ラン化合物が、下記式(b)で表されるシラン化合物で
あることを特徴とする。
According to a second aspect of the present invention, there is provided a method for manufacturing a laminated board for a printed wiring board according to the first aspect, wherein the silane compound represented by the formula (a) is used. And a silane compound represented by the following formula (b).

【0014】[0014]

【化4】 Embedded image

【0015】本発明の請求項3に係るプリント配線板用
積層板の製造方法は、請求項1又は請求項2記載のプリ
ント配線板用積層板の製造方法において、銅回路に上記
式(a)で表されるシラン化合物を塗布する方法が、上
記式(a)で表されるシラン化合物を含有する溶液に、
銅回路を浸漬する方法であることを特徴とする。
According to a third aspect of the present invention, there is provided a method for manufacturing a laminated board for a printed wiring board according to the first or second aspect, wherein the copper circuit has the above formula (a). The method of applying a silane compound represented by the formula, a solution containing a silane compound represented by the above formula (a),
It is a method of immersing a copper circuit.

【0016】本発明の請求項4に係るプリント配線板用
積層板の製造方法は、請求項3記載のプリント配線板用
積層板の製造方法において、上記式(a)で表されるシ
ラン化合物を含有する溶液の銅イオン濃度が、15pp
m以下であることを特徴とする。
According to a fourth aspect of the present invention, there is provided a method of manufacturing a laminated board for a printed wiring board according to the third aspect, wherein the silane compound represented by the formula (a) is used. The copper ion concentration of the contained solution is 15 pp
m or less.

【0017】本発明の請求項5に係るプリント配線板用
積層板の製造方法は、請求項1から請求項4のいずれか
に記載のプリント配線板用積層板の製造方法において、
銅回路と接着する熱硬化性樹脂が、ガラスクロスに含浸
された熱硬化性樹脂であることを特徴とする。
According to a fifth aspect of the present invention, there is provided a method of manufacturing a laminated board for a printed wiring board according to any one of the first to fourth aspects.
The thermosetting resin that adheres to the copper circuit is a thermosetting resin impregnated in a glass cloth.

【0018】本発明によると、酸性水溶液で処理して得
られた粗面化した銅回路の表面と、上記式(a)で表さ
れるシラン化合物が加熱処理により強固に結合して、熱
硬化性樹脂との接着性及び耐酸強度が優れると共に、吸
湿絶縁信頼性も優れたプリント配線板用積層板が得られ
る。
According to the present invention, the surface of the roughened copper circuit obtained by the treatment with the acidic aqueous solution and the silane compound represented by the above formula (a) are firmly bonded by heat treatment to form a thermoset. A laminate for a printed wiring board having excellent adhesiveness to a water-soluble resin and excellent acid resistance and excellent in moisture absorption insulation reliability can be obtained.

【0019】[0019]

【発明の実施の形態】本発明に係るプリント配線板用積
層板の製造方法は、基板に形成された銅回路をギ酸、銅
イオン及び銅イオンのキレート剤を含有する酸性水溶液
で処理して銅回路の表面を粗化した後、上記式(a)で
表されるシラン化合物を銅回路の表面に塗布し、次いで
105〜200℃で5〜90分加熱処理して表面処理し
た後、その銅回路と熱硬化性樹脂を接着して製造する。
BEST MODE FOR CARRYING OUT THE INVENTION In the method of manufacturing a laminate for a printed wiring board according to the present invention, a copper circuit formed on a substrate is treated with an acidic aqueous solution containing formic acid, copper ions and a chelating agent for copper ions to form a copper circuit. After roughening the surface of the circuit, a silane compound represented by the above formula (a) is applied to the surface of the copper circuit, and then subjected to a heat treatment at 105 to 200 ° C. for 5 to 90 minutes, followed by surface treatment. It is manufactured by bonding a circuit and a thermosetting resin.

【0020】酸性水溶液には、ギ酸、銅イオン及び銅イ
オンのキレート剤を含有することが重要である。これら
のいずれかを含有していない場合は、銅回路の表面の粗
化が均一に進みにくくなり、接着性が低下する。
It is important that the acidic aqueous solution contains formic acid, copper ions and a chelating agent for copper ions. When any of these is not contained, it becomes difficult for the surface of the copper circuit to be uniformly roughened, and the adhesiveness is reduced.

【0021】なお、上記酸性水溶液のギ酸の濃度は、一
般には10〜100グラム/リットルであることが望ま
しく、銅イオンの濃度は15〜25グラム/リットルで
あることが望ましく、銅イオンのキレート剤の濃度は、
0.1〜10グラム/リットルであることが望ましい。
また、pHは、4以下であることが望ましく、処理時の
液温は、32〜43℃程度が望ましい。なお、キレート
剤としては、銅イオンと結合してキレート効果を有する
ものであれば特に限定するものではなく、例えばエチレ
ンジアミン四酢酸、シクロヘキサンジアミン四酢酸、
1,10−フェナントロリン、8−ヒドロキシキノリン
等が挙げられる。このキレート剤が介在することによ
り、銅回路の表面の銅が溶解しやすくなり、粗化が均一
に進むと考えられる。
The concentration of formic acid in the acidic aqueous solution is generally desirably 10 to 100 g / l, the concentration of copper ion is desirably 15 to 25 g / l, and a chelating agent for copper ion is preferred. The concentration of
Desirably, it is 0.1 to 10 grams / liter.
Further, the pH is desirably 4 or less, and the liquid temperature during the treatment is desirably about 32 to 43 ° C. The chelating agent is not particularly limited as long as it has a chelating effect by binding to copper ions, for example, ethylenediaminetetraacetic acid, cyclohexanediaminetetraacetic acid,
Examples thereof include 1,10-phenanthroline and 8-hydroxyquinoline. It is considered that the presence of the chelating agent facilitates the dissolution of copper on the surface of the copper circuit, leading to uniform roughening.

【0022】また、上記酸性水溶液を用いて内層用基板
を処理する時間は、酸性水溶液の濃度、温度に応じて適
宜決められるが、銅回路の表面の粗度が、2〜6μmと
なる条件で処理を行うと好ましい。2μm以下の場合
は、接着性が低下する場合があり、6μmを越えると、
銅回路の厚みが薄くなって電気信頼性が低下する場合が
ある。なお、酸性水溶液を内層用基板にスプレーして処
理を行う場合には、処理時間を短縮することが可能とな
り好ましい。
The time for treating the inner layer substrate using the above acidic aqueous solution is appropriately determined according to the concentration and temperature of the acidic aqueous solution, and is determined under the condition that the surface roughness of the copper circuit is 2 to 6 μm. Processing is preferred. When the thickness is 2 μm or less, the adhesiveness may decrease.
In some cases, the thickness of the copper circuit is reduced, and the electrical reliability is reduced. In the case where the treatment is performed by spraying the acidic aqueous solution onto the inner layer substrate, the treatment time can be shortened, which is preferable.

【0023】なお、上記酸性水溶液には、酢酸等の他の
酸や、湿潤剤等の物質を含有していてもよい。また、処
理の前に必要により、内層用基板の銅箔の表面を機械的
な研磨又は過硫酸アンモニウム若しくは塩化銅のような
化学的な研磨を行い洗浄した後、酸性水溶液で処理を行
ってもよい。
The acidic aqueous solution may contain other acids such as acetic acid, and substances such as wetting agents. Before the treatment, if necessary, the surface of the copper foil of the inner layer substrate may be washed by mechanical polishing or chemical polishing such as ammonium persulfate or copper chloride, and then may be treated with an acidic aqueous solution. .

【0024】次いで、上記式(a)で表されるシラン化
合物を銅回路の表面に塗布し、次いで105〜200℃
で5〜90分加熱処理する。このシラン化合物の塗布及
び加熱処理を共に行うことが重要であり、シラン化合物
の塗布又は加熱処理のいずれかを行わない場合は、耐酸
強度が低下したり、接着性が低下する。これは、このシ
ラン化合物の塗布及び加熱処理により銅回路の表面とシ
ラン化合物が強固に結合して、熱硬化性樹脂との接着性
が優れ、かつ、耐酸強度が優れた処理面となるためと考
えられる。
Next, a silane compound represented by the above formula (a) is applied to the surface of the copper circuit,
For 5 to 90 minutes. It is important to carry out both the application of the silane compound and the heat treatment. If neither the application of the silane compound nor the heat treatment is carried out, the acid resistance decreases and the adhesiveness decreases. This is because the surface of the copper circuit and the silane compound are firmly bonded by the application of the silane compound and the heat treatment, and the adhesion to the thermosetting resin is excellent, and the treated surface has excellent acid resistance. Conceivable.

【0025】この加熱処理の条件としては、105〜2
00℃で5〜90分程度加熱処理を行う。温度が105
℃未満の場合や、温度が105℃以上でも処理時間が5
分未満の場合は、熱硬化性樹脂との接着性が低下した
り、耐酸強度が低下する場合がある。また、200℃を
越えると、内層用基板の樹脂が変性して、電気特性が低
下する場合があり、処理時間が90分を越えて処理して
も接着性及び耐酸強度の向上効果が少ないため、経済的
でない。
The conditions of this heat treatment are as follows:
Heat treatment is performed at 00 ° C. for about 5 to 90 minutes. Temperature 105
C. or less than 105 ° C.
If it is less than 10 minutes, the adhesion to the thermosetting resin may be reduced, or the acid resistance may be reduced. On the other hand, when the temperature exceeds 200 ° C., the resin of the substrate for the inner layer is denatured, and the electrical characteristics may be deteriorated. Even if the processing is performed for more than 90 minutes, the effect of improving the adhesiveness and the acid resistance is small. Not economic.

【0026】上記式(a)で表されるシラン化合物は、
一般にエポキシシランカップリング剤と呼ばれる化合物
であり、この上記式(a)で表されるシラン化合物を銅
回路の表面に塗布した後加熱処理すると、接着性及び耐
酸強度が優れると共に、吸湿絶縁信頼性も優れた積層板
となる。
The silane compound represented by the above formula (a) is
A compound generally called an epoxy silane coupling agent. When a silane compound represented by the above formula (a) is applied to the surface of a copper circuit and then heated, the adhesiveness and the acid resistance are improved, and the moisture absorption insulation reliability is improved. Is also an excellent laminate.

【0027】なお、上記式(a)で表されるシラン化合
物としては、例えば、γ−グリシドキシプロピルトリメ
トキシシラン等の上記式(b)で表されるエポキシシラ
ンや、γ−グリシドキシプロピルトリエトキシシラン等
が挙げられる。なお、上記式(b)で表されるシラン化
合物であると、接着性及び耐酸強度が特に優れ好まし
い。
The silane compound represented by the above formula (a) includes, for example, epoxy silane represented by the above formula (b) such as γ-glycidoxypropyltrimethoxysilane, and γ-glycidoxy. Propyltriethoxysilane and the like. The silane compound represented by the above formula (b) is particularly excellent in adhesiveness and acid resistance, and is preferable.

【0028】これらのシラン化合物は、噴霧する方法等
により銅回路の表面に直接塗布してもよいが、上記シラ
ン化合物を溶かした溶液に、銅回路を形成した内層用基
板を浸漬する方法で塗布する場合、接着性及び耐酸強度
の向上する効果を確実に得ることができ好ましい。な
お、シラン化合物を溶かした溶液に浸漬する場合の液
は、上記シラン化合物を、5〜20重量%含有する水溶
液を用いると好ましい。
These silane compounds may be applied directly to the surface of the copper circuit by a method such as spraying, but may be applied by dipping the substrate for the inner layer on which the copper circuit is formed in a solution in which the silane compound is dissolved. In this case, the effect of improving the adhesiveness and the acid resistance is reliably obtained, which is preferable. In addition, it is preferable to use an aqueous solution containing the silane compound in an amount of 5 to 20% by weight as the liquid to be immersed in the solution in which the silane compound is dissolved.

【0029】なお、上記シラン化合物を含有する溶液
に、酸性水溶液で処理した銅回路を繰り返し浸漬してい
くと、その溶液中の銅イオン濃度がしだいに上昇する場
合がある。その場合、上記シラン化合物を含有する溶液
中の銅イオン濃度が15ppm以下であると、吸湿絶縁
信頼性が特に優れ好ましい。
When a copper circuit treated with an acidic aqueous solution is repeatedly immersed in a solution containing the silane compound, the concentration of copper ions in the solution may gradually increase. In this case, when the copper ion concentration in the solution containing the silane compound is 15 ppm or less, the moisture absorption insulation reliability is particularly excellent and is preferable.

【0030】加熱処理した後、その銅回路と熱硬化性樹
脂を接着して、プリント配線板用積層板を製造する。本
発明に用いる熱硬化性樹脂としては、エポキシ樹脂系、
フェノール樹脂系、ポリイミド樹脂系、不飽和ポリエス
テル樹脂系、ポリフェニレンエーテル樹脂系等の単独、
変性物、混合物のように、熱硬化性樹脂全般を用いるこ
とができ、必要に応じてシリカ、炭酸カルシウム、水酸
化アルミニウム、タルク等の無機質粉末充填材や、ガラ
ス繊維、パルプ繊維、合成繊維、セラミック繊維等の繊
維質充填材を含有させることができる。なお熱硬化性樹
脂が、ガラスクロス等の基材に熱硬化性樹脂を含浸して
製造した、一般にプリプレグと呼ばれる樹脂含浸基材に
含浸された熱硬化性樹脂の場合、接着性及び耐酸強度の
向上する効果が大きく好ましいが、プリプレグに用いら
れた熱硬化性樹脂のみに限定するものではなく、内層用
基板の表面に、基材なしの熱硬化性樹脂層を介して金属
箔を接着して製造する場合の熱硬化性樹脂層の熱硬化性
樹脂や、ソルダーレジストのように外層回路と接着する
熱硬化性樹脂でもよい。
After the heat treatment, the copper circuit and the thermosetting resin are bonded to produce a laminate for a printed wiring board. As the thermosetting resin used in the present invention, epoxy resin,
Phenol resin type, polyimide resin type, unsaturated polyester resin type, polyphenylene ether resin type alone,
Modified products, such as mixtures, can be used generally thermosetting resin, silica, calcium carbonate, aluminum hydroxide, inorganic powder filler such as talc, glass fiber, pulp fiber, synthetic fiber, if necessary A fibrous filler such as ceramic fibers can be included. The thermosetting resin is manufactured by impregnating the base material such as glass cloth with the thermosetting resin.In the case of the thermosetting resin impregnated into a resin-impregnated base material generally called a prepreg, the adhesiveness and the acid resistance strength are improved. Although the effect of improving is preferably large, it is not limited to only the thermosetting resin used for the prepreg, and the surface of the inner layer substrate is bonded to a metal foil via a thermosetting resin layer without a base material. The thermosetting resin of the thermosetting resin layer in the case of manufacturing, or a thermosetting resin which adheres to an outer layer circuit such as a solder resist may be used.

【0031】本発明に用いる内層用の基板としては、上
記加熱処理の温度に耐える材料を用いて、片面又は両面
に銅回路が形成されている板であればよく、例えば、上
記熱硬化性樹脂のシートの片面又は両面に銅箔が張られ
ている板や、ガラス等の無機質繊維やポリイミド等の有
機質繊維のクロス、ペーパー等の基材を、上記熱硬化性
樹脂で接着し、片面又は両面に銅箔が張られている板等
を用いて、銅箔をエッチングして回路を形成したもの
や、銅箔が張られていない板の表面に銅メッキを行い、
銅の回路を形成したもの等が挙げられる。
The substrate for the inner layer used in the present invention may be a plate having a copper circuit formed on one or both sides using a material that can withstand the temperature of the above-mentioned heat treatment. A sheet in which a copper foil is stretched on one or both sides of a sheet of the sheet, a cloth of inorganic fibers such as glass or an organic fiber such as polyimide, or a substrate such as paper, is adhered with the thermosetting resin, and one or both sides are bonded. Using a plate or the like with copper foil on it, etching the copper foil to form a circuit, or copper plating on the surface of the board without copper foil,
One in which a copper circuit is formed, and the like can be given.

【0032】[0032]

【実施例】【Example】

(実施例1)大きさ50×50cm、銅箔を除く厚み
0.8mmの両面ガラス基材エポキシ樹脂銅張積層板
[松下電工株式会社製、商品名 R−1766]の銅箔
(厚み35μm)をエッチングし、JIS規格C501
2 多層プリント板用複合パターンの、内層の絶縁抵抗
テストパターンに準じた、回路の幅が300μm、回路
と回路の間隔が150μm、長さが50mmの回路が2
0本で構成されるパターン、及び直径1.5mmのラン
ドパターンを複数形成した内層用基板を得た。
(Example 1) Copper foil (35 μm in thickness) of 50 × 50 cm, double-sided glass substrate epoxy resin copper-clad laminate [trade name: R-1766 manufactured by Matsushita Electric Works, Ltd.] having a thickness of 0.8 mm excluding copper foil Is etched to JIS C501
2 A circuit having a circuit width of 300 μm, a space between circuits of 150 μm, and a length of 50 mm according to the insulation resistance test pattern of the inner layer of the composite pattern for a multilayer printed circuit board is 2
An inner layer substrate was obtained in which a plurality of patterns each composed of zero and a land pattern having a diameter of 1.5 mm were formed.

【0033】また、ギ酸及び銅イオンのキレート剤を含
有する酸性水溶液として、メック株式会社製処理液[商
品名 CZ8100]を用いて、水酸化銅を溶解させる
ことにより銅イオンを20グラム/リットル含有する、
pH3.5の酸性水溶液を作成した。
As an acidic aqueous solution containing a chelating agent for formic acid and copper ions, copper hydroxide is dissolved in 20 g / l by dissolving copper hydroxide using a processing solution [CZ8100] manufactured by Mec Co., Ltd. Do
An acidic aqueous solution having a pH of 3.5 was prepared.

【0034】その酸性水溶液を38℃に加熱した後、上
記銅回路を形成した内層用基板に2分スプレーして処理
して銅回路の表面を粗化した。次いで、水洗した後、上
記式(a)で表されるシラン化合物として、γ−グリシ
ドキシプロピルトリメトキシシラン[信越化学工業株式
会社製、商品名KBM403]を11重量%配合した水
溶液に1分浸漬した後、140℃で30分加熱処理し
た。なお、シラン化合物を配合した水溶液の銅イオン濃
度を、アルゴンプラズマ発光分光分析法により測定した
ところ、6ppmであった。
After the acidic aqueous solution was heated to 38 ° C., the surface of the copper circuit was roughened by spraying for 2 minutes on the inner layer substrate on which the copper circuit was formed. Then, after washing with water, 1 minute in an aqueous solution containing 11% by weight of γ-glycidoxypropyltrimethoxysilane [manufactured by Shin-Etsu Chemical Co., Ltd., trade name: KBM403] as a silane compound represented by the above formula (a). After immersion, heat treatment was performed at 140 ° C. for 30 minutes. In addition, when the copper ion concentration of the aqueous solution containing the silane compound was measured by argon plasma emission spectroscopy, it was 6 ppm.

【0035】得られた銅回路の表面の粗度を表面粗さ計
[東京精密株式会社製、サーフコム]により針径5μ
m、走査長さ10mm、走査速度0.3mm/秒の条件
で、Rmax(最大粗さ)を測定したところ、4.1μ
mであった。
The surface roughness of the obtained copper circuit was measured with a surface roughness meter [Surfcom, manufactured by Tokyo Seimitsu Co., Ltd.] to a needle diameter of 5 μm.
m, a scanning length of 10 mm, and a scanning speed of 0.3 mm / sec, Rmax (maximum roughness) was measured.
m.

【0036】次いで、その内層用基板に、厚み0.15
mm、樹脂量50%のガラス基材エポキシ樹脂プリプレ
グ[松下電工株式会社製、商品名 R−1661]を内
層用基板の両方の面に2枚づつ重ねて積層し、さらにそ
の積層物の両外層に厚み18μmの銅箔を積層し、この
積層物を温度170℃、圧力3.9MPa、時間60分
の条件で加熱加圧成形してプリント配線板用積層板を得
た。
Next, a thickness of 0.15
mm, a glass-based epoxy resin prepreg having a resin amount of 50% [trade name: R-1661, manufactured by Matsushita Electric Works, Ltd.] is laminated on both sides of the inner layer substrate by two sheets, and further, both outer layers of the laminate are laminated. Then, a copper foil having a thickness of 18 μm was laminated thereon, and this laminate was heated and pressed under the conditions of a temperature of 170 ° C., a pressure of 3.9 MPa and a time of 60 minutes to obtain a laminate for a printed wiring board.

【0037】(実施例2)シラン化合物を配合した水溶
液に浸漬した後、105℃で5分加熱処理したこと以外
は、実施例1と同様にしてプリント配線板用積層板を得
た。
Example 2 A laminated board for a printed wiring board was obtained in the same manner as in Example 1 except that it was immersed in an aqueous solution containing a silane compound, and then heat-treated at 105 ° C. for 5 minutes.

【0038】(実施例3)シラン化合物を配合した水溶
液の銅イオン濃度が、14ppmである水溶液で処理し
たこと以外は、実施例1と同様にしてプリント配線板用
積層板を得た。
Example 3 A laminate for a printed wiring board was obtained in the same manner as in Example 1 except that the aqueous solution containing the silane compound was treated with an aqueous solution having a copper ion concentration of 14 ppm.

【0039】(実施例4)シラン化合物を配合した水溶
液の銅イオン濃度が、18ppmである水溶液で処理し
たこと以外は、実施例1と同様にしてプリント配線板用
積層板を得た。
Example 4 A laminated board for a printed wiring board was obtained in the same manner as in Example 1 except that the aqueous solution containing the silane compound was treated with an aqueous solution having a copper ion concentration of 18 ppm.

【0040】(比較例1)シラン化合物を配合した水溶
液に浸漬した後、80℃で5分加熱処理したこと以外
は、実施例1と同様にしてプリント配線板用積層板を得
た。
(Comparative Example 1) A laminated board for a printed wiring board was obtained in the same manner as in Example 1 except that it was immersed in an aqueous solution containing a silane compound, and then heat-treated at 80 ° C for 5 minutes.

【0041】(比較例2)シラン化合物を配合した水溶
液に浸漬した後、80℃で90分加熱処理したこと以外
は、実施例1と同様にしてプリント配線板用積層板を得
た。
Comparative Example 2 A laminated board for a printed wiring board was obtained in the same manner as in Example 1 except that it was immersed in an aqueous solution containing a silane compound, and then heat-treated at 80 ° C. for 90 minutes.

【0042】(比較例3)シラン化合物を配合した水溶
液に浸漬した後、140℃で1分加熱処理したこと以外
は、実施例1と同様にしてプリント配線板用積層板を得
た。
Comparative Example 3 A laminated board for a printed wiring board was obtained in the same manner as in Example 1 except that it was immersed in an aqueous solution containing a silane compound, and then heat-treated at 140 ° C. for 1 minute.

【0043】(比較例4)シラン化合物として、γ−ア
ミノプロピルトリエトキシシラン[信越化学工業株式会
社製、商品名KBE903]を11重量%配合した水溶
液を用いたこと以外は、実施例1と同様にしてプリント
配線板用積層板を得た。なお、この場合も実施例1と同
様に測定した銅イオン濃度が、6ppmである水溶液を
用いた。
Comparative Example 4 The same procedure as in Example 1 was carried out except that an aqueous solution containing 11% by weight of γ-aminopropyltriethoxysilane [trade name: KBE903, manufactured by Shin-Etsu Chemical Co., Ltd.] was used as the silane compound. Thus, a laminate for a printed wiring board was obtained. In this case, an aqueous solution having a copper ion concentration of 6 ppm measured in the same manner as in Example 1 was used.

【0044】(比較例5)シラン化合物を配合した水溶
液に浸漬せずに加熱処理したこと以外は、実施例1と同
様にしてプリント配線板用積層板を得た。
Comparative Example 5 A laminated board for a printed wiring board was obtained in the same manner as in Example 1 except that heat treatment was performed without immersion in an aqueous solution containing a silane compound.

【0045】(比較例6)酸性水溶液で処理せずにシラ
ン化合物を配合した水溶液に浸漬したこと以外は、実施
例1と同様にしてプリント配線板用積層板を得た。な
お、実施例1と同様にして、酸性水溶液で処理した銅回
路の表面の粗度を測定したところ、0.3μmであっ
た。
Comparative Example 6 A laminate for a printed wiring board was obtained in the same manner as in Example 1, except that the laminate was not immersed in an aqueous solution containing a silane compound without being treated with an acidic aqueous solution. In addition, when the surface roughness of the copper circuit treated with the acidic aqueous solution was measured in the same manner as in Example 1, it was 0.3 μm.

【0046】(評価、結果)実施例1〜4及び比較例1
〜6で得られた積層板の耐酸性、内層銅箔引き剥がし強
さ及び吸湿絶縁信頼性を測定した。
(Evaluation and Results) Examples 1-4 and Comparative Example 1
The acid resistance, inner layer copper foil peeling strength and moisture absorption insulation reliability of the laminates obtained in Nos. To 6 were measured.

【0047】耐酸性は内層用基板の直径1.5mmのラ
ンドパターンがある位置に、直径0.4mmのドリル
[ユニオンツール株式会社製、商品名 UC30]を用
いて、72000回転/分の回転数、19μm/回転の
送り速度で50個穴あけを行い、次いで1.2規定の塩
酸水溶液に20℃で10分浸漬して処理した後、直ちに
水洗し、次いで、外層の銅箔とプリプレグが硬化した絶
縁層を削り、内層用基板の銅回路を露出させ、処理皮膜
がピンク色に変色した部分の、穴の壁面からの最大の長
さを50倍の拡大鏡で測定した。
The acid resistance is determined by using a drill having a diameter of 0.4 mm (trade name: UC30, manufactured by Union Tool Co., Ltd.) at a position where a land pattern having a diameter of 1.5 mm is present on the inner layer substrate, at a rotation speed of 72,000 revolutions / minute. 50 holes were drilled at a feed rate of 19 μm / rotation, then immersed in a 1.2N aqueous hydrochloric acid solution at 20 ° C. for 10 minutes, immediately washed with water, and then the outer layer copper foil and prepreg were cured. The insulating layer was shaved, the copper circuit of the inner layer substrate was exposed, and the maximum length from the wall surface of the hole at the portion where the treated film turned pink was measured with a magnifying glass of 50 times.

【0048】内層銅箔引き剥がし強さは内層用基板の銅
回路の表面処理面とプリプレグ層との間の接着力を測定
したものであり、測定方法としては、上記表面処理をし
ていないマット面を露出させた内層用基板の銅回路に1
0mm幅のラインを形成し、そのラインの90度方向の
引き剥がし強さを50mm/分の引き剥がし速度で測定
した。
The peel strength of the inner layer copper foil is obtained by measuring the adhesive force between the surface treated surface of the copper circuit of the inner layer substrate and the prepreg layer. 1 for copper circuit of inner layer substrate with exposed surface
A line having a width of 0 mm was formed, and the peeling strength of the line in the 90-degree direction was measured at a peeling speed of 50 mm / min.

【0049】吸湿絶縁信頼性は、内層用基板の銅回路の
所定の位置を露出させた後、48Vの電圧を印加しなが
ら110℃のPCT(プレッシャークッカーテスト)処
理を連続的に行い、絶縁抵抗が10の6乗Ω以下になる
までの平均故障時間(MTTF)を求めた。
The moisture absorption insulation reliability is as follows. After exposing a predetermined position of the copper circuit of the inner layer substrate, a PCT (pressure cooker test) process at 110 ° C. is continuously performed while applying a voltage of 48 V, and the insulation resistance is measured. The mean time to failure (MTTF) until was reduced to 10 6 Ω or less was determined.

【0050】その結果は表1及び表2に示したとおり、
各実施例は比較例1〜3と比較して吸湿絶縁信頼性は同
等であるが、耐酸性及び内層銅箔引き剥がし強さが優れ
ていることが確認された。また、各実施例は上記式
(a)で表されるシラン化合物と異なるシラン化合物で
処理した比較例4と比較して、耐酸性及び内層銅箔引き
剥がし強さは同等であるが、吸湿絶縁信頼性が優れてい
ることが確認された。また、各実施例はシラン化合物を
配合した水溶液に浸漬しない比較例5や、酸性水溶液で
処理をしない比較例6と比較して、耐酸性が優れている
ことが確認された。すなわち、各実施例は接着性及び耐
酸強度が優れると共に、吸湿絶縁信頼性も優れるが、各
比較例は接着性、耐酸強度及び吸湿絶縁信頼性の少なく
ともいずれかが劣ることが確認された。
The results are shown in Tables 1 and 2,
Although each example has the same moisture absorption insulation reliability as Comparative Examples 1 to 3, it was confirmed that the acid resistance and the peel strength of the inner copper foil were excellent. Further, in each example, the acid resistance and the peel strength of the inner layer copper foil were the same as those of Comparative Example 4 in which the silane compound was treated with a silane compound different from the silane compound represented by the above formula (a). It was confirmed that the reliability was excellent. In addition, it was confirmed that each example had better acid resistance than Comparative Example 5 not immersed in an aqueous solution containing a silane compound and Comparative Example 6 not treated with an acidic aqueous solution. That is, it was confirmed that each of the examples was excellent in the adhesiveness and the acid resistance, and also was excellent in the hygroscopic insulation reliability, but each comparative example was inferior in at least one of the adhesiveness, the acid resistance and the hygroscopic insulation reliability.

【0051】[0051]

【表1】 [Table 1]

【0052】[0052]

【表2】 [Table 2]

【0053】[0053]

【発明の効果】本発明に係るプリント配線板用積層板の
製造方法によると、基板に形成された銅回路をギ酸、銅
イオン及び銅イオンのキレート剤を含有する酸性水溶液
で処理して銅回路の表面を粗化した後、上記式(a)で
表されるシラン化合物を銅回路の表面に塗布し、次いで
105〜200℃で5〜90分加熱処理して表面処理し
た後、その銅回路と熱硬化性樹脂を接着して製造するた
め、酸性水溶液で処理して得られた粗面化した銅回路の
表面とシラン化合物が、加熱処理により強固に結合し
て、銅回路と熱硬化性樹脂との接着性が優れ、かつ、耐
酸強度が優れると共に、吸湿絶縁信頼性も優れたプリン
ト配線板用積層板が得られる。
According to the method of manufacturing a laminate for a printed wiring board according to the present invention, a copper circuit formed on a substrate is treated with an acidic aqueous solution containing formic acid, copper ions and a chelating agent for copper ions to form a copper circuit. After roughening the surface of the above, the silane compound represented by the above formula (a) is applied to the surface of the copper circuit, and then heat-treated at 105 to 200 ° C. for 5 to 90 minutes, and then the copper circuit is treated. The surface of the roughened copper circuit obtained by treatment with an acidic aqueous solution and the silane compound are firmly bonded by heat treatment to produce a thermosetting resin by bonding with the thermosetting resin. A laminate for a printed wiring board having excellent adhesiveness to resin, excellent acid resistance, and excellent moisture absorption insulation reliability can be obtained.

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 基板に形成された銅回路を表面処理した
後、その銅回路と熱硬化性樹脂を接着して製造するプリ
ント配線板用積層板の製造方法において、表面処理の方
法が、ギ酸、銅イオン及び銅イオンのキレート剤を含有
する酸性水溶液で銅回路を処理して銅回路の表面を粗化
した後、下記式(a)で表されるシラン化合物を銅回路
の表面に塗布し、次いで105〜200℃で5〜90分
加熱処理する方法であることを特徴とするプリント配線
板用積層板の製造方法。 【化1】
1. A method for manufacturing a laminate for a printed wiring board, which comprises bonding a copper circuit formed on a substrate to a surface, and then bonding the copper circuit to a thermosetting resin. After treating the copper circuit with an acidic aqueous solution containing copper ions and a chelating agent for copper ions to roughen the surface of the copper circuit, a silane compound represented by the following formula (a) is applied to the surface of the copper circuit. And a heat treatment at 105 to 200 [deg.] C. for 5 to 90 minutes. Embedded image
【請求項2】 上記式(a)で表されるシラン化合物
が、下記式(b)で表されるシラン化合物であることを
特徴とする請求項1記載のプリント配線板用積層板の製
造方法。 【化2】
2. The method for producing a laminate for a printed wiring board according to claim 1, wherein the silane compound represented by the formula (a) is a silane compound represented by the following formula (b). . Embedded image
【請求項3】 銅回路に上記式(a)で表されるシラン
化合物を塗布する方法が、上記式(a)で表されるシラ
ン化合物を含有する溶液に、銅回路を浸漬する方法であ
ることを特徴とする請求項1又は請求項2記載のプリン
ト配線板用積層板の製造方法。
3. A method of applying a silane compound represented by the above formula (a) to a copper circuit is a method of immersing the copper circuit in a solution containing the silane compound represented by the above formula (a). The method for producing a laminate for a printed wiring board according to claim 1 or 2, wherein:
【請求項4】 上記式(a)で表されるシラン化合物を
含有する溶液の銅イオン濃度が、15ppm以下である
ことを特徴とする請求項3記載のプリント配線板用積層
板の製造方法。
4. The method for producing a laminate for a printed wiring board according to claim 3, wherein the copper ion concentration of the solution containing the silane compound represented by the formula (a) is 15 ppm or less.
【請求項5】 銅回路と接着する熱硬化性樹脂が、ガラ
スクロスに含浸された熱硬化性樹脂であることを特徴と
する請求項1から請求項4のいずれかに記載のプリント
配線板用積層板の製造方法。
5. The printed wiring board according to claim 1, wherein the thermosetting resin that adheres to the copper circuit is a thermosetting resin impregnated in a glass cloth. A method for manufacturing a laminate.
JP22907596A 1996-08-29 1996-08-29 Method for manufacturing laminated board for printed wiring board Pending JPH1075056A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22907596A JPH1075056A (en) 1996-08-29 1996-08-29 Method for manufacturing laminated board for printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22907596A JPH1075056A (en) 1996-08-29 1996-08-29 Method for manufacturing laminated board for printed wiring board

Publications (1)

Publication Number Publication Date
JPH1075056A true JPH1075056A (en) 1998-03-17

Family

ID=16886357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22907596A Pending JPH1075056A (en) 1996-08-29 1996-08-29 Method for manufacturing laminated board for printed wiring board

Country Status (1)

Country Link
JP (1) JPH1075056A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003053879A (en) * 2001-06-04 2003-02-26 Nippon Zeon Co Ltd Circuit board and manufacturing method thereof
JP2006156746A (en) * 2004-11-30 2006-06-15 Toppan Printing Co Ltd Wiring board with built-in resistor and its manufacturing method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003053879A (en) * 2001-06-04 2003-02-26 Nippon Zeon Co Ltd Circuit board and manufacturing method thereof
JP2006156746A (en) * 2004-11-30 2006-06-15 Toppan Printing Co Ltd Wiring board with built-in resistor and its manufacturing method
JP4552624B2 (en) * 2004-11-30 2010-09-29 凸版印刷株式会社 Resistor built-in wiring board and manufacturing method thereof

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