JPH1050778A - Heavy object moving system and inspection system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To sustain a test head and a probe card constantly in parallel state with high reproducibility. SOLUTION: A probe system comprises a moving mechanism 4 for moving a test head 2 to connect the test head 2 electrically with a probe card in a system body 1 or disconnect the test head 2 therefrom, a cantilever arm 3 coupled with the moving mechanism 4 and supporting the test head 2 through a joint plate 7 extending from one side of the test head 2, and a horizontal auxiliary mechanism 5 mounted on the side face opposite to the moving mechanism 4 while being interlocked with the moving mechanism 4 to elevate/lower the test head 2 while supporting horizontally when the test head 2 touches the probe card or separates therefrom.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heavy object moving device and an inspection device.

[0002]

2. Description of the Related Art In a conventional inspection device, for example, a probe device, a probe card mounted on a top surface of a device body and connection terminals formed on the back surface of the probe card are provided with connection terminals corresponding to these terminals. A test head formed, and electrically connecting a connection terminal of the test head to a connection terminal of the probe card to perform an electrical characteristic inspection of an object to be inspected, for example, a semiconductor wafer.

That is, a head plate forming the top surface is attached to the probe device main body. An opening is formed substantially at the center of the head plate, and an insert ring is mounted in the opening. A probe card is detachably mounted on the insert ring via a card holder. A test head electrically connected to the connection terminals of the probe card is disposed above the head plate. The test head can be moved in the vertical direction, the front-rear direction, and the θ direction via a moving device provided on a side surface of the apparatus main body.
Then, when inspecting the semiconductor wafer, the test head is moved using a moving device, and a number of connection terminals (for example, pogo pins) arranged in a ring shape on the test head side are connected to the connection terminals of the probe card. The electrical inspection of the semiconductor wafer is performed via a probe card. Further, at the time of maintenance such as replacement of the probe card or inspection of the inside of the apparatus main body, the test head is separated from the probe card of the apparatus main body using a moving device, and then moved to the maintenance area.

The test head is cantilevered by a pair of arms of a moving device. That is, the arm has a connecting member made of, for example, a floating bolt, and the arm is connected to the frame of the test head via a pair of joint plates attached to the frame of the test head via the connecting member. Then, the connecting member is loosely fitted in the connecting hole formed in the joint plate, and the connecting member moves in the connecting hole when the test head is inverted or the test head is connected to the probe card, and the test head is connected with the connecting member. The test head is lifted or separated from the moving mechanism.

Recently, the diameter of semiconductor wafers has been increased,
Since the test head has become larger and heavier depending on the type of probe card due to higher integration, the test head has been moved using a motor. When electrically connecting the test head and the probe card, the test head is lowered while keeping the horizontal state of the test head as much as possible, so that the test head and the probe card of the apparatus main body are connected smoothly. is there.

[0006]

However, in the case of the conventional probe apparatus, there is a test head of a super heavy class exceeding, for example, 100 kg depending on the kind of the probe card, and the test head cantilevered by the arm is used. Due to its own weight, it tilts slightly but downward from the horizontal state, the parallelism between the test head and the probe card is broken, and among the connection terminals such as pogo pins arranged in a ring shape, the connection terminal at the inclined end corresponds to the probe card. Connections start to be made obliquely to the connection terminals, and these connection terminals may be overloaded, possibly damaging the connection terminals. In the case of a conventional probe device, measures have been taken to hold the test head in parallel during movement, but this is not always the case, and particularly, the test head is returned from the inverted state to the state connected to the probe card. At this time, the connecting member connecting the arm and the joint plate moves in the connecting hole, but the connecting member does not move with good reproducibility in the connecting hole, so that the test head and the probe card are always in a constant parallel state with good reproducibility. There was a problem that it was difficult to maintain.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems. Even when a heavy object such as a cantilevered test head is rotated or moved, the heavy object is always reproducibly kept in a constant state with good reproducibility. In addition to providing a heavy object moving device that can be held and moved, even if the test head is inverted due to maintenance, etc. It is an object of the present invention to provide an inspection apparatus which can be connected, does not damage a connection terminal on the test head side such as a pogo pin, and can surely separate the test head from an arm.

[0008]

According to a first aspect of the present invention, there is provided a heavy object moving device, comprising: a moving mechanism for moving a heavy object;
An arm that is connected to the moving mechanism and supports the heavy object through a joint plate that protrudes from one side of the heavy object, and that moves the heavy object cantileverly and places it on a base. In the heavy object moving device, first and second connection holes are vertically provided in the joint plate, and a first connection member having a rotatable roller is loosely fitted in the first connection hole and rotatable in the second connection hole. The second connecting member having a roller is loosely fitted to connect the joint plate to the arm, and the first connecting hole is inclined to the side of the heavy object farther from the heavy object and the roller rolls. A first inclined side is provided, and a first inclined side is provided at a lower end of the joint plate.
A second inclined side opposite to the inclined side is provided, and a lower end roller that rolls according to the inclined side is provided on the arm.

According to a second aspect of the present invention, there is provided an inspection apparatus for moving a test head to electrically connect to and disconnect from a probe card of the apparatus main body, and for connecting the test head to the test mechanism. An arm that cantileverly supports the test head via a joint plate protruding from one side of the test head, and connects the test head to the probe card via the moving mechanism to perform an electrical characteristic test of the device under test. In the inspection apparatus to be performed, first and second connection holes are vertically provided in the joint plate, the first connection member is loosely fitted in the first connection hole, and the second connection member is vertically movable in the second connection hole. The joint plate is connected to the arm by fitting, and the roller is inclined to the test head side of the first connection hole farther from the test head and the roller rolls. And a horizontal auxiliary mechanism that moves up and down while supporting the test head horizontally in conjunction with the moving mechanism when the test head and the probe card are separated from each other, on the opposite side to the moving mechanism. Are provided on the side surface of

According to a third aspect of the present invention, in the inspection apparatus according to the second aspect, the horizontal auxiliary mechanism is provided with a lower surface on a side opposite to a side supported by the arm of the test head. An engagement protrusion provided so as to protrude, an engagement recess provided on the apparatus main body side such that the engagement protrusion is engageable, and a drive mechanism for driving the engagement recess up and down. It is characterized by having.

According to a fourth aspect of the present invention, in the inspection apparatus according to the second or third aspect, the first connecting member includes a rotatable roller positioned in the first connecting hole. It is characterized by having.

According to a fifth aspect of the present invention, in the inspection apparatus according to any one of the second to fourth aspects, the first inclined side is provided at a lower end of the joint plate. A second inclined side having an opposite direction is provided, and a lower end roller that rolls according to the inclined side is provided on the arm.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A probe apparatus according to an embodiment of the present invention will be described below with reference to FIGS. As shown in FIGS. 1 and 2, the probe device according to the present embodiment corresponds to a probe card (not shown) fixed to the upper surface of the device main body 1 and connection terminals formed on the back surface of the probe card. Test head 2 having connection terminals
And an arm 3 for supporting the test head 2 on the front left side of the apparatus main body 1, and a moving mechanism 4 for moving the test head 2 from the apparatus main body 1 via the arm 3. As shown in FIG. 1, the moving mechanism 4 includes an elevating body 41 (which also supports the test head 2) that moves in the vertical direction (Z direction) and an elevating body that moves the elevating body 41 in the Z direction. Move the mechanism and the elevating body 41 back and forth (Y direction)
Housing 42 in which a back-and-forth moving mechanism to be moved by means of
And a rotation driving mechanism 43 (see FIG. 3) housed at the upper end of the elevating body 41 for rotating the test head 2 in the forward and reverse directions within a predetermined angle range in the θ direction about the axis in the X direction. The test head 2 to the maintenance area and the apparatus body 1
Is reciprocated within the range of connection with the probe card. Therefore, the test head 2 is moved up and down above the apparatus main body 1 by the moving mechanism 4 to be electrically connected to and disconnected from the probe card.

Further, as shown in FIG. 2, the probe device is provided with a horizontal auxiliary mechanism 5 which constitutes a main part of the probe device of the present embodiment. As shown in FIG. When the test head 2 is connected to the probe card, the test head 2 moves in synchronism with the moving mechanism 4 and moves up and down while receiving and holding the test head 2 horizontally. That is, the horizontal auxiliary mechanism 5 includes, for example, engaging projections (engaging rods) 52 attached to the front and rear two places on the side surface opposite to the arm 3 so as to protrude downward via the bracket 51.
And two vertically movable engagement bodies 54 attached to the side surface of the apparatus main body 1 via the bracket 53 so that the engagement rods 52 are engaged from above, and each of the engagement bodies 54 is synchronously driven. A drive mechanism (for example, an air cylinder) 55 is provided. A spherical portion 52A is formed at the lower end of the engagement rod 52, and an inverted conical recess 54A is formed on the upper surface of the engagement body 54.
The spherical portion 52A of the engagement rod 52 is fitted into the engaging rod 52. The maximum diameter of the concave portion 54A is larger than the maximum diameter of the spherical concave portion 52A, and the test head 2 is also positioned by the concave portion 52A.

When the test head 2 descends, the air in the air cylinder 55 is exhausted, and the descending speed is adjusted by, for example, a flow regulating valve. When the test head 2 ascends, compressed air is supplied into the cylinder, and the ascending speed is adjusted by the flow control valve as in the case of descending. The synchronous driving of the horizontal auxiliary mechanism 5 with the moving mechanism 4 is performed by detecting the test head 2 with sensors (not shown) provided above and below.

The test head 2 is shown in FIG.
As shown in FIG. 3, the arm 3 is connected to the arm 3 via a joint plate 7 connected to the frame 6 of the test head 2, but the joint plate 7 and the arm 3 can be easily separated as described later. This is a characteristic of the probe device of the present embodiment. That is, the arm 3 is formed in an elongated shape along the side surface of the test head 2 as shown in FIG. 2, and the rotation driving mechanism 43 and the rotating body 43A are provided on the lower side at a position slightly deviated from the center in the longitudinal direction.
A connecting portion 31 is formed to be connected via. Also,
Reinforcing members 32 having a U-shaped cross section which run longitudinally in the longitudinal direction are attached to the arm 3 vertically, and the torsion due to the load of the test head 2 is prevented by the reinforcing members 32.

The front and rear ends of the arm 3 (FIG. 3,
A block 33 formed in a substantially T-shape is connected to the left and right ends (in FIG. 4, both ends) via a connecting member 34 and a screw 35. On the other hand, as shown in FIG. 3, the joint plate 7 is connected to a projecting portion 6A projecting from the frame 6 to the moving mechanism 4 side. The joint plate 7 is vertically connected by first and second connecting members 8 and 9 in a state of being superposed on the block body 33 of the arm 3. Both the first and second connecting members 8 and 9 are loosely fitted in the first and second connecting holes 7A and 7B on the upper and lower sides of the joint plate 7, and the first and second connecting holes 33 on the upper and lower sides of the block body 33.
A and 33B penetrate without leaving a gap. The first and second connecting members 8 and 9 protrude from the block body 33, and the first and second stopping members 81 and 91 are attached to the portions, and the first and second stopping members 81 and 91 are armed with the first and second stopping members 81 and 91. 3
And the joint plate 7. Further, the sheet member 1 is provided between the joint plate 7 and the block body 33.
0 is interposed, and the joint plate 7 is configured to be easily slid with respect to the block body 33 via the sheet member 10.

Next, the first and second joint plates 7
The relationship between the connection holes 7A, 7B and the first and second connection members 8, 9 will be described. As shown in FIGS. 4 and 5, the first and second connection holes 7A and 7B are each formed in a substantially rectangular shape. In addition, the first and second connecting members 8 and 9 are rollers 82 and 9 located in the first and second connecting holes 7A and 7B, respectively.
2, and the joint plate 7 is connected to the block body 33 by screwing with the first and second connecting female screws 33A and 33B of the block body 33 at the male screw portion. When the test head 2 rotates in the θ direction and the first and second connecting members 8 and 9 move in the respective connecting holes 7A and 7B due to the load of the test head 2, each roller 8
2, 92 rotate via a sliding member 83 (only the first connecting member 8 is shown in FIG. 5). As shown in FIGS. 5A and 5B, the first connection hole 7A is formed to have a size in which the first connection member 8 is loosely fitted. Further, a side farther from the test head 2 is formed in the first connection hole 7A as a first inclined side 7C inclined from the elevating body 41 side to the test head 2 side, and the other sides are formed to be orthogonal to each other. Have been. Also, the second
The connection hole 7B is formed as a rectangle having a size in which the second connection member 9 is loosely fitted. Here, 84 and 94 are spacers, respectively.

When the test head 2 is mounted on the apparatus main body 1 and connected to the probe card, the axis of the first and second connecting members 8, 9 is aligned with the first and second connecting holes 7A, 7B.
And the test head 2 is separated from the arm 3, that is, in a so-called floating state. When the test head 2 is separated from the probe card via the moving mechanism 4, the first connecting member 8
Are in contact with the first inclined side 7C of the first connection hole 7A. When the test head 2 is connected to the probe card, the engaging rod 52 of the horizontal auxiliary mechanism 5 engages with the concave portion 54A of the engaging body 54, and the air cylinder 55 of the horizontal auxiliary mechanism 5 synchronizes with the moving mechanism 4. The test head 2 gradually descends while maintaining the horizontal level while gradually discharging the compressed air of the air cylinder 55, and when the test head 2 reaches the descending end, the first and second connecting members 8 perform the test. The test head 2 is separated from the head 2 and becomes a floating state, and the test head 2 is kept horizontally on the apparatus main body 1.

Further, as shown in FIGS. 4 and 5, mounting members 11 are respectively attached to the upper and lower ends of the block body 33, and a roller 12 is attached to an end of each mounting member 11 via a shaft member 13. It is rotatably mounted. Each of the rollers 12 has protrusions 7D at the upper and lower ends of the joint plate 7 in a state where the arm 3 and the joint plate 7 are connected to each other.
The side of the moving mechanism 4 of 7E rolls.
In particular, the side of the lower protrusion 7D with which the roller 12 is engaged is formed as a second inclined side 7F inclined by the same angle in the opposite direction to the first inclined side 7C of the first connection hole 7A. When the test head 2 moves up and down, the lower roller 12
As in the case of the roller 82 of the first connecting member 8, the roller smoothly rolls while strongly pressing the second inclined side 7F of the projection 7E. Therefore, when the test head 2 is moved up and down, the load of the test head 2 is equally divided into two by the first connecting member 8 and the roller 12 via the joint plate 7.

FIG. 7 is a view showing a joint plate 70 different from the joint plate 7 shown in FIG. As shown in FIG. 5, the joint plate 70 includes first and second connecting members 80, 9 as in the case of FIG.
The first and second connection holes 70A and 70B into which 0 is loosely fitted are formed. However, the first connecting hole 70A and the lower roller 1
The distance L1 between the centers of the two is formed shorter than the distance L in the case of FIG. Further, the first and second connecting members 80 and 90 have no rollers, and the angle β of each of the inclined side 70C of the first connecting hole 70A and the inclined side 70F of the projection 70E is set to be larger than the angle.

In the case of the joint mechanism shown in FIG. 7, for example, when the test head 2 is connected to the probe card or separated from the probe card, the load applied to the inclined side 70C of the first connection hole 70A from the test head 2 is As shown by (b) in the figure, at F1, the force increases as the distance L1 decreases. Also, when the test head 2 returns from the inverted state to the state connected to the probe card,
For example, the first connecting member 80 moves to the left from the lower right corner of FIG. 7B and slides on the inclined side 70C. At this time, the first connecting member 80 moves at the inclined side 70C of the first connecting member 80. The force which hinders the movement of F acts as F4 shown in FIG. This resistance can be obtained by F4 = F2 × cos β + F3 × μ. F3, which is the resultant of F1 and F2, is F3
= F1 / cosβ. Here, μ is the friction coefficient of the contact portion. As is clear from these relational expressions, it is understood that F2 and F3 become smaller as the distance L1 between the first and second connection holes is made smaller and the angle β is made smaller. Further, it can be seen that the smaller the friction coefficient μ of the contact portion, the smaller the F4.

Based on these facts, the inclination angle α of the first inclined side 7C and the second inclined side 7F is small as in the joint plate 7 shown in FIGS. As the friction coefficient becomes smaller, the force F4 that hinders the movement of the first and second connecting members 8 and 9 becomes smaller, and the first and second connecting members 8 and 9 become the first and second connecting holes 7.
It turns out that it moves smoothly in A and 7B. In particular, the test head 2 is connected to the probe card from the inverted state (the state where the first connection hole 7A is located on the lower side and the second inclined side 7F is located on the upper side) (the state shown in FIG. 5A). ), The first connecting member 8 in the inverted state shown in FIG. 6 (however, only the relationship between the first connecting member 8 and the first connecting hole 7A is shown) is at the position shown by the solid line in FIG. As the test head 2 returns to the state of being connected to the probe card, the first connecting member 8 moves to the position shown by the one-dot chain line in the first connecting hole 7A, and then to the first inclined side 7C shown by the two-dot chain line. While moving, the roller 82 rolls according to the first inclined side 7C and smoothly returns to the state shown in FIG. 5A with good reproducibility, so that the relationship between the test head 2 and the probe card is always kept constant. Can be maintained. In order for the first connecting member 8 to move with good reproducibility in the first connecting hole 7A, the inclination angle α is, for example, 400 m in the horizontal direction from the center of the floating portion to the center of gravity of the test head 2.
m and 8 when L in FIG. 5 is set to 270 mm.
° or less is preferable.

The following operation will be described. First, a case where the test head 2 is lowered from a position directly above the apparatus main body 1 and the test head 2 is connected to the probe card will be described. When the test head 2 is located above the apparatus main body 1, the test head 2 is horizontally held by the arm 3 via the joint plate 7. In this state, the elevating body 41 of the moving mechanism 4 inclines slightly toward the apparatus main body 1 due to the load from the test head 2, and the block 33 of the arm 3 connected to the elevating body 41 also moves in the same manner as the elevating body 41. It is inclined to the side.

Next, the test head 2 is moved by the moving mechanism 4.
Is lowered, the engagement rod 52 is fitted into the recess 54A of the engagement body 54, and the sensor of the horizontal auxiliary mechanism 5 detects that the horizontal auxiliary mechanism 5 has held the test head 2 horizontally. As the mechanism 5 synchronizes with the moving mechanism 4 and exhausts the compressed air in the cylinder while adjusting the flow rate, the test head 2 gradually descends while maintaining the horizontal level,
When all the connection terminals of the test head 2 start to contact the connection terminals of the probe card with a uniform pressure from directly above, the test head 2
Reaches the lower end, the sensor detects the test head 2 (in a state in which the engaging body 54 is in contact with the bracket side as shown in FIG. 1), the exhaust of the air cylinder 55 is terminated, and the test head is moved by a clamp mechanism (not shown). Clamp.
At this time, all the connection terminals of the test head 2 are connected to the connection terminals of the probe card. After that, moving mechanism 4
Continue to be driven, and the first and second connecting members 8 and 9
When the test head 2 reaches the center of the second connection holes 7A and 7B, the test head 2 enters a floating state separated from the moving mechanism 4. After the test head 2 is in a floating state, a predetermined inspection can be performed by the probe device.

After the predetermined inspection is completed, for example, when replacing the probe card, the test head 2 is moved up from the apparatus main body 1 via the moving mechanism 4. At this time, for example, a clamp mechanism (not shown) is activated to operate the test head 2.
When the first and second connecting members 8 and 9 are lifted by the moving mechanism 4 after releasing the test head 2, the test head 2 is gradually lifted up via the joint plate 7, and the test head 2 is separated from the probe card. At this time, the horizontal auxiliary mechanism 5 operates via a sensor to supply compressed air to the air cylinder 55 at the timing when the test head 2 is lifted by the moving mechanism 4, and lifts the engagement body 54 by the air pressure. Rises horizontally.

After the test head 2 reaches the rising end and moves to the maintenance area, if the test head 2 is turned over for maintenance, for example, the first connecting member 8 moves in the first connecting hole 7A and the solid line in FIG. Move to the second position
The connecting member 9 moves according to the second inclined side 7F. When the test head 2 moves to the apparatus main body 1 again after the maintenance, the test head 2 is turned over, for example, in the maintenance area. When the test head 2 is reversed to return to the state of connection with the probe card, for example, as the test head 2 is reversed, for example, the first connecting member 8 moves from the solid line position to the position indicated by the one-dot chain line as shown in FIG. Then, when the test head 2 is turned over, the first connecting member 8 moves to the position shown by the two-dot chain line on the first inclined side 7C side, and
It comes into pressure contact with the inclined side 7C. At this time, since the first connecting member 8 is in pressure contact with the first inclined side 7C, the first connecting member 8 returns to the position shown in FIG. Although a force that hinders movement acts, in the present embodiment, the first
Since the inclination angle of the inclined side 7C is small and the first connecting member 8 is in contact with the first inclined side 7C via the roller 82, the first connecting member 8 moves smoothly according to the first inclined side 7C, Returning to the position shown in FIG. 5A with good reproducibility, the positional relationship between the test head 2 and the probe card can always be kept constant. After that, when the test head 2 is lowered and connected to the probe card, the test head 2 is kept parallel to the probe card by the action of the horizontal auxiliary mechanism 5 as described above, so that damage such as pogo pins can be reliably prevented. .

As described above, according to the present embodiment,
First and second connection holes 7A and 7B are provided vertically on a joint plate 7 for connecting the test head 2 and the arm 3, and the first connection member 8 is loosely fitted in the first connection hole 7A and the second connection hole 7B. The joint plate 7 is connected to the arm 3 by loosely fitting the second connecting member 9 to the arm 3. Further, a first inclined side 7C inclined toward the test head 2 is provided in the first connecting hole 7A, and the test head 2 and the probe card are provided. Since the horizontal auxiliary mechanism 5 that moves up and down while supporting the test head 2 horizontally in conjunction with the moving mechanism 4 when the moving mechanism 4 moves is provided on the side opposite to the moving mechanism 4, the test head 2 and the probe card are always parallel. Are connected and disconnected in a state in which they are held, and damage to connection terminals such as pogo pins can be reliably prevented.

Further, according to the present embodiment, the roller 82 located in the first connection hole 7A is provided in the first connection member 8 of the arm 3.
And a joint plate 7 at the lower end of the arm 3.
Since the roller 12 that contacts the second inclined side 7F is provided,
Even if the first inclined side 7C and the second inclined side 7D of the joint plate 7 are strongly pressed against the roller 82 and the roller 12 of the first connecting member 8, the first connecting member 8 is in the first position via the roller 82.
The roller 12 rolls along the inclined side 7C and the second inclined side 7
F, the first connecting member 8 moves smoothly in the first connecting hole 7A, and when the test head 2 is returned from the inverted state to the connection state with the probe card, the first connecting member 8 is moved in the first connecting hole 7A.
The connecting member 8 returns to the corner between the first inclined side 7C and the upper side reliably and with good reproducibility, so that the test head 2 can be always delivered to the horizontal auxiliary mechanism 5 in a constant state.
Can be reliably separated from the moving mechanism 4 and the floating state of the test head 2 can be ensured.

The present invention is not limited to the above-described embodiment. For example, the first inclined side 7 of the first connecting hole 7A
C and the inclination angle α of the second inclined side 7F at the lower end can be appropriately set, and the structure of the roller can also be appropriately selected. Further, the driving mechanism of the horizontal auxiliary mechanism 5 is not limited to the air cylinder. In short, the specific components can be appropriately selected as needed without departing from the spirit of the present invention.

[0031]

According to the first aspect of the present invention, even when a heavy object such as a cantilevered test head is rotated or moved, the heavy object is always kept in a constant state with good reproducibility. A heavy object moving device that can be held and moved can be provided.

Further, according to the present invention, even if the test head is inverted due to maintenance or the like, the test head is always kept parallel to the probe card of the apparatus main body with good reproducibility. It is possible to provide an inspection device that can be electrically connected in a state, does not damage connection terminals on the test head side such as pogo pins, and can reliably separate the test head from the arm.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a probe device which is an embodiment of an inspection device of the present invention.

FIG. 2 is a front view showing a main part of the probe device shown in FIG. 1 with a part thereof cut away.

3A is an exploded perspective view showing a relationship between a moving mechanism and an arm of the probe device shown in FIG. 1, and FIG. 3B is a sectional view of the arm.

FIG. 4 is an exploded perspective view showing a relationship between an arm and a joint plate shown in FIG. 2;

5A and 5B are diagrams showing the relationship between the joint plate and the connecting member shown in FIG. 4, wherein FIG. 5A is a front view thereof, and FIG.
It is a figure which expands and shows the part enclosed with (circle).

FIG. 6 is an explanatory diagram for explaining a moving state of the first connecting member when returning the test head from the inverted state to the connected state with the probe card.

FIGS. 7A and 7B are diagrams corresponding to FIGS. 5A and 5B, respectively, showing a relationship between another joint plate and a connecting member.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Apparatus main body 2 Test head 3 Arm 4 Moving mechanism (heavy-weight moving apparatus) 5 Horizontal auxiliary mechanism 7 Joint plate 7A 1st connection hole 7B 2nd connection hole 7C 1st slope side 7F 2nd slope side 8 1st connection member 9 Second connection member 12 Lower roller (lower end roller) 82 Roller of first connection member

Claims (5)

[Claims] 1. A moving mechanism for moving a heavy object, and an arm connected to the moving mechanism and supporting the heavy object cantilever via a joint plate projecting from one side of the heavy object, the arm comprising: In a heavy object moving device for cantileverly moving an object and mounting the object on a base, a first connection having a first and a second connection hole provided vertically on the joint plate and a rotatable roller provided in the first connection hole. A member is loosely fitted and a second connecting member having a rotatable roller is loosely fitted in the second connecting hole to connect the joint plate to the arm. Also, on the side of the first connecting hole farther from the heavy object, A first inclined side that is inclined to the heavy object side and on which the roller rolls is provided. A second inclined side opposite to the first inclined side is provided at a lower end of the joint plate, and the joint plate rolls according to the inclined side. Moving lower end b A heavy object moving device, wherein a roller is provided on the arm. 2. A test apparatus comprising: a moving mechanism for moving a test head to electrically connect to and disconnect from a probe card of an apparatus main body; and a joint plate connected to the moving mechanism and extending from one side of the test head to perform the test. An arm for supporting the head in a cantilever manner, wherein the test head is connected to the probe card via the moving mechanism to perform an electrical characteristic test on the device under test. 2 connecting holes are provided up and down, the first connecting member is loosely fitted in the first connecting hole, and the second connecting member is loosely fitted in the second connecting hole so as to be vertically movable, and the joint plate is connected to the arm. A first inclined side that is inclined toward the test head side and on which the roller rolls is provided on a side of the first connection hole farther from the test head;
Furthermore, a horizontal auxiliary mechanism that moves up and down while supporting the test head horizontally in conjunction with the moving mechanism when the test card is separated from or connected to the probe card is provided on a side surface opposite to the moving mechanism. Inspection equipment. 3. The horizontal auxiliary mechanism includes: an engagement protrusion provided on a side surface of the test head opposite to a side supported by an arm; the engagement protrusion being provided so as to engage with the engagement protrusion. 3. The inspection apparatus according to claim 2, further comprising: a vertically movable engagement recess provided on the apparatus main body side; and a drive mechanism for vertically driving the engagement recess. 4. The apparatus according to claim 2, wherein the first connecting member has a rotatable roller positioned in the first connecting hole.
Or the inspection device according to claim 3. 5. The arm according to claim 1, wherein a second inclined side opposite to the first inclined side is provided at a lower end of the joint plate, and a lower roller which rolls according to the inclined side is provided on the arm. The inspection device according to any one of claims 2 to 4.