JP3252083B2 - Probe device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a probe device.

[0002]

2. Description of the Related Art A conventional probe apparatus has a test apparatus in which a probing card mounted on a top surface of an apparatus main body and connection terminals formed on the back surface of the probing card are provided with connection terminals corresponding to these terminals. With a head,
The connection terminals of the test head are electrically connected to the connection terminals of the probing card to perform an electrical inspection of an object to be inspected, for example, a semiconductor wafer.

That is, a head plate forming the top surface is attached to the probe device main body. An opening is formed substantially at the center of the head plate, and an insert ring is mounted in the opening. A probing card is removably mounted on the insert ring via a card holder. A test head electrically connected to the connection terminals of the probing card is provided above the head plate. The test head is mounted, for example, on the left side of the main body so that it can be turned outward from the side of the main body.The test head is located on the left side during maintenance work such as when replacing the probing card or checking the inside of the main body. The head plate is turned in the other direction so that it does not interfere with the test head. For example, the head plate is turned in the rear direction so that maintenance work can be performed. Further, a tester is arranged on the side where the test head is inverted. Then, the test head and the tester are connected by a cable, signals are transmitted and received between the tester and the probe device, and an electrical inspection of the semiconductor wafer is performed. The test head and the probing card are electrically connected to each other via pogo pins such as a performance board and a connection ring.

Recently, the diameter of semiconductor wafers has been increased,
Due to the high integration, the inspection content is abundant, and depending on the inspection target, the test head is becoming larger and heavier,
The test head is moved using a motor. When the test head and the probing card are electrically connected, the test head is lowered by using a ball screw, and the test head and the probing card of the apparatus main body are electrically contacted.

[0005]

However, in the case of the conventional probe device, the test head is, for example, 250 mm.
Due to the weight of ~ 300 kg, the free end side of the arm is lowered by the weight of the test head, and the arm is slightly inclined. Due to this inclination, the test head fixed to the arm is inclined together, and there is a problem that it is difficult to align the performance board (not shown) with the insert ring of the probing card. In addition, when the test head is lowered by the motor, it is difficult to stop the test head accurately at the original inspection position. To ensure that the test head is connected to the probing card, the test head is extra than the original stop position. Is lowered, an extra load is applied to the pogo pins and the like of the performance board, and the pogo pins and the like may be damaged. Further, in the case of the conventional probe device, since the test head is inverted each time the probing card is replaced, the work efficiency is poor, and there is a problem that the replacement work requires much time. Further, in the case of the conventional probe device, since the test head is inverted toward the tester, a space for accommodating the inverted test head is required between the tester and the probe device main body. Therefore, there is a problem that the distance from the probe device to the tester becomes longer and the length of the cable becomes longer accordingly.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and when the test head side and the probing card side are electrically connected by a motor driving method, the test head side is simply connected to the probing card side. It is an object of the present invention to provide a probe device capable of performing alignment and reducing an excessive load from a test head. Further, another object of the present invention is to provide a probe device capable of performing a work of replacing a performance board in a short time, and further reducing a cable connecting a test head and a tester and reducing an installation area. It is in.

[0007]

A probe device according to a first aspect of the present invention has a probing card fixed to an apparatus main body and a connection terminal corresponding to a connection terminal formed on the back surface of the probing card. A test head,
An arm for supporting the test head from the side of the apparatus main body, and the test head mounted on the arm via the arm.
And a lift drive mechanism for raising and lowering in the upper Okimoto body, the
A probe device for lowering the test head via the arm inclined by the weight of the test head and bringing the test head into electrical contact with the probing card to perform an electrical inspection of the device under test. A support shaft is provided on both front and rear surfaces of the test head, and each support shaft is fitted into a support hole of the arm, and the test head is pivotally supported on the arm via the support shaft so as to be tiltable with respect to the arm . In addition, when the test head is moved up and down, the tilt of the test head is corrected horizontally, and the test head and the professional are corrected.
Or the test head-to-Bing card is in electrical contact
A tilt correction mechanism that is separated from the main body.

According to a second aspect of the present invention, in the probe device according to the first aspect, the tilt correction mechanism includes a swing member rotatably supported by the support shaft, A pair of left and right engagement protrusions provided symmetrically on the upper surface of the swinging member, and a pair of left and right engagement blocks having engagement recesses with which the respective engagement protrusions can be engaged and fixed to the test head side; Above, so as to hold down these engagement blocks.
A pair of left and right holding members provided on the
And a tilt limiting mechanism for limiting the tilt of the rocking member which has rocked via the member.

[0009]

[0010]

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the embodiments shown in FIGS. FIG. 1 is a view showing an embodiment of the probe device of the present invention, and FIG.
(B) is a side view showing a rotation angle limiting mechanism of the test head,
2A and 2B are diagrams showing a driving mechanism of a test head used in the probe device shown in FIG. 1, FIG. 2A is a side view thereof, and FIG.
FIG. 3 is a configuration diagram showing a lock mechanism of the turning drive mechanism shown in FIG. 3A, FIG. 3 is an operation explanatory view of an auxiliary mechanism that assists the turning operation of the turning drive mechanism of the probe device shown in FIG. 1, and FIG. FIGS. 8A and 8B are views showing the tilt correction mechanism used in the probe device, in which FIG. 9A is a perspective view, FIG. 8B is a cross-sectional view showing an engagement state between an engagement protrusion and an engagement recess, and FIG. FIG. 5 is a cross-sectional view showing an inclination limiting mechanism, FIG. 5 is a configuration diagram showing a test head lock mechanism used in the probe device shown in FIG. 1,
FIG. 6 is a perspective view showing a use state of a template used for positioning the performance board of the test head and the insert ring.

As shown in FIG. 1, the probe device of the present embodiment has a probing card (not shown) fixed to the device body 1 and connection terminals corresponding to connection terminals formed on the back surface of the probing card. A test head 2 having an arm 3 for supporting the test head 2 from the left side (in FIG. 1, the front side) of the apparatus main body 1;
And a moving mechanism 4 for moving the test head 2 from the apparatus main body 1 through the device. A tester 5 is disposed on the left side of the front of the probe device (the left side in FIG. 1) with a distance L therebetween. The tester 5 and the test head 2 are electrically connected via a cable 6.

The moving mechanism 4 is disposed on the left side of the front of the apparatus main body 1 and raises and lowers the arm 3 above the apparatus main body 1 as indicated by an arrow A, and the arm 3 is indicated by an arrow B. And a turning drive mechanism 8 for turning the motor. On the right side of the apparatus main body 1 facing the moving mechanism 4, a wafer storage section 9 for storing a semiconductor wafer as an object to be inspected in a cassette unit is formed. The driving mechanism such as the moving mechanism 4 is driven under the control of a controller in which a predetermined program is incorporated.

As shown in FIG. 2A, the elevation drive mechanism 7 includes a motor 7A, a first gear 7B fixed to a rotating shaft of the motor 7A, and a first gear 7B meshed with the first gear 7B. The ball gear 7C includes a second gear 7C, a ball screw 7D having the second gear 7C at the lower end, and a pair of upper and lower nut members 7E, 7E screwed to the ball screw 7D. A bearing 7F is attached to a lower end of the ball screw 7D. The upper and lower nut members 7E, 7E are both fixed to a support 10 that supports the turning drive mechanism 8, and this support 1
The turning drive mechanism 8 supported at 0 is moved up and down in the direction of arrow A according to a guide rail (not shown) by forward and reverse rotation of the ball screw 7D. Further, on the left side of the first gear 7B, an elevating lock mechanism 11 in which the projection 11A is engaged with the first gear 7B is provided, and a lock claw 11A of the elevating lock mechanism 11 advances to lock the elevating drive mechanism 7. The test head is stopped at a desired position, and the lock claw 11A is retracted to release the lock.

As shown in FIG. 2A, the turning drive mechanism 8 includes a motor 8A, a small gear 8B fixed to a rotating shaft of the motor 8A, and a large gear meshing with the small gear 8B. And a gear 8C. And large gear 8C
A hinge arm 12 that supports the arm 3 is fixed to a rotation shaft (not shown) of the test gear 2. By rotating the large gear 8 C, the test head 2 is connected to the test head 2 via the hinge arm 12 and the arm 3.
It is configured to turn backward by 20 ° (in the direction of arrow B in the figure). A turning lock mechanism 13 that engages with the large gear 8C is disposed below the large gear 8C. The turning lock mechanism 13 locks the turning drive mechanism 8 so that the test head stops at a desired turning position. is there.

As shown in FIG. 2B, for example, the turning lock mechanism 13 includes an air cylinder 13A, a pin 13B connected to the cylinder rod, and a pin 13B.
Of flat bars 13C, 13D connected via
have. And the flat bar on the right (hereinafter,
Called the "right flat bar." ) Pin 1 at the left end of 13C
3B is fixed, and a lock claw 13E that engages with the large gear 8C is connected to the right end thereof via a pin 13F. The lock claw 13E is horizontally fitted into a guide hole of a guide member 13G fixed to the support 10. On the other hand, a left flat bar (hereinafter, referred to as "left flat bar").
A long hole 13H extending in the longitudinal direction is formed from the right end of 13D, and the pin 13B is movable in the long hole 13H. The left end of the left flat bar 13D is connected via a pin 13I fixed to the support 10, and the left flat bar 13D is rotatable about the pin 13I. Further, the support 10 and each flat bar 13C, 1
3D are connected to each other by springs 13J, and each flat bar 13
C and 13D are always urged in the direction opposite to the direction of pushing up by the air cylinder 13A.

Accordingly, when the air cylinder 13A is driven to extend the cylinder rod as shown by the solid line in FIG. 2 (b), the left flat bar 13D rotates counterclockwise around the left end pin 13I, and Right flat bar 13C
The roller 13F is lifted while moving to the left in the guide groove 13G, and the lock claw 13E is disengaged from the large gear 8C to release the lock of the turning drive mechanism 8. Conversely, when the compressed air in the cylinder escapes, the spring 13
The flat bars 13C and 13D are pulled down by J to be in a horizontal state as shown by the dashed line in FIG. 3, and the lock claw 13E is engaged with the large gear 8C to lock the turning drive mechanism 8 at a desired turning position. It is.

As shown in FIG. 1A, a rotating body 14 is rotatably mounted on the tip of the hinge arm 12, and the rotating body 14 is attached to the base frame 3 of the arm 3.
A Integrated with a gear (not shown) fixed at the center. This gear meshes with a gear (not shown) fixed to a rotating shaft of a motor (not shown) on the rotating body 14, and the motor rotates the arm 3 and the test head 2 forward and backward via the gear. The arm 3 has a lock pin 1
5, and a hole (not shown) for inserting the lock pin 15 is provided in the base frame 3A.
A lock pin 15 is inserted into each of the holes to hold the test head 2 horizontally, for example. One hole is used to hold the test head 2 horizontally above the apparatus main body 1 as shown in FIG. 1, and the other hole is used for turning the test head 2 backward as shown in FIG.
It is used when the test head 2 is manually turned and held horizontally. A switch 15A is provided on the front left side of the arm 3.
5A, the lock pin 15 is fixed to the hole of the base arm 3A, and the lock pin 15
5 is made easy to fall out of the hole.

Further, as shown in FIG. 1B, a shock absorber 17 is attached to the left side of the arm 3 via an L-shaped bracket 16, and a shock absorber is mounted on the front side of the hinge arm 12. A receiving member 18 to which the elastic member 17 makes elastic contact is attached. Also, the bracket 16
An adjustment bolt 19 adjacent to the shock absorber 17 is attached to the, and the adjustment bolt 19 abuts on the receiving member 18 to regulate the clockwise rotation of the test head 2 and the arm 3, and The arm 3 is held horizontally. Shock absorber 1
7 is an impact when the adjusting bolt 19 is brought into elastic contact with the receiving member 18 just before the adjusting bolt 19 comes into contact with the receiving member 18 when the test head 2 is rotated clockwise by the motor 15 and the adjusting bolt 19 comes into contact with the receiving member 18. Test head 2
Are stopped at the horizontal position as described above. That is, these members 16 to 20 constitute a rotation angle limiting mechanism for limiting the rotation angle of the test head 2.
The test head 2 is rotated counterclockwise by a predetermined angle, for example, 60 ° by the motor 15, and is stopped at the rotational position by a member (not shown) similar to the above-described shock absorber 17 or the like. The latter members are mounted so as to sandwich the hinge arm 12 with the above members 16 to 19. Note that, in FIG.
Is a lock nut.

An auxiliary mechanism 2 for reducing the driving force of the turning drive mechanism 8, as shown in FIG.
1 is provided. The auxiliary mechanism 21 is constituted by an air cylinder as shown in the figure, and a roller 21A is attached to the tip of the cylinder rod. Air is always supplied to this air cylinder, and the roller 21A is hinged when the test head 2 pivots backward from the arm position shown by the solid line in FIG. Recess 1 formed on the rear side of arm 12
2A to receive the load of the test head 3. Therefore, the auxiliary mechanism 21 receives the load of the test head 2 during the turning by the roller 21A, and can reduce the torque based on the weight of the test head 2 and, consequently, reduce the driving force of the motor 8A of the turning drive mechanism 8 to operate the motor 8A. It can be made smaller. The auxiliary mechanism 21 is pin-coupled at the lower end and swings back and forth.

A mounting plate 22 is mounted on both front and rear surfaces of the test head 2 as shown in FIG.
A support shaft 23 is mounted via each mounting plate 22. The front and rear support shafts 23 are fitted into support holes 3A formed in the arm 3. Therefore, the test head 2 is tiltably supported by the support hole 3A via the support shaft 23. Also, a large rectangular hole is formed in the arm 3,
A tilt correction mechanism 24 is provided in the hole, and the tilt correction mechanism 24 corrects the tilt of the test head 2 horizontally and receives a load from the test head 2 at the lower end of the test head 2 to load the apparatus main body 1. Is to be reduced. The tilt correcting mechanism 24 is configured as follows.

That is, as shown in FIG. 4A, the tilt correcting mechanism 24 includes a swing member 24A rotatably supported by a support shaft 23 and a left-right symmetrical upper surface of the swing member 24A. A pair of left and right engagement blocks 24D having a pair of engagement protrusions 24B provided on the test head 2 and having a pair of engagement protrusions 24B provided on the
And a pair of left and right bolts provided on the arm 3 corresponding to each of the engagement blocks 24D and abutting from above one of the engagement blocks 24D to regulate the left and right inclination of the test head 2 with respect to the arm 3. Holding member 24E
And a tilt limiting mechanism 24F that limits the tilt of the test head 2 in cooperation with each pressing member 24E. The engagement protrusion 24B is such that the test head 2 is at the lower end (inspection position).
Engage with the corresponding engagement block 24D until
The test heads 2 are kept horizontal, and when they come to the inspection position , they are separated from the corresponding engagement blocks 24D.
You. As a result, the test head 2 is separated from the arm 3
It has a role of reducing the load applied to the apparatus main body 1 side and preventing damage such as pogo pins of the performance board. Here, the extra load means a force for further pushing down the test head 2 from the inspection position by the driving force of the lifting drive mechanism 7.

The swing member 24A is formed in a substantially T-shape as shown in FIG. This swing member 24A
The horizontal portion of the arm 3 faces the hole of the arm 3, and an engagement protrusion 24B is fitted into a pair of left and right holes on the upper surface thereof as shown in FIG. Further, a hole is formed at the center in the width direction of the leg portion of the swinging member 24A, and the support shaft 23 penetrates this hole,
The swinging member 24 </ b> A makes a seesaw movement about the support shaft 23 in a small angle range. This seesaw movement is restricted by the inclination restriction mechanism 24F.

That is, as shown in FIGS. 4B and 4C, the inclination limiting mechanism 24F includes four bolts 24G,
It has a hole 24H into which each bolt 24G fits.
There are two pairs of bolts 24G on the left, right, upper and lower sides of the support shaft 23, and they are fixed to the mounting plate 22 similarly to the support shaft 23. Each hole 24H is formed in the leg and the arm 3 of the swinging member 24A, and the inner diameter of each is formed larger than the outer diameter of the bolt 24G fitted into each hole. Accordingly, the seesaw movement of the swinging member 24A is limited to a range in which each bolt 24G moves in each hole 24H (for example, a tilt range of about 2 °).
It is done within. Each engagement block 24D is screwed to the mounting plate 22.

When the test head 2 moves up and down, for example, the right engagement projection 24B engages with the engagement recess 24C of the corresponding engagement block 24D. Accordingly, the swing member 24A is tilted within the allowable range of the tilt limiting mechanism 24F, and the test head 2 corrects a tilt greater than a predetermined angle. When the test head 2 is at the inspection position, the left and right engagement protrusions 24B are connected to the left and right engagement blocks 24D.
It is designed to be separated from the engagement block 24D on the lower surface.

Further, as shown in FIG.
A test head lock mechanism 25 for locking the test head 2 at the inspection position is provided at a front upper end portion on the left side surface and a rear upper end portion on the right side surface. A frame 26 connected to the arm 3 is provided slightly below the test head 2.
Is attached. The frame 26 has two L-shaped side projections 27 for locking the test head 2 by the test head lock mechanism 25 at two locations. This test head lock mechanism 25
For example, as shown in FIG. 5, a lock member 25A that is hinged, a spring 25B and an air cylinder 25C that are connected to the lock member 25A, and receives a signal from a controller to be automatically driven. It is. Accordingly, the test head lock mechanism 25 receives the lowering command signal (Z down signal) of the test head 2 and automatically locks the test head 2 when the test head 2 reaches the inspection position. (Z-up signal).

Therefore, when the test head 2 reaches the inspection position, the air cylinder 25C is turned on, the rod of the air cylinder 25C is extended against the tensile force of the spring 25B, and the lock member 25A is moved to the position shown in FIG. The test head 2 is automatically rotated out of the position indicated by the dashed line in a clockwise direction and hangs over the projection 27 through the opening 25E as shown by the solid line to automatically lock the test head 2 at the inspection position. Further, when the Z-up signal of the test head 2 is received, the air cylinder 25C is turned off, the compressed air of the air cylinder is released, and the spring 25B returns to the original one-dot chain line position by the pulling force, and the lock is automatically released. It is like that.

As shown in FIG. 6, four first positioning posts 28A and two second positioning posts 2 are provided on the upper surface of the apparatus main body 1 and around the insert ring 1A.
8B, and these positioning posts 28A, 2B
8B, the test head 2 is positioned at the inspection position. Six positioning posts 28A, 28
Of B, four first positioning posts 28A are erected on the insert ring 1A, and the remaining two second positioning posts 28B are erected on the left front and right rear of the apparatus main body 1. Although not shown, a hole into which the former four are fitted is formed on the test head 2 side, and a positioning member into which the latter two are fitted is attached to the frame 26 of the test head 2.

By the way, the test head 2 is attached to the arm 3.
When attaching the test head 2, it is necessary to attach the test head 2 to the arm 3 so that the test head 2 exactly matches the insert ring 1A of the apparatus main body 1. When positioning the test head 2 on the arm 3, an elongated rectangular template 29 shown in FIG. 6 is used. The template 29 has, for example, four holes. In each hole, a pipe-shaped post 29A having a size into which the positioning posts 28A and 28B are fitted is fixed therethrough. As shown in FIG. 6, the two posts 29A are arranged at the corners at both ends of the template 29 corresponding to the positioning posts 28B erected on the left front side and the right rear side of the apparatus main body 1, and the remaining two posts are provided. The post 29A is disposed on the side edge of the template 29 in the longitudinal direction corresponding to the positioning post 28A at a position separated by 180 ° in the circumferential direction of the insert ring 1B. That is, 4 of the template 29
The book posts 29A are arranged following the positioning posts 28 arranged substantially diagonally on the left front and right rear of the apparatus main body 1.

Further, each post 2 of the template 29
9A corresponds to a hole of a positioning member attached to the arm 3 and a positioning hole of the test head 2, and each post 2
9A to the hole of the positioning member of the arm 3 and the test head 2
The test head 2 can be attached to the arm 3 so that the test head 2 comes to the inspection position.

Next operation will be described. First, a method of attaching the test head 2 to the arm 3 will be described. After the assembly of the apparatus main body 1 is completed, the template 29
Of the post 29A is aligned with the positioning posts 28A and 28B. All positioning posts 28A and 28B are shown in FIG.
If all the posts 29A are fitted as shown in FIG. 7, the positioning posts 28A and 28B stand upright. If the four positioning posts 28A, 28B on the apparatus main body 1 are displaced from the corresponding posts 29A, the posts 29A are adjusted so that the respective positioning posts 28A, 28B are at the proper positions as shown in FIG. I do. Thereafter, the L-shaped angles 30 attached to the left front and the right rear of the frame 26 are shifted to adjust to the posts 29A of the template 29. This makes it possible to easily position the test head 2 and the insert ring 1A.

Next, a case where the performance board of the test head 2 is replaced or a case where the maintenance of the apparatus body 1 or the test head 2 is performed will be described. First, a case where the performance board is replaced after the inspection of the semiconductor wafer will be described. After the inspection of the semiconductor wafer, the motor 7A of the lifting drive mechanism 7 is driven under the control of the controller. As a result, the first gear 7B rotates, and the second gear 7C
, The ball screw 7D rotates, and the support 10 ascends integrally with the turning drive mechanism 8 via the nut member 7E.
The arm 3 is connected to the turning drive mechanism 8 via a hinge arm 12.
And the test head 2 are connected, the test head 2 moves up. When the test head 2 is at a predetermined distance, for example, 30
When the motor 7A rises by 0 mm, the motor 7A stops and the lock claw 11A of the elevating lock mechanism 11 pops out, and the first gear 7
And locks the elevation drive mechanism 7. As a result, the test head 2 stops at a position elevated by 300 mm from the apparatus main body 1 and is held horizontally at that position. If there is a gap of 300 mm between the test head 2 and the apparatus main body 1, the performance board can be replaced in this state. In the case of a conventional apparatus, the test head 2 is inverted, so much time is required. However, in this embodiment, since the performance board can be replaced only by raising the test head 2 by 300 mm, the replacement work is shortened. can do.

When the probing card is replaced or the test head 2 is inspected, the test head 2 is raised upward, for example, by 120 mm from the apparatus main body 1.
From this state, the test head 2 is turned using the turning drive mechanism 8. In this case, the motor 8A of the turning drive mechanism 8
Drives. As a result, the small gear 8B rotates, and when the large gear 8C meshed with the small gear 8B rotates, the test head 2 turns counterclockwise as indicated by an arrow B in FIG. When the test head 2 turns to some extent, the roller 21A at the tip of the extended cylinder rod of the auxiliary mechanism 21 engages with the concave portion 12A of the hinge arm 12 and receives the load of the test head 2 as shown in FIG. Furthermore, the test head 2 is further turned by the turning drive mechanism 8 against the pushing-up force of the auxiliary mechanism 21, and is moved from the horizontal position by 120 degrees.
At the time of rotation, the motor 8A of the turning drive mechanism 8 is stopped, the turning lock mechanism 13 is driven, and the lock claw 13E is engaged with the large gear 8C to lock the turning drive mechanism 8. As a result, the test head 2 stops at the turning position and is held in that state. At this time, the test head 2 is
It is inclined as shown.

In the above-mentioned inclined state, the performance board side is inclined to face the apparatus main body 1 side, so that the working space is narrow and inspection work is difficult. Then, the motor attached to the hinge arm 12 is continuously driven, and the test head 2 is further rotated clockwise from the position shown in FIG. 3 by 60 °, so that the test head 2 becomes horizontal. At this time, the lock pin 15 is inserted into the hole of the base plate 3A of the arm 3 to hold the test head 2 horizontally. Thus, the inspection work can be performed from behind the test head 2 and the inspection work is facilitated. Also, when replacing the probing card, the
The head plate 1B can be easily opened, and the internal inspection of the apparatus main body 1 can be easily performed.

In this embodiment, since the test head 2 is swung backward from above the apparatus main body 1 as described above, the distance between the apparatus main body 1 and the tester 5 is reduced, and Can be shortened, and the length of the cable 6 connecting the test head 2 and the tester 5 can be shortened accordingly, so that the characteristics of the tester can be improved and the installation area of the apparatus can be reduced. it can.

When returning the test head 2 to the inspection position after various maintenances, the test head 2 is returned to the inspection position by an operation reverse to that described above. However,
Since the test head 2 has been getting heavier in recent years, when the test head 2 turns and becomes a horizontal position above the apparatus main body 1, the arm 2 slightly tilts due to the weight of the test head 2. Become. In the case of a conventional apparatus, when the test head 2 is returned to the inspection position by the lifting / lowering driving mechanism 7, the test head 2 is fixed to the arm 3 as described above. Alignment with the insert ring was difficult.
Further, since the test head 2 is lowered by the motor 7A, it is difficult to stop the test head 2 accurately at the original inspection position. However, in the present embodiment, since the tilt correction mechanism 24 is provided, the test head 2 is horizontally corrected by reaching the inspection position and the engagement protrusion 24B engaging with the engagement recess 24C of the engagement block 24D. The test head 2 can be easily positioned.

That is, when the test head 2 is lowered by the elevation drive mechanism 7, even if the arm 3 is slightly inclined to the lower right, the test head 2 is basically supported as shown in FIG. The arm 3 is supported by the shaft 3 by the shaft 23.
Is in a floating state, so that it is substantially horizontal regardless of the inclination of the arm 3. Also,
Even if the test head 2 is inclined to the left or right around the support shaft 23, the engagement block 24D
Then, the engagement protrusion 24B or the pressing member 24E of the swing member 24A and the inclination restricting mechanism 24F act to keep the test head 2 horizontal. In this state, when the test head 2 descends and reaches the inspection position, the engagement protrusion 24
4B is separated from the engagement recess 24C on the lower surface of the engagement block 24D from the state shown in FIG. 4B, and the test head 2 is installed on the apparatus main body 1. As a result, the test head 2
Can be easily adjusted to the original inspection position. Further, since the test head 2 is lowered by the motor 7A, the test head 2 does not stop accurately at the original inspection position, and when a large load is to be applied to the probing card, the engagement block 24D and the engagement protrusion 24B separate. This can prevent the test head 2 from being pushed into the apparatus main body 1 by the motor 7A.

When the test head 2 reaches the inspection position as described above, the air cylinder of the test head lock mechanism 25 is driven to instantaneously extend the cylinder rod as shown in FIG. 5, whereby the lock member 25A protrudes. To lock the test head 2 at the inspection position by engaging with the projection 27. Thereby, the inspection of the semiconductor wafer can be performed. When the test head 2 is raised after the inspection, the lock is automatically released upon receiving a Z-up signal from the controller, and the locked state of the test head 2 is released.

As described above, according to the present embodiment,
The test head 2 is moved by the lifting drive mechanism 7 through the arm 3.
In the case of a probe device for lowering the
Is rotatably supported by the arm 3 via the support shafts 23, 23, and between the test head 2 and the arm 3, the inclination of the test head 2 is horizontally corrected and the load from the test head 2 is received. Since the tilt correction mechanism 24 is provided, when the test head 2 and the probing card are electrically connected to each other, even if the test head 2 cannot be accurately stopped at the inspection position by the lifting / lowering drive mechanism 7, the test head 2 cannot be stopped. Reaches the inspection position, the tilt correcting mechanism 24 corrects the tilt of the test head 2 horizontally, and the test head 2 can be easily positioned in the first positioning post 28A of the insert ring 1A. Moreover, at this time, even if a force for pushing down the test head 2 is applied from the lifting drive mechanism 7, the load from the test head 2 is received by the inclination correction mechanism 24 so that no load is applied to the apparatus main body 1.

Further, according to the present embodiment, the test head 2 is lifted above the apparatus main body 1 by the lifting drive mechanism 7, and a gap required for replacing the performance board is formed between the test head 2 and the apparatus main body 1. Therefore, the test head 2 can be moved without turning the test head 2 over.
The work of replacing the performance board can be performed simply by lifting the work, and the work time can be shortened.

Further, according to the present embodiment, the test head 2 can be turned rearward of the apparatus main body 1 by the turning drive mechanism 8, so that the test head 2 is turned over as compared with the conventional apparatus in which the test head is turned to the tester side. The distance between the main body 1 and the tester 5 can be reduced, and the cable connecting the test head 2 and the tester 5 can be shortened.

Further, according to the present embodiment, since the turning lock mechanism 13 for locking the turning drive mechanism 8 and stopping the test head 2 at a desired turning position is provided, the test head 2 can be set in accordance with the work contents of the operator. It can be adjusted to a desired inclination angle, and work efficiency can be increased.

It should be noted that the present invention is not limited to the above-described embodiment, and is included in the present invention unless departing from the gist of the present invention.

[0044]

According to the first and second aspects of the present invention, when the test head side and the probing card side are electrically connected by the motor driving method, the test head side is connected to the probing card. It is possible to provide a probe device which can be easily positioned to the side and can reduce an excessive load applied to the device main body from the test head side.

[0045]

[0046]

[Brief description of the drawings]

FIG. 1 is a diagram showing an embodiment of a probe device of the present invention,
(A) is a perspective view thereof, and (b) is a side view showing a rotation angle limiting mechanism of a test head.

2A and 2B are diagrams showing a driving mechanism of a test head used in the probe device shown in FIG. 1, wherein FIG.
(B) is a block diagram showing a lock mechanism of the turning drive mechanism shown in (a).

FIG. 3 is an operation explanatory view of an auxiliary mechanism that assists a turning operation of a turning drive mechanism of the probe device shown in FIG. 1;

FIGS. 4A and 4B are views showing a tilt correction mechanism used in the probe device shown in FIG. 1, and FIG.
(B) is a cross-sectional view showing an engagement state between the engagement protrusion and the engagement recess, and (c) is a cross-sectional view showing the inclination limiting mechanism.

FIG. 5 is a configuration diagram showing a test head lock mechanism used in the probe device shown in FIG. 1;

FIG. 6 is a perspective view showing a use state of a template used for aligning a performance board and an insert ring of a test head.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Apparatus main body 2 Test head 3 Arm 3A Support hole 7 Elevation drive mechanism 8 Rotation drive mechanism 13 Rotation lock mechanism 23 Support shaft 24 Inclination correction mechanism 24B Engagement projection 24C Engagement recess 24D Engagement block 24F Inclination limit mechanism

Continuation of front page (56) References JP-A-7-147305 (JP, A) JP-A-6-102313 (JP, A) JP-A-8-264603 (JP, A) JP-A-8-148534 (JP) , A) JP-A-7-147306 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) H01L 21/66 G01R 1/06 G01R 31/26 G01R 31/28

Claims (2)

(57) [Claims] 1. A probing card fixed to an apparatus main body, a test head having a connection terminal corresponding to a connection terminal formed on a back surface of the probing card, and the test head supported from a side of the apparatus main body. An arm, and an elevating drive mechanism that moves the test head up and down above the apparatus main body via the arm. The test head is lowered by moving the test head down through the arm inclined by the weight of the test head. A probe device for electrically testing a device under test by electrically contacting the probe head with the probing card, wherein support shafts are provided on both front and rear surfaces of the test head, and each support shaft is fitted into a support hole of the arm. , The test head is pivotally supported with respect to the arm via each of the support shafts, and
A probe device for correcting a tilt of the test head horizontally when the test head is moved up and down, and a tilt correction mechanism for separating the test head and the probing card from the test head by making electrical contact. . 2. The tilt correction mechanism includes: a swing member rotatably supported by the support shaft; a pair of engagement protrusions provided on the upper surface of the swing member in a symmetrical manner; A pair of left and right engagement blocks each having an engagement concave portion with which the projection can be engaged and fixed to the test head side; and a pair of left and right pressing members provided on the arm so as to press these engagement blocks. 2. The probe device according to claim 1, further comprising an inclination limiting mechanism for limiting an inclination of the swing member swinging via the holding members.