JP4114125B2 - Semiconductor tester equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an improvement in a method for directly connecting a test head body of a semiconductor tester device to a handler body.
[0002]
[Prior art]
FIG. 10 is a diagram illustrating the configuration of a conventional example that is generally used.
In the figure, 1 is a test head body, 2 is a handler body, 3 is a handler base plate, and 4 is a performance board clamp ring.
[0003]
5 is a performance board, 6 is a handler docking plate, 7 is a DUT socket, 8 is a positioning pin, and 9 is a positioning hole provided in the handler docking plate and into which the positioning pin 8 is inserted.
The DUT includes IC, LSI, and the like.
The test head main body 1 is mounted on, for example, a carriage (lifter or the like) with a lifting mechanism (not shown).
[0004]
In the above configuration, the test head main body 1 and the handler main body 2 can be connected, for example, by moving and moving the carriage with the lifting mechanism on which the test head main body 1 is mounted while the positioning pins 8 are the handler base plate 3. In the positioning hole 9, a position that fits exactly is found, and the carriage is fixed.
[0005]
Next, the inclination of the test head main body 1 is adjusted so that the lower surface of the handler base plate 3 and the upper surface of the handler docking plate 6 are in contact with each other without a gap.
The tilt adjustment is a very important operation for the purpose of setting the surface of the DUT transported by the DUT socket 7 and the handler body 2.
[0006]
The test head main body 1 is tilted by adjusting the fixing levelers (four locations) (not shown) of the carriage in a well-balanced manner or by using a carriage (not shown) with a tilt adjusting mechanism. .
[0007]
[Problems to be solved by the invention]
However, in such a semiconductor tester device, the position adjustment for finding the fitting position of the positioning pin 8 and the inclination adjustment by the leveler are performed while moving the carriage on which the heavy test head body (for example, about 150 kgf) is mounted. It takes time and labor to adjust the driving.
Moreover, the cart with the tilt adjusting mechanism is expensive.
[0008]
SUMMARY OF THE INVENTION An object of the present invention is to provide a semiconductor tester device in which the installation adjustment of a test head main body with respect to a handler main body is easy and the positional accuracy can be improved.
[0009]
[Means for Solving the Problems]
In order to achieve such an object, according to the present invention, in the semiconductor tester device of claim 1,
In a semiconductor tester device for measuring the DUT by fitting a DUT supplied from a handler body to a DUT socket provided in a test head body,
A socket board provided with the DUT socket; a support means for supporting the socket board on the test head body with one end connected to the socket board and the other end connected to the test head body; and the support means. A horizontal floating means for floating the socket board horizontally from the test head main body, a first stud provided at the support means and fixed at one end to the socket board, and provided at the test head main body A second stud having one end connected to the performance board; a horizontal plate connecting the other end of the first stud and the other end of the second stud in a horizontal direction; and A sliding bushing on which the other end side of the first stud slides, and a disconnection provided on the other end of the first stud Eye color, wherein a spring provided between the socket board and said horizontal plate, and vertical floating means for floating in a vertical direction said socket board from the test head body, one end to the socket board The other end of the socket is connected to the test head main body, and the socket board is electrically connected to the test head main body.
[0010]
In the semiconductor tester device according to claim 2 of the present invention, in the semiconductor tester device according to claim 1,
As the horizontal floating means,
Connection diameter of the other end of said first stud of the other end or the second other end is provided on the mounting location of the first stud of the mounting location and the other end or said second stud of the stud of the horizontal plate The semiconductor tester device according to claim 1, further comprising an adjustment hole for adjusting a relative horizontal position with respect to the test head main body.
[0012]
In the semiconductor tester device according to claim 3 of the present invention, in the semiconductor tester device according to claim 1 or claim 2 ,
One end of the support means and one end of the connection cable are detachably attached to the socket board.
[0013]
In a semiconductor tester device according to a fourth aspect of the present invention, in the semiconductor tester device according to any one of the first to third aspects,
The socket board is attached to one end of the support means with a screw, and is connected to one end of the cable by a cable connector.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1 is an explanatory diagram of the main part of an embodiment of the present invention, FIG. 2 is a plan view of FIG. 1, FIG. 3 is a side view of FIG. XX sectional view of FIG. 4, FIGS. 6, 7, 8, and 9 are operation explanatory views of FIG.
In the figure, configurations with the same symbols as in FIG. 10 represent the same functions.
Only the differences from FIG. 10 will be described below.
[0015]
In the figure, the socket board 11 is provided with a socket board support block 111, positioning pins 8 and a DUT socket 7.
The support means 21 has one end connected to the socket board 11 and the other end connected to the test head body 1, and supports the socket board 11 to the test head body 1.
[0016]
In this case, four support means 21 are provided.
The socket board support block 111 functions as a reinforcement block for the socket board 11 and a support block for the screws 211.
[0017]
The horizontal floating means 31 is provided on the support means 21 and floats the socket board 11 in the horizontal direction (XY direction in the figure) from the test head body 1.
[0018]
In this case, as shown in FIGS. 4 and 5, the horizontal floating means 31 includes a first stud 311, a second stud 312, a horizontal plate 313, and an adjustment hole 314.
[0019]
One end of the first stud 311 is connected to the socket board 11.
One end of the second stud 312 is connected to the performance board 5 provided in the test head body 1.
[0020]
The horizontal plate 313 connects the other end of the first stud 311 and the other end of the second stud 312 in the horizontal direction.
[0021]
As shown in FIG. 5, the adjustment hole 314 is provided at the other end of the first stud 311 of the horizontal plate 313 or the other end attachment position of the second stud 312.
Then, the relative horizontal position with respect to the test head main body 1 is adjusted to be larger than the connection diameter of the other end of the first stud 311 or the other end of the second stud 312 at this attachment point.
[0022]
In this case, the adjustment hole 314 is provided at the other end attachment portion of the first stud 311 of the horizontal plate 313.
[0023]
The vertical floating means 41 is provided on the support means 21 and floats the socket board 11 in the vertical direction (Z direction in the figure) from the test head main body 1.
In this case, as the vertical floating means 41, a spring 411 that is provided on the stud on the side where the adjustment hole 314 is provided and adjusts the relative vertical position with respect to the test head body 1 is used.
[0024]
The other end of the first stud 311 is held by a sliding bushing 412 and a retaining collar 413 is attached to the other end.
[0025]
The connection cable 51 has one end connected to the socket board 11 and the other end connected to the test head main body 1 to electrically connect the socket board 11 and the test head main body 1.
[0026]
One end of the support means 21 and one end of the connection cable 51 are detachably attached to the socket board 11.
In this case, the socket board 11 is attached to one end of the support means 21 with a screw 211 and is connected to one end of the connection cable 51 by a cable connector 511.
[0027]
In the above configuration, as shown in FIG. 6, the first stud 311 is held by the sliding bushing 412 and moves in the vertical direction in the figure by the force of the coil spring 411 (Z direction in the figure).
[0028]
As shown in FIG. 5, there is a gap α between the first stud 311 and the adjustment hole 314, and the first stud 311 freely moves in the XY plane direction in the figure within the gap.
[0029]
Also, θ rotation can be performed within the XY plane movable range.
The socket board support block 111 functions as a reinforcement block for the socket board 11 and a support block for the screws 211.
Depending on the degree of freedom of the floating mechanism, the handler docking plate 6 can finally move in the XYθZ directions.
[0030]
7 is a state before handler docking, and FIG. 8 is a state diagram of completion of handler docking.
When the carriage with lifting mechanism is moved, the test head body 1 is moved, and the tip of the taper-shaped positioning pin 8 is within the positioning hole 9 of the handler base plate 3, the test head body 1 is lifted by the carriage. The handler docking plate 6 moves while learning with the positioning pins 8 and the docking is completed.
[0031]
Further, when the handler docking plate 6 is pressed against the handler base plate 3 due to the degree of freedom in the Z direction in the figure, the gap (tilt) between the plates 3 and 6 becomes zero.
As described above, the position and inclination of the test head body 1 can be adjusted very easily.
[0032]
FIG. 9 shows a method of removing the socket board 11.
The floating mechanism portion and the socket board 11 can be easily separated by removing the four locations of the screws 211 and the cable connector 511.
[0033]
As a result,
(1) The socket board 11 provided with the DUT socket 7, the vertical floating means 41, the horizontal floating means 31, and the connection cable 51 are provided in the test head body.
[0034]
Accordingly, the socket board 11 provided with the DUT socket 7 has a degree of freedom in the relative vertical direction, the relative horizontal direction, and the relative inclination with respect to the test head body 1. Thus, a semiconductor tester device that can easily absorb the error at the time of surface exposure, can easily adjust the installation of the test head main body 1 with respect to the handler main body 1, and can improve the position accuracy can be obtained.
[0035]
(2) Since the adjustment hole 314 for adjusting the relative horizontal position is provided, the mechanism is simplified and an inexpensive semiconductor tester device can be obtained.
[0036]
(3) Since the horizontal floating means 31 is fixedly attached to the socket board 11 and the performance board 5 and slides on the horizontal board 313, the socket board 11 and the performance board 5 are rubbed. Therefore, there is no fear that the socket board 11 and the performance board 5 are damaged, and a semiconductor tester device with improved reliability can be obtained.
[0037]
(4) Since the spring 411 is used as the vertical floating means 41, an inexpensive semiconductor tester device can be obtained.
[0038]
(5) By adopting a structure in which the socket board 11 provided with the DUT socket 7 can be easily removed, a semiconductor tester device in which the DUT socket 7 can be easily maintained and replaced can be obtained.
[0039]
(6) Since the socket board 11 can be easily removed with the screw 311 and the cable connector 511, a semiconductor tester device in which maintenance and product replacement of the DUT socket 7 can be easily performed is obtained.
[0040]
In the above-described embodiment, the positioning of the handler main body 2 and the socket board 11 has been described for the case where the positioning pin 8 and the positioning hole 9 are used. However, the present invention is not limited to this. For example, a plate having a tapered tip may be used. In short, it is only necessary that the handler body 2 and the socket board 11 can be aligned.
[0041]
Further, the above description merely shows a specific preferred embodiment for the purpose of explanation and illustration of the present invention.
Therefore, the present invention is not limited to the above-described embodiments, and includes many changes and modifications without departing from the essence thereof.
[0042]
【The invention's effect】
As described above, according to claim 1 of the present invention, there are the following effects.
A socket board provided with a DUT socket, a vertical floating means, a horizontal floating means, and a connection cable were provided in the test head body.
[0043]
Therefore, since the degree of freedom in the relative vertical direction, relative horizontal direction and relative inclination with respect to the test head body is obtained in the socket board provided with the DUT socket, the error of the positioning of the test head body with respect to the handler body and the surface-out error Can be absorbed easily, installation adjustment of the test head main body with respect to the handler main body is easy, and a semiconductor tester device that can improve the positional accuracy is obtained.
[0044]
According to claim 2 of the present invention, there are the following effects.
Since the adjustment hole for adjusting the relative horizontal position is provided, the mechanism is simplified and an inexpensive semiconductor tester device can be obtained.
[0045]
As for the horizontal floating means, the part to be attached to the socket board and the performance board is fixed, and the horizontal board part is slid. Therefore, the socket board and the performance board are not rubbed. A semiconductor tester device with improved reliability without risk of damage can be obtained.
[0047]
According to claim 3 of the present invention, there are the following effects.
By adopting a structure in which the socket board provided with the DUT socket can be easily removed, a semiconductor tester device in which maintenance and product replacement of the DUT socket can be easily performed can be obtained.
[0048]
According to claim 4 of the present invention, there are the following effects.
Since the socket board can be easily removed with screws and sockets, a semiconductor tester device that allows easy maintenance and product replacement of the DUT socket can be obtained.
[0049]
Therefore, according to the present invention, it is possible to realize a semiconductor tester device in which the installation adjustment of the test head body with respect to the handler body is easy and the positional accuracy can be improved.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram of a main part configuration of an embodiment of the present invention.
2 is a plan view of FIG. 1. FIG.
FIG. 3 is a side view of FIG. 1;
FIG. 4 is a detailed explanatory diagram of a main part of FIG. 1;
5 is a cross-sectional view taken along the line XX of FIG.
6 is an operation explanatory diagram of FIG. 1. FIG.
7 is an operation explanatory diagram of FIG. 1; FIG.
8 is an operation explanatory diagram of FIG. 1. FIG.
FIG. 9 is an operation explanatory diagram of FIG. 1;
FIG. 10 is an explanatory diagram of a main part configuration of a conventional example generally used conventionally.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Test head body 2 Handler body 3 Handler base plate 4 Performance board clamp ring 5 Performance board 6 Handler docking plate 7 DUT socket 8 Positioning pin 9 Positioning hole 11 Socket board 111 Socket board support block 21 Support means 211 Screw 31 Horizontal direction floating means 311 First Stud 312 Second Stud 313 Horizontal Plate 314 Adjusting Hole 41 Vertical Floating Means 411 Spring 412 Sliding Bushing 413 Locking Collar 51 Connection Cable 511 Cable Connector α Clearance

Claims (4)

In a semiconductor tester device for measuring the DUT by fitting a DUT supplied from a handler body to a DUT socket provided in a test head body,
A socket board provided with the DUT socket;
One end is connected to the socket board and the other end is connected to the test head main body, and the socket board is supported by the test head main body.
A horizontal floating means provided on the support means for floating the socket board in a horizontal direction from the test head body;
A first stud provided at the support means and having one end fixed to the socket board; a second stud having one end connected to a performance board provided at the test head body; and the first stud A horizontal plate connecting the other end and the other end of the second stud in the horizontal direction, a sliding bushing provided on the horizontal plate and sliding on the other end side of the first stud, and the first stud A vertical floating means for floating the socket board in a vertical direction from the test head main body , having a retaining collar provided at the other end of the socket and a spring provided between the socket board and the horizontal plate When,
A semiconductor tester device comprising: a connection cable for connecting one end to the socket board and the other end to the test head body, and electrically connecting the socket board and the test head body. As the horizontal floating means,
Connection diameter of the other end of said first stud of the other end or the second other end is provided on the mounting location of the first stud of the mounting location and the other end or said second stud of the stud of the horizontal plate The semiconductor tester device according to claim 1, further comprising an adjustment hole for adjusting a relative horizontal position with respect to the test head main body.   One end of the support means and one end of the connection cable are detachably attached to the socket board.
  The semiconductor tester device according to claim 1 or 2, wherein The socket board is attached to one end of the support means with a screw and connected to one end of the cable by a cable connector.
  The semiconductor tester device according to claim 1, wherein:

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