JPH1050600A5 - - Google Patents

Info

Publication number
JPH1050600A5
JPH1050600A5 JP1996221752A JP22175296A JPH1050600A5 JP H1050600 A5 JPH1050600 A5 JP H1050600A5 JP 1996221752 A JP1996221752 A JP 1996221752A JP 22175296 A JP22175296 A JP 22175296A JP H1050600 A5 JPH1050600 A5 JP H1050600A5
Authority
JP
Japan
Prior art keywords
baseline amount
pattern formed
image
exposed
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996221752A
Other languages
English (en)
Japanese (ja)
Other versions
JP3651630B2 (ja
JPH1050600A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP22175296A priority Critical patent/JP3651630B2/ja
Priority claimed from JP22175296A external-priority patent/JP3651630B2/ja
Priority to US08/905,330 priority patent/US6243158B1/en
Publication of JPH1050600A publication Critical patent/JPH1050600A/ja
Publication of JPH1050600A5 publication Critical patent/JPH1050600A5/ja
Application granted granted Critical
Publication of JP3651630B2 publication Critical patent/JP3651630B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP22175296A 1996-08-05 1996-08-05 投影露光方法及び投影露光装置 Expired - Fee Related JP3651630B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP22175296A JP3651630B2 (ja) 1996-08-05 1996-08-05 投影露光方法及び投影露光装置
US08/905,330 US6243158B1 (en) 1996-08-05 1997-08-04 Projection exposure apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22175296A JP3651630B2 (ja) 1996-08-05 1996-08-05 投影露光方法及び投影露光装置

Publications (3)

Publication Number Publication Date
JPH1050600A JPH1050600A (ja) 1998-02-20
JPH1050600A5 true JPH1050600A5 (enExample) 2004-08-26
JP3651630B2 JP3651630B2 (ja) 2005-05-25

Family

ID=16771662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22175296A Expired - Fee Related JP3651630B2 (ja) 1996-08-05 1996-08-05 投影露光方法及び投影露光装置

Country Status (2)

Country Link
US (1) US6243158B1 (enExample)
JP (1) JP3651630B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7050957B2 (en) * 2001-02-26 2006-05-23 Agere Systems Inc. Projection electron beam lithography apparatus and method employing an estimator
EP1398601A3 (en) * 2002-09-13 2014-05-07 Canon Kabushiki Kaisha Head up display for navigation purposes in a vehicle
TWI649790B (zh) 2004-11-18 2019-02-01 日商尼康股份有限公司 位置測量方法、位置控制方法、測量方法、裝載方法、曝光方法及曝光裝置、及元件製造方法
JP4756984B2 (ja) * 2005-10-07 2011-08-24 キヤノン株式会社 露光装置、露光装置の制御方法およびデバイスの製造方法
NL2007215A (en) * 2010-09-08 2012-03-12 Asml Netherlands Bv Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate.
CN107003618B (zh) * 2014-12-02 2019-03-15 Asml荷兰有限公司 光刻方法和设备
KR20230109740A (ko) * 2020-11-24 2023-07-20 어플라이드 머티어리얼스, 인코포레이티드 광학 디바이스들에 대한 광학 해상도 측정 방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5243195A (en) 1991-04-25 1993-09-07 Nikon Corporation Projection exposure apparatus having an off-axis alignment system and method of alignment therefor
US5654553A (en) * 1993-06-10 1997-08-05 Nikon Corporation Projection exposure apparatus having an alignment sensor for aligning a mask image with a substrate
JPH07249558A (ja) * 1994-03-09 1995-09-26 Nikon Corp 位置合わせ方法
JP3315540B2 (ja) * 1994-10-28 2002-08-19 キヤノン株式会社 位置計測装置、位置合わせ装置、露光装置およびデバイスの製造方法
US5751404A (en) * 1995-07-24 1998-05-12 Canon Kabushiki Kaisha Exposure apparatus and method wherein alignment is carried out by comparing marks which are incident on both reticle stage and wafer stage reference plates
JPH0963924A (ja) * 1995-08-18 1997-03-07 Nikon Corp アライメント方法

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