JPH1044143A - Workpiece mounting jig, device and method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To contrive to simplify the fixing work of a workpiece to a work plate by a method wherein the workpiece is bonded to the under surface of an abutting plate and the abutting plate is mounted to the work plate by means of a clamping means provided on the work plate. SOLUTION: A workpiece 40, at a predetermined position of which an abutting plate 68 is bonded, is placed on a supporting block so as to correct the longitudinal direction of the workpiece 40. The fixation is performed by clamping the abutting plate 68 with clamping claws 60 by raising the clamping claws 60 through the pivoting of clamping bolts 58 with an electric driver. Due to the construction as mentioned above, the assembly of the abutting plate 68 and the workpiece 40 is brought into a strongly fixed state to a work plate 52 by means of the clamping claws 60. The work plate 52, the abutting plate 68 and the workpiece 40, all of which are made into an integral body, is moved to the cutting position of a wire saw device for cutting.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to a work, for example,
The present invention relates to a work mounting jig, an apparatus, and a method used in a wire saw apparatus for cutting a semiconductor single crystal ingot such as a silicon single crystal ingot, and a method for simultaneously cutting a plurality of works.

[0002]

2. Related Art A wire saw device is known as a means for cutting a brittle material such as a compound semiconductor single crystal or a silicon semiconductor single crystal. In this wire saw device, as shown in FIG. 5, three (or four) resin rollers 10A, 10 called main rollers having the same configuration.
0B and 10C are arranged with their axes parallel to each other.

A wire 12 is wound around ring-shaped grooves 14a, 14b, 14c formed at a constant pitch on the surfaces of the rollers 10A to 10C. The rotation from the drive roller 10C connected to the drive motor 16 is transmitted to the driven rollers 10A and 10B via the wire 12.

The starting end of the wire 12 is connected to a tension adjusting mechanism 2.
0 is wound around the wire winding drum 22. Similarly, the terminal side of the wire 12 is connected to the tension adjusting mechanism 3.
0 is wound around the wire winding drum 32. 24 and 34 are torque motors.

The workpiece 40 is, for example, a semiconductor ingot. For example, as shown in FIGS. 6 and 7, an orientation flat surface (hereinafter, referred to as an orientation flat surface) is adhered to a lower surface of the backing plate 41 by an adhesive C. The upper surface of the plate 41 is bonded to the lower surface of the work plate 42 with an adhesive C. The conventional backing plate 41 is formed of a glass material or a carbon material in consideration of dimensional stability and the like.

With such a configuration, the driving roller 10C
Is rotated, the wire 12 travels in the line direction,
At the same time, a working liquid containing abrasive grains is applied to the wire 12. In this state, when the workpiece 40 is lowered and brought into contact with the wire 12, the workpiece 40 is wrapped.
Are cut, and a large number of wafers are cut and formed simultaneously.

Work 4 in conventional wire saw device
The method of fixing the “0” to the work plate 42 is such that the worker completely fixes the work plate 42 with an adhesive via the backing plate 41. Needless to say, fixing with such an adhesive requires a long time, it is impossible to mechanize or automate, and once bonded, the angle of attachment of the work to the work plate is reduced. There was an inconvenience that fine adjustment could not be performed.

Since it is impossible to finely adjust the work mounting angle, it has been difficult to implement a mode in which a plurality of works 40 are arranged in a straight line and cut simultaneously by a wire saw device. This is because in this case, it is necessary to finely adjust the orientations of the plurality of works 40 separately, but it is impossible to perform the fine adjustment.

The orientation of the work has been corrected after the work has been mounted on the wire saw device.
It was time-consuming and required a great deal of labor, including the inability to automate.

[0010]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and realizes simplification of work for fixing a work to a work plate to reduce labor and work time. And a work mounting jig, device and method, and a plurality of workpiece mounting jigs capable of performing fine adjustment of a work mounting angle and realizing mechanization, automation and improvement of production efficiency of a fixing work. An object of the present invention is to provide a method for simultaneously cutting a workpiece.

[0011]

In order to solve the above problems, a work mounting jig of the present invention is a work mounting jig used in a wire saw device for cutting a work fixed to a work plate via a backing plate. The work is bonded to the lower surface of the plate, and the work is fixed to the work plate by attaching the plate to the work plate by a clamp means provided on the work plate. Features.

If the clamp means is constituted by a pair of clamp claws opposed to each other and the clamp means is arranged in a plurality of pairs on the work plate, the holding plate is firmly gripped by the clamp means.

It is preferable that the backing plate is composed of a rectangular plate-shaped wide locking portion and a narrow joining portion provided at the center of the lower surface of the wide locking portion. In addition, it is preferable to use a plastic material as the material of the corresponding plate because molding is easy.

The clamp claw has an L-shaped side surface, and comprises a main body standing upright in the vertical direction and a fastening portion projecting laterally from a lower end of the main body. A threaded screw hole is drilled, while a through hole is formed at both ends in the width direction of the work plate, and a tightening bolt having a male screw formed on the outer peripheral surface is formed in the through hole. Is rotatably inserted while projecting downward from the lower surface of the work plate, and a tip end of a tightening bolt is screwably screwed into the screw hole, and the clamp is rotated by rotating the tightening bolt. If the pawl is moved up and down to tighten and release the wide locking portion of the backing plate, an electric screwdriver or the like is inserted into the through hole from above the work plate to rotate the tightening bolt. By doing so, simply tighten and release the plate as appropriate There is an advantage that it can be.

A first clearance portion is formed between the wide locking portion of the backing plate and the main portion of the clamp claw, and a second clearance is formed between the narrow joint portion of the plate and the clamping portion of the clamp claw. The formation of the clearance portion has the advantage that the contact plate and the work can be twisted by a desired angle with respect to the work plate, so that the azimuth of the work in the longitudinal direction can be easily corrected.

A work mounting apparatus according to the present invention is a work mounting apparatus used for a wire saw apparatus for cutting a work fixed to a work plate via a backing plate, and a work support table for supporting the work so that its orientation can be corrected. A work plate hanger arranged side by side on the work support table and movable in a direction parallel to the longitudinal direction of the work, wherein the work plate provided with the work mounting jig is used as an arm member of the work plate hanger. A work, which is detachably attached to the tip and has a backing plate adhered in the upper surface longitudinal direction, is placed on the work support table, the work plate hanger is moved to the work placement position, and a clamp provided on the work plate is provided. Means for securing the workpiece to the work plate by attaching a corresponding plate to the work plate by means Characterized in that was.

By using the above-mentioned work mounting device, a plurality of works can be linearly arranged and fixed on a work plate, and the works thus linearly arranged and fixed are simultaneously cut by a wire saw device. It is possible.

A first aspect of the work mounting method of the present invention is a work mounting method used in a wire saw apparatus for cutting a work fixed to a work plate via a backing plate, and determines a position at which the backing plate is to be attached. A circumferential positioning step for the work, a step of attaching a patch plate to a predetermined position of the work with an adhesive, a step of curing the adhesive, and a step of positioning the work in the axial direction,
Fixing the work, which has been positioned in the axial direction, to a work plate via the work mounting jig described above.

In the above-described method of mounting the work, if the step of re-confirming the position of the work fixed to the work plate in the axial direction is performed after the positioning in the axial direction, a mistake in the positioning of the work in the axial direction is caused. It has the advantage of being completely absent.

A second aspect of the method for mounting a work according to the present invention is a method for mounting a plurality of works used in a wire saw apparatus for cutting a work fixed to a work plate via a backing plate. A circumferential positioning step of a work for determining a bonding position, and a step of bonding a contact plate to a predetermined position of the work with an adhesive,
A first work mounting step, comprising a step of curing the adhesive, a step of positioning the work in the axial direction, and a step of fixing the work, which has been positioned in the axial direction, to a work plate via the work mounting jig described above. And a second and subsequent work mounting process comprising the same steps as the first work mounting process.

After the axial positioning is performed, a step of reconfirming the axial positioning positions of the works positioned at both ends in the longitudinal direction fixed to the work plate is performed. There is an advantage that there is no mistake in positioning the workpiece in the axial direction.

The re-confirmation of the axial positioning position of the work described above is performed by reversing a plurality of works arranged in a straight line by 180 ° using one X-ray azimuth measuring machine so that both ends in the longitudinal direction can be confirmed. This is performed by measuring the end faces of two located works.

If the number of workpieces in the above-described workpiece mounting method is two, there is an advantage that the axial positioning of both workpieces can be reliably performed.

Using the above-described work mounting method, a plurality of works arranged and fixed in a straight line can be cut simultaneously by a wire saw device.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of a work mounting jig according to the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a sectional view of a work mounting jig of the present invention, and FIG. 2 is a side view of the same.

In the figure, reference numeral 50 denotes a work mounting jig of the present invention, which is mounted on a work plate 52. Through holes 54 are formed at both ends in the width direction of the work plate 52. The through hole 54 has a support step 5 at its center.
5 having a small diameter hole 56 at the lower part and a large diameter hole 57 at the upper part.
It has been. A tightening bolt 58 having a male screw formed on the outer peripheral surface is rotatably inserted into the through hole 54 with its tip protruding downward from the lower surface of the work plate 52.

Reference numeral 60 denotes a side L-shaped clamp claw, which is composed of a main body 62 erected in the vertical direction and a fastening portion 64 projecting laterally from the lower end of the main body 62. Is provided with a screw hole 66 formed by cutting a female screw. The tip of the tightening bolt 58 is screwably screwed into the screw hole 66, and the clamp pawl 60 moves up and down by rotating the tightening bolt 58.

As shown in the figure, a pair of the clamp claws 60 are installed at both ends in the width direction of the work plate 52 so as to face each other.
This constitutes a clamping means. A plurality of such clamping means are provided in the longitudinal direction of the work plate 52, and perform a function of uniformly gripping the entire length of the contact plate 68 described later.

Reference numeral 68 denotes a backing plate having a rectangular plate-shaped wide locking portion 70 and a narrow joining portion 72 provided at the center of the lower surface of the wide locking portion 70. On the lower surface of the narrow joint portion 72, a radius is formed according to the outer peripheral shape of the work 40,
The work 40 can be adhered by the adhesive C.
The plate 68 has a shape peculiar to the present invention, and it is difficult to mold with a glass material or a carbon material which is a material of a conventional backing plate. It is preferable to use a plastic material which is easy to mold and is made of a synthetic resin having excellent heat resistance and mechanical stability such as polyacetal, polycarbonate and polyimide.

When the wide locking portion 70 of the plate 68 is inserted between the lower surface of the work plate 52 and the upper surface of the tightening portion 64 of the clamp claw 60, the above-mentioned tightening bolt 58 is tightened. 60 rises and the wide locking portion 7
Numeral 0 is fixed between the work plate 52 and the tightening portion 64 by tightening.

When the tightening bolt 58 is loosened, the clamp pawl 60 descends, and
The tightening of the wide locking portion 70 of FIG. 8 is released, and the plate 68 can be removed accordingly.

A first clearance portion 74 is provided between the wide locking portion 70 of the plate 68 and the main portion 62 of the clamp claw 60.
74 is formed and the corresponding narrow joint 72 of the plate 68 is formed.
The dimensions of each member are adjusted so that the second clearance portions 76, 76 are formed between the second clearance portions 76, 76 between the clamp portions 64 of the clamp claws 60.

The presence of these clearance portions 74, 76 allows the work plate 52 to be brought into contact with the backing plate 68.
In addition, there is an advantage that the work 40 can be twisted by a desired angle, and therefore, the azimuth of the work 40 in the longitudinal direction can be easily corrected. The width of the clearances 76 varies depending on the size of the work and the like, but a width of about 5 to 10 mm is sufficient.

As described above, when the orientation of the work 40 in the longitudinal direction can be easily corrected, a plurality of works 40 are arranged in a straight line in the longitudinal direction, which has been impossible with the conventional method. The device makes it possible to cut at once. This is because, according to the present invention, it is possible to finely adjust the directions of the plurality of works 40 arranged linearly separately.

As a method of attaching and fixing the above-mentioned structure in which the backing plate 68 is adhered to the work 40 to the work plate 52 by the clamp claws 60, an operator may manually carry out the work. It can also be done automatically using a mounting device.

An embodiment of a work mounting apparatus to which the above-described work mounting jig is applied will be described below with reference to the accompanying drawings. 3 is a front view of the work mounting device, and FIG. 4 is a side view of the work mounting device.

In FIGS. 3 and 4, reference numeral 80 denotes a work support table constituting the work mounting device A. The work support 80 has a base 82 installed on the floor F.
A support block 84 is provided on the base 82.

A V-shaped groove 86 is formed on the upper surface of the support block 84.
Are formed, and the work 40 is supported through the V-shaped groove 86. A pulse motor 88 is provided on the base 82, and the support block 84 and the work 40 can be turned or twisted in the horizontal direction by driving the pulse motor 88. A backing plate 68 is adhered to the work 40.

Reference numeral 90 denotes an inverted L-shaped work plate hanger for holding the work plate 52 in a suspended state, which is composed of an upright hanger body 92 and an arm member 94 extending laterally from the upper end of the hanger body 92. ing.

Reference numeral 96 denotes guide rails arranged on the floor F in parallel with the base 82. The work plate hanger 90 is slidably attached to the guide rail 96 via a guide groove 98 provided on the lower surface of the hanger body 92.

The mounting position of the base 82 and the guide rail 96 is such that the backing plate 70 can be inserted between the opposing clamp claws 60 provided on the lower surface of the work plate 52. . D is an electric screwdriver for tightening and releasing the clamp pawl 60 by rotating the tightening bolt 58.

The operation of the above configuration will be described.
The work 40 with the backing plate 68 adhered to a predetermined position is placed on a support block 84, and the pulse motor 88 is driven to correct the longitudinal direction of the work 40. The position correction can be performed at any time until the backing plate 68 is tightened and fixed by the clamp claws 60.

Then, with the clamp pawls 60 of the work plate 52 lowered and opened, the work plate hanger 90 is moved along the guide rails 96, and the corresponding clamp pawls 60 of the work plate 52 face the corresponding plate 68. It is in the state located between.

In this state, the tightening bolt 58 is rotated using the electric screwdriver D to raise the clamp claw 60, and the plate 68 is tightened and fixed by the clamp claw 60. In this way, the structure of the backing plate 68 and the work 40 is firmly fixed to the work plate 52 by the clamp claws 60. The work plate 52, the backing plate 68, and the work 40 integrated as described above are moved to the cutting position of the wire saw device, and the work of cutting the work 40 by the wire saw device can be performed as in the related art.

Further, a plurality of integrated structures of the work plate 52, the backing plate 68 and the work 40 are formed, arranged in a straight line, and the orientation of each work 40 is corrected if necessary. At the cutting position, the work of cutting the plurality of works 40 can be performed at once.

FIG. 8 is a schematic explanatory view showing the arrangement of each device for carrying out the method of the present invention. In FIG. 8, M is a work stocker that stores a work 40, for example, an ingot. N is an X-ray measurement and patch attaching device, A is the above-described work attaching device, and P is an X for positioning position reconfirmation.
The line measuring machine and Q are work take-out sections.

The X-ray measurement and patch attaching device N takes out the workpiece 40 from a work tray (not shown), performs azimuth measurement by X-rays, performs circumferential positioning, and sets the attaching position of the patch directly above. This is a device for attaching a backing plate so as to face it.

The work mounting device A is, as described above,
This is a device for taking out a work 40 with a backing plate attached from a work tray, positioning the work in the axial direction, and attaching a plurality of ingots to a work plate.

The X-ray measuring device P for reconfirming the positioning position is used for reconfirming whether or not the above-described positioning of the workpiece 40 in the axial direction has been correctly performed. This reconfirmation operation is unnecessary and can be omitted if the above-mentioned positioning is constantly and accurately performed. Since the azimuth measurement is performed by the end face of the work, when a plurality of works are arranged in a straight line, only two of the two ends need to be confirmed.

The work take-out section Q is provided with a work 40 on the tray.
And a lifter for loading the trolley on a dedicated trolley for transporting to a wire saw device.

V is an in / out conveyor for transferring the work between the work stocker M and the X-ray measuring and patching apparatus N, Y is a take-out conveyor for taking out the work from the work stocker M to the work mounting apparatus A, and Z is a tray storage conveyor that stores the tray from the work take-out section Q in the work stocker M.

Next, the steps of the method of the present invention will be described. FIG. 9 shows an example of the steps of the method of the present invention (when there are two workpieces).
It is a flowchart which shows.

In FIG. 9, the work 40 is received from the work stocker M (100), and the azimuth of the work is first measured in the X-ray measurement and patch attaching apparatus N (102). As a result, the work is positioned in the circumferential direction (104), and the attaching position of the backing plate 68 is directed directly upward.

The contact plate 68 is attached to the attaching position of the contact plate with the adhesive C (106). Next, the adhesive C is cured by being left for a predetermined time (108).

The work 40 to which the backing plate 68 is attached is
The work is temporarily returned to the work stocker M, and the work is then positioned in the work mounting device A in the axial direction (110). The work whose axial direction has been positioned is attached and fixed to the work plate 52 (11).
2).

Only one work 40 is provided on the work plate 52.
When the cutting is performed by the wire saw device by attaching to the X-ray device, it is confirmed by the next positioning position confirmation X-ray device P whether or not the axial positioning has been correctly performed (116). If the positioning is correct, it is transported to the wire saw device (118). However, if the positioning is incorrect, the axial positioning step (11
After returning to 0), the positioning is performed again, and this operation is repeated until accurate positioning is performed.

When two work pieces are mounted on the work plate (example of FIG. 9), when the first work piece is mounted, the second work piece is received (100), and the azimuth measurement is similarly performed (100). 102), circumferential positioning (1
04), adhesive plate pasting (106), adhesive curing (10
8) Steps of axial positioning (110) and work plate clamp (112) are performed.

Thereafter, the positioning positions of the first and second workpieces are reconfirmed (116). If both of the positioning positions are accurate, they are transported to the wire saw device (118). However, if the positioning positions are incorrect, the axial positioning is repeated until both positions are accurate.

In the example of FIG. 9, two workpieces are mounted on the work plate. However, it is needless to say that the number of workpieces may be one, or three or more. In the case of three or more works, the above-described positioning position reconfirmation step (116) is performed only on the two works located at both ends, and the reconfirmation of the positioning position of the inner work is performed. It will not be.

[0060]

As described above, according to the present invention, the work for fixing the work to the work plate can be simplified, the labor can be reduced, and the mounting angle of the work can be finely adjusted. In addition, there is a great effect that the mechanization and automation of the fixing work and the improvement of the production efficiency can be realized.

[Brief description of the drawings]

FIG. 1 is a front view of a work mounting jig of the present invention.

FIG. 2 is a side view of the same.

FIG. 3 is a front view of the work mounting device of the present invention.

FIG. 4 is a partially sectional side view of the same.

FIG. 5 is an overall perspective view of a conventional wire saw device.

FIG. 6 is a perspective view showing a conventional state of bonding a work and a work plate.

FIG. 7 is a side view of the same.

FIG. 8 is a schematic explanatory view showing an arrangement of each device for carrying out the method of the present invention.

FIG. 9 is a flowchart showing an example of steps of the method of the present invention.

[Explanation of symbols]

 10A, 10B, 10C Resin roller 12 Wire 14a, 14b, 14c Ring-shaped groove 16 Drive motor 20, 30 Tension adjustment mechanism 22, 32 Wire winding drum 24, 34 Torque motor 40 Work 41, 68 Patch plate 50 Work mounting jig 42,52 Work plate 54 Through hole 55 Support step 56 Small diameter hole 57 Large diameter hole 58 Tightening bolt 60 Clamp pawl 62 Main part 64 Tightening part 66 Screw hole 70 Wide locking part 72 Narrow joint part 74 First Clearance part 76 Second clearance part 80 Work support base 82 Base 84 Support block 86 V-shaped groove 88 Pulse motor 90 Work plate hanger 92 Hanger body 94 Arm member 96 Guide rail 98 Guide groove A Work mounting device C Adhesive D Electric driver F floor Z tray storage Conveyer Y unloading conveyor M workpiece stocker Q workpiece takeout portion P positioning position confirming X-ray device V and out conveyor N caul application device

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁶ Identification code Agency reference number FI Technical display location H01L 21/68 H01L 21/68 N

Claims (15)

[Claims] 1. A work mounting jig used in a wire saw device for cutting a work fixed to a work plate via a backing plate, wherein the work is attached to a lower surface of a plate and provided on the work plate. The work is fixed to the work plate by attaching a corresponding plate to the work plate by a clamp means. 2. The work mounting jig according to claim 1, wherein said clamp means comprises a pair of opposed clamp claws, and a plurality of said clamp means are provided on said work plate. 3. The device according to claim 1, wherein the backing plate comprises a wide locking portion in the shape of a rectangular plate, and a narrow joining portion provided at the center of the lower surface of the wide locking portion. The described work mounting jig. 4. The work mounting jig according to claim 3, wherein said backing plate is formed of FRP or a plastic material. 5. The clamp claw has an L-shaped side surface, and comprises a main body vertically erected and a fastening portion protruding laterally from a lower end of the main body. Is threaded with a female thread, while a through hole is drilled at both ends in the width direction of the work plate, and the through hole is provided with a tightening bolt having a male thread formed on the outer peripheral surface. The tip of the fastening bolt is rotatably inserted with the tip protruding downward from the lower surface of the work plate, and the tip of the fastening bolt is screwably screwed into the screw hole, and by rotating the fastening bolt, 5. The work mounting jig according to claim 3, wherein the clamp pawl moves up and down to tighten and release the wide locking portion of the backing plate. 6. A first clearance portion is formed between the wide locking portion of the backing plate and the main portion of the clamp claw, and between the narrow joint portion of the plate and the tightening portion of the clamp claw. The workpiece mounting jig according to claim 5, wherein a second clearance portion is formed. 7. A work mounting device used in a wire saw device for cutting a work fixed to a work plate via a backing plate, wherein the work support table supports the work so that its orientation can be corrected, and 7. A work plate hanger which is juxtaposed and is movable in a direction parallel to a longitudinal direction of the work.
The work plate provided with the work mounting jig according to the above item is detachably attached to the tip of the arm member of the work plate hanger, and the work having the contact plate adhered in the upper surface longitudinal direction is placed on the work support table. The work plate hanger is moved to the work mounting position, and the work is fixed to the work plate by attaching a corresponding plate to the work plate by a clamp means provided on the work plate. Work mounting device. 8. A plurality of works are linearly arranged and fixed on a work plate by using the work mounting device according to claim 7, and then the plurality of works are simultaneously cut by a wire saw device. A method for simultaneously cutting a plurality of works. 9. A work mounting method used in a wire saw apparatus for cutting a work fixed to a work plate via a backing plate, comprising: a step of positioning a work in a circumferential direction for determining a position to which a backing plate is to be attached; 7. A step of attaching a backing plate to a predetermined position of the work with an adhesive, a step of curing the adhesive, a step of positioning the work in an axial direction, and the work having been subjected to the axial positioning. Fixing the work to the work plate via the above described work mounting jig. 10. The method according to claim 9, further comprising the step of reconfirming the axial positioning position of the work fixed to the work plate after performing the axial positioning. 11. A method for mounting a plurality of works used in a wire saw apparatus for cutting a work fixed to a work plate via a backing plate, the work being performed in a circumferential direction of the work for determining an attaching position of the backing plate. Claims: a positioning step, a step of attaching a patch plate to a predetermined position of the work with an adhesive, a step of curing the adhesive, a step of positioning the work in an axial direction, and the work which has been subjected to the axial positioning. A first work mounting process comprising the steps of fixing the work to the work plate via the work mounting jig according to any one of 1 to 6; and a second or later work mounting process comprising the same processes as the first work mounting process. A work mounting method, characterized by having; 12. The method according to claim 11, further comprising the step of reconfirming the axial positioning positions of the works located at both ends in the longitudinal direction fixed to the work plate after performing the axial positioning. The described work mounting method. 13. The reconfirmation of the axial positioning position of a work is performed by inverting a plurality of works arranged in a straight line by 180 ° using one X-ray azimuth measuring machine.
13. The work mounting method according to claim 12, wherein the method is performed by measuring end faces of two works located at both ends in a longitudinal direction. 14. The method according to claim 11, wherein the number of the workpieces is two. 15. A simultaneous cutting method for workpieces, wherein a plurality of workpieces linearly arranged and fixed by the method according to claim 11 are simultaneously cut by a wire saw device.