JPH1038823A - Fluorescent x-ray spectrometer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily select resolution and sensitivity according to samples and attain precise analysis by selecting plural light reception side solar slits with their different opening angles and passing a light-dispersed secondary X-ray between a spectroscope and a detector. SOLUTION: A diverging side selection means 7 selects by advancing and retracting orthogonally to a light path a diverging side solar slit 6 (6A to 6C) with its different opening angle, passes a fluorescent X-ray 4 from a sample 3, light is dispersed by a spectroscope 5, and a fluorescent X-ray 8 is irradiated. Reception side selection means 13 advances and retracts orthogonally to the light path a reception side solar slit 12 (12A to 12C) with its different opening angle and selects it, passes the fluoroescent X-ray 8, and makes it incident to a detector 9. Thus, an adequate reception side solar slit 12 (12A to 12C) can be easily selected on the reception side as well as diverging side, making it possible to easily select an adequate resolution or sensitivity according to the sample 3 in a wide range that cannot be obtained by selection of only diverging side solar slit 6 (6A to 6C).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray analysis for irradiating a sample with primary X-rays and detecting secondary X-rays generated from the sample. The present invention relates to a fluorescent X-ray analyzer that can be selected.

[0002]

2. Description of the Related Art As a conventional X-ray fluorescence analyzer, as shown in FIG. 3, an X-ray source 1 for generating a primary X-ray 2 and a first X-ray source 1 are shown.
Fluorescent X-rays (2
A spectroscope 5 for dispersing the next X-ray) 4, a plurality of divergent solar slits 6 (6A, 6B, 6C) having different opening angles,
Divergence-side selecting means 7 for selecting a divergence-side solar slit 6 that allows the fluorescent X-rays 4 generated from the sample 3 to pass between the sample 3 and the spectroscope 5, and the fluorescent X-rays 8 separated by the spectroscope 5 are incident. Detector 9 and the fluorescent X-rays 8 separated by the spectroscope 5
And a light-receiving-side solar slit 10 through which light passes between the spectroscope 5 and the detector 9 (Japanese Patent Publication No. 2-504).
No. 20).

[0003] The resolution and sensitivity of the optical system of such an apparatus are in a so-called trade-off relationship, and are determined by the opening angles of the diverging solar slit 6 and the light receiving solar slit 10. The solar slits 6 and 10 are provided with a number of foils (flat plates) 6Aa, 6Ba, 6Ca and 10a perpendicular to the plane of FIG. 6Aa, 6Ba, 6Ca, 10a in the longitudinal direction (directions 4, 8 in FIG. 3) to obtain X-rays. The opening angles of the lines 4 and 8 are determined by the foils 6Aa and 6B constituting the solar slits 6 and 10.
a, 6Ca and 10a are determined by the intervals and lengths.

In view of the fact that the diverging solar slit 6 closer to the sample 3 is more effective in obtaining parallel light, the light receiving solar slit 10 is fixed to a standard single slit. In the diverging-side solar slit 6, when performing precise analysis of a sample containing a component that generates fluorescent X-rays 4 having wavelengths close to each other while avoiding overlapping of disturbing lines, a diverging-side standard having a standard foil interval is used. In place of the solar slit 6B, the diverging-side high-resolution solar slit 6C having a narrower foil interval is selected and used by the diverging-side selecting means 7, and a fluorescent X-ray having a weak intensity is used for a sample having a small content of the component to be analyzed. In the case of analyzing 4, the diverging-side high-sensitivity solar slit 6A with a wider foil interval is selected by the diverging-side selecting means 7 and used. Thereby, appropriate resolution and sensitivity can be selected within a certain range according to the sample.

[0005]

However, for example, when a higher resolution analysis is required, even if the diverging solar slit 6 is made to have a smaller foil interval, the sensitivity (detector However, there is a limit that the resolution is hardly improved, since the intensity of the fluorescent X-rays incident on the sample 9 is only reduced. This is presumably because the ratio of the end face of the foil to the incident surface of the solar slit 6 increases, and the actual opening area decreases. Therefore,
No more accurate analysis is possible.

The present invention has been made in view of the above-mentioned conventional problems. In an X-ray analysis for irradiating a sample with primary X-rays and detecting secondary X-rays generated from the sample, the present invention
It is an object of the present invention to provide a fluorescent X-ray analyzer capable of easily selecting a wide range of resolution and sensitivity.

[0007]

In order to achieve the above object, an X-ray fluorescence spectrometer according to claim 1 includes a plurality of solar slits having different opening angles not only on the diverging side but also on the light receiving side. And a light receiving side selecting means for selecting a light receiving side solar slit through which secondary X-rays separated by the spectroscope pass between the spectrometer and the detector.

According to the first aspect of the present invention, an appropriate one can be easily selected from a plurality of solar slits having different opening angles not only on the diverging side but also on the light receiving side. With an appropriate combination of the solar slits on the light receiving side, it is possible to easily select an appropriate resolution and sensitivity according to the sample in a wide range that cannot be obtained by selecting only the solar slits on the diverging side. Therefore, more accurate analysis can be performed.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an X-ray fluorescence analyzer according to an embodiment of the present invention will be described with reference to the drawings. First, the configuration of the X-ray fluorescence analyzer will be described. As shown in FIG. 1, the present apparatus comprises a sample stage 11 on which a sample 3 is fixed.
An X-ray source 1 for irradiating the sample 3 with primary X-rays 2;
Spectroscope 5 for dispersing fluorescent X-rays (secondary X-rays) 4 generated from the light, and a plurality of divergent solar slits 6 having different opening angles
(6A, 6B, 6C), divergence-side selection means 7 for selecting divergence-side solar slit 6 for passing fluorescent X-rays 4 generated from sample 3 between sample 3 and spectroscope 5, and spectroscope 5. A detector 9 into which the separated fluorescent X-rays 8 are incident. Further, the present apparatus includes a plurality of light receiving side solar slits 12 (12A, 12B, 12C) having different opening angles,
The fluorescent X-rays 8 separated by the spectroscope 5 are converted into the spectroscope 5 and the detector 9.
And a light-receiving-side selecting means 13 for selecting the light-receiving-side solar slit 12 to be passed between the two.

Here, the light-receiving-side standard solar slit 12B with a standard foil interval, the light-receiving-side high-resolution solar slit 12C with a smaller foil interval, and the light-receiving-side high-sensitivity solar slit 12A with a wider foil interval are X The length of the passage in which the line 8 passes is the same, and the line 8 is vertically connected to the passage. The light-receiving-side selection means 13 moves the connected light-receiving-side solar slits 12 perpendicularly to the optical path of the fluorescent X-rays 8 separated by the spectroscope 5 to move any of the light-receiving-side solar slits 12A, 12B, and 12C. To choose.
The diverging-side solar slits 6A, 6B, 6C and the diverging-side selecting means 7 have the same configuration.

Next, the operation of the present apparatus will be described by taking as an example a case where vanadium and titanium in the sample 3 are analyzed. Now, it is assumed that the diverging-side standard solar slit 6B is selected by the diverging-side selecting means 7 and the light-receiving-side standard solar slit 12B is selected by the light-receiving-side selecting means 13.
A measurement result of the wavelength and the intensity of the fluorescent X-rays incident on the detector 9 in this case is shown by a curve BB in FIG. Since the V-Kα line of vanadium and the Ti-Kβ1 line of titanium are close in wavelength, the result is that the valley between the two peaks is shallow and the decomposition is not sufficient. Therefore, when the diverging-side high-resolution solar slit 6C is selected by the diverging-side selecting means 7, although the sensitivity (measurement intensity) is reduced, the resolution is improved, and the measurement result shown by the curve CB in FIG. 2 is obtained. Up to this point, it can also be achieved by a conventional device in which the light receiving side is fixed to the standard solar slit 10 (FIG. 3). However, the valley between both peaks is still shallow, and the decomposition is not sufficient. Further, in the case of the conventional apparatus, even if the diverging-side solar slit 6 is further narrowed, the sensitivity is reduced and the resolution is hardly improved.

Here, according to the present apparatus, the light receiving side high resolution solar slit 12C can be selected by the light receiving side selecting means 13. Then, although the sensitivity is reduced, the resolution is further improved, and a measurement result as shown by a curve CC in FIG. 2 is obtained. In this result, while the required measurement intensity is maintained, the valley between both peaks is deep and the decomposition is sufficient. Further, according to the present apparatus, when analyzing the fluorescent X-rays 4 having a weak intensity with respect to the sample 3 having a small content of the component to be analyzed, the sensitivity is regarded as important, for example, ,
Divergence side high sensitivity solar slit 6 by divergence side selection means 7
By selecting A and selecting the light-receiving-side high-sensitivity solar slit 12A by the light-receiving-side selecting means 13, a sufficient measurement intensity can be obtained while maintaining the required wavelength resolution.

That is, according to the present apparatus, on the light-receiving side as well as the diverging side, an appropriate one can be easily selected from a plurality of solar slits 12A, 12B, 12C having different opening angles. Side solar slit 6
A, 6B, 6C and light-receiving-side solar slits 12A, 12
By an appropriate combination of B and 12C, an appropriate resolution and sensitivity can be easily selected according to the sample 3 in a wide range that cannot be obtained by selecting only the diverging solar slits 6A, 6B and 6C. Therefore, more accurate analysis can be performed. In the present embodiment, the number of solar slits that can be selected on the diverging side and the light receiving side is 3 respectively.
However, the number is not limited to three and may be any number.

Further, according to the present apparatus, the light-receiving-side selecting means 1 is also used for the fluorescent X-rays and the scattered X-rays generated from the spectroscope 5.
By selecting the high-resolution solar slit 12C on the light-receiving side by 3, it is possible to reduce the incidence of such fluorescent X-rays and scattered X-rays on the detector 9 while maintaining the required measurement intensity of the analysis line 8. it can. That is, it is possible to make a selection that emphasizes the reduction of the background caused by the spectroscope 5, which cannot be handled by the conventional apparatus.

[0015]

As described above, according to the apparatus of the present invention, an appropriate one can be easily selected from a plurality of solar slits having different opening angles not only on the diverging side but also on the light receiving side. Therefore, with an appropriate combination of the diverging-side solar slit and the receiving-side solar slit, an appropriate resolution and sensitivity can be easily selected according to the sample in a wide range that cannot be obtained by selecting only the diverging-side solar slit. Therefore, more accurate analysis can be performed.

[Brief description of the drawings]

FIG. 1 is a front view showing an X-ray fluorescence analyzer according to an embodiment of the present invention.

FIG. 2 is a diagram showing a measurement result by the device.

FIG. 3 is a front view showing a conventional device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... X-ray source, 2 ... primary X-ray, 3 ... sample, 4 ... secondary X-ray generated from sample, 5 ... spectroscope, 6A, 6B, 6C ... divergence side solar slit, 7 ... divergence side selection means , 8 ... Secondary X-rays separated by a spectroscope, 9 ... Detectors, 12A, 12B, 1
2C: light receiving side solar slit; 13: light receiving side selecting means.

Claims (1)

[Claims] An X-ray source for generating primary X-rays, a spectroscope for dispersing secondary X-rays generated from a sample irradiated with the primary X-rays, and a plurality of divergent sides having different opening angles A solar slit; diverging-side selecting means for selecting a diverging solar slit that allows secondary X-rays generated from the sample to pass between the sample and the spectroscope; and secondary X-rays split by the spectroscope. An X-ray analyzer comprising: a plurality of light-receiving solar slits having different opening angles; and a secondary X-ray split by the spectroscope. An X-ray analysis apparatus comprising: a light-receiving-side solar slit for selecting a light-receiving-side solar slit to be passed between the light-receiving side slits.