JPH10340969A - Bga semiconductor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To form a large solder ball by making less the restriction on wiring arranged in a carrier tape. SOLUTION: A tape 5 for pad extension is stuck, via a carrier tape 4 on a surface where an electrode 2 of a semiconductor chip 1 is formed. In the carrier tape 4, the following are formed: an inner lead 10 to be connected with the electrode 2, a pad 12 for external connection, and a connecting wiring 11 for external connection for connecting the inner lead 10 with the pad 12 for external connection. In the tape 5 for pad extension, a through-hole 5a is formed at a position corresponding to the pad 12 for external connection. On the surface of the tape 5 for pad extension, an extension electrode 15 having an outer diameter larger than the inner diameter of the through-hole 5a is formed around the through-hole 5a. On the extension electrode 15, a solder ball 6 is formed, which is connected with the pad 12 for external connection.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a BGA (ball grid array) type semiconductor device in which a semiconductor chip and a carrier tape are laminated and can be used in a size almost the same as a semiconductor chip.

[0002]

2. Description of the Related Art In recent years, high-density mounting of electronic components has been promoted, and there has been a demand for a semiconductor device having a narrow pin pitch and a small size. An example of this type of semiconductor device is disclosed in
A package (CSP) having a size equal to or slightly larger than the size of a semiconductor chip, in which a semiconductor chip is bonded to a flexible film with an adhesive as described in JP-A-32-157157 and JP-A-8-102474. Also called).

Hereinafter, this semiconductor device will be described with reference to FIGS. FIG. 7 is a sectional view of a conventional semiconductor device. FIG. 8 is a plan view of a carrier tape used in the semiconductor device shown in FIG. 7, and FIG. 9 is a cross-sectional view of the carrier tape shown in FIG.

[0004] As shown in FIG.
An A-type semiconductor device having an electrode 1 made of aluminum or the like on its surface.
02 is attached to the surface of the semiconductor chip 101 on which the electrodes 102 are provided, and the semiconductor chip 101 on which the electrodes 102 are provided.
Carrier tape 104 which is a flexible film
And a solder ball 106 formed on a carrier tape 104 for mounting the semiconductor device on a mounting substrate.

As shown in FIG. 8, the carrier tape 104 has a plurality of external connection pads 112 arranged in a matrix, and the electrode of the semiconductor chip 101 is provided outside the region where the external connection pads 112 are arranged. A plurality of inner leads 110 are provided for connection with 102. External connection pad 112 and inner lead 11
0 is connected by the external connection wiring 111.

As shown in FIG. 9, the carrier tape 104 includes an adhesive 107 made of an insulating material,
It has a structure in which a base material 108 and a cover coat 109 are laminated. The adhesive 107 is used for the carrier tape 104.
On the semiconductor chip 101. The base material 108 is a layer serving as a base of the carrier tape 104, and is made of polyimide or the like. The above-described inner leads 110, external connection wiring 111, and external connection pads 112 are formed on the base material 108. The cover coat 109 is a wiring for external connection 1
This is a layer formed on the base material 108 so as to cover the external connection wiring 111 so that the wiring 11 is not exposed.
As shown in FIG. 7, the solder balls 106 are formed on the external connection pads 112.

Next, the manufacturing process of the above-described semiconductor device will be described with reference to FIGS.

First, as shown in FIG. 10A, a bonding tool 11 is placed in a state where a carrier tape 104 is placed on a surface of a semiconductor chip 101 on which electrodes 102 are provided.
7, the electrode 102 and the inner lead 110 are connected. Next, as shown in FIG. 10B, the semiconductor chip 1 and the carrier tape 1 are
The semiconductor chip 101 and the carrier tape 104 are bonded by thermocompression bonding of the semiconductor chip 101 and the carrier tape 104. Then, FIG.
As shown in FIG. 1C, the solder balls 106 are formed on the external connection pads 112 of the carrier tape 104. As a method of forming the solder ball 106, a method of transferring solder to the external connection pad 112 by a solder punching method and heating the solder ball 106 to form the solder ball 106, or a method of forming the solder ball 1
06 is directly mounted on the external connection pad 112 and is formed by heating. Finally, the carrier tape 104 is cut along the outer shape of the semiconductor chip 101 to obtain a semiconductor device as shown in FIG.

[0009]

However, in the above-described conventional semiconductor device, the carrier tape for taking advantage of the miniaturization characteristic of the CSP is provided with an external connection pad in a region mounted on the semiconductor chip. In addition, a lead wiring for connection between the lead and the inner lead, and a lead wiring for plating which is necessary when plating the lead wiring and the external connection pad are required. for that reason,
As the number of electrodes of the semiconductor chip increases, the number of these wirings also increases, and the size of the diameter of the external connection pad is naturally limited. As a result, the diameter of the solder ball is also limited, and the solder ball becomes small.

[0010] When the diameter of the solder ball is reduced, the connection strength when the semiconductor device is mounted on the mounting board becomes low, and when an external stress such as a thermal stress is applied after mounting, the external connection pad and the solder ball are connected. In some cases, cracks occur at the interface with the substrate, and it becomes electrically open. In addition, a liquid resin is filled between the semiconductor device and the mounting substrate in order to reduce the thermal stress of the mounting, but as the diameter of the solder ball becomes smaller, the gap between the semiconductor device and the mounting substrate becomes smaller. This makes it difficult to fill the resin. Further, when the solder balls are formed on the external connection pads, the smaller the diameter of the solder balls, the higher the probability that the solder balls will not be formed.

SUMMARY OF THE INVENTION An object of the present invention is to provide a BGA type semiconductor device which is hardly restricted by wiring provided on a carrier tape and can form a larger solder ball.

[0012]

In order to achieve the above object, a BGA type semiconductor device according to the present invention comprises a semiconductor chip provided with electrodes on its surface, a semiconductor chip laminated on the surface of the semiconductor chip, and connected to the electrodes. An inner lead and a pad connected to the inner lead are provided therein; an insulating layer having a hole for exposing the pad; and an insulating layer formed around the hole on the surface of the insulating layer, and an inner diameter of the hole. An extended electrode having a larger outer diameter; and a conductive ball formed on the extended electrode and connected to the pad.

In the BGA type semiconductor device of the present invention configured as described above, the electrodes of the semiconductor chip are connected to the pads in the insulating layer. A hole for exposing a pad is formed in the insulating layer. A conductive ball for mounting the BGA type semiconductor device on a substrate is formed in the hole, and the pad and the conductive ball are connected. . Here, on the surface of the insulating layer, an extended electrode having an outer diameter larger than the inner diameter of the hole is formed around the hole, and a conductive ball is formed on the extended electrode. The size is determined by the outer diameter of the extension electrode regardless of the size of the pad or the hole. Therefore, a larger conductive ball is formed without being restricted by the wiring provided in the insulating layer.

The insulating layer includes a carrier tape provided with the inner leads and pads and fixed to the surface of the semiconductor chip, and a through hole formed in a position corresponding to the pad and fixed to the carrier tape. And a pad expansion tape, wherein the expansion electrodes are
It may be formed around the through hole on the surface of the pad expanding tape. In this case, the pad expansion tape has a two-layer structure of a base material layer and an adhesive layer for fixing the pad expansion tape to the carrier tape, and the expansion electrode is formed on the base material layer. By forming the inner peripheral surface of the through hole and the periphery of the through hole on the front and back surfaces of the base material layer, the distance between the pad and the extended electrode is reduced, and a conductive ball is formed. In this case, the connection between the conductive ball and the pad is stabilized.

Further, the insulating layer may be a carrier tape, and the extension electrode may be formed on the carrier tape by closing the hole so as to contact the pad. According to such a configuration, since the pad and the extended electrode are in contact with each other, the connection between the conductive ball formed on the extended electrode and the pad is more reliable.

[0016]

Next, embodiments of the present invention will be described with reference to the drawings.

(First Embodiment) FIG. 1 shows a BG of the present invention.
FIG. 2 is a cross-sectional view of the first embodiment of the A-type semiconductor device.

As shown in FIG. 1, a BGA type semiconductor device according to the present embodiment is attached to a semiconductor chip 1 having an electrode 2 made of aluminum or the like on its surface, and to a surface of the semiconductor chip 1 on which the electrode 2 is provided. A carrier tape 4 attached, a pad expansion tape 5 attached to the surface of the carrier tape 4, and conductive balls formed on the pad expansion tape 5 for mounting the semiconductor device on a mounting substrate. And a solder ball 6. On the surface of the semiconductor chip 1, except for the portion where the electrode 2 is provided,
Is provided with a protective film 3 for protecting the surface.

The carrier tape 4 is made of an adhesive 7 similar to the conventional carrier tape described with reference to FIGS.
, A base material 8, and a cover coat 9. The inner lead 10 is connected to the electrode 2, the external connection pad 12 is connected to the solder ball 6, and the inner lead 10 is An external connection wiring line 11 for connecting to the connection pad 12 is provided. The inner leads 10, the external connection lead wires 11 and the external connection pads 12 are formed on the base material 8, and the inner leads 1
0 and only the external connection pads 12
It is exposed from. The inner leads 10 are provided at positions corresponding to the electrodes 2, and the external connection pads 12 are arranged in a matrix.

Here, regarding the pad expanding tape 5,
This will be described with reference to FIGS. FIG. 2 shows FIG.
FIG. 3 is a plan view of a pad expanding tape used in the BGA type semiconductor device shown in FIG. 3, and FIG. 3 is a cross-sectional view taken along line BB of the pad expanding tape shown in FIG.

The pad expanding tape 5 is a carrier tape 4
And a base material 14 having insulating properties and flexibility, and a thermoplastic or thermosetting adhesive 13
And a two-layer structure. The pad expanding tape 5 is attached to the carrier tape 4 by the adhesive 13. The pad expansion tape 5 is attached by a thermocompression bonding method.

A bonding tool 17 used for connecting the electrode 2 to the inner lead 10 is provided on the pad expanding tape 5 at a position corresponding to the electrode 2 of the semiconductor chip 1.
A through hole 5b is formed (see FIG. 4A). Further, the pad expanding tape 5 is provided at a position corresponding to the external connection pad 12 of the carrier tape 4.
A through-hole 5a for connecting the solder ball 6 to the external connection pad 12 is formed.

The periphery of the through hole 5a corresponding to the external connection pad 12 on the surface of the base material 14 of the pad expanding tape 5 and the inner peripheral surface of the through hole 5a in the base material portion are made of gold or copper. An extended electrode 15 having conductivity is formed. The outer diameter of the extension electrode 15 is larger than the inner diameter of the through hole 5a. The solder ball 6 is formed on the extended electrode 15 and fills the through hole 5a and is connected to the external connection pad 12.

As described above, the pad expanding tape 5 having the extended electrodes 15 is attached to the surface of the carrier tape 4 and the solder balls 6 are formed on the extended electrodes 15 to thereby form the electrodes 2 of the semiconductor chip 1. As the number increases, the wirings 11 for external connection on the carrier tape 4 become larger.
Is increased, and the size of the external connection pad 12 is limited, there is no such limitation in forming the solder ball 6.

Accordingly, a larger solder ball 6 can be formed according to the arrangement pitch of the external connection pads 12. As a result, when the semiconductor device is mounted on the mounting substrate, the connection strength between the solder balls 6 and the mounting substrate can be sufficiently maintained, and a highly reliable semiconductor device resistant to external stress such as thermal stress has been achieved. it can. Also,
When filling liquid resin between the semiconductor device and the mounting substrate to reduce the thermal stress after mounting, the gap between the semiconductor device and the mounting substrate can be kept large, so the resin filling is also good. Becomes

Next, the manufacturing process of the semiconductor device according to the present embodiment will be described with reference to FIGS.

An integrated tape structure 1 in which a carrier tape 4 and a pad expanding tape 5 are bonded in advance by thermocompression bonding.
6 and the integrated tape structure 16 is placed on the surface of the semiconductor chip 1 on which the electrodes 2 are provided, as shown in FIG. The lead 10 is connected.

Next, as shown in FIG. 4B, the semiconductor chip 1 and the carrier tape 4 are
The semiconductor chip 1 and the carrier tape 4 are bonded by thermocompression bonding.

Thereafter, as shown in FIG. 4C, the through holes 5a are formed on the extension electrodes 15 of the pad extension tape 5.
To form a solder ball 6. Since the solder ball 6 is formed on the extended electrode 15 having an outer diameter larger than the diameter of the through hole 5a, the solder ball 6 can be formed well even when the through hole 5a is small. As a method of forming the solder ball 6, a method of transferring the solder to the extension electrode 15 by a solder punching method and performing heating to form the solder ball 6 may be used, or the solder ball 6 may be directly placed on the extension electrode 15. Alternatively, a method of forming by heating may be used.

Finally, the integrated tape structure 16 is cut along the outer shape of the semiconductor chip 1 to obtain a semiconductor device having a size equal to or slightly larger than that of the semiconductor chip 1 as shown in FIG.

(Second Embodiment) FIG. 5 shows a BG according to the present invention.
It is sectional drawing of 2nd Embodiment of A type semiconductor device.

In the present embodiment, the extension electrode 35 is formed not only on the surface of the base material 34 of the pad expansion tape 25 and the inner peripheral surface of the through hole 25 a in the base material portion, but also on the adhesive 3.
3 is also formed on the surface provided with the same as the surface of the base material 34. The adhesive 33 is applied to the base material 34 on the extension electrode 3.
After the formation of No. 5, it is provided on the back surface of the base material.

Other structures of the semiconductor chip 21 and the carrier tape 24, and a pad expansion tape 25
The procedure for laminating the semiconductor chip 21 with the carrier tape 24, the method for connecting the electrodes 22 to the inner leads 30, and the method for forming the solder balls 26 on the extended electrodes 35 are the first.
Since they may be the same as those of the first embodiment, their description will be omitted.

By providing the extension electrode 35 in this manner,
Since the distance between the extended electrode 35 and the external connection pad 32 is reduced, the through hole 2
The wettability of the solder inside 5a is improved. As a result, as compared with the first embodiment, when forming the solder balls 26, the solder easily reaches the external connection pads 32, and the connection between the solder balls 26 and the external connection pads 32 is more stable. .

(Third Embodiment) FIG. 6 shows a BG according to the present invention.
It is sectional drawing of 3rd Embodiment of A type semiconductor device.

In this embodiment, the extended electrodes 55 are formed directly on the carrier tape 44 without using the pad expanding tape as used in the above two embodiments. The extended electrode 55 is connected to the external connection pad 5 of the carrier tape 44.
2 and a pad 52 for exposing external connection.
Is formed in contact with. The solder balls 46 are connected to the extended electrodes 5.
5 is formed. The diameter of the extension electrode 55 is larger than the inner diameter of the hole exposing the external connection pad 52.
The extension electrode 55 can be formed by, for example, an additive method.

Other structures of the semiconductor chip 41 and the carrier tape 44, a procedure for bonding the carrier tape 44 and the semiconductor chip 41, a method for connecting the electrodes 42 and the inner leads 50, and a method for solder balls to the extended electrodes 55 4
6 can be formed in the same manner as in the first embodiment, and the description thereof is omitted.

As described above, by providing the extended electrodes 55 directly on the carrier tape 44, the structure is simplified as compared with the above-described first and second embodiments. Further, the extension electrode 55 is in contact with the external connection pad 52, and since the solder ball 46 is formed on such an extension electrode 55, the connection between the solder ball 46 and the external connection pad 52 is further ensured. It will be.

[0039]

As described above, the BGA type semiconductor device of the present invention extends to the periphery of the hole exposing the pad on the surface of the insulating layer provided with the inner lead and the pad connected to the electrode of the semiconductor chip. Since the electrodes are formed, larger conductive balls can be formed.
As a result, the connection strength between the conductive balls and the substrate in a state where the BGA semiconductor device is mounted on the substrate can be sufficiently maintained. Also, when filling a liquid resin between the semiconductor device and the substrate to reduce the thermal stress after mounting,
Good filling properties can be obtained.

When the insulating layer is composed of a carrier tape provided with inner leads and pads and a pad expansion tape provided with the above-mentioned expansion electrodes, the expansion electrodes are formed on the base layer of the expansion tape. By forming the conductive ball on the inner peripheral surface of the through hole and around the through hole on the front surface and the back surface of the base material layer, the connection between the conductive ball and the pad when forming the conductive ball can be stabilized. On the other hand, the insulating layer is formed of a carrier tape, and the extended electrodes are formed on the carrier tape by closing the holes so as to be in contact with the pads, so that the connection between the conductive balls and the pads can be further ensured. .

[Brief description of the drawings]

FIG. 1 is a sectional view of a first embodiment of a BGA type semiconductor device of the present invention.

FIG. 2 is a plan view of a pad expanding tape used in the BGA type semiconductor device shown in FIG.

FIG. 3 is a sectional view taken along line BB of the pad expanding tape shown in FIG. 2;

FIG. 4 is a cross-sectional view for explaining a manufacturing step of the semiconductor device shown in FIG.

FIG. 5 is a sectional view of a second embodiment of the BGA type semiconductor device of the present invention.

FIG. 6 is a sectional view of a third embodiment of the BGA type semiconductor device of the present invention.

FIG. 7 is a sectional view of a conventional semiconductor device.

8 is a plan view of a carrier tape used in the semiconductor device shown in FIG.

FIG. 9 is a sectional view of the carrier tape shown in FIG. 8 taken along line AA.

10 is a cross-sectional view for explaining a manufacturing step of the semiconductor device shown in FIG.

[Explanation of symbols]

 1,21,41 Semiconductor chip 2,22,42 Electrode 3 Protective film 4,24,44 Carrier tape 5,25 Pad expansion tape 5a, 5b, 25a Through hole 6,26,46 Solder ball 7,13,33 Adhesion Agent 8, 14, 34 Base material 9 Cover coat 10, 30, 50 Inner lead 11 External connection wiring 12, 32, 52 External connection pad 15, 35 Extended electrode 16 Integrated tape structure 17 Bonding tool 18 Thermocompression head

Claims (4)

[Claims] A semiconductor chip having an electrode provided on a surface thereof, an inner lead laminated on the surface of the semiconductor chip and connected to the electrode, and a pad connected to the inner lead provided inside the semiconductor chip. An insulating layer having a hole for exposing the pad, an extended electrode formed around the hole on the surface of the insulating layer, and having an outer diameter larger than the inner diameter of the hole, formed on the extended electrode; A BGA type semiconductor device having a conductive ball connected to the pad. 2. The insulating layer has a carrier tape provided with the inner leads and pads and fixed to the surface of the semiconductor chip, and a through hole formed in a position corresponding to the pad fixed to the carrier tape. 2. The BGA type semiconductor device according to claim 1, wherein the extended electrodes are formed around the through holes on a surface of the pad extended tape. 3. 3. The pad expanding tape, comprising: a base material layer;
An adhesive layer for fixing the pad expansion tape to the carrier tape, wherein the expansion electrode has an inner peripheral surface of the through hole in the base layer, and a surface of the base layer. 3. The BGA type semiconductor device according to claim 2, wherein the BGA type semiconductor device is formed around the through hole on the back surface. 4. The BGA type semiconductor device according to claim 1, wherein said insulating layer is a carrier tape, and said extension electrodes are formed on said carrier tape by closing said holes so as to contact said pads.