JPH10333326A5 - - Google Patents

Info

Publication number
JPH10333326A5
JPH10333326A5 JP1997145437A JP14543797A JPH10333326A5 JP H10333326 A5 JPH10333326 A5 JP H10333326A5 JP 1997145437 A JP1997145437 A JP 1997145437A JP 14543797 A JP14543797 A JP 14543797A JP H10333326 A5 JPH10333326 A5 JP H10333326A5
Authority
JP
Japan
Prior art keywords
group
acid
branched
optionally substituted
photosensitive composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997145437A
Other languages
English (en)
Japanese (ja)
Other versions
JP3890375B2 (ja
JPH10333326A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP14543797A priority Critical patent/JP3890375B2/ja
Priority claimed from JP14543797A external-priority patent/JP3890375B2/ja
Publication of JPH10333326A publication Critical patent/JPH10333326A/ja
Publication of JPH10333326A5 publication Critical patent/JPH10333326A5/ja
Application granted granted Critical
Publication of JP3890375B2 publication Critical patent/JP3890375B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP14543797A 1997-06-03 1997-06-03 ポジ型感光性組成物 Expired - Lifetime JP3890375B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14543797A JP3890375B2 (ja) 1997-06-03 1997-06-03 ポジ型感光性組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14543797A JP3890375B2 (ja) 1997-06-03 1997-06-03 ポジ型感光性組成物

Publications (3)

Publication Number Publication Date
JPH10333326A JPH10333326A (ja) 1998-12-18
JPH10333326A5 true JPH10333326A5 (cg-RX-API-DMAC7.html) 2004-10-14
JP3890375B2 JP3890375B2 (ja) 2007-03-07

Family

ID=15385230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14543797A Expired - Lifetime JP3890375B2 (ja) 1997-06-03 1997-06-03 ポジ型感光性組成物

Country Status (1)

Country Link
JP (1) JP3890375B2 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3281612B2 (ja) 1999-03-05 2002-05-13 松下電器産業株式会社 パターン形成方法
JP5544098B2 (ja) * 2008-09-26 2014-07-09 富士フイルム株式会社 感活性光線性または感放射線性樹脂組成物、及び該感光性組成物を用いたパターン形成方法

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