JPH10332598A - Automatic visual inspection apparatus - Google Patents

Automatic visual inspection apparatus

Info

Publication number
JPH10332598A
JPH10332598A JP9139599A JP13959997A JPH10332598A JP H10332598 A JPH10332598 A JP H10332598A JP 9139599 A JP9139599 A JP 9139599A JP 13959997 A JP13959997 A JP 13959997A JP H10332598 A JPH10332598 A JP H10332598A
Authority
JP
Japan
Prior art keywords
line sensor
light
maximum
image processor
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9139599A
Other languages
Japanese (ja)
Inventor
Yukio Saito
幸雄 斉藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP9139599A priority Critical patent/JPH10332598A/en
Publication of JPH10332598A publication Critical patent/JPH10332598A/en
Pending legal-status Critical Current

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an automatic visual inspection apparatus by which the defect part in the appearance on the surface of an object can be detected properly and easily. SOLUTION: An apparatus is constituted so as to be provided with a light source 2 which shines light at the surface of an object 1 to be inspected, with a line sensor 3 by which the surface of the object 1 to be inspected is scanned, by which reflected light from the irradiated light is received from the surface and which detects the intensity of the reflected light and with an image processor 4 which processes the output of the line sensor 3 and which detects the defect part in the appearance of the object 1 to be inspected. The maximum output voltage of the line sensor 3 is designated as (a), the maximum input voltage in the image processing A/D conversion part of the image processor 4 is designated as (b), the light and shade resolution of the image processor 4 is designated as (c), and the maximum voltage fluctuation width in the output voltage of the line sensor 3 is designated as (d). Then, (a)=(b), and the threshold value of the judgment of the defect part is at ±1/2 d/(a/c)}.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、被検査対象物,
例えば電子写真応用製品である複写機やプリンタに用い
られる電子写真感光体などの外観の欠陥を検出する自動
外観検査装置に関する。
The present invention relates to an object to be inspected,
For example, the present invention relates to an automatic appearance inspection apparatus that detects an appearance defect of an electrophotographic photosensitive member used for a copying machine or a printer that is an electrophotographic application product.

【0002】[0002]

【従来の技術】近年、電子写真応用製品である複写機や
プリンタにおいて画像形成部材として用いられる電子写
真感光体としては、有機感光体が普及してきている。こ
のような有機感光体は、通常、導電性の円筒状の支持体
の外周面上に有機材料を主要材料とする感光層を塗布法
で形成することにより製造される。さらに、必要に応じ
て、同様に塗布法で、支持体と感光層との間に下引き層
を設けたり、感光層表面に保護層を設けることも行われ
ている。
2. Description of the Related Art In recent years, organic photoconductors have been widely used as electrophotographic photoconductors used as image forming members in copying machines and printers which are electrophotographic products. Such an organic photoreceptor is usually manufactured by forming a photosensitive layer mainly composed of an organic material on the outer peripheral surface of a conductive cylindrical support by a coating method. Further, if necessary, an undercoat layer is provided between the support and the photosensitive layer by a coating method, and a protective layer is provided on the surface of the photosensitive layer.

【0003】このような感光体において、支持体の表面
に傷などの物理的欠陥や汚染,酸化物などの化学的欠陥
が存在したり、支持体の上に形成される感光層,あるい
は下引き層や保護層に傷,塗布ムラ,異物の混在などに
よる欠陥が存在すると、感光体としての画像処理機能が
阻害され、得られる画像に欠陥が発生する。従って、こ
のような欠陥を有する感光体を排除することが必要とな
る。
In such a photoreceptor, a physical defect such as a scratch or a chemical defect such as an oxide exists on the surface of the support, a photosensitive layer formed on the support, or an undercoat. If the layer or the protective layer has a defect such as a scratch, uneven coating, or a mixture of foreign matter, the image processing function as a photoconductor is impaired, and a defect occurs in an obtained image. Therefore, it is necessary to eliminate the photoconductor having such a defect.

【0004】このような欠陥を有する感光体の表面に一
定強度の光を照射しその反射光を観察すると、欠陥部か
らの反射光強度は、欠陥の種類に応じて、正常部の反射
光強度に比して強く,あるいは弱くなる。これに着目し
て、感光体製造の最終工程で、感光体の外周面に光を照
射し反射光を観察する外観検査を行い、欠陥を有する感
光体を選別,除去することが行われてきた。
When the surface of a photoreceptor having such a defect is irradiated with light of a constant intensity and the reflected light is observed, the intensity of the reflected light from the defective portion is determined according to the type of the defect. Stronger or weaker than. Focusing on this, in the final step of photoconductor production, an outer appearance inspection of irradiating the outer peripheral surface of the photoconductor and observing reflected light has been performed, and a photoconductor having a defect has been selected and removed. .

【0005】上述のような外観検査としては、従来、検
査員による目視検査が採られてきたが、目視検査は官能
検査であるため、検査レベルの変動,誤判定,見落とし
などがある程度発生することは避けられず、そのため
に、検査レベルを厳しくしたり,検査に多くの時間をか
けたりして、不良品の見落としを防止しなければなら
ず、リスクの大きい,しかもコスト高の検査であった。
また、検査員の目の疲労度が大きく健康面でも心配な検
査方法であった。
Conventionally, a visual inspection by an inspector has been adopted as the above-mentioned appearance inspection. However, since the visual inspection is a sensory inspection, a change in the inspection level, erroneous determination, oversight, and the like occur to some extent. Inevitably, the inspection level must be strict or the inspection must take a lot of time to prevent defective products from being overlooked. This is a high-risk and high-cost inspection. .
In addition, the inspection method was so concerned that the degree of eye fatigue of the inspector was large and the health was concerned.

【0006】その対策として、自動外観検査装置の開発
が進められている。その一つの有効な自動検査方法とし
て、感光体表面に光を照射し、その反射光を感光体表面
を走査するセンサーに受けて反射光強度を検出し、その
出力を画像処理器で処理して外観欠陥部を検出する方法
が知られている。感光体表面を走査するセンサーとして
は、CCDラインセンサーが好適に用いられる。
[0006] As a countermeasure, the development of an automatic appearance inspection apparatus has been advanced. One effective automatic inspection method is to irradiate the photoreceptor surface with light, receive the reflected light with a sensor that scans the photoreceptor surface, detect the reflected light intensity, and process the output with an image processor. A method for detecting an appearance defect is known. As a sensor for scanning the surface of the photoconductor, a CCD line sensor is preferably used.

【0007】画像欠陥は、画像上正常部の画像濃度に比
して濃度の濃い部分(暗欠陥),あるいは濃度の薄い部
分(明欠陥),あるいは濃度ムラとして現れる。感光体
に光を照射したとき、濃度の濃い画像欠陥に対応する感
光体表面異常部は正常部に比して光反射が少なくCCD
ラインセンサーの出力は低くなり、濃度の薄い画像欠陥
に対応する感光体表面異常部は正常部に比して光反射が
多くCCDラインセンサーの出力は高くなる。従って、
CCDラインセンサーの出力を画像処理器で処理し、そ
の出力が正常部の出力よりも高低いずれかに振れること
により、異常部を検出することができる。
The image defect appears as a portion having a higher density (dark defect), a portion having a lower density (bright defect), or uneven density, as compared with the image density of a normal portion on the image. When the photoconductor is irradiated with light, abnormalities on the surface of the photoconductor corresponding to high-density image defects have less light reflection compared to the normal parts.
The output of the line sensor becomes lower, and the abnormal portion of the photoreceptor surface corresponding to the image defect with low density has more light reflection than the normal portion, and the output of the CCD line sensor becomes higher. Therefore,
The output of the CCD line sensor is processed by the image processor, and the output swings higher or lower than the output of the normal part, whereby an abnormal part can be detected.

【0008】以上に述べたような自動外観検査装置は、
感光体の外観検査に限られることはなく、同様な物体の
表面の外観検査には有効に適用できる。
The automatic appearance inspection apparatus as described above is
The present invention is not limited to the visual inspection of the photoreceptor, but can be effectively applied to the visual inspection of the surface of a similar object.

【0009】[0009]

【発明が解決しようとする課題】上述のような自動外観
検査装置において、ラインセンサーは受光した反射光を
光電変換し、変換した電気信号を増幅回路で増幅した後
出力する。その際ノイズ成分も増幅される。そのような
ラインセンサーの出力を入力として画像処理器で処理し
た出力にはノイズ成分も含まれているので、その出力で
欠陥部を判定すると良品を不良品とする誤判定が生じ
る。従って、そのノイズ成分を除去し誤判定をなくすた
めに、判定の「しきい値」を設定することが必要とな
る。このしきい値が検査の精度を左右することになるの
で、適切に決めることが重要となる。
In the above-mentioned automatic appearance inspection apparatus, the line sensor photoelectrically converts the received reflected light, amplifies the converted electric signal by an amplifier circuit, and outputs the amplified electric signal. At that time, the noise component is also amplified. The output processed by the image processor using the output of such a line sensor as an input also includes a noise component. Therefore, if a defective portion is determined based on the output, an erroneous determination that a non-defective product is a defective product occurs. Therefore, it is necessary to set a "threshold" for the determination in order to eliminate the noise component and eliminate the erroneous determination. Since this threshold affects the accuracy of the inspection, it is important to determine it appropriately.

【0010】この発明は、上述の点に鑑みてなされたも
のであって、適切なしきい値が容易に決められる自動外
観検査装置を提供することを目的とする。
[0010] The present invention has been made in view of the above points, and has as its object to provide an automatic appearance inspection apparatus in which an appropriate threshold value can be easily determined.

【0011】[0011]

【課題を解決するための手段】上記の課題は、この発明
によれば、被検査対象物表面に光を照射する光源と、該
表面を走査し前記照射光の表面からの反射光を受光して
その強度を検出するラインセンサーと、そのラインセン
サーの出力を処理して外観の欠陥部を検出する画像処理
器とを備えた自動外観検査装置において、前記ラインセ
ンサーの最大出力電圧をaとし、画像処理器の画像処理
A/D変換部最大入力電圧をbとし、前記画像処理器の
明暗解像度をcとし、前記ラインセンサーの出力電圧の
最大電圧変動幅をdとしたとき、a=bで、かつ、欠陥
部判定のしきい値を±1/2・(d/(a/c))とす
る自動外観検査装置によって解決される。
According to the present invention, there is provided a light source for irradiating light to a surface of an object to be inspected, and a light source for scanning the surface and receiving reflected light of the irradiated light from the surface. A line sensor for detecting the intensity of the line sensor, and an image processor for processing the output of the line sensor to detect a defective portion of the appearance, the maximum output voltage of the line sensor is a, When the maximum input voltage of the image processing A / D converter of the image processor is b, the light / dark resolution of the image processor is c, and the maximum voltage fluctuation width of the output voltage of the line sensor is d, a = b In addition, the problem is solved by an automatic appearance inspection apparatus that sets a threshold value for determining a defective portion to ± 1/2 · (d / (a / c)).

【0012】ラインセンサーの出力電圧の最大電圧変動
幅dは、ラインセンサーの出力を最大出力電圧aとする
強度の光の80%の強度の光を受光したときのラインセ
ンサーの出力電圧の最大電圧変動幅とするとよい。
The maximum voltage fluctuation width d of the output voltage of the line sensor is the maximum voltage of the output voltage of the line sensor when light having an intensity of 80% of the light having the output of the line sensor as the maximum output voltage a is received. It is good to set the fluctuation range.

【0013】[0013]

【発明の実施の形態】以下、この発明の実施例の形態に
ついて、電子写真感光体を例にして説明するが、この発
明はこれに限定されるものではなく物体表面の外観検査
には同様に有効に適用できる。被検査物の形状も円筒状
に限定されるものではない。図1は、この発明に係わる
自動外観検査装置の一例の構成を示す模式図で、図1
(a)は側面図,図1(b)は正面図である。円筒状の
感光体1の外周面に対してその軸方向に沿って帯状に均
一に光を照射する光源2(例えば蛍光灯)が配置され、
感光体1の光源2の照射面でもっとも照度の高いところ
にピントが合うようにCCDラインセンサー3が配置さ
れている。4はCCDラインセンサー3の出力を受けて
その信号を処理する画像処理器であり、5は感光体1を
その円筒軸を中心に回転させる駆動モーターである。こ
のような構成の装置で、光源2より感光体1の外周面に
軸方向に沿って光を帯状に照射し、その反射光をCCD
ラインセンサー3に受けてその光強度を検出し、その出
力を画像処理器4で処理して欠陥を検出する。感光体1
を駆動モーター5により円筒軸の回りに一回転させるこ
とにより感光体1の外周面全域がCCDラインセンサー
3により走査され、感光体全表面を容易に検査すること
ができる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described by taking an electrophotographic photosensitive member as an example. However, the present invention is not limited to this, and the same applies to the appearance inspection of the surface of an object. Can be applied effectively. The shape of the inspection object is not limited to the cylindrical shape. FIG. 1 is a schematic diagram showing a configuration of an example of an automatic visual inspection apparatus according to the present invention.
1A is a side view, and FIG. 1B is a front view. A light source 2 (for example, a fluorescent lamp) for uniformly irradiating light to the outer peripheral surface of the cylindrical photoreceptor 1 in a band shape along the axial direction thereof is disposed,
A CCD line sensor 3 is arranged so as to focus on a position where the illuminance is highest on the irradiation surface of the light source 2 of the photoconductor 1. Reference numeral 4 denotes an image processor which receives the output of the CCD line sensor 3 and processes the signal, and reference numeral 5 denotes a drive motor for rotating the photoreceptor 1 about its cylindrical axis. With the apparatus having such a configuration, light is radiated from the light source 2 to the outer peripheral surface of the photoreceptor 1 in a band shape along the axial direction, and the reflected light is CCD.
The light intensity is received by the line sensor 3 and the output is processed by the image processor 4 to detect a defect. Photoconductor 1
Is rotated around the cylindrical axis by the driving motor 5, the entire outer peripheral surface of the photoconductor 1 is scanned by the CCD line sensor 3, and the entire surface of the photoconductor can be easily inspected.

【0014】図2は、上述のような構成の画像処理器の
出力画像の一例を示す線図である。図2において、横軸
は時間軸、縦軸は画像処理器の出力の階調を示し、感光
体表面正常部からの反射光を受けたときのCCDライン
センサーの出力を処理して得られた値を基準値とし、こ
れに対して感光体表面各部からの反射光を受けたときの
CCDラインセンサーの出力を画像処理器で処理して得
られた階調値が示されている。画像上正常部に比して濃
度の濃い欠陥は基準値の(−)方向に振れ、濃度の薄い
欠陥は(+)方向に振れて現れる。CCDラインセンサ
ーの出力のノイズ成分にも対応して若干振れるので、こ
れを排除するしきい値を設定し、それ以上に振れた場合
(図のイ,ロ,ハ)欠陥として検出する。
FIG. 2 is a diagram showing an example of an output image of the image processor having the above configuration. In FIG. 2, the horizontal axis represents the time axis, and the vertical axis represents the gradation of the output of the image processor, which is obtained by processing the output of the CCD line sensor when receiving the reflected light from the normal portion of the photosensitive member surface. The reference value is used as a reference value, and the gradation value obtained by processing the output of the CCD line sensor when receiving the reflected light from each part of the photoconductor surface by the image processor is shown. Defects having a higher density than the normal portion on the image appear in the direction of the reference value (-), and defects having a lower density appear in the direction of the plus (+). Since the output slightly fluctuates according to the noise component of the output of the CCD line sensor, a threshold value for eliminating this is set, and if the output deviates more than that (a, b, c in the figure), it is detected as a defect.

【0015】図1のような構成の装置において、CCD
ラインセンサー3の最大出力電圧aに対して画像処理器
4の画像処理A/D変換部最大入力bが等しくなるよう
に調整する。次に、CCDラインセンサー3の出力電圧
の最大電圧変動幅(すなわちノイズ成分)dを求める。
CCDラインセンサー3の出力電圧を最大とする強度の
光を照射したときのCCDラインセンサー3の出力電圧
の電圧変動幅を測定すればよいが、CCDラインセンサ
ー3の出力電圧が最大となるときには、その電圧変動幅
は実測できない。従って、出力電圧の変動幅の測定可能
な範囲内でできるだけ強い光を照射したときの出力電圧
の電圧変動幅を測定する。現実的には、CCDラインセ
ンサー3の出力電圧が最大出力電圧aとなる強度の80
%程度の強度の光を連続して受光したときのCCDライ
ンセンサー3の出力の電圧変動を測定し、その最大値を
最大電圧変動幅とすると好適である。CCDラインセン
サー3の最大出力電圧と画像処理器の最大入力電圧を等
しくしてあるので、画像処理器の最大電圧変動幅もdと
なる。画像処理器4の明暗解像度をc(階調)とする
と、最大電圧変動幅dに対応する階調幅eはd/(a/
c)となる。そうして、自動外観検査装置の出力におけ
るしきい値を±e/2とすることにより、CCDライン
センサー3の電圧変動(ノイズ成分)を除去できること
になり、欠陥を精度よく検出することが可能となる。
In the apparatus having the structure as shown in FIG.
The maximum output voltage a of the line sensor 3 is adjusted so that the maximum input b of the image processing A / D converter of the image processor 4 becomes equal. Next, the maximum voltage fluctuation width (ie, noise component) d of the output voltage of the CCD line sensor 3 is determined.
What is necessary is just to measure the voltage fluctuation width of the output voltage of the CCD line sensor 3 when irradiating light with the intensity that maximizes the output voltage of the CCD line sensor 3. When the output voltage of the CCD line sensor 3 becomes maximum, The voltage fluctuation width cannot be measured. Therefore, the voltage fluctuation width of the output voltage when the light as intense as possible is irradiated within the measurable range of the output voltage fluctuation width is measured. Realistically, the output voltage of the CCD line sensor 3 has a maximum intensity 80a.
It is preferable to measure the voltage fluctuation of the output of the CCD line sensor 3 when continuously receiving the light having the intensity of about%, and determine the maximum value as the maximum voltage fluctuation width. Since the maximum output voltage of the CCD line sensor 3 and the maximum input voltage of the image processor are equal, the maximum voltage fluctuation width of the image processor is also d. Assuming that the light / dark resolution of the image processor 4 is c (gradation), the gradation width e corresponding to the maximum voltage fluctuation width d is d / (a /
c). By setting the threshold value of the output of the automatic visual inspection apparatus to ± e / 2, voltage fluctuation (noise component) of the CCD line sensor 3 can be removed, and defects can be accurately detected. Becomes

【0016】実施例1 図1に示した構成の装置を用い、外径30mm,有効長
さ120mmの円筒状感光体の外観検査を行う。CCD
ラインセンサーとしては2000画素(CCD素子個数
2000)で最大出力電圧aが5Vであるものを用い
る。このCCDラインセンサーに出力が最大出力電圧5
Vとなる強度の80%の強度の光を照射したときの最大
変動電圧dをオシロスコープで測定したところ390m
Vであった。また、画像処理器としては、明暗解像度c
が8ビット(256階調)のものを用い、その最大入力
電圧bをCCDラインセンサーの最大出力電圧5Vと等
しくなるように調整した。従って、画像処理器の最大変
動電圧の階調幅eは、390mV/(5000mV/2
56)で約20階調となる。
Example 1 Using the apparatus having the configuration shown in FIG. 1, an external appearance inspection of a cylindrical photosensitive member having an outer diameter of 30 mm and an effective length of 120 mm is performed. CCD
As the line sensor, a sensor having 2000 pixels (2,000 CCD elements) and a maximum output voltage a of 5 V is used. The maximum output voltage of this CCD line sensor is 5
When the maximum fluctuation voltage d when irradiating light having an intensity of 80% of the intensity which becomes V was measured with an oscilloscope, it was 390 m.
V. Further, as the image processor, the light and dark resolution c
Is 8 bits (256 gradations), and the maximum input voltage b is adjusted to be equal to the maximum output voltage 5V of the CCD line sensor. Therefore, the gradation width e of the maximum fluctuation voltage of the image processor is 390 mV / (5000 mV / 2
At 56), about 20 gradations are obtained.

【0017】このような装置で、CCDラインセンサー
を2MHzで作動させながら、感光体を30rpmの速
度で一回転させて感光体全外周面を走査し、その出力を
画像処理器に入力させて処理し、出力画像により欠陥の
有無を検出する。画像良好な感光体、画像欠陥のある感
光体(暗欠陥(大),暗欠陥(小),明欠陥(大),明
欠陥(小),濃度ムラ)について、しきい値(±e/
2)を±8,±10,±12と変えて検査した。
With such an apparatus, while operating the CCD line sensor at 2 MHz, the photosensitive member is rotated once at a speed of 30 rpm to scan the entire outer peripheral surface of the photosensitive member, and the output is input to an image processor for processing. Then, the presence or absence of a defect is detected from the output image. For the photoreceptor having a good image and the photoreceptor having an image defect (dark defect (large), dark defect (small), bright defect (large), bright defect (small), density unevenness), the threshold value (± e /
2) was changed to ± 8, ± 10, ± 12 and inspected.

【0018】その結果を表1に示す。表1において、×
印は装置で不良と判定されたことを示し、○印は装置で
良と判定されたことを示す。
Table 1 shows the results. In Table 1, ×
The mark indicates that the device was determined to be defective, and the mark ○ indicates that the device was determined to be good.

【0019】[0019]

【表1】 [Table 1]

【0020】表1に見られるように、良否判定しきい値
をCCDラインセンサーの最大電圧変動幅に対応する画
像処理器の最大変動電圧の階調幅の1/2である±10
としたとき誤判定が最も少ない。
As shown in Table 1, the pass / fail judgment threshold value is set to ± 10 which is 1/2 of the gradation width of the maximum fluctuation voltage of the image processor corresponding to the maximum voltage fluctuation width of the CCD line sensor.
And the erroneous determination is the least.

【0021】[0021]

【発明の効果】この発明によれば、被検査対象物表面に
光を照射する光源と、該表面を走査し表面からの前記照
射光の反射光を受光して反射光強度を検出するラインセ
ンサーと、そのラインセンサーの出力を処理して被検査
対象物の外観の欠陥部を検出する画像処理器とを備えた
自動外観検査装置において、ラインセンサーの最大出力
電圧をaとし、画像処理器の画像処理A/D変換部最大
入力電圧をbとし、画像処理器の明暗解像度をcとし、
前記ラインセンサーの出力電圧の最大電圧変動幅をdと
したとき、a=bで、かつ、欠陥部判定のしきい値を±
1/2・(d/(a/c))とする。このような装置を
用いることにより、被検査対象物の外観不良を容易に自
動的に精度良く検出することが可能となる。
According to the present invention, a light source for irradiating light to a surface of an object to be inspected, and a line sensor for scanning the surface and receiving reflected light of the irradiated light from the surface to detect reflected light intensity And an image processor for processing the output of the line sensor to detect a defect in the appearance of the object to be inspected, wherein the maximum output voltage of the line sensor is a, The maximum input voltage of the image processing A / D converter is set to b, the light / dark resolution of the image processor is set to c,
Assuming that the maximum voltage fluctuation width of the output voltage of the line sensor is d, a = b, and the threshold for determining a defective portion is ±
1/2 (d / (a / c)). By using such an apparatus, it is possible to easily and automatically detect the appearance defect of the inspection object with high accuracy.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明に係わる装置の一例の構成を示す模式
図で、図1(a)は側面図、図1(b)は正面図
FIG. 1 is a schematic view showing a configuration of an example of an apparatus according to the present invention. FIG. 1 (a) is a side view, and FIG. 1 (b) is a front view.

【図2】この発明に係わる装置の出力画像の一例を示す
線図
FIG. 2 is a diagram showing an example of an output image of the device according to the present invention;

【符号の説明】[Explanation of symbols]

1 感光体 2 光源 3 CCDラインセンサー 4 画像処理器 5 駆動モーター Reference Signs List 1 photoconductor 2 light source 3 CCD line sensor 4 image processor 5 drive motor

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】被検査対象物表面に光を照射する光源と、
該表面を走査し表面からの前記照射光の反射光を受光し
て反射光強度を検出するラインセンサーと、そのライン
センサーの出力を処理して外観の欠陥部を検出する画像
処理器とを備えた自動外観検査装置において、前記ライ
ンセンサーの最大出力電圧をaとし、画像処理器の画像
処理A/D変換部最大入力電圧をbとし、前記画像処理
器の明暗解像度をcとし、前記ラインセンサーの出力電
圧の最大電圧変動幅をdとしたとき、a=bで、かつ、
欠陥部判定のしきい値を±1/2・(d/(a/c))
とすることを特徴する自動外観検査装置。
A light source for irradiating light to a surface of the inspection object;
A line sensor that scans the surface and receives reflected light of the irradiation light from the surface to detect reflected light intensity; and an image processor that processes an output of the line sensor to detect a defect in appearance. The maximum output voltage of the line sensor is a, the maximum input voltage of the image processing A / D converter of the image processor is b, the light / dark resolution of the image processor is c, When the maximum voltage fluctuation width of the output voltage is d, a = b, and
± 1/2 · (d / (a / c))
An automatic visual inspection device characterized by the following.
【請求項2】ラインセンサーの出力電圧の最大電圧変動
幅dを、ラインセンサーの出力を最大出力電圧aとする
強度の光の80%の強度の光を受光したときのラインセ
ンサーの出力電圧の最大電圧変動幅とすることを特徴と
する請求項1記載の自動外観検査装置。
2. The maximum voltage fluctuation width d of the output voltage of the line sensor is set to the maximum output voltage a of the output voltage of the line sensor. 2. The automatic visual inspection device according to claim 1, wherein the maximum voltage fluctuation width is set.
JP9139599A 1997-05-29 1997-05-29 Automatic visual inspection apparatus Pending JPH10332598A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9139599A JPH10332598A (en) 1997-05-29 1997-05-29 Automatic visual inspection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9139599A JPH10332598A (en) 1997-05-29 1997-05-29 Automatic visual inspection apparatus

Publications (1)

Publication Number Publication Date
JPH10332598A true JPH10332598A (en) 1998-12-18

Family

ID=15249033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9139599A Pending JPH10332598A (en) 1997-05-29 1997-05-29 Automatic visual inspection apparatus

Country Status (1)

Country Link
JP (1) JPH10332598A (en)

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