JPH10328987A - Both faces of plate member simultaneous grinding method and device therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simultaneously grind an upper and a lower both surfaces of a plate member by holding the plate member to be machined, by a holding hole of a holding member, and transferring the same in one direction between a mounting member and a pressing member with autorotation, by a pair of rotary driving belts. SOLUTION: A holding member 12 is linearly transferred in one direction shown by an arrow at a speed generated by the difference of the traveling speeds with autorotation, by the traveling of the rotary driving belts 6, 7 in the directions opposite to each other. A plate member (W) is held by a holding member 1 which is thinner than the thickness of the plate member (W). Whereby the upper and lower both faces of the plate member (W) are brought into contact with the grinding wheel faces respectively formed on the faces opposite to each other, of a mounting member 2 and a pressing member. The proper grinding pressure is applied to the pressing member. The plate member (W) is ground and machined by the holding and pressing action of the mounting member 2 and the pressing member, and the transferring with autorotation.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to polishing (including grinding, lapping, and polishing) on both upper and lower surfaces of a plate-like member made of, for example, aluminum, quartz, semiconductor wafer, ceramics, ferrite, metal, and carbide. TECHNICAL FIELD The present invention relates to a method and an apparatus for simultaneously polishing both surfaces of a plate-like member used for polishing.

[0002]

2. Description of the Related Art Conventionally, as a plate-type member double-sided simultaneous polishing apparatus of this type, a holding member having a holding hole capable of holding the plate-like member and having a plate thickness smaller than the thickness of the plate-like member is provided. A disk-shaped mounting rotary disk on which the held plate-shaped member can be mounted, and a plate-shaped member on the mounting member that rotates in a direction opposite to the rotation direction of the mounting rotary disk and is sandwiched between the mounting member and the mounting member; A pressurized disk-shaped pressurizing wheel, a planetary gear mechanism that revolves while rotating the holding member disposed between the mounting plate and the pressurizing plate, and an opposition between the mounting wheel and the pressurizing wheel. There is known a structure having a polishing liquid supply section capable of supplying a polishing liquid between surfaces.

[0003]

However, in the case of the above-mentioned conventional structure, a plurality of holding members are arranged on a radius centered on the rotation center of the mounting turntable and the pressing turntable, and are held by the holding members. Since the plate-shaped member revolves around the center of rotation of the mounting rotary plate and the pressing rotary disk while rotating, it can be mounted on the mounting rotary plate in order to increase the polishing processing capability at one time. When trying to increase the number of members,
The outer diameter of the disk of the mounting rotary disk and the pressure rotary disk must be increased, which leads to an increase in the size and weight of the apparatus, which may necessitate an increase in the manufacturing cost, and a holding member and a plate-like shape. The pressurizing rotary disk must be retracted each time the member is supplied to and removed from the mounting rotary disk, which has the disadvantage that polishing workability may be reduced accordingly.

[0004]

SUMMARY OF THE INVENTION The object of the present invention is to solve such disadvantages. Among the present invention, the method according to the first aspect of the present invention is directed to a method in which a plate-like member is used. The holding member having a thickness smaller than the thickness of the holding member is held by the holding hole, the plate member held by the holding member is placed on the mounting member, and the plate member on the mounting member is pressed by the pressing member. , The opposing surfaces of the mounting member and the pressing member are formed on a grindstone surface, and can be brought into contact with the opposing outer peripheral surfaces of the holding member, respectively, so that both sides of the mounting member and the pressing member The holding member is rotated in one direction while rotating between the mounting member and the pressing member by the difference in running speed of the pair of rotary drive belts running in opposite directions arranged at the position, and the plate member is moved up and down. A method for simultaneously polishing both surfaces of a plate-shaped member, characterized by simultaneously polishing the surface. .

According to a second aspect of the present invention, there is provided a method according to the first aspect, wherein the placing member having a grindstone surface and the pressing member are replaced with a placing member having no grindstone surface. A polishing liquid supply unit capable of supplying a polishing liquid is provided between opposing surfaces of the members.

According to a third aspect of the present invention, there is provided a holding member having a holding hole capable of holding a plate member, the holding member having a thickness smaller than the thickness of the plate member, and being held by the holding member. A placing member on which the plate member can be placed, and a pressing member capable of pressing the plate member on the placing member with the placing member, wherein the placing member and the pressing member are opposed to each other. The surface is formed on a grindstone surface, and a pair of rotating drive belts that run in opposite directions to both sides of the placing member and the pressing member and that have different running speeds can contact the opposing outer peripheral surface of the holding member, respectively. A speed setting unit that determines a traveling speed of each of the pair of rotary drive belts, and rotates the holding member between the placing member and the pressing member by a difference in travel speed between the pair of rotary drive belts. Device for simultaneously polishing both sides of a plate-shaped member, while moving the plate in one direction A.

According to a fourth aspect of the present invention, there is provided an apparatus according to the third aspect of the present invention, wherein the placing member having a grindstone surface and the pressing member are replaced with a placing member having no grindstone surface. A polishing liquid supply unit capable of supplying a polishing liquid is provided between opposing surfaces of the members.

According to a fifth aspect of the present invention, there is provided an apparatus according to the third aspect of the present invention, wherein a polishing liquid supply section capable of supplying a polishing liquid is provided between the opposing surfaces of the mounting member and the pressing member. According to a sixth aspect of the present invention, there is provided an apparatus according to the sixth aspect, further comprising a vibration mechanism for oscillating the placing member and the pressing member in directions opposite to each other. Things,
According to a seventh aspect of the present invention, the driven bite portion is formed on the outer peripheral surface of the holding member, and the rotary drive belt is provided with a drive bite portion that can bite with the driven bite portion. Things.

[0009]

1 to 8 show an embodiment of the present invention. FIGS. 1 to 6 show a first embodiment, FIG. 7 shows a second embodiment, and FIG. 8 shows a third embodiment. is there.

In the first embodiment shown in FIGS. 1 to 6, reference numeral 1 denotes a holding member, which has a disk shape in this case, is made of metal, non-ferrous metal, synthetic resin or the like, and has a thickness t of the holding member 1.
Is a plate-shaped member W as a workpiece, in this case, formed thinner than the plate thickness T of the aluminum plate, and has a circular holding hole 1a through which the plate-shaped member W can be inserted and held. The holding hole 1a may be formed as a square hole or a deformed hole depending on the contour shape of the plate-like member 1 to be processed.

Reference numeral 2 denotes a mounting member. Reference numeral 3 denotes a pressing member. In this case, grinding wheels 2b are attached to the base members 2a. The surfaces 2c and 3c are formed, and the mounting member 2 is disposed so as to be horizontally swingable by a guide mechanism (not shown), and the pressing member 3 can be horizontally slid and moved up and down by a guide mechanism and a vertical movement mechanism (not shown). The plate-shaped member W on the mounting member 2 is arranged so as to be squeezable with the mounting member 2 with an appropriate polishing pressure by a pressing mechanism (not shown).

Reference numeral 4.5 denotes a swinging mechanism. In this case, a crank mechanism comprising crank plates 4a and 5a and connecting rods 4b and 5b is employed, and the placing member 2 and the pressing member 3 are moved in opposite directions. It is configured to slide horizontally.

Reference numerals 6 and 7 denote rotary driving belts. In this case, driving pulleys 6a and 7a and driven pulleys 6b and 7b are vertically arranged at positions on both sides of the placing member 2 and the pressing member 3, and are driven. Control motor 6 for rotating pulleys 6a and 7a
c and 7c, and the driving pulleys 6a and 7a and the driven pulleys 6b and 7b are wound around the rotation driving belts 6 and 7, respectively.
7 is connected to a speed setting unit 8 for determining the respective running speeds V ₁ and V _2, and the inner belt surfaces of the pair of rotary drive belts 6 and 7 run in opposite directions and circulate at different running speeds. And each rotary drive belt 6.
Each of the inner belt surfaces 7 is provided so as to be capable of contacting the opposing outer peripheral surface of the holding member 1.

In this case, a toothed driven bite portion 1b is formed on the outer peripheral surface of the holding member 1 so as to be able to bite the driven bite portion 1b of the rotary drive belts 6 and 7. Parts 6d and 7d are formed to prevent sliding contact between the holding member 1 and the rotary drive belts 6 and 7.

Reference numeral 9 denotes a feeding conveyor, and reference numeral 10 denotes an unloading conveyor, which are arranged on the entrance side and the exit side of the placing member 2 and the pressing member 3, respectively.

Since the first embodiment of the present invention has the above configuration, as shown in FIGS. 1 and 6, a plate-shaped member W is inserted and held in each holding hole 1a of the holding member 1 in the supply section A. When the plate-like member W held by the holding member 1 is fed onto the feeding conveyor 9 by a feeding mechanism (not shown), the holding member 1 is sent between the opposing surfaces of the placing member 2 and the pressing member 3. The inner peripheral surfaces of the pair of rotary driving belts 5 and 6 disposed on both sides of the placing member 2 and the pressing member 3 come into contact with the outer peripheral surface of the holding member 1, and the pair of rotational driving The belts 5 and 6 run in mutually opposite directions, and are set to different running speeds of V ₁ > V ₂ by the speed setting unit 8,
Accordingly, the traveling speed difference V ₁ -V ₂ is obtained while the holding member 1 rotates by the traveling of the rotary drive belts 5 and 6 in the opposite directions.
And the plate member W is held in the holding member 1 having a plate thickness t smaller than the plate thickness T of the plate member W. The upper and lower surfaces of W are the mounting member 2 and the pressing member 3 respectively.
The plate member W is placed in a state where it is held by the holding member 1 because the pressing member 3 comes into contact with the grindstone surfaces 2c and 3c formed on the respective opposing surfaces, and the pressing member 3 is appropriately applied with polishing pressure. The plate-shaped member W is nipped by the member 2 and the pressing member 3, so that the plate-shaped member W is polished by the one-way transfer operation sent while being rotated while being held between the mounting member 2 and the pressing member 3. Become.

In this case, the holding member 1 and the plate-like member W are sent to the take-out conveyor 10 of the take-out section B, and only the holding member 1 is taken out from the take-out conveyor 10 by a take-out mechanism (not shown). The plate-shaped member W remains on the take-out conveyor 10, the plate-shaped member W is taken out and transferred by the take-out conveyor 10, and the taken-out holding member 1 is returned to the supply section A again. W is inserted and held in the holding hole 1a of the holding member 1, and in the same manner,
Polishing will be performed.

Accordingly, the plate-like member W to be processed is held in the holding hole of the holding member 1 and is moved in one direction while rotating between the mounting member 2 and the pressing member 3 by a pair of rotary drive belts. Therefore, both the upper and lower surfaces of the plate-shaped member W can be polished at the same time, and the plate-shaped member W is transferred in one direction while rotating. In addition, the overall length and body width of the apparatus can be reduced, the apparatus can be downsized, and continuous polishing can be performed, thereby improving workability.

In this case, the mounting member 2 and the pressing member 3 are oscillated in the opposite directions by the oscillating mechanisms 4 and 5, so that more favorable polishing can be performed.
In this case, the driven bite portion 1 is driven by the outer peripheral surface of the holding member 1.
b and the driving bite portions 6d and 7d that can bite the driven bite portion 1b with the rotary drive belts 6 and 7, the rotation and the transfer operation of the holding member 1 can be performed reliably. The adjacent holding members 1 during polishing can also be prevented from approaching and separating from each other, can be transferred at a fixed transfer interval, and good polishing can be performed.

The second embodiment shown in FIG. 7 shows another structure of the polishing operation. In this case, the opposing surfaces of the placing member 2 and the pressing member 3 are formed as simple planes without the grinding stone surfaces 2c, 3c. In addition, a polishing liquid supply unit 11 capable of supplying a polishing liquid L containing loose abrasive grains is provided between opposing surfaces of the mounting member 2 and the pressing member 3.

In the second embodiment, the polishing is performed by the polishing liquid L, and the plate-like member W is transported in one direction while rotating, similarly to the first embodiment. be able to.

The third embodiment shown in FIG. 8 also shows another example of the structure of the polishing action, and the opposing surfaces of the mounting member 2 and the pressing member 3 are formed on the grindstone surfaces 2c and 3c as in the first embodiment. In addition to this, a polishing liquid supply unit 11 capable of supplying a polishing liquid L containing free abrasive grains between the opposing surfaces of the mounting member 2 and the pressing member 3.
Are arranged and configured.

In the third embodiment, the grinding wheel surfaces 2a and 3
Since the polishing process is performed by c and the polishing liquid L, and the plate-like member W is transferred in one direction while rotating, similarly to the first embodiment, it is possible to perform a favorable polishing process.

It should be noted that the present invention is not limited to the above embodiment, and the holding member 1, the placing member 2, the pressing member 3,
The structures and the like of the oscillation mechanisms 4 and 5 are appropriately changed and designed.

[0025]

As described above, according to the present invention, the plate member to be machined is held in the holding hole of the holding member, and the mounting member is held by the pair of rotary drive belts. Between the pressure member and the pressure member, the plate member is transferred in one direction while rotating, so that the upper and lower surfaces of the plate member can be simultaneously polished and the plate member is transferred in one direction while rotating. Therefore, good polishing can be performed, and furthermore, the overall length of the apparatus and the body width can be reduced structurally, and the apparatus can be downsized and continuous polishing can be performed. Workability can be improved.

According to the second or fourth aspect of the present invention, since the polishing liquid supply section capable of supplying the polishing liquid is disposed between the opposing surfaces of the mounting member and the pressing member, the polishing liquid is supplied. Polishing can be performed, and in the invention according to the fifth aspect, polishing can be performed using a grindstone surface and a polishing liquid.

In the invention according to claim 6, the mounting member and the pressing member are oscillated in directions opposite to each other by the oscillating mechanism, so that more favorable polishing can be performed. According to the seventh aspect of the present invention, since the driven bite portion is formed along the outer peripheral surface of the holding member and the driven bite portion is formed so as to be able to bite into the driven bite portion with the rotary drive belt. In addition, the rotation and the transfer operation of the holding member can be reliably performed.

As described above, the intended purpose can be sufficiently achieved.

[Brief description of the drawings]

FIG. 1 is an overall plan view of a first embodiment of the present invention.

FIG. 2 is an overall side view of the first embodiment of the present invention.

FIG. 3 is a partially enlarged plan view of the first embodiment of the present invention.

FIG. 4 is a partially enlarged transverse sectional view of the first embodiment of the present invention.

FIG. 5 is a partially enlarged sectional view of the first embodiment of the present invention.

FIG. 6 is a partial perspective view of the first embodiment of the present invention.

FIG. 7 is a partially enlarged sectional view of a second embodiment of the present invention.

FIG. 8 is a partially enlarged sectional view of a third embodiment of the present invention.

[Explanation of symbols]

W Plate-shaped member V ₁ Travel speed V ₂ Travel speed 1 Holding member 1b Followed bite portion 2 Placement member 2c Grinding stone surface 3 Pressure member 3c Grindstone stone surface 4 Rocking mechanism 5 Rocking mechanism 6 Rotary drive belt 6d Drive biting section 7 Rotary drive belt 7d Drive occlusion part 8 Speed setting part 11 Polishing liquid supply part

Claims (7)

[Claims] The plate member is held by a holding member having a thickness smaller than the thickness of the plate member by a holding hole, and the plate member held by the holding member is placed on a mounting member. The plate-like member on the mounting member is pressed by the pressing member with the mounting member, and the opposing surfaces of the mounting member and the pressing member are formed on a grindstone surface, and can contact the opposing outer peripheral surfaces of the holding member, respectively. The holding member is rotated between the placing member and the pressing member by the difference in traveling speed between the pair of rotary drive belts that run in opposite directions and are disposed at both sides of the placing member and the pressing member. A method for simultaneously polishing both upper and lower surfaces of a plate-shaped member while transferring the plate-shaped member in one direction. A holding member having a thickness smaller than a thickness of the plate member, the holding member being held by a holding hole, and the plate member held by the holding member being placed on a placement member; The plate-shaped member on the mounting member is pressed between the mounting member and the mounting member by a pressing member, and a polishing liquid is supplied between the opposing surfaces of the mounting member and the pressing member. The holding member is placed between the placing member and the pressing member by a difference in traveling speed between a pair of rotary drive belts that can be brought into contact with each other and run in opposite directions arranged on both sides of the placing member and the pressing member. A method for simultaneously polishing both upper and lower surfaces of a plate-like member by simultaneously moving the plate-like member in one direction while rotating. 3. A holding member having a holding hole capable of holding the plate member and having a thickness smaller than the thickness of the plate member, and a mounting member capable of mounting the plate member held by the holding member. A member, and a pressing member capable of pressing the plate-shaped member on the mounting member with the mounting member, wherein opposing surfaces of the mounting member and the pressing member are formed on a grindstone surface; A pair of rotary drive belts that run in opposite directions to both sides of the mounting member and the pressing member and that have different running speeds are disposed so as to be able to contact the opposing outer peripheral surfaces of the holding member, respectively. A speed setting unit that determines the traveling speed of each is disposed, and the holding member is rotated in one direction while rotating between the mounting member and the pressing member by a traveling speed difference between the pair of rotary drive belts. Plate-like member simultaneous double-side polishing machine. 4. A holding member having a holding hole capable of holding the plate member and having a thickness smaller than the thickness of the plate member, and a mounting member capable of mounting the plate member held by the holding member. A polishing member comprising a member and a pressing member capable of pressing the plate-shaped member on the mounting member with the mounting member, and capable of supplying a polishing liquid between the opposing surfaces of the mounting member and the pressing member. A liquid supply unit is provided, and a pair of rotary drive belts that run in opposite directions to both sides of the placing member and the pressing member and that have different running speeds can contact the opposing outer peripheral surfaces of the holding member, respectively. Disposed, a speed setting unit for determining a traveling speed of each of the pair of rotary driving belts is disposed, and a holding member is provided between the placing member and the pressing member by a traveling speed difference between the pair of rotary driving belts. An apparatus for simultaneously polishing both surfaces of a plate-shaped member, wherein the plate is moved in one direction while rotating. 5. A double-sided simultaneous polishing process for a plate-shaped member according to claim 3, wherein a polishing liquid supply section capable of supplying a polishing liquid is disposed between the opposing surfaces of the placing member and the pressing member. apparatus. 6. A plate-like member according to claim 3, further comprising a swinging mechanism for swinging the placing member and the pressing member in directions opposite to each other. Polishing equipment. 7. A driving bite portion which is formed on the outer peripheral surface of the holding member and which is capable of biting with the driven bite portion on the rotary drive belt. Or the apparatus for simultaneously polishing both surfaces of a plate-shaped member according to 6.