JPH10325792A - Infrared microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily verify a measurement position after measurement and easily release a sample from a prism, by forming the top of a contact surface with the sample of a prism (ATR prism) with a spherical contact surface in the shape of a raised surface. SOLUTION: The tip of an ATR prism 60 is cut, for example, by etching, thus forming a raised surface with a diameter of approximately 10-200 μm. When a sample 34 is to be measured, the ATR prism 60 is positioned at the upper portion of the measurement point of the sample 34, the sample stage is raised and the sample 34 is pressed against the bottom surface of the ATR prism 60. At this time, a recess (a mark on the raised surface) is given to the surface of the sample 34 by the raised surface (contact) on the bottom surface of the ATR prism 60. Therefore, even after a measurement ends, the mark remains at the measurement position, thus verifying the measurement position of the sample 34 easily. Also, since the contact surface between the ATR prism 60 and the sample 34 is small, the sample 34 can be easily released from the ATR prism 60.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an infrared microscope for irradiating a sample surface with infrared light and observing the sample surface by measuring the reflected light, and more particularly to a total reflection using an infrared microscope. The present invention relates to a total internal reflection objective used when analyzing the surface of a sample by a measurement method.

[0002]

2. Description of the Related Art Attenuated Total Reflection
The principle of the sample analysis method (ATR method) using ance) will be described with reference to FIG. In FIG. 5A, a prism (AT) having a larger refractive index than the sample 34 is used.
When the sample 34 is pressed against the R prism 27 and the infrared light is directed toward the surface of the sample 34 at an incident angle equal to or greater than the total reflection critical angle, the infrared light is incident on the ATR prism 27, and then the ATR prism
The light is totally reflected at an interface 35 between the sample 27 and the sample 34. At the time of this total reflection, the infrared light slightly crosses the boundary surface 35 (a fraction of the wavelength of the measured infrared light) and enters the sample side as shown in FIG. It is inherently absorbed by the surface portion. By measuring the absorption spectrum of the infrared light reflected on the sample surface in this way, the sample surface can be analyzed.

FIG. 3 shows a configuration of an objective optical system of a general infrared microscope. Cassegrain type objective mirror 1
4. It includes an ATR prism 60 having a spherical contact surface, a prism holder 62 for holding the ATR prism 60, and a sample stage 36 for mounting a sample 34. The diameter of the ATR prism 60 is about 2 to 5 mm. The prism holder 62 can slide in the horizontal direction. The position of the sample stage 36 in the three-dimensional space (X, Y, and Z) can be freely moved within a predetermined range. Further, although not shown, an infrared light source, a visible light source, a measurement optical system for detecting infrared light, and a visual optical system for visually observing a sample using visible light are components of the infrared microscope. And these are well-known configurations.

[0004]

In an infrared microscope having such a structure, as shown in an enlarged view of FIG. 4, the ATR prism is on a spherical surface which swells downward, and the contact surface with the sample has a diameter of a few. The pressure on the sample is relatively small, being as large as 100 μm. Therefore, there is no physical damage to the sample surface, but on the contrary, the measurement position cannot be checked after the measurement. Further, since the contact surface (contact surface) with the sample is relatively wide, there is also a problem that the sample is hard to separate from the ATR prism after the measurement.

SUMMARY OF THE INVENTION It is an object of the present invention to provide an infrared microscope in which a measurement position can be easily confirmed visually after measurement and a sample can be easily separated from an ATR prism after measurement.

[0006]

In order to achieve the above object, in the infrared microscope of the present invention, the top of the contact surface of the ATR prism with the sample is formed in the shape of a protruding surface.

[0007] The size of the projection surface is 10 to 20 in diameter.
It is about 0 μm. Further, as shown in FIG. 2, the projection surface shape is formed by shaving the tip of the ATR prism by etching or the like to form a projection surface.

An A having a projection surface on the top of such a contact surface
By pressing the TR prism on the sample, a depression is formed in the sample as shown in FIG. 1, whereby the measurement position can be easily confirmed even after the measurement, and since the contact surface is small, the ATR prism can be easily formed. The sample can be peeled off from the sample.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an infrared microscope according to an embodiment of the present invention will be described. The basic structure of the infrared microscope is the same as that of the general red microscope shown in FIG. Since this is the same as the external microscope, it will be described again with reference to FIG.

[0010] As shown in FIG.
The ATR prism 60 is retracted from the surface of the sample 34 by sliding 62. In this state, the sample 34 is directly irradiated with visible light from a visible light source (not shown),
The sample stage 36 is driven while visually observing the image of
The position of 34 is adjusted so that the measurement point on the surface of the sample 34 is located at the focal point of the objective mirror.

After determining the position of the sample 34, the prism holder 62 is slid horizontally so that the ATR prism 60 is positioned above the measurement point of the sample 34, as shown in FIG. Then, the sample stage 36 is further raised, and the sample 34 is pressed against the bottom surface of the ATR prism 60.

Here, the bottom surface of the ATR prism 60, that is,
As shown in FIG. 2, the contact surface with the sample 34 has a diameter of 1
A small projection surface (contact point) of about 0 to 200 μm is formed, and when the sample 34 is crimped, the surface of the sample 34
As shown in FIG. Thus, the measurement point can be easily confirmed even after the measurement.

In such a state, an infrared light source (not shown)
Is collected by the Cassegrain objective 14
Irradiation is made to the contact point of the contact surface of the R prism 60 with the sample 34, and the reflected infrared light from the surface of the sample 34 is collected again by the Cassegrain type objective mirror 14 and detected by the detection optical system.

[0014]

Since the present invention is configured as described above, a trace remains at the measurement position even after the measurement is completed, and the measurement point can be easily confirmed. Further, since the contact surface of the ATR prism with the sample is small, there is an effect that the sample can be easily peeled off from the ATR prism.

[Brief description of the drawings]

FIG. 1 is a diagram showing a shape of an ATR prism of an infrared microscope according to an embodiment of the present invention.

FIG. 2 is a diagram showing an example of a method for processing an ATR prism of the infrared microscope according to the embodiment of the present invention.

FIG. 3 is a diagram showing an objective optical system of a general infrared microscope.

FIG. 4 is a diagram showing a shape of an ATR prism of a conventional infrared microscope.

FIG. 5 is a diagram illustrating the principle of a sample analysis method using total reflection absorption.

[Explanation of symbols]

14 ... objective mirror 34 ... sample 36 ... sample stage 60
… ATR prism

Claims (1)

[Claims] 1. A prism having a spherical contact surface is pressed against a sample, and infrared light is directed toward the surface of the sample at an incident angle equal to or greater than a critical angle for total reflection. An infrared microscope for measuring an absorption spectrum, wherein an apex of a contact surface of the prism is formed in a projection shape.