JPH10323673A - Deionized water-producing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To drive a deionized water-producing apparatus at low voltage while suppressing scale formation in a concentration chamber by specifying the flow ratio of the flow rate of water to be treated and flowing into a desalination chamber and the flow rate of the concentrated water flowing in the concentration chamber and respectively specifying the linear velocity of the water to be treated in the desalination chamber and the linear velocity of the concentrated water flowing in the concentration chamber. SOLUTION: In a self-reproducing type electrodialyzing deionizing apparatus, an anode chamber 2, concentration chambers S1 -Sn+1 , deionization chambers R1 -Rn , and a cathode chamber 3 are constituted by installing anion exchange membranes A and cation exchange membrane K in an electrodialysis tank 1 at prescribed intervals and the desalination chamber R1 -Rn are filled and house anion exchange resin and cation exchange resin. In this case, the flow rate ratio of the concentrated water to the water to be treated is controlled to be (2:1) to (5.5:1). Moreover, the linear velocity of the water to be treated in the desalination chambers is set to be within 0.5-7.0 cm/sec and at the same time the linear velocity of the concentrated water in the concentration chambers is controlled to be 1.2-20 times as high as the linear velocity in the desalination chambers. Consequently, high conductivity in the concentration chambers is retained and the production cost per unit amount of produced water is lowered.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a self-regenerating electrodialysis deionization method for efficiently purifying pure water or ultrapure water used in the pharmaceutical manufacturing industry, semiconductor manufacturing industry, food industry, boiler water or research facilities. The present invention relates to a method for manufacturing a semiconductor device.

[0002]

2. Description of the Related Art Conventionally, as a method for producing deionized water, generally, a method of obtaining deionized water by flowing treated water through a packed bed of ion exchange resin and adsorbing and removing impurity ions on the ion exchange resin is generally used. It is a target. In this method, regeneration of the ion-exchange resin having reduced exchange / adsorption capacity is usually performed using an acid or an alkali. However, in this method, since such regeneration is necessary, there is a problem that waste liquid caused by the acid or alkali is discharged together with troublesome regeneration operation.

For this reason, a method for producing deionized water that does not require regeneration is desired. In recent years, a self-regenerating electrodialysis deionization method that does not require a regeneration operation using a chemical solution has been developed and put into practical use. In this method, a mixture of an anion exchange resin and a cation exchange resin is placed in a desalting chamber of an electrodialysis tank in which an anion exchange membrane and a cation exchange membrane are alternately arranged, and the water to be treated is placed in the desalting chamber. This is a method of producing deionized water by applying a voltage and performing electrodialysis while flowing concentrated water into a concentrating chamber formed and arranged alternately with a demineralizing chamber while flowing the same.

That is, in the conventional method for producing self-regenerating electrodialysis deionized water, a cation exchange membrane and an anion exchange membrane are alternately arranged between an anode chamber having an anode and a cathode chamber having a cathode. Dehydration of an electrodialysis tank having a desalination chamber in which the anode side is partitioned by an anion exchange membrane and the cathode side is partitioned by a cation exchange membrane, and a concentration chamber in which the anode side is partitioned by a cation exchange membrane and the cathode side is partitioned by an anion exchange membrane. Using a deionized water producing apparatus containing an anion exchange resin and a cation exchange resin in the salt chamber, the water to be treated flows into the desalination chamber while applying voltage, and the water or By flowing a part of the treated water as concentrated water, impurity ions in the treated water are removed.

According to this method, since the ion exchanger is continuously regenerated, there is an advantage that regeneration with a chemical such as acid or alkali is not required. However, since a high voltage is generally applied, there is a problem in that the cost is increased due to the power consumption and the attached rectifier. For this reason, how to reduce the voltage is an important issue, and the amount of wastewater has been greatly reduced as compared with the case of using a packed bed of ion exchange resin. It is strongly desired to actively increase the raw water utilization rate in order to further reduce the amount of wastewater.

[0006] Among the above-mentioned problems, reducing the voltage means how to reduce the electric resistance of the desalting chamber and / or the concentrating chamber. Since the anion and cation exchange resins accommodated in the container are already conductors, it is considered that an important factor in reducing the electric resistance is in the concentration chamber.

Therefore, as a method of reducing the electric resistance in the concentrating chamber, a method of reducing the thickness of the concentrating chamber to reduce it is considered. However, since the electrodialysis tank is usually composed of a plurality of pairs, if the thickness of the concentrating chamber is made extremely thin, the difference in the flow rate distribution of the fluid between each pair becomes remarkable, which may lead to a local voltage increase. Also, there is a restriction from the viewpoint of accuracy in manufacturing the concentrating chamber, and the thickness of the concentrating chamber that is actually allowed is limited.

On the other hand, considering the case where the liquid flow system on the side of the concentrating chamber is not of the circulation type, the practical flow rate ratio of the water to be treated and the concentrated water in the conventional electrodialysis tank is 3: 1 to 5:
When the water to be treated was desalinated to pure water, the concentration ratio of impurity ions in the concentrated water was 4 to 6 times. However, at such a concentration ratio, even if the thickness of the chamber frame is made as thin as possible, a satisfactory reduction in electric resistance is not achieved, and on the contrary, a problem arises in the distribution of liquid flow and the applied voltage is increased. It is possible.

Another method for reducing the electric resistance in the concentration chamber is to increase the concentration of the concentrate.
As this method, a mode of reducing the flow rate of the concentrated water can be considered. That is, a method of increasing the concentration magnification by reducing the flow rate of the concentrated water, thereby increasing the conductivity and reducing the applied voltage. However, in order to suppress the generation of ion concentration gradients in the concentration chamber and to prevent scale precipitation due to hardness components such as Ca ions and Mg ions, it is necessary to cause concentrated water to flow at a flow rate of a certain level or more to cause turbulence. There is. For this reason, reducing the flow rate of the concentrated water as described above has a problem that the necessary turbulence is reduced or made impossible.

Therefore, it is conceivable to increase the flow rate ratio between the water to be treated and the concentrated water (the ratio of treated water / concentrated water) and increase the linear velocity of the liquid in the concentration chamber. However, when the liquid flow system on the enrichment chamber side is not a circulation system, as described above, in addition to the problem of the frame thickness, the amount of water to be treated or the amount of treated water to be supplied as a concentrate increases, There is a drawback that the water utilization rate decreases and the amount of waste liquid increases.

Further, as a method of reducing the electric resistance of the concentration chamber, a method of filling the concentration chamber with an ion exchange resin is also conceivable. However, since the thickness of the concentrating chamber is originally thin, it is difficult to fill it with an ion exchange resin, and the feasibility is poor at present. Also, even if the chamber frame is thickened and filled, the pressure loss increases, making it difficult to balance the pressure between the concentrating chamber and the desalting chamber. Also increases. As described above, there are several methods for reducing the electric resistance of the concentrating chamber. However, when the liquid flow system on the concentrating chamber side is not a circulation system, each of the methods includes the disadvantages as described above and has been fundamentally performed. No solution has been reached.

[0012]

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and has a cation exchange membrane and an anion exchange membrane which are alternately arranged between a cathode and an anode. In a deionized water production apparatus in which an ion exchanger is accommodated in the desalination chamber in an electrodialysis tank formed by forming a salt chamber and a concentration chamber, the prior art has been improved by adding fine measures to its operating conditions. It is an object of the present invention to provide a method for producing deionized water by a self-regeneration type electrodialysis deionization method, which solves the above-mentioned disadvantages.

[0013]

According to the present invention, a cation exchange membrane and an anion exchange membrane are alternately arranged between an anode chamber having an anode and a cathode chamber having a cathode, and the anion exchange membrane is provided on the anode side. An ion exchanger is provided in a desalination chamber of an electrodialysis tank in which a deionization chamber is defined and a cathode side is partitioned by a cation exchange membrane, and a concentration chamber is defined on the anode side by a cation exchange membrane and the cathode side is partitioned by an anion exchange membrane. Using a deionized water production apparatus containing water, the water to be treated flows into the desalination chamber while applying a voltage, and at least part of the water to be treated or the treated water is circulated as concentrated water. In the self-regeneration type electrodialysis deionized water producing method for removing impurity ions in the treated water, the flow ratio of the water to be treated flowing into the desalting chamber to the concentrated water flowing into the concentrating chamber is 2: 1 to 5.5: 1. And in the desalination room 0.5 to the linear velocity of the water to be treated that
Producing deionized water by a self-regeneration type electrodialysis deionization method, wherein the linear velocity of the concentrated water in the concentration chamber is set to be 1.2 to 20 times the linear velocity of the deionization chamber at 7.0 cm / sec. Is the way.

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In the present invention, a cation exchange membrane and an anion exchange membrane are alternately arranged between an anode chamber provided with an anode and a cathode chamber provided with a cathode, and the anode side is partitioned by an anion exchange membrane and the cathode is separated. An ion exchanger is accommodated in a desalting chamber of an electrodialysis tank which forms a desalting chamber whose side is partitioned by a cation exchange membrane and a concentrating chamber whose anode side is partitioned by a cation exchange membrane and whose cathode side is partitioned by an anion exchange membrane. Deionized water production equipment. The concentrated liquid flowing into the concentrating chamber is preferably circulated and reused between another tank and the concentrated chamber, and a certain amount of the water to be treated or a part of the treated water is added to the circulating system to thereby concentrate the concentrated liquid. Is kept constant. The amount of water to be treated or treated water added in this manner is not particularly limited, but is practically preferably 0.2% with respect to all the water to be treated.
Operate in the range of ９9.5% by weight. Here, the treated water is water flowing out of the desalinated water.

FIG. 1 is a view schematically showing one embodiment of a self-regenerating type electrodialysis deionization apparatus which can be used in the present invention. In FIG. 1, A is an anion exchange membrane and K is a cation exchange membrane. As shown, these anion exchange membrane A and cation exchange membrane K are installed in the electrodialysis tank 1 in the desalting chamber frames D ₁ , D ₂ , D
₃ ... Dn and the enrichment chamber frames C ₁ , C ₂ , C ₃ ... Cn ₊₁ are arranged at predetermined intervals, whereby the anode chamber 2 and the enrichment chambers S ₁ , S _2. Sn ₊₁ , desalination chamber R ₁ , R ₂ ...
Rn and the cathode chamber 3 are configured. And the desalination chamber R ₁ ,
R ₂ ... Rn are filled and filled with a positive and negative ion exchange resin. A structure such as a mesh, that is, a spacer is inserted and arranged in the concentration chamber.

In FIG. 1, reference numeral 4 denotes an anode, and 5 denotes a cathode, and a predetermined voltage is applied between both electrodes during operation. Thereby, the anion component in the liquid to be treated, which is introduced from the conduit 6 into the desalting chambers R ₁ , R _2, ..., Rn, permeates and transfers to the concentration chamber on the anode side through the anion exchange membrane A. The cation component passes through the cation exchange membrane K to the concentration chamber on the cathode side, and the liquid to be treated is deionized and discharged through the conduit 7. The concentrated liquid is introduced into each of the concentrating chambers S ₁ , S ₂ ... Sn _{+ 1} and the anode chamber 2 and the cathode chamber 3 through the introduction pipe 8, where the permeated and transferred anions and cations are collected and concentrated. The liquid is discharged from the conduit 8 as a liquid. The anolyte is discharged from the anolyte chamber 2 and the catholyte chamber 3 through an anolyte outlet pipe 13 and a catholyte outlet pipe 14, respectively. In addition,
FIG. 1 shows a case where the direction of the liquid flow to be treated and the direction of the concentrated liquid flow are the same direction (cocurrent), but both directions are opposite (backflow).
Needless to say, it may be.

The cations in the water to be treated captured by the cation exchanger in each of the desalting chambers R ₁ , R ₂ ... Rn are given a driving force by an electric field and come into contact with the captured cation exchanger. Through the cation exchanger, and reaches the cation exchange membrane, and further passes through the membrane to each of the concentration chambers S ₁ , S ₂ ... S
Move to n _{+ 1} . Similarly, the anions in the water to be treated captured by the anion exchanger are passed through the anion exchanger and the anion exchange membrane in contact with the anion exchanger to form the respective enrichment chambers S ₁ , S _2.
Move to Sn _{+ 1} .

As described above, in the present invention, the concentrated liquid flowing out of each enrichment chamber is preferably circulated and reused between each enrichment chamber and another tank. The concentration is kept constant by adding a part of water or treated water. In FIG. 1, reference numeral 10 denotes a tank. The concentrate from each of the concentration chambers S ₁ , S _2, ..., Sn ₊₁ is introduced into the tank 10 from the outlet pipe 8, and then circulated and reused through the conduit 9. P1 is a circulation pump whose discharge port is connected to the concentrated liquid introduction pipe 9. In the present invention, the water to be treated and the concentrated water are controlled to a predetermined liquid flow ratio by controlling the water to be newly added to the concentrated liquid circulation system. Shunted regulating valve
(Not shown) and introduced into the tank 10 and added to the circulating concentrate. In the present invention, treated water may be used in place of the water to be treated, but in this case, the water is separated from the treated water conduit 7.

Next, in the present invention, first, the flow rate ratio of concentrated water to treated water (= treated water / concentrated water) is 2: 1.
To 5.5: 1. The reason is that if the flow rate of the water to be treated is less than twice the flow rate of the concentrated water, it is difficult to obtain sufficient electric conductivity even if the concentrated liquid is circulated and reused. If the flow rate exceeds 5.5 times, the efficiency of deionization is reduced and the quality of deionized water is reduced. In particular, the range is 3: 1 to 5: 1
It is preferred that

However, even if only the flow rate ratio of the concentrated water to the water to be treated is satisfied, sufficient results can be obtained if the linear velocities of the respective fluids in the desalting chamber and the concentrating chamber do not satisfy predetermined conditions. It is not possible. In the case of desalination, it is usual to operate the desalination chamber with an overpressure so that the water to be treated is not contaminated by the concentrated liquid even if an internal leak occurs. However, for the water to be treated, if the linear velocity is lower than 0.5 cm / sec, it is difficult to obtain an appropriate pressure loss, and the absolute pressure in the concentrating chamber becomes higher. Conversely, the linear velocity of the liquid to be treated is 7.0 c.
If the pressure is higher than m / sec, the pressure loss becomes too high and the contact time with the resin becomes short, so that the efficiency of deionization may be reduced and the quality of deionized water may be reduced. Therefore, the linear velocity of the water to be treated in the desalting chamber is 0.5 to 7.0 c.
m / sec, preferably in the range of 1.0 to 5.5 cm / sec.

On the other hand, for the concentrated liquid, the linear velocity of the liquid in the concentrating chamber is at least 1.2 times higher than the linear velocity of the liquid in the desalting chamber.
It is necessary to take a value higher than double. In the concentration chamber, a structure is usually used to prevent deformation and secure a flow path, and the structure is often a mesh. However, this structure has a smaller pressure loss than the ion exchange packing in the desalting chamber. For this reason, when the linear velocity of the liquid flowing through the concentrating chamber is less than 1.2 times the linear velocity of the liquid flowing through the desalting chamber, the pressure of the concentrating chamber with respect to the desalting chamber is too low, and the structure, for example, the mesh The ion exchange membrane bites into the opening, making it difficult to secure an appropriate flow rate.

At such a low linear velocity, it is extremely difficult to generate an effective turbulent flow in the enrichment chamber, and furthermore, there is a high possibility of scale generation due to hardness components such as Ca ions and Mg ions. Become. On the other hand, if the linear velocity of the liquid flowing through the condensing chamber exceeds 20 times the linear velocity of the liquid flowing through the desalting chamber, the operation conditions for setting the pressure of the desalting chamber higher than that of the concentrating chamber will be disrupted, and the quality of the treated water will decrease. I do. For this reason, the linear velocity of the concentrated water in the enrichment chamber is 1.2 to 20 with respect to the linear velocity of the desalination chamber.
Times, preferably 1.5 to 15 times.

In the present invention, in order to provide the above specific flow rate ratio and linear velocity, the thickness of the desalting chamber is set to 0.3 to 30 c.
m and the thickness of the concentration chamber are preferably in the range of 0.01 to 3.7 cm. That is, the thickness of the desalination chamber is 0.3
cm, the number of components for a given load increases, and the cost increases. On the other hand, if it exceeds 30 cm, the probability that the cation exchange resin and the anion exchange resin are continuously connected between the cation exchange membrane and the anion exchange membrane separating the desalting chamber becomes extremely low, so that the desalination efficiency becomes low. Not so desirable. On the other hand, the thickness of the concentration chamber is 0.01 c
When the thickness is less than m, it is very difficult to suppress the liquid dispersion in each chamber frame. Also disadvantageous. Above all, the thickness of the desalination chamber is 0.7 to 15 cm, and the thickness of the concentration chamber is 0.04 to 2 cm.
Is particularly preferred.

The concentration of the concentrated water can be increased by adding a salt or an acid to the concentrated liquid to be recycled. In particular, the addition of a salt or an acid in the circulation system can be arbitrarily controlled in concentration and pH of the concentrated water by combining it with the amount of the water to be treated or the amount of the treated water supplied separately. In addition, it is effective in preventing the precipitation of hardness components, particularly Ca salts, in the concentration chamber. In actual operation, the electric conductivity of the concentrated water is 50 to 300 in consideration of the water to be treated, the treated water, and the basic unit of salt or acid.
It is desirable to be in the range of 0 μS / cm.

[0025]

EXAMPLES Hereinafter, the present invention will be described in more detail with reference to Examples, but it is a matter of course that the present invention is not limited to these Examples. A self-regenerating type electrodialysis device as shown in FIG. 1 was used as the device to be used, but the water to be treated and the concentrated water were used as cocurrent flows in the upward direction. Comparative Example 1 is a case in which the liquid flow on the side of the enrichment chamber is not circulated and one pass is performed. FIG.
In other words, the conduit 8 is cut, water to be treated is introduced from the conduit 9, and discharged from the conduit 8. Further, in Comparative Example 2, the thickness of the concentrating chamber was changed from that of the other examples to 0.3.
In Example 2 and Comparative Example 2, Mg ²⁺ ions equivalent to 1 ppm were added to the concentration chamber as a scale generation acceleration factor.

Examples 1-2 and Comparative Examples 1-2 Cation exchange membranes (strongly acidic heterogeneous membrane, thickness 500 μm, ion exchange capacity 4.5 meq / g dry resin) and anion exchange membranes (strong A filter press type in which a basic heterogeneous membrane, a thickness of 500 μm, and an ion exchange capacity of 3.5 meq / g dry resin) are arranged and fastened through a desalting chamber frame (made of polypropylene) and a concentrating chamber frame (made of polypropylene). An effective area of 507 cm ² [diameter (width of the chamber frame) 13 cm, comprising a dialysis tank (a polypropylene net is inserted in the concentration chamber)
Vertical (= desalting length) 39 cm] × 3 pairs of electrodialysis tanks were configured. Here, in Examples 1 and 2 and Comparative Example 1, the thickness of the desalting chamber was 0.8 cm and the thickness of the concentrating chamber was 0.19 cm. In Comparative Example 2, the thickness of the concentrating chamber was 0.38 cm.

The desalting chamber is filled with a mixture of a cation exchange resin, an anion exchange resin and a binder and molded into a plate and dried, and the enrichment chamber is made of a synthetic resin for securing a flow path. Was filled. The above both ion exchange resins have a particle diameter of 400 to 600 μm and an ion exchange capacity of 4.5 meq / g dry resin sulfonic acid type (H type) cation exchange resin (manufactured by Mitsubishi Chemical Corporation, trade name: Diamond Ion SK-1B) and particle size of 400 to 600 μm
m, ion exchange capacity is 3.5 meq / g 4 of dry resin
A grade ammonium salt type (OH type) anion exchange resin (manufactured by Mitsubishi Chemical Corporation, trade name: Diaion SA-10A) is used, and the ion exchange capacity ratio is 50/50.

Using this electrodialysis tank, a production test of deionized water was performed as follows. The industrial water was filtered and treated with a reverse osmosis membrane device to be treated water. The electric conductivity, pH value, and composition of the components of the industrial water and the treated water are as shown in Table 1. The water to be treated was used as a liquid to be treated and a concentrated liquid, both of which were passed through an upward flow, regenerated under predetermined electric regeneration conditions, and then carried out under the flow conditions shown in Table 2.

Table 3 shows the conditions of the applied voltage and the direct current at this time. The applied voltage shown in Table 3 is a voltage necessary to obtain good deionized water having a specific resistance of at least 10 MΩ · cm or more. Comparative Example 1 is a case in which the liquid flow on the side of the enrichment chamber is not circulated and one pass is performed. In Examples 1 and 2 and Comparative Examples 1 and 2, Tables 2 and 3
It was operated continuously for 750 hours under the conditions shown in (1). After the operation was completed, the electrodialysis tank used was dismantled, and the scale generation status on the enrichment room side was confirmed. Tables 2 and 3 show these results.

[0030]

[Table 1]

[0031]

[Table 2]

[0032]

[Table 3]

As is clear from Tables 2 and 3, Comparative Example 1
That is, when the liquid flow on the concentration chamber side is one-pass, the conductivity of the concentrated water is much lower (that is, the concentration is lower) and the applied voltage is higher than in Example 1 in which the flow ratio and the flow velocity are the same. In addition, the raw water utilization rate of Comparative Example 1 is 20% lower than that of Example 1. Furthermore, comparing Example 2 with Comparative Example 2 in which Mg ²⁺ ions equivalent to 1 ppm were added to the concentration chamber as an acceleration factor of scale generation, no scale was generated in Example 2, whereas Comparative Example 2 was evident. Scale generation was observed. It can be seen that the hardness component scale occurs when the liquid linear velocity on the concentration chamber side is low even though the flow ratio of the liquid to be treated and the concentrated liquid is the same.

[0034]

According to the present invention, by controlling the water to be treated or the amount of treated water to be newly added to the concentrated liquid circulation system, the treated water and the concentrated water are set to a predetermined liquid flow rate ratio, and each liquid linear velocity is controlled. Is within a predetermined range, high conductivity in the enrichment chamber is ensured, and effective turbulence is generated by a high linear velocity, so that operation at a low applied voltage can be performed while suppressing generation of scale in the enrichment chamber. For this reason, the power consumption can be reduced. Further, since a high raw water utilization rate can be easily obtained, the amount of waste liquid to the outside of the system can be reduced, thereby reducing the processing cost, and the cost per production water amount can be further reduced.

[Brief description of the drawings]

FIG. 1 is a view schematically showing one embodiment of a self-regeneration type electrodialysis deionization apparatus that can be used in the present invention.

[Explanation of symbols]

A anion exchange membrane K cation exchange membrane 1 vessel (electrodialyser) 2 anode chamber 3 the cathode chamber 4 anode 5 cathode S _1, S ₂ ··· Sn ₊₁ concentrating compartments R _1, R ₂ ··· Rn desalting D ₁ , D ₂ , D ₃ ... Dn Deionization chamber frame C ₁ , C ₂ , C ₃ ... Cn _{+ 1} Concentration chamber frame 6 Liquid inlet pipe 7 Deionized water conduit 8 Concentrate inlet pipe 9 Concentrated liquid outlet pipe 10 Tank 11 Concentrated liquid circulation pipe 12 Liquid to be treated branch pipe 13 Anolyte outlet pipe 14 Catholyte outlet pipe P1 pump

 ──────────────────────────────────────────────────の Continuing on the front page (72) Inventor David Florian Tessir Guelph Royal Road, Ontario, Canada 29 Inside Greg Water Conditioning, Inc.

Claims (3)

[Claims] A cation exchange membrane and an anion exchange membrane are alternately arranged between an anode chamber having an anode and a cathode chamber having a cathode, and the anode side is partitioned by an anion exchange membrane and the cathode side is a cation exchange membrane. Deionized water containing an ion exchanger in a desalination chamber of an electrodialysis tank in which a partitioned desalination chamber and a concentration chamber partitioned on the anode side with a cation exchange membrane and the cathode side with an anion exchange membrane are formed. Using the manufacturing apparatus, the water to be treated flows into the desalination chamber while applying a voltage, and at least a part of the water to be treated or the treated water is circulated as concentrated water to remove impurity ions in the water to be treated. In the self-regenerating type electrodialysis deionized water production method, the flow ratio of the water to be treated flowing into the desalting chamber to the concentrated water flowing into the concentration chamber is 2: 1 to 5.5: 1, and Set the linear velocity of the treated water to 0. And ~7.0cm / sec, 1 the linear velocity of the concentrated water in the concentrating compartments against desalting compartment linear velocity.
A method for producing deionized water by a self-regenerating electrodialysis deionization method, wherein the amount is 2 to 20 times. 2. The deionization method according to claim 1, wherein the thickness of the desalting chamber is 0.3 to 30 cm, and the thickness of the concentrating chamber is 0.01 to 3.7 cm. Ion water production method. 3. The self-regenerating electrodialysis deionization according to claim 1, wherein the flow rate ratio, the linear velocity and the linear velocity ratio are adjusted by adding a salt or an acid to the concentrated solution to be recycled. Deionized water production method by the method.