JPH10312537A - Apparatus for producing magnetic recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To surely produce magnetic recording media of a required characteristic for a long time and improve productivity, by making widths of a can roll and a non-magnetic base body approximately equal to each other, thereby making a formation condition of a magnetic film on the non-magnetic base body constant at all times. SOLUTION: A width of a base film 6 which becomes a magnetic recording medium is made equal to that of a cooling can roll 7, and therefore, the cooling can roll 7 is covered all in a breadthwise direction thereof with the base film 6. A conventionally used masking part preventive from attachment at each end of the base film 6 is eliminated, so that the base film 6 and cooling can roll 7 are covered only with a maximum incidence angle regulation mask 9 and a minimum incidence angle regulation mask 10. For instance, the cooling can roll 7 has a diameter of 1000 m and a breadth of 300 m, and the base film 6 is obtained by vapor-depositing 0.2 μm CoO on a PET film of 10000 m length, 300 mm breadth and 6 μm thickness.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a magnetic recording medium manufacturing apparatus for forming a magnetic film on a non-magnetic substrate.

[0002]

2. Description of the Related Art The recording density of a magnetic tape has been rapidly increased in recent years. In this process, magnetic tapes have shifted to high-performance iron oxide tapes, metal tapes, and thin film tapes having high coercive force and high magnetic flux density. As an application of this magnetic tape, in the field of VTRs, a thin film tape is particularly noted in the future in order to achieve digitization and high definition.

As this thin film tape, a so-called evaporation tape in which a magnetic film is formed by an oblique evaporation method has been put to practical use. Specifically, a magnetic material such as Co or CoNi in a crucible is irradiated with an electron beam in a vacuum using a pierce-type electron gun to melt and evaporate these materials. , PEN, PI (polyimide), PA (polyamide)
It is manufactured by forming a thin film made of oO and CoNiO.

FIG. 2 shows a general film forming apparatus using this oblique evaporation method. In FIG. 2, an unwinding roll 2, a take-up roll 3, guide rolls 4, 5 and a cooling can roll 7 are respectively arranged in a vacuum chamber 1, and a non-magnetic substrate, that is, a base film 6 is indicated by an arrow. Roll 2 → guide roll 4 → cooling can roll 7 →
It travels in the direction of the guide roll 5 → the take-up roll 3. A cooling device (not shown) is provided inside the cooling can roll 7 in order to prevent deformation of the base film 6 due to a rise in temperature during vapor deposition on the base film 6.

[0005] A crucible 8 containing a magnetic material 11 is disposed below the cooling can roll 7.
For example, a pierce-type electron gun 12 is provided as a heating device for melting and evaporating the magnetic material 11 on the side wall. The electron beam 13 emitted from the piercing type electron gun 12 is controlled by a deflection magnet 14 which is arranged close to the crucible 8 and applies a deflection magnetic field in the trajectory of the electron beam 13.
Is performed by the deflection magnet 15 in the pierce type electron gun 12. The irradiation position of the electron beam 13 is located at the center of the crucible 8 and is scanned at a predetermined period in the width direction of the base film 6 to melt and evaporate the magnetic material 11 in the crucible 8.
Also, a method of scanning a straight electron beam emitted from the pierce-type electron gun 12 in the crucible 8 using only the deflection magnet 15 in the pierce-type electron gun 12 without installing a deflection magnet close to the crucible 8. There is also.

In the vicinity of the outer peripheral surface of the cooling can roll 7, the maximum incident angle θmax (generally 90 °) and the minimum incident angle θmin of the vapor flow of the magnetic material 11 with respect to the base film 6.
(Generally 40 °) masks 9 and 1
0 is provided. Then, while the base film 6 is traveling on the outer periphery of the cooling can roll 7, the range of the maximum and minimum incident angles set at a predetermined angle (this range is
The magnetic material 11 evaporated at the vapor deposition opening adheres to the surface of the base film 6 to form a magnetic film. At this time, the magnetic characteristics of the obtained magnetic film are determined by the maximum incident angle θmax and the minimum incident angle θmin of the vapor flow of the magnetic material.

[0007] As shown in FIG.
Is formed smaller than the cooling can roll 7.
The maximum incident angle restricting mask 9 and the minimum incident angle restricting mask 10 are formed as an integral member, and this member further prevents deposits from being deposited on both ends of the base film 6 not covered by the base film 6. Protective mask part 16
Are formed integrally. The deposition mask portion 16 also covers both ends of the base film 6 in consideration of the fact that the deposit goes around through the gap 17 between the deposition mask portion 16 and the cooling can roll 7 as shown in FIG. It is formed as follows.

[0008]

However, in the above conventional example, a large amount of evaporating material adheres to the deposition-preventing mask portion 16 in the process of forming a film on the base film 6 as shown in FIG. ), Since the amount of the deposit 18 increases with the elapse of the film formation time, the evaporation flow 19 causes the deposit 1
8 prevents the film from reaching the base film 6. For this reason, there is a problem that the film thickness and the magnetic characteristics at the end of the base film 6 change with the lapse of the film forming time, and it is impossible to reliably manufacture a magnetic recording medium having desired characteristics for a long time. Further, since both ends of the base film 6 are covered with the anti-adhesion mask portion 16, no magnetic film is formed at this portion, and therefore, there is a problem that productivity is poor.

In view of the above-mentioned conventional problems, the present invention can reliably manufacture a magnetic recording medium having desired characteristics over a long period of time by keeping the conditions for forming a magnetic film on a nonmagnetic substrate constant. Another object of the present invention is to provide a magnetic recording medium manufacturing apparatus capable of improving productivity.

[0010]

According to the present invention, in order to achieve the above object, the width of the can roll and the non-magnetic substrate are made substantially the same. That is, according to the present invention, in a magnetic recording medium manufacturing apparatus for forming a magnetic film on a non-magnetic substrate running on a can roll, the width of the can roll and the non-magnetic substrate are substantially the same. A magnetic recording medium manufacturing apparatus is provided.

[0011]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram showing a main part of an embodiment of a magnetic recording medium manufacturing apparatus according to the present invention.

In FIG. 1, the width of the base film 6 is the same as that of the cooling can roll 7, so that the width direction of the cooling can roll 7 is entirely covered by the base film 6. Further, as in the conventional example, the masking portions 16 are not provided at both ends of the base film 6, and the base film 6 and the cooling can roll 7 are covered only by the maximum incident angle restricting mask 9 and the minimum incident angle restricting mask 10. .

[0013]

Next, an embodiment will be described. <Example 1> In the apparatus shown in FIGS. 1 and 2, a cooling can roll 7 having a diameter of 1000 mm and a width of 300 mm was used, and oxygen was introduced into the vacuum chamber 1 while the base film 6 was 10,000 m long and 300 mm wide. A PET film having a thickness of 6 μm is run on the cooling can roll 7 at a speed of 50 m / min.
m of CoO was deposited. The incident angle at the time of film formation of the vapor flow is such that the initial incident angle is 90 ° and the minimum incident angle is 40 °.

<Comparative Example 1> In the apparatus shown in FIGS. 2 to 4, the cooling can roll 7 has a diameter of 1000 mm and a width of 4 mm.
A PET film having a length of 10000 m, a width of 300 mm, and a thickness of 6 μm as a base film 6 was introduced at 50 m / m while oxygen was introduced into the vacuum chamber 1 in the same manner.
In, 0.2 μm CoO was deposited on the PET film 6 by running on the cooling can roll 7. The incident angle at the time of film formation of the vapor stream is such that the initial incident angle is 90 ° and the minimum incident angle is 40.
°. In addition, as shown in FIG. 4, the width L of the end of the PET film 6 covered by the anti-adhesion mask portion 16 is 30 mm.

Table 1 shows the results of measuring the Hc, Rs, and film thickness of the CoO magnetic film formed at a position 40 mm from the end of the film every 2000 m from the start of film formation in both Example 1 and Comparative Example 1. I have. As shown in Table 1, in Comparative Example 1, Hc, Rs, and the film thickness deteriorated as the deposition distance became longer because of the influence of the evaporant 18 deposited on the deposition-preventing mask portion 16. In No. 1, Hc, Rs
The film thickness and the film thickness hardly deteriorated even when the film formation distance was increased. In the above description, a vapor deposition method has been described as an example of a film forming method, but the present invention can also be applied to a sputtering method.

[0016]

[Table 1]

[0017]

As described above, according to the present invention, since the width of the can roll and the non-magnetic substrate are made substantially the same, the conditions for forming the magnetic film on the base film are always kept constant to achieve the desired characteristics. The magnetic recording medium can be reliably manufactured for a long time, and the productivity can be improved.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a main part of an embodiment of an apparatus for manufacturing a magnetic recording medium according to the present invention.

FIG. 2 is a configuration diagram showing an apparatus for manufacturing a magnetic recording medium according to the present invention.

FIG. 3 is a configuration diagram showing a main part of a conventional magnetic recording medium manufacturing apparatus.

FIG. 4 is an explanatory diagram showing deposits in a conventional magnetic recording medium manufacturing apparatus.

[Explanation of symbols]

 6 Base film (non-magnetic substrate) 7 Cooling can roll

Claims (2)

[Claims] 1. A magnetic recording medium manufacturing apparatus for forming a magnetic film on a non-magnetic substrate running on a can roll, wherein the width of the can roll and the non-magnetic substrate are substantially the same. Equipment for manufacturing magnetic recording media. 2. A magnetic film is formed by applying a vapor flow from an evaporation source of a magnetic material to a non-magnetic substrate running on a can roll by oblique vapor deposition. For manufacturing magnetic recording media.