JPH10262515A - Production of member for guide - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide the subject member capable of simultaneously satisfying abrasion resistance, sliding properties and manufacturability and especially sufficiently improving the sliding properties by molding a ceramic powder in a mold, sintering the resultant molded product, regulating the surface roughness thereof so as to afford specific conditions and forming a diamondlike carbon film having a specified thickness on the surface thereof. SOLUTION: This member for guide is obtained by molding a ceramic powder in a mold, sintering the molded product, then regulating the surface of the sintered product to a surface roughness of <=3.0 μm center line average height (Ra ) and subsequently forming a diamondlike carbon film having 0.5-10 μm thickness through a bonding middle film having preferably <=0.3 μm thickness (silicon or silicone carbide or titanium carbide) on the surface thereof. A plasma chemical vapor deposition(CVD) method, an ionic vapor deposition method or a sputtering method can be applied to the formation of the diamondlike carbon film.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method for manufacturing a guide member. Various guides for guiding a yarn or a cloth are used in a textile machine. Various guides for guiding a fishing line are used for fishing gear. Further, various guides for guiding the tape are used in electric or electronic equipment. These guides include thread, cloth,
Alternatively, various guide members are used which are in direct contact with the tape to guide them. Due to its nature, the guide member has abrasion resistance and does not adversely affect yarns, cloths or tapes (hereinafter referred to as running materials) that run in direct contact with the guide member. However, in recent years in which ultra-thin yarns or ultra-thin cloths and tapes have been achieved, and these speeds have been increased, the above requirements have become even stronger. The present invention relates to a method for manufacturing a guide member that meets such recent strong demands.

[0002]

2. Description of the Related Art Conventionally, as a method of manufacturing such a guide member, a metal material or a ceramic material is generally used to form the guide member into a predetermined shape (Japanese Patent Publication No. 52-48647; 57-102472, JP-A-4-271739). However, such a conventional method has disadvantages in that the resulting guide member has poor wear resistance and low slidability. If the abrasion resistance is inferior, the frequency of replacement of the guide member increases, and if the slidability is low, the generated frictional heat impairs the quality of the traveling material, and in some cases, cuts the traveling material.

Therefore, as an improved method of manufacturing a guide member, a method has been proposed in which a metal material or a ceramic material is used to form a predetermined shape and then a diamond film is formed on the surface of the formed product. (JP-A-7-3
22796). However, although this conventional method has an advantage that the wear resistance of the obtained guide member is correspondingly better than the case where the molded article is used as it is, when a diamond film is formed on the surface of the molded article by a CVD method or the like. However, the surface of the film is covered with sharp projections of axially crystallized diamond, and the running material will be cut in a short time in this state. Processing has to be performed, and as a result, there is a disadvantage in that the production of the guide member is troublesome.

[0004]

The problem to be solved by the present invention is that the conventional method cannot simultaneously improve the wear resistance, slidability and manufacturability of the guide member obtained, and This is because the improvement of the performance is insufficient, and as a result, the running material is adversely affected.

[0005]

Means for Solving the Problems The inventors of the present invention have studied to solve the above problems, and as a result, have formed a ceramic powder by molding, sintered the molded product, and obtained a sintered product. It has been found that a method of adjusting the surface roughness of the surface of the sintered product to a predetermined value or less and forming a diamond-like carbon (DLC) film on the surface with a thickness in a predetermined range is correct and suitable.

That is, the present invention relates to a method for manufacturing a guide member, which includes the following first step and second step. First step: After molding a ceramic powder by molding and sintering the molded product to obtain a sintered product, the surface roughness of the sintered product is adjusted to a center line average roughness (Ra) of 3.0 μm or less. Process. Second step: thickness 0.5 on the surface of the sintered material whose surface roughness has been adjusted
A step of forming a diamond-like carbon film of 10 to 10 μm.

In the present invention, known ceramic powders can be used. Examples of such ceramic powders include Al ₂ O ₃ , ZrO ₂ , TiO ₂ , SiC,
Si ₃ N _{4 and the} like or a mixture thereof, but SiC
And / or a material mainly composed of Si ₃ N ₄ is preferable. In the present invention, the above-mentioned ceramic powder is molded together with a binder, if necessary, to obtain a molded product having a predetermined shape. Then, this molded product is sintered to obtain a sintered product. For example, after filling SiC powder into a mold having a predetermined shape and molding it into a predetermined shape,
The molded product is heated at about 1200 ° C. and sintered. The obtained sintered product is usually washed in order to remove oils, dust and the like adhering to its surface. For example, after the surface of the sintered product is washed with an organic solvent such as alcohol or acetone, the remaining organic solvent is evaporated by drying.

The surface of the sintered product is adjusted for its surface roughness. For adjusting the surface roughness of the sintered product, a known method such as a sand blast method, a barrel polishing method, and a buff polishing method can be applied, but the buff polishing method is preferable. The surface roughness of the sintered product is adjusted so that the center line average roughness (Ra) is 3.0 μm or less, preferably 0.3 μm or less.
Perform as follows. The sintered product whose surface roughness has been adjusted is usually washed to remove polishing residues, dust, and the like attached to the surface. For example, when the surface roughness of the sintered material is adjusted by a buffing method, the surface of the sintered material having the adjusted surface roughness is washed with water, further washed with an organic solvent such as alcohol or acetone, and then the remaining organic material is washed. The solvent is evaporated by drying.

[0009] The sintered product having the adjusted surface roughness can directly form a diamond-like carbon film on its surface, but it is preferable to form an adhesive intermediate film on its surface prior to this. It is preferable to apply a sputtering method to the formation of the bonding intermediate film, and an argon sputtering method is particularly preferable. For example, a high-frequency voltage is applied between the target whose surface roughness has been adjusted and the target under an argon gas atmosphere in a vacuum state to form an intermediate film for bonding the target on the surface of the target whose surface roughness has been adjusted. . The bonding intermediate film is for improving the adhesion between the sintered material whose surface roughness has been adjusted and the diamond-like carbon film. Therefore, the bonding intermediate film is suitably made of silicon and / or silicon carbide. The thickness is preferably 0.3 μm or less, and more preferably about 0.1 μm. Silicon is easy to form silicon carbide as a result, and silicon carbide is easy to adapt to both the sintered material whose surface roughness has been adjusted and the diamond-like carbon film. And diamond-like carbon film to improve adhesion. When forming a bonding intermediate film on the surface of the sintered product whose surface roughness has been adjusted, usually, prior to this, a surface treatment is performed to remove fine water, hydrocarbons and the like adhering to the surface. For example, an argon plasma cleaning is performed by applying a high-frequency voltage to a sintered material whose surface roughness has been adjusted without passing through a target under an argon gas atmosphere in a vacuum state.

A diamond-like carbon film is formed on the surface of a sintered product whose surface roughness has been adjusted or an intermediate film for adhesion formed on the surface thereof. For the formation of the diamond-like carbon film, a plasma enhanced CVD method (plasma elevating chemical vapor deposition), an ECR plasma CVD method (electron cyclotron resonance plasma enhanced chemical vapor deposition), or the like, an ionized vapor deposition method or a sputtering method is applied. Is preferred. For example, a high-frequency voltage is applied to the sintered body whose surface roughness has been adjusted in a hydrocarbon gas atmosphere in a vacuum state, and a diamond-like carbon film is formed on the surface of the sintered body whose surface roughness has been adjusted. In this case, the hardness and thickness of the diamond-like carbon film can be controlled by adjusting the gas composition, the gas pressure, the voltage intensity, the treatment time, and the like. When a metal component is introduced, a diamond-like carbon film having more wear resistance or better adhesion to a sintered product can be formed. The diamond-like carbon film is intended to improve the wear resistance and slidability of the obtained guide member, and has a thickness of 0.5 to 10 μm.
m, preferably 1 to 8 μm. The surface roughness of the sintered product is adjusted so that the center line average roughness (Ra) is 3.0 μm or less, preferably 0.3 μm or less.
For the first time, when forming an intermediate film for bonding, it is formed so as to have a thickness of 0.3 μm or less, preferably about 0.1 μm. For the first time, the characteristics of diamond-like carbon as a surface film of a guide member come to life. Prior to the formation of a diamond-like carbon film, a surface-treated sintered product or a product obtained by forming an intermediate film for adhesion on the surface thereof is usually subjected to a surface treatment. This surface treatment is substantially the same as the above-mentioned surface treatment performed prior to forming the adhesive intermediate film.

The guide member obtained by the present invention and whose surface is covered with a diamond-like carbon film usually has a Vickers hardness of about 3,000 to 10,000 kg / mm ² . In addition, the diamond-like carbon film is amorphous, in which graphite and diamond coexist, and has no crystal grain boundaries. Since it is finished, troublesome surface treatment after forming the diamond-like carbon film is unnecessary. Therefore, according to the present invention, the wear resistance, slidability and manufacturability of the obtained guide member can be simultaneously improved, and especially the slidability can be significantly improved.

[0012]

FIG. 1 is a process diagram illustrating a method for manufacturing a guide member according to the present invention. A binder is mixed with the SiC powder, and the mixture is molded using a mold having a predetermined shape coated with a release agent, to obtain a molded product. This molded product is 1200 ° C
Sintering is performed by heating to a degree to obtain a sintered product. The sintered product is washed with ethyl alcohol and dried with warm air. The hot-air dried sintered product is subjected to buff polishing to have a center line average roughness (Ra) of 0.5.
Adjust the surface roughness so that it becomes μm. The sintered material whose surface roughness has been adjusted is washed with water, further washed with ethyl alcohol, dried with hot air, and then subjected to a surface treatment by an argon plasma cleaning method. An adhesive intermediate film having a thickness of about 0.1 μm is formed on the surface of the surface-treated sintered product by sputtering using silicon as a target. The surface on which the adhesive intermediate film is formed is subjected to the surface treatment again by the argon plasma cleaning method. A diamond-like carbon film having a thickness of about 5 μm is formed on the surface of the surface-treated bonding intermediate film by a plasma CVD method in a vacuum methane gas and nitrogen gas atmosphere. Thus, a guide member is obtained in which a diamond-like carbon film is formed on the surface of the sintered product whose surface roughness has been adjusted via the bonding intermediate film. Depending on the physical properties required for the guide member, the formation of the bonding intermediate film can be omitted, and when the formation of the bonding intermediate film is omitted, the surface treatment immediately before that is also omitted.

FIG. 2 is a sectional view illustrating a guide member manufactured according to the present invention. FIG. 2 shows a guide line for a fishing line attached to a fishing rod. The guide ring is formed on a surface of a ring-shaped sintered product 11 whose surface roughness is adjusted as a whole through a bonding intermediate film 21 through diamond-like carbon. The film 31 is formed. FIG.
FIG. 4 is a cross-sectional view illustrating another guide member manufactured according to the present invention. FIG. 3 shows a guide pin for a fiber yarn attached to a spinning machine. The guide pin is used for bonding to the surface of a generally cylindrical sintered product 12 having a constricted surface on the outer periphery whose surface roughness is adjusted. A diamond-like carbon film 32 is formed via an intermediate film 22.

[0014]

【Example】

Example 1 A guide ring for fishing line (outer diameter: 10
mm, inner diameter: 6 mm). First, SiC powder was molded with a mold having a predetermined shape to obtain a molded product. This molded product is
It was heated at 200 ° C. and sintered to obtain a sintered product. This sintered product was washed with ethyl alcohol and dried with warm air. The surface roughness of the hot air dried sintered product is adjusted by buffing (using an aqueous suspension of 0.03 μm alumina powder), and the surface is finished to a center line average roughness (Ra) of 0.03 μm. Was. The sintered product whose surface roughness has been adjusted is washed with water, further washed with ethyl alcohol, dried with hot air, and then subjected to an argon plasma cleaning method (pressure: 10 Pa, atmosphere gas: argon gas, supply power: 2 W / surface cm). ² , treatment time: 10 minutes). Plasma C on the surface of the surface-treated sintered product
A diamond-like carbon film having a thickness of 2 μm was formed by the VD method (pressure: 10 Pa, atmosphere gas: methane gas, supply power: 2 W / surface cm ² , formation time: 10 minutes).
Thus, a guide ring having a diamond-like carbon film formed on the surface of the sintered product whose surface roughness was adjusted was obtained.

Examples 2 to 6 and Comparative Example 1 A guide ring was obtained in the same manner as in Example 1 except that the center line average roughness (Ra) of the sintered product was adjusted as shown in Table 1 by adjusting the surface roughness. .

The guide ring obtained in each of Examples 1 to 6 and Comparative Example 1 was subjected to a heating test as an index of slidability with respect to a fishing line under the following conditions. The results are shown in Table 1. Heating test and its conditions: JP-A-4-2717
According to the method described in Japanese Patent Publication No. 39, fishing line = Toray Co., Ltd. road yarn "Ginscale PX5.0", load = 3 kg, stroke length = 300 mm, stroke time = 1 round trip / 3 seconds

[0017]

[Table 1]

Examples 7 to 10 and Comparative Examples 2 and 3 The center line average roughness (Ra) of the sintered product was adjusted to 1.0 μm by adjusting the surface roughness, and the thickness (DLC) of the diamond-like carbon film formed by the plasma CVD method was adjusted. Was changed as shown in Table 2 to obtain a guide ring in the same manner as in Example 1. With respect to the guide ring obtained in each example, a heating test was performed under the same conditions as described above. The results are shown in Table 2.

[0019]

[Table 2]

Embodiment 11 A guide line for a fishing line (outer diameter: 10
mm, inner diameter: 6 mm). First, SiC and Si ₃
By molding a mixture of equal amounts powder N ₄ in a mold of a predetermined shape to obtain a molded product. This molded product is heated at 1200 ° C. and sintered,
A sintered product was obtained. This sintered product was washed with ethyl alcohol and dried with warm air. The sintered product dried with hot air is subjected to buff polishing (using a 0.3 μm aqueous suspension of alumina powder) to adjust the surface roughness, and the surface is adjusted to have a center line average roughness (Ra) of 0.
Finished to 5 μm. The sintered material whose surface roughness has been adjusted is washed with water, further washed with ethyl alcohol, dried with hot air, and then subjected to an argon plasma cleaning method (pressure: 0.1 P).
a, atmosphere gas: argon gas, supply power: 1 W / surface
cm ² , treatment time: 10 minutes). Sputtering method (pressure: 0.1P) on the surface of the surface-treated sintered product
a, atmosphere gas: argon gas, supply power: 1 W / surface
cm ² , formation time: 3 minutes, target: silicon) and a 0.1 μm thick intermediate film for adhesion was formed. The surface on which the adhesive intermediate film was formed was again subjected to a surface treatment by an argon plasma cleaning method (pressure: 10 Pa, atmosphere gas: argon gas, supply power: 2 W / surface cm ² , treatment time: 10 minutes). Plasma CVD method (pressure: 10 Pa, atmosphere gas: methane gas, supply power: 2 W / surface cm ² , formation time: 20 minutes) on the surface of the surface of the bonding intermediate film after the surface treatment.
To form a diamond-like carbon film having a thickness of 5 μm. Thus, a guide ring was obtained in which a diamond-like carbon film was formed on the surface of the sintered product whose surface roughness was adjusted via an intermediate film for adhesion of silicon (partly silicon carbide). When a heating test was performed on this guide ring under the same conditions as described above, the heating test (times) was 89.

Example 12 Example 9 except that a diamond-like carbon film was formed on the surface of the surface-treated bonding intermediate film under an atmosphere gas of methane gas / nitrogen gas = 95/5 (volume ratio).
In the same manner as described above, a guide ring was obtained in which a diamond-like carbon film was formed on the surface of the sintered product whose surface roughness was adjusted via an intermediate film for adhesion of silicon (partly silicon carbide). About this guide ring,
A heating test was performed under the same conditions as described above, and the number of heating tests (times) was 97.

[0022]

As is apparent from the above description, the present invention described above can simultaneously improve the wear resistance, slidability and manufacturability of the obtained guide member, and can significantly improve the slidability in particular. This has the effect.

[Brief description of the drawings]

FIG. 1 is a process chart illustrating a method for manufacturing a guide member according to the present invention.

FIG. 2 is a cross-sectional view illustrating a guide member manufactured according to the present invention.

FIG. 3 is a cross-sectional view illustrating another guide member manufactured according to the present invention.

[Explanation of symbols]

11, 12: sintered product, 21, 22, ... intermediate film for bonding, 31, 32: diamond-like carbon film

Claims (6)

[Claims] 1. A method for manufacturing a guide member, comprising the following first step and second step. First step: After molding a ceramic powder by molding and sintering the molded product to obtain a sintered product, the surface roughness of the sintered product is adjusted to a center line average roughness (Ra) of 3.0 μm or less. Process. Second step: thickness 0.5 on the surface of the sintered material whose surface roughness has been adjusted
A step of forming a diamond-like carbon film of 10 to 10 μm. 2. In a second step, after forming an adhesion intermediate film having a thickness of 0.3 μm or less on the surface of the sintered product whose surface roughness has been adjusted, a thickness of 0.5 μm is formed on the surface of the adhesion intermediate film. -10
2. The method for producing a guide member according to claim 1, wherein a diamond-like carbon film having a thickness of μm is formed. 3. The method for producing a guide member according to claim 2, wherein an intermediate film for bonding silicon and / or silicon carbide is formed on the surface of the sintered body whose surface roughness has been adjusted. 4. The method for producing a guide member according to claim 1, wherein the diamond-like carbon film is formed by a plasma CVD method, an ionization vapor deposition method or a sputtering method. 5. A diamond-like carbon film is formed under an atmosphere gas into which a nitrogen gas, a silane gas and / or a metal component is introduced together with a hydrocarbon-based gas.
5. The method for producing a guide member according to 3 or 4. 6. The ceramic powder according to claim 1, wherein the main component is silicon carbide and / or silicon nitride.
Or the manufacturing method of the member for guides of 5.