JPH10230378A - Forming method, combining method and combining device using this forming method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simultaneously satisfy high joining strength and high joining preci sion and to obtain the constructing method of combination having high productiv ity by locally irradiating an energy beam on the rivet member inserted into a work to heat and applying an impressing force or vibration with a punch to the heated part. SOLUTION: First, the energy beam 19 is started to irradiate under the state not bringing an ultrasonic horn 8 into contact with a combining part 3. The joining interface in the vicinity of the combining part 3 is locally heated by irradiating the energy beam 19 to reduce a deformation resistance. Since the process occurs instantaneously, the ultrasonic horn 8 is rapidly descended. The ultrasonic vibration (e.g. the vibration of several microns to several ten microns) having the effect of the improvement of fluidity or the like due to the breakage of an oxide film and the generation of the heat by vibration in addition to thermal energy given with the energy beam 19 is applied to the joining interface. Consequently, the tip end of the combining part 3 is plastically made to flow and deformed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a molding method and a fastening method using the same. Further, the present invention relates to a fastening device which enables permanent fastening which cannot be performed by a conventional joining process by using these methods. It is a suggestion.

[0002]

2. Description of the Related Art At present, various joining techniques are in practical use. However, it is not an exaggeration to say that the respective joining technologies are almost completed in the sense of simply combining general-purpose materials and parts or forming a complicated structure. There, various methods have been developed and put into practical use, even with the same principle of joining methods, and they have been rationalized and automated using computers.

[0003] Permanent bonding is premised on the premise that the bonding portion does not lose the bonding function semi-permanently. For example, VTRs, FDDs, and VTRs in which mechatronics technology is assembled from large-scale structures such as various types of buildings, bridges, and ships. It is widely used up to DVDs and the like. In this method, the bonding interface must be stable until the life of the object is reached.

[0004] The caulking joint is a method in which a hole of a plate is combined with a shaft-shaped projection, and a portion protruding from the upper surface of the plate is crushed to perform the fastening with high bonding strength. On the other hand, rivet joining, which is broadly included in the above-described caulking joint, is to join two or more plate-shaped parts by using a rivet as a fastening element and plastically deforming the top or leg of the rivet. is there. In each case, a large plastic deformation different from the shape and appearance of the material is given to the fastening material, and a permanently high joining strength is expected.

[0005] In recent years, a construction method combining the two construction methods has been put into practical use. That is, at the stage of pressing the base material, a rivet-shaped protrusion is formed on one of the two members to be fastened, thereby enabling fastening without inserting the rivet member.

In recent years, in the process of assembling micromechanical parts of OA / AV products, the above-mentioned means of permanent joining, ie, caulking joining, rivet joining, or a method of combining the two have played an important role. I have. The reason for this is that there are few places where these products are disassembled or separated into two objects again after assembling, so that the use of the above-described method can greatly reduce the assembling process and cost.

[0007] However, the recent micro-
Higher precision has been required for caulking as well as finer design. For example, as typified by a digital video cassette (DVC) or the like, a tape guide system of a VTR which is increasingly miniaturized is constituted by a tape guide element extending to about 20 places such as a limiter post, an impedance roller, and a pinch roller. You. Each tape guide element is assembled with an appropriate inclination angle with respect to a reference chassis according to its function, and when the tape runs, it is geometrically shaped so that the tape occupies a predetermined running position without twisting. Must be set according to scientific conditions. Therefore, the angles and positions of these tape guide elements require extremely high fastening accuracy. Consider the case where these tape guide elements are also fastened to the chassis by permanent bonding, also serving as rivet members.

[0008] Now, various types of rivet bonding have conventionally been used at production sites. In the hammer type shown in FIG. 9, the punch 151 is moved in the axial direction of the rivet material 152 and collides with the head of the rivet material 152, thereby rolling the rivet tip in the radial direction.
Is a method of concluding. It is difficult to obtain high fastening accuracy because the metal structure is unevenly deformed even if the holder of the workpiece is stiffly reinforced by using the impact load, even if the holder for the work piece is stiffly reinforced.

As an alternative to the above-mentioned hammer method, FIG.
As shown by 0, a rivet method called a dowel type or a rosette type in which the punch 155 is swiveled while the tip of the punch 155 is in contact with the head of the rivet 156 to fasten the members 157 and 158 has been put into practical use. I have.
In these systems, the change in the metal structure is relatively small, but the accuracy is still limited to about 0.01 mm.

Diffusion bonding using ultrasonic vibration has been put to practical use as a method for bonding two metals without applying a relatively large external force. For example, in the case of an aluminum electrolytic capacitor, it is used for joining a chemical conversion foil (thickness: 50 to 100 μm) and a lead tab (thickness: 150 μm) or joining a cathode, anode and a lead tab. Diffusion bonding utilizes the fact that impurities such as oxides or organic films are destroyed and dispersed by ultrasonic vibration to clean the surface.
In addition, since a brittle intermetallic compound is not formed, the pressurizing force and the application time promote heat generation efficiency, and thus, atomic bonding or interatomic diffusion is performed by plastic flow. As for the material to be fastened, as the sheet thickness becomes thinner, the vibration energy is effectively applied in a very short time, so that the joining property is improved. Conversely, when the plate thickness is large, a large pressing force and a long application time are required, and the vibration does not work effectively. In some cases, the vibration stops, or a crack or an internal void is generated when the vibration is applied for a long time. In general, small, thin and soft materials can be joined with low output and low pressure. However, the application of diffusion bonding becomes more difficult as large parts and thicker and harder materials are used. Therefore, it has been difficult to apply the ultrasonic diffusion bonding to a rivet method in which members are fastened by plastically deforming a metal material.

Ultrasonic welding (welding) has been practically used as a method for fastening plastic and metal or different plastics. This method is a method (deformation flow joining) utilizing a welding phenomenon due to heat generated due to contact and separation of the contact surfaces (collision effect), and is limited to plastics having a low heat softening point and composite materials thereof.

Therefore, it has been difficult to apply this method to, for example, a rivet method in which members are fastened by utilizing plastic deformation of metal.

[0013]

According to the present invention, a high precision of several microns or less, which cannot be obtained by the conventional mechanical caulking method, can be obtained, and diffusion bonding by ultrasonic waves and ultrasonic welding can not be performed. An object of the present invention is to provide a permanent joining method in which a thick metal can be used as a joining member such as a rivet, and an apparatus for realizing the method.

[0014]

SUMMARY OF THE INVENTION The present invention proposes a new shape forming method including a fastening method using a fusion of an energy beam and a mechanically applied force.

For example, the rivet member inserted into the workpiece is heated by locally radiating an energy beam to the rivet member and applying an applied force or vibration to the heated portion by a punch. The plastic flow is promoted by utilizing the decrease in the deformation resistance of the heated portion to fasten the members.

Further, if the present invention is limited to the concept of "ultrasonic laser processing", a laser beam is locally emitted to a rivet member to heat the rivet member, and a horn to which ultrasonic vibration is applied to a punch member. Is also used.

Further, the fastening device of the present invention has a heating means for radiating and heating an energy beam near at least a pair of joining interfaces of a plurality of members to be fastened to each other, and the heating means has reduced softening or deformation resistance. A pressurizing means for applying a relative application force to the pair of bonding interfaces or a vibrating means for applying vibration, and optimally, a laser as an energy beam is provided inside a punch member as the vibrating means. A beam path is formed, and an optical system of the laser beam irradiation means is configured in the path of the punch member so that the laser beam is substantially focused at the bonding interface.

[0018]

In order to achieve the above object, the invention according to the first aspect of the present invention is to emit an energy beam near at least one pair of joining interfaces of a plurality of members to be fastened to each other. A fastening method for fastening the plurality of members by applying an applied force or vibration that causes the heated portion to soften or reduce deformation resistance by heating and that causes relative deformation to the pair of joining interfaces. It is characterized by the following.

The invention according to a second aspect of the present invention is characterized in that the plurality of members are a rivet member and a member to be joined fastened to the rivet member, and the method is a fastening method using a laser beam as an energy beam. Is what you do.

The laser as the energy beam is YAG
Solid laser, GaAs semiconductor laser, liquid laser, CO
₂ or an excimer gas laser can be used. In the case of micro parts in OA / AC products, a YAG laser with a short wavelength, a clean laser, or the like is preferable. When a large component is used, an electron beam may be used as the energy beam.

According to a third aspect of the present invention, an ultrasonic vibration is applied to the vicinity of a joint interface between a rivet member and a member to be joined.

By the synergistic effect obtained by combining the local heating effect by the laser beam and the stress concentration effect by the ultrasonic wave, it is possible to perform a fastening method in which laser processing and ultrasonic processing cannot be performed independently.

According to a fourth aspect of the present invention, there is provided a fastening method using an ultrasonic horn for applying ultrasonic vibration as a punch member for fastening.

As the timing for applying ultrasonic vibration and laser light to the bonding interface, it is preferable to first irradiate the fastening portion with laser light and then apply ultrasonic vibration. Although there is a slight time difference, when the ultrasonic vibration is applied in a state where the deformation resistance of the bonding interface is reduced by the heating by the laser, the external force applied to the fastening member can be reduced. As a result, the fastening can be performed with higher accuracy.

As the ultrasonic horn, any of exponential, step and conical shapes can be used. Although the same effect can be obtained with a low frequency less than the frequency of the ultrasonic wave, the effect as a fastening action is larger at a higher frequency.

The invention according to claim 5 of the present invention is characterized in that it is a fastening method in which a laser beam is passed through the internal space of the punch member to focus on the vicinity of the joining interface.

According to a sixth aspect of the present invention, a member to be formed is irradiated with a laser beam and heated to soften or reduce resistance to deformation of the heated portion and to reduce the deformation resistance. The present invention is characterized in that it is a forming method of forming a predetermined shape by giving a vibration by an ultrasonic horn to plastic deformation.

According to a seventh aspect of the present invention, there is provided a heating means for radiating and heating an energy beam near at least a pair of bonding interfaces of a plurality of members to be fastened to each other;
It is a fastening device comprising a pressurizing means for applying a relative applied force to the pair of bonding interfaces, which has been softened or reduced in deformation resistance by the heating means, or a vibration means for applying vibration. .

The invention according to claim 8 of the present invention is characterized in that the heating means is a fastening device which is a laser beam irradiation means.

The invention according to claim 9 of the present invention is characterized in that the vibration means is a fastening device which is an ultrasonic vibration means.

The invention according to claim 10 of the present invention is characterized in that the ultrasonic horn of the ultrasonic vibration means is a fastening device constituting a punch member for vibrating the pair of joint interfaces. Things.

According to an eleventh aspect of the present invention, a laser beam irradiating means is used to press the inside of a punch member which is a pressing means for applying a relative application force to a pair of bonding interfaces or a vibrating means for applying vibration. A fastening device, wherein a passage for a laser beam is formed, and an optical system of the laser beam irradiation means is configured in the passage of the punch member so that the laser beam is substantially focused at a bonding interface. It is characterized by the following.

According to the present invention, it is possible to perform high-precision joining using a hardened metal material as a fastening material, which cannot be achieved by, for example, a conventional mechanical caulking method or diffusion joining by ultrasonic vibration.

Hereinafter, an example in which the fastening device according to an embodiment of the present invention is applied to a tape traveling system of a VTR based on FIG. 1 and FIGS. . FIG. 1 is a vibration mode diagram of the fastening device and the ultrasonic horn used therein.

Reference numeral 1 denotes a post as a tape guide element, which also serves as a metal rivet member. Reference numeral 2 denotes a flange portion formed at an intermediate portion of the post 1, reference numeral 3 denotes a portion accommodated in the chassis 4, and reference numeral 5 denotes a guide portion through which the tape runs. The post 1 is composed of the flange portion 2, the joint portion 3, and the guide portion 5. The vicinity of the fastening portion 3 to which plastic deformation is applied (including the chassis 4 to be fastened) includes a bonding interface 6 (shown by a chain line ellipse 6 in enlarged views 2 (a), (b) and (c)). I will call it. In addition, regardless of before or after the fastening, in the present invention, this portion is connected to the bonding interface 6.
Call. 7 is a backing plate for holding the chassis 4 and the post 1, 8 is an ultrasonic horn also serving as a punch member, 9 is a vibrator for driving the ultrasonic horn, 10 is a giant magnetostrictive element, 11 is a permanent magnet, Reference numeral 12 denotes a pickup coil. The vibrator 9 is constituted by 10, 11, and 12.
13 is the lower end support of the ultrasonic horn, 14 is the upper end support,
Reference numerals 15, 16, and 17 denote holders that support and store the ultrasonic horn 8, and 18 denotes a storage case in the giant magnetostrictive element 10. An upper portion of the inner surface of the ultrasonic horn 8 is hollowed out in a cylindrical shape, and a lower portion thereof is hollowed out in a conical shape. 2
Reference numeral 1 denotes a folding mirror disposed above the fixed pipe 20, and reference numeral 22 denotes a focal lens provided at a lower end of the fixed pipe.

The inner surface of the lower end surface 23 of the ultrasonic horn 8 has a conical shape so as to surround the joint portion 3. In a state in which the ultrasonic horn 8 presses the joint 3 from above or in a state where the ultrasonic horn 8 is slightly away from the joint, the focusing lens is formed so that the laser beam 19 is approximately focused at the upper end of the joint 3. 22 are arranged. Also,
Since the fixed pipe 20 on which the focusing lens 22 and the folding mirror 21 are mounted is disposed in non-contact with the ultrasonic horn 8, the fixed pipe 20 is not affected by the vibration of the ultrasonic horn 8. Absent.

FIGS. 2A, 2B and 2C show the fastening portion 3
FIG. 3 shows a partially enlarged view of the vicinity from the start of processing to the end of processing.
First, the fastening process in the present embodiment is performed as shown in FIG.
As shown in (1), the operation was started by emitting the laser 19 in a state where the ultrasonic horn 8 was not brought into contact with the fastening portion 3. The bonding interface 6 near the fastening portion 3
Is locally heated by the radiation of the laser 19,
Deformation resistance is reduced. Since the above process occurs instantaneously, the ultrasonic horn 8 and the fastening portion 3 are immediately lowered so that the relative position is as shown in FIG. 2B. Ultrasonic vibration (amplitude of several microns to several tens of microns) is applied to the bonding interface 6 in addition to the thermal energy given by the laser 19, which has the effect of breaking down the oxide film and improving the fluidity due to vibration heat generation. Is done. As a result, the tip of the fastening portion 3 plastically flows, and is deformed like the tip portion 26 in FIG.

In the present embodiment, as described above, by applying the laser beam and the ultrasonic vibration to the fastening member with a slight time difference, the external force applied to the fastening member can be reduced, and higher fastening accuracy can be obtained. did it.

In the conventional rivet fastening, the precision of the pilot hole greatly affects the fastening accuracy (for example, the verticality of the post 1). In the method of the present invention, since the plastically flowing metal flows into the gap between the rivet (fastening portion 3) and the pilot hole without resistance, the fastening accuracy is not essentially affected by the pilot hole accuracy. Therefore, according to the present invention, a post having an arbitrary inclination angle can be fastened.

The fixed pipe 20 and the ultrasonic hose
Purge gas (N) ₂Gas) flow path 2
4 and the purge gas is formed in the holder 15
From the gas inlet hole 25 as indicated by the arrow B in FIG.
Then, from the upper part of the ultrasonic horn 8 through the middle part,
It flows out from the lower end of the ultrasonic horn 8 into the atmosphere. This pa
Evaporating metal that is slightly generated during processing
Attachment of smoke containing molecules and molten scattered matter to the focal lens 22
Prevent wearing. Therefore, the dirt on the focusing lens 22
Can be prevented from lowering the laser output.

In some applications, an assist gas (eg, oxygen) may be used to increase the processing efficiency, also serving as the above-mentioned barge gas for preventing contamination of the focal lens 22.

In this embodiment, longitudinal vibration is used as the ultrasonic vibration. As shown in FIG. 1, the horn has a vibration mode in which the support points 13 and 14 are nodes, and has a horn shape such that the lower end face 23 has a maximum amplitude. In carrying out the present invention, it is important to determine the magnitude of the light energy given to the laser and the magnitude of the vibration energy given to the ultrasonic horn. In the example,
The power applied to the laser light source and the vibrator under a certain processing time was set as follows.

As the electric power to be applied to the laser light source, an electric power value before the bonding interface is melted in a state where ultrasonic vibration is not applied is selected.

Under the above conditions, the power to be applied to the vibrator is set while pressing the tip of the ultrasonic horn against the surface to be joined with an appropriate processing force.

By repeating the above, optimum conditions were found. The vibration applied to the ultrasonic horn 8 may be either a longitudinal vibration or a torsional vibration. However, if the torsional vibration is applied, the applied force between the members can be reduced, so that the fastening can be performed with higher precision. It is more effective to use a composite vibration in which the torsional vibration is superimposed on the longitudinal vibration. The ultrasonic vibrator may be of the Langevin type, which is conventionally used for vibration machining, but in the embodiment, the giant magnetostrictive type was used. By employing a giant magnetostrictive element having a Curie point of 300 ° C. or more as compared with the Langevin type, sufficient reliability can be maintained even if the horn rises in temperature due to heat generated during processing.

FIG. 3 shows a case where an exhaust duct 27 is provided near the lower end of the ultrasonic horn 8 of the fastening device shown in FIG.
Since the fastening member does not need to be in a molten state, the amount of smoke and scattered matter containing metal molecules is extremely small as compared with ordinary laser processing. However, if an exhaust duct having an exhaust source is provided outside and the vicinity of the fastening portion 3 is sucked, a cleaner surrounding environment can be maintained. As described above, in the present embodiment, the purge gas for preventing the dirt on the focusing lens 22 is flowed into the ultrasonic horn 8, but the opening portion 28 is formed at the lower end of the ultrasonic horn 8. Is formed, the purge gas can be smoothly exhausted.

FIG. 4 shows a second embodiment of the present invention, in which the method of the present invention is used to rivet a plurality of plate-shaped members. 30 is a solid rivet,
31 is a member A which is a member to be fastened, 32 is a member B, and 33 is a backing plate. 34 is a punch member (for example, an ultrasonic horn), and 35 is a laser beam. Even in this case, if the present invention is used, the rivet 30 and the members to be fastened A31, B32
To reduce the external force applied to the members A31, B3
Both members can be fastened while maintaining the relative position of 2 with high accuracy.

FIG. 5 shows a third embodiment of the present invention, in which a laser light source is not provided on the punch member side but is provided on the rivet side. 41 is a punch member (for example, an ultrasonic horn), and 42 is a rivet. The rivet 42 is formed with a hollow hole 46 having an opening 44 on the side from which the laser beam 43 is emitted and a sealing side 45 on the punch side. 47 is a member A, 48 is a member B, and 49 is a backing plate. Laser light 4
3 is radiated toward the inside of the hollow hole of the rivet 42 and heats the closed end 45 on the punch side, that is, the vicinity of the joint interface. As in the other embodiments, plastic deformation is performed by applying an applied force or vibration by the punch member 41 to the heated portion.

As described above, the present invention can be practiced without using the hollow passage formed in the punch portion with the laser beam. As a method other than the third embodiment, for example, the tip of the ultrasonic horn is made as small as possible, and a laser beam is radiated as a spot near the tip.

A ring-shaped laser light path is formed near the tip of the horn so as to cover the horn, and the laser light is focused so as to form a spot near the bonding interface (neither is shown).

The above method can be applied. In the case where the fastening accuracy is not so high as shown in FIG. 6, instead of using an ultrasonic horn, a conventional hammer type, Tawell type or the like is used as the punch member 36, and the hollow portion of the punch member is irradiated with a laser beam 37. May be allowed to pass.

The case where the present invention is carried out by swaging is described above, but the present invention can of course be applied to other uses.

FIG. 7 is a view showing a fourth embodiment of the present invention and shows a case where the present invention is applied to soldering which includes wire bonding in a broad sense. 50 is an ultrasonic horn, 51 is a vibrator, 52 and 53 are horn support parts, 55 is a fixed side housing of the ultrasonic horn 50, 56 is a hollow vibration tool provided at the tip of the horn, and 57 is the fixed vibrator. A reflecting mirror provided on the side housing 50, a laser beam 58,
Reference numerals 9 and 60 denote lead wires and electrodes which are members to be fastened,
61 is solder. In the above configuration, the laser beam 58 already focused is emitted from the reflection mirror 57 to the solder 61 via the internal passage of the hollow vibration tool 56. At the same time, since the ultrasonic vibration is applied to the joint interface, the electrode 60 and the lead wire 59 that can obtain higher reliability than conventional soldering can be fastened.

As shown in the above embodiment, the above-described caulking method can be realized even if the ultrasonic horn is arranged in a horizontal manner. Of course, a method such as soldering can be realized even in a vertical arrangement.

Now, by applying the present invention, it is possible to perform a special processing for producing an arbitrary shape by plastic deformation. FIG.
FIG. 8A shows a case where the present invention is used for a flattening process, and FIG.
(B) is a partially enlarged view of the processed part.

Reference numeral 61 denotes an ultrasonic horn also serving as a punch member for flattening, 62 denotes a laser beam, and 63 denotes a minute uneven surface 6.
4 is a member. The ultrasonic horn 61 relatively moves in the direction C in FIG. 8B while performing longitudinal vibration.
This method radiates an energy beam to a part of the member and heats it, thereby softening or reducing the deformation resistance of the heated part and applying a relative applied force or vibration to the heating part. That is, the uneven surface 64
In addition, laser light is emitted in addition to longitudinal vibration caused by ultrasonic vibration. As a result, the deformation resistance of the member 63 is locally reduced, and the flattening process is promptly promoted. It should be noted that the ultrasonic horn 61 can have substantially the same configuration as that of FIG. 1 except for the tip shape.

[0057]

As described above, by applying the present invention, for example, the following two demands, which could not be attained by a conventional mechanical method, laser, ultrasonic wave, or the like, that is, high bonding strength and high bonding accuracy can be simultaneously satisfied. A highly productive fastening method can be realized. If the present invention is used in, for example, a caulking method, it is possible to realize a member that can achieve high accuracy on the order of several microns while maintaining the same strength as conventional rivet fastening.

Further, if the respective driving conditions of the laser light source and the ultrasonic oscillation source are set in advance according to the kind of the material of the fastening member (metal, plastic, etc.), various fastenings can be performed by one fastening device. Work can be realized. In addition, since the melting and scattering of metal on a processing surface such as ordinary laser processing can be reduced, a clean working environment can be maintained.

Further, in addition to the above-mentioned fastening method, the present invention
The present invention can be applied to creation processing of an arbitrary shape requiring minute and high precision, for example, ultra-flattening processing, and the effect is enormous.

[Brief description of the drawings]

FIG. 1 is a vibration mode diagram of a fastening device according to a first embodiment of the present invention and an ultrasonic horn used therein.

2A is a partially enlarged view of the fastening device shown in FIG. 1 immediately after machining is started, and FIG. 2B is a partially enlarged view of the fastening position during machining.

FIG. 3 is a diagram in which an exhaust duct is provided in the fastening device shown in FIG. 1;

FIG. 4 is a partially enlarged view of a fastening device according to a second embodiment of the present invention.

FIG. 5 is a partially enlarged view of a fastening device according to a third embodiment of the present invention.

FIG. 6 is a diagram in which a normal punch member is used for the fastening device according to the first, second, and third embodiments of the present invention.

FIG. 7 is a front sectional view of a fastening device according to a fourth embodiment of the present invention.

8A is a front sectional view showing a planarization process according to a fifth embodiment of the present invention. FIG. 8B is a partially enlarged view of FIG.

FIG. 9 is a diagram showing a conventional hammer-type caulking method.

FIG. 10 is a view showing a conventional rosette-type caulking method.

[Explanation of symbols]

 1,4 Plural members 6 Joining interface 19 Energy beam

Claims (11)

[Claims] An energy beam is radiated and heated in the vicinity of at least one pair of joining interfaces of a plurality of members to be fastened to each other, thereby softening a heating portion or reducing deformation resistance, and further reducing the deformation resistance. A fastening method, wherein the plurality of members are fastened by applying an applied force or vibration that causes relative deformation of the plurality of members. 2. The fastening method according to claim 1, wherein the plurality of members include a rivet member and a member to be joined fastened to the rivet member, and a laser beam is used as an energy beam. 3. The fastening method according to claim 2, wherein ultrasonic vibration is applied to a vicinity of a joint interface between the rivet member and the member to be joined. 4. An ultrasonic horn for applying ultrasonic vibration is used as a punching member for fastening.
The fastening method described. 5. The fastening method according to claim 4, wherein a laser beam is passed through an inner space of the punch member to focus on the vicinity of the bonding interface. 6. A member to be formed is irradiated with a laser beam and heated to soften or reduce the deformation resistance of the heated portion. A forming method characterized by forming a predetermined shape by deforming. 7. A heating means for radiating and heating an energy beam near at least a pair of joining interfaces of a plurality of members to be fastened to each other, and a heating means for reducing the softening or deformation resistance by said heating means. A fastening device comprising a pressurizing means for applying a relative applied force or a vibrating means for applying vibration. 8. The fastening device according to claim 7, wherein the heating means is a laser beam irradiation means. 9. The fastening device according to claim 8, wherein the vibration means is an ultrasonic vibration means. 10. The fastening device according to claim 9, wherein the ultrasonic horn of the ultrasonic vibration means constitutes a punch member for vibrating the pair of joining interfaces. 11. A path for a laser beam from a laser beam irradiation means is formed inside a punch member which is a pressurizing means for applying a relative applied force to a pair of bonding interfaces or a vibration means for applying vibration. 9. The fastening device according to claim 8, wherein an optical system of the laser beam irradiating means is arranged in the passage of the punch member so that a beam is substantially focused at the bonding interface.