JPH10229116A5 - - Google Patents

Info

Publication number
JPH10229116A5
JPH10229116A5 JP1997047103A JP4710397A JPH10229116A5 JP H10229116 A5 JPH10229116 A5 JP H10229116A5 JP 1997047103 A JP1997047103 A JP 1997047103A JP 4710397 A JP4710397 A JP 4710397A JP H10229116 A5 JPH10229116 A5 JP H10229116A5
Authority
JP
Japan
Prior art keywords
substrate
mounting surface
substrate holder
opening
suction groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997047103A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10229116A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9047103A priority Critical patent/JPH10229116A/ja
Priority claimed from JP9047103A external-priority patent/JPH10229116A/ja
Publication of JPH10229116A publication Critical patent/JPH10229116A/ja
Publication of JPH10229116A5 publication Critical patent/JPH10229116A5/ja
Pending legal-status Critical Current

Links

JP9047103A 1997-02-14 1997-02-14 基板ホルダ Pending JPH10229116A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9047103A JPH10229116A (ja) 1997-02-14 1997-02-14 基板ホルダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9047103A JPH10229116A (ja) 1997-02-14 1997-02-14 基板ホルダ

Publications (2)

Publication Number Publication Date
JPH10229116A JPH10229116A (ja) 1998-08-25
JPH10229116A5 true JPH10229116A5 (OSRAM) 2005-01-06

Family

ID=12765852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9047103A Pending JPH10229116A (ja) 1997-02-14 1997-02-14 基板ホルダ

Country Status (1)

Country Link
JP (1) JPH10229116A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6057599B2 (ja) * 2012-08-09 2017-01-11 タツモ株式会社 吸着定盤及びその製造方法

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