JPH10202529A - Ultra-abrasive grain grinding wheel and manufacture thereof - Google Patents

Ultra-abrasive grain grinding wheel and manufacture thereof

Info

Publication number
JPH10202529A
JPH10202529A JP2953797A JP2953797A JPH10202529A JP H10202529 A JPH10202529 A JP H10202529A JP 2953797 A JP2953797 A JP 2953797A JP 2953797 A JP2953797 A JP 2953797A JP H10202529 A JPH10202529 A JP H10202529A
Authority
JP
Japan
Prior art keywords
abrasive
grain
groove
grains
superabrasive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2953797A
Other languages
Japanese (ja)
Inventor
Akio Hara
昭夫 原
Kosuke Mitsui
康祐 三井
Kazunori Kadomura
和徳 門村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka Diamond Industrial Co Ltd
Original Assignee
Osaka Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Diamond Industrial Co Ltd filed Critical Osaka Diamond Industrial Co Ltd
Priority to JP2953797A priority Critical patent/JPH10202529A/en
Priority to US09/077,024 priority patent/US6312324B1/en
Priority to KR1019980703950A priority patent/KR100293863B1/en
Priority to EP97941208A priority patent/EP0870578A4/en
Priority to PCT/JP1997/003369 priority patent/WO1998014307A1/en
Publication of JPH10202529A publication Critical patent/JPH10202529A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To increase the effective number of abrasive grains and improve accuracy and surface roughness of a surface to be processed by dividing ultra- abrasive grains in an abrasive grain layer according to grooves, and forming a plurality of abrasive grain ends. SOLUTION: A diamond grain 1 has a groove 2, and a bond material 3 has a groove 4 continuous to the groove 2. The end of the groove 2 of the diamond grain becomes a cutting edge. While small cutting chips like a cutting wheel using fine grain are being generated, grinding advances. Grain 1 is retained firmly deeply against the bond material, therefore, no interference with breaking- off is made. The depth and width, number of threads, and presence of crossing of the groove, and whether a crossing angle should be made identical or different on the right and left can be selected optionally, depending upon a work, grinding conditions or the like. Where the surface of an ultra-abrasive grain layer is not flat, a flat surface is formed by truing for laser beam irradiation, thus it is not always necessary to make the grain diameter of ultra-abrasive grain uniform.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明はダイヤモンド、立方
晶窒化ほう素(CBN)等超砥粒を用いた砥石ならびに
その製造方法に関するものである。
The present invention relates to a grindstone using superabrasives such as diamond and cubic boron nitride (CBN), and a method for producing the same.

【0002】[0002]

【従来の技術】この種砥石としては、ダイヤモンド、C
BNなどの超砥粒を、メタル、レジン或はビトリファイ
ドでボンドしたものが知られている。また超砥粒を単層
に保持した形の砥石としては、超砥粒を電気メッキ法に
よって台金上に固定して形成されるものが知られてい
る。
2. Description of the Related Art As such a kind of grinding stone, diamond, C
It is known to bond superabrasive grains such as BN with metal, resin or vitrified. Further, as a grindstone in which superabrasive grains are held in a single layer, those formed by fixing superabrasive grains on a base metal by an electroplating method are known.

【0003】前記電着法によるものに対し、例えばダイ
ヤモンド砥粒については、ニッケル、コバルト、クロー
ムよりなる合金または銀、銅、チタンよりなる合金が、
前記ダイヤモンド砥粒の表面を容易にぬらす特性を利用
し、この合金によりダイヤモンド砥粒を台金に直接固定
するという、いわゆるろう付け方法も知られている。
[0003] In contrast to the above-mentioned electrodeposition method, for example, for diamond abrasive grains, an alloy composed of nickel, cobalt, and chrome or an alloy composed of silver, copper, and titanium is used.
There is also known a so-called brazing method in which the surface of the diamond abrasive grains is easily wetted, and the diamond abrasive grains are directly fixed to a base metal using this alloy.

【0004】また高精度、高品位加工を達成する砥石と
して、微粒ダイヤモンドを用いたポーラスレジンボンド
砥石が提案されている。ポーラス部によってチップポケ
ットの増加などをはかったものである。
As a grindstone achieving high precision and high quality processing, a porous resin bond grindstone using fine diamond has been proposed. The porous portion aims to increase the number of chip pockets.

【0005】[0005]

【発明が解決しようとする課題】上記ポーラスレジンボ
ンド砥石は、コンピュータ、光通信機器などの電子、光
学部品の高精度、高品位加工において従来用いられてい
た遊離砥粒加工(ラッピング、ポリシングなど)を、固
定砥粒加工化しようと言うもので、量産における能率
上、管理上もスラッジ処理などの環境上も好ましき方向
のものである。
The above-mentioned porous resin-bonded grindstone is used for loose abrasive grain processing (lapping, polishing, etc.) conventionally used in high-precision, high-quality processing of electronic and optical parts such as computers and optical communication equipment. Is intended to be fixed abrasive processing, which is preferable in terms of efficiency in mass production, management and environment such as sludge treatment.

【0006】然し、仕上面の高い平坦度が要求されるよ
うな研削においては、砥粒層に弾性を有する上記ポーラ
スレジンボンド砥石は必らずしも充分とは言えず、剛性
が高く有効砥粒数の多い砥粒層を備えた超砥粒砥石の出
現が望まれる。
[0006] However, in grinding where a high degree of flatness of the finished surface is required, the above-mentioned porous resin bond whetstone having elasticity in the abrasive grain layer is not necessarily sufficient, and has high rigidity and effective grinding power. The appearance of a superabrasive grindstone provided with an abrasive layer having a large number of grains is desired.

【0007】被研削面の面粗さは、砥石表面の単位当り
の有効砥粒数で決まるとされているが、用いた砥粒の粒
径・集中度に対する有効砥粒数をどのようにして把握す
るかは明確とは言い難く、用いた砥粒の粒径の大小によ
り、常に次のような問題も有している。
It is said that the surface roughness of the surface to be ground is determined by the number of effective abrasive grains per unit of the grinding wheel surface. It is hard to say whether it is grasped or not, and there are always the following problems depending on the size of the used abrasive grains.

【0008】大きいもの即ち粗粒では、砥粒の保持力が
強くて脱落が少なく、研削液の流れもよいが、被研削面
の精度、面粗さは低い。小さいもの即ち細粒では、被研
削面の精度、面粗さを高くすることは可能であるが、砥
粒の保持力が弱くて脱落が多く、研削液の流れも悪い。
従って研削性能が低く少しの砥粒摩耗で寿命となる。
[0008] In the case of large grains, that is, coarse grains, the holding power of the abrasive grains is high, the falling of the grains is small, and the flow of the grinding fluid is good. With small grains, that is, fine grains, it is possible to increase the precision and surface roughness of the surface to be ground, but the holding power of the abrasive grains is weak and the abrasive grains often fall off, and the flow of the grinding fluid is poor.
Therefore, the grinding performance is low, and the life is extended with a little abrasive wear.

【0009】[0009]

【課題を解決するための手段】本発明は上記のような問
題を解決するためになされたもので、その第1の特徴と
するところは、従来の細粒並びに粗粒を用いた砥石の夫
々の長所を兼ね備えた、砥粒の集中度を上げないで有効
砥粒数を増加させた全く新しい着想に基づく超砥粒砥石
を提供しようとするものである。そしてそれを実現する
方法として、砥粒層における超砥粒を溝によって分割
し、複数の砥粒端を設けることを創出したことである。
DISCLOSURE OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and the first feature of the present invention is that each of conventional grinding wheels using fine grains and coarse grains is used. It is an object of the present invention to provide a super-abrasive grindstone based on a completely new idea, which has the advantages of the above and increases the number of effective abrasive grains without increasing the concentration of abrasive grains. As a method of realizing this, it has been created that the superabrasive grains in the abrasive grain layer are divided by grooves to provide a plurality of abrasive grain ends.

【0010】この方法によれば、粗粒の超砥粒を用い、
砥粒先端を揃えるためツルーイングにより砥面を平坦面
に加工し、平坦面上にレーザービームにより溝を設けて
超砥粒砥面を分割して複数の砥粒端を形成し、あたかも
集中度の高い細粒の砥面のように有効砥粒数を増大する
ことができる。超砥粒層の砥面が、製作当初から、或は
使用によって平坦面となったものを用いる場合は、ツル
ーイングなどの平坦加工を省略することができ、また溝
は複数条交叉して設けあたかも碁盤の目のようにしてお
くことが好ましい。
According to this method, coarse super-abrasive grains are used,
In order to align the tips of the abrasive grains, the grinding surface is processed to a flat surface by truing, a groove is formed on the flat surface by a laser beam, the superabrasive abrasive surface is divided and multiple abrasive edges are formed, as if The number of effective abrasive grains can be increased like a high-fine-grain abrasive surface. When the abrasive surface of the superabrasive layer is a flat surface from the beginning of manufacture or when used, flat processing such as truing can be omitted, and grooves may be provided by intersecting a plurality of grooves. It is preferable to make it look like a go board.

【0011】そして、この比較的大きな超砥粒はその粒
径の略揃ったものを用いることにより、またその用いる
粒径の程度も50μm以上好ましくは、♯20〜40の
範囲の中から選ぶことにより、より効果を発揮すること
が出来る。
The relatively large super-abrasive grains should be of substantially uniform grain size, and the grain size used should be at least 50 μm, preferably within the range of ♯20-40. Thereby, more effects can be exhibited.

【0012】なお、本発明者等は、先きに特願平8−2
80227号にボンド材表面より突出した超砥粒に溝を
設けて有効砥粒数と砥粒空間を増大させることを提案し
たが、超砥粒表面とボンド材表面とが略同一高さの平坦
なものにおいても、レーザービームの照射方法の調整に
より溝の深さ、幅及び交叉しない(平行)乃至は碁盤目
状の交叉の角度の選択などにより、有効砥粒数を増すこ
とが出来、所要の研削性能が得られることを確認し、本
出願に至ったものである。
The inventors of the present invention have previously reported in Japanese Patent Application No.
No. 80227 proposes to increase the number of effective abrasive grains and the abrasive grain space by providing grooves in the superabrasive grains protruding from the surface of the bond material. However, the number of effective abrasive grains can be increased by selecting the depth and width of the groove and the angle of non-intersecting (parallel) or cross-shaped intersection by adjusting the laser beam irradiation method. It has been confirmed that the grinding performance can be obtained, and the present application has been achieved.

【0013】ボンド材としては、メタル、ビトリファイ
ドの外レジンも使用できるが、研削層は1層形成である
から、結合力の高いメタルが好ましく、電気メッキによ
って形成したものや、使用によって砥面が平坦になった
ものの再生加工として用いる場合に最も効果的である。
As the bonding material, metal or vitrified outer resin can be used. However, since the grinding layer is formed of one layer, a metal having a high bonding force is preferable. This is most effective when the flattened material is used for reprocessing.

【0014】[0014]

【作用】上記のように、比較的粒径の大きな超砥粒で砥
石面を形成するので、従来ならば、被加工面に粗さを生
じるが、本発明では、前記超砥粒層、平坦面にレーザー
ビームを照射して溝を形成しているので、この平坦面に
おいて多数の砥粒端が形成され、これが切れ刃乃至はさ
らえ刃として働き、有効砥粒数を増大し、被加工面の精
度、表面粗さが向上される。一方、砥石面に使用される
超砥粒の粒径が大きいので前述のような電気メッキによ
る超砥粒の台金への固定は安定して強固な砥石面を形成
することができる。なお本発明の砥石は、必要により使
用に際し或は使用の途次にドレッシングを施すことがで
きる。
As described above, since the grindstone surface is formed by superabrasive grains having a relatively large particle diameter, the work surface is conventionally roughened. However, in the present invention, the superabrasive grain layer has a flat surface. Since the grooves are formed by irradiating the surface with a laser beam, a large number of abrasive grains are formed on this flat surface, and these serve as cutting or wiping blades, increasing the number of effective abrasive grains and increasing the number of effective abrasive grains. Accuracy and surface roughness are improved. On the other hand, since the diameter of the superabrasive grains used on the grindstone surface is large, the fixing of the superabrasive grains to the base metal by electroplating as described above can stably form a strong grindstone surface. The grindstone of the present invention can be dressed at the time of use or during use as needed.

【0015】[0015]

【発明の実施の形態】以下具体的な実施の状態を実施例
によって説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments will be described below with reference to embodiments.

【0016】[0016]

【実施例】図1は実施例砥石における砥面の形状を示す
断面模式図で、1は溝2を有するダイヤモンド粒、3は
溝2に連なる溝4を有するボンド材の部分である。この
砥石は次によって作成した。 砥石スペック カップ型砥石 砥石径125mm 砥面巾7mm ダイヤモンド粒子 ♯18/20(800〜1000μm) ボンド材 Niメッキ ツルーイング ♯120のダイヤモンド砥石によりツルーイング して、平坦面を形成 砥面へのレーザービーム 使用機 YAGレーザー 照射条件 入力値 5KHZ 出力パワー2.5KW ピッチ 50μm ピッチ数 16〜20
FIG. 1 is a schematic cross-sectional view showing the shape of a grinding surface of a grinding wheel according to an embodiment. Reference numeral 1 denotes a diamond grain having a groove 2 and 3 denotes a portion of a bonding material having a groove 4 connected to the groove 2. This whetstone was prepared as follows. Whetstone Specifications Cup type whetstone Whetstone diameter 125mm Whetstone width 7mm Diamond particles ♯18 / 20 (800-1000μm) Bonding material Ni plating Truing ♯Truing with a diamond whetstone of 120 to form a flat surface. Laser irradiation condition Input value 5KHZ Output power 2.5KW Pitch 50μm Pitch number 16-20

【0017】図1におけるダイヤモンド粒1の平坦面の
長さAは800〜1000μm、溝巾Bは30μm、溝
深さCは14〜18μm、溝と溝との間の平坦部長さ
A′は20μmであった。
In FIG. 1, the flat surface length A of the diamond grain 1 is 800 to 1000 μm, the groove width B is 30 μm, the groove depth C is 14 to 18 μm, and the flat portion length A ′ between the grooves is 20 μm. Met.

【0018】図2は上記ツルーイング後、そのツルーイ
ング面に接線方向のレーザービームを照射して溝を形成
した200倍の顕微鏡写真である。薄墨み色に見えるの
がダイヤモンド粒1の平坦面で照射により規則的な溝2
が白いボンド材3の表面に連らなって形成されている。
FIG. 2 is a photomicrograph at 200 × magnification in which a groove is formed by irradiating the truing surface with a tangential laser beam after the truing. Irregularities appear on the flat surface of the diamond grain 1 due to irradiation.
Are formed continuously on the surface of the white bonding material 3.

【0019】このダイヤモンド粒の溝の端縁が切れ刃乃
至はすくい刃となって、細粒を用いた砥石のような小さ
な切り粉を生じて研削が進む。しかも該粒子1は粗粒で
ボンド材に深くしっかりと保持されているので、脱落に
よる支障を生じることはない。溝の深さ、巾、条数、交
叉の有無並びに交叉角度を左右同一にするか差異を持た
せるかなどは、ワーク、研削条件などにより自由に選択
できる。
The edges of the grooves of the diamond grains serve as cutting edges or rake edges to generate small chips like a grindstone using fine grains, and the grinding proceeds. Moreover, since the particles 1 are coarse and are firmly held deeply and firmly in the bonding material, no trouble is caused by falling off. The depth, width, number of grooves, presence / absence of intersection, and whether the intersection angle is the same or different between the left and right can be freely selected depending on the work, grinding conditions, and the like.

【0020】上記のように、本発明は砥面の構成を特定
構成にしてなるものであるから、砥粒層の超砥粒は一層
とすることが必要である。また、超砥粒層の表面が平坦
面でない場合は、ツルーイングにより平坦面を形成して
からレーザービームを照射するものであるから、必らず
しも超砥粒の粒径が揃っていなくてもよい。
As described above, in the present invention, the configuration of the abrasive surface is made to be a specific configuration. Therefore, it is necessary that the number of superabrasive grains in the abrasive layer be one. In addition, when the surface of the superabrasive layer is not a flat surface, since the laser beam is applied after forming a flat surface by truing, the particle size of the superabrasive particles is not necessarily uniform. Is also good.

【0021】然し乍ら、粒径が略揃っていないと、平坦
面上に溝を形成し得ない砥粒が増加したりして目的とす
る効果を充分に奏し得ないし、砥粒が揃っていればツル
ーイングが行いやすく、またツルーイングによる除去量
が少なくても、場合によってはツルーイングしなくても
所要の溝を形成できる効果がある。
However, if the particle diameters are not substantially uniform, the number of abrasive grains that cannot form grooves on the flat surface increases, and the desired effect cannot be obtained sufficiently. Truing can be easily performed, and there is an effect that a required groove can be formed even if the amount of removal by truing is small or even in some cases without truing.

【0022】[0022]

【発明の効果】既に述べたように、本発明においては、
比較的大きな粗粒の超砥粒が用いられているので、ボン
ド材中への埋没深さの絶対値が微粒の超砥粒を用いたも
のより深い。従ってボンド材による結合度が強く研削に
よる超砥粒の欠損や脱落が少ない。
As described above, in the present invention,
Since relatively large coarse superabrasives are used, the absolute value of the burial depth in the bond material is deeper than that using fine superabrasives. Therefore, the degree of bonding by the bonding material is strong, and the loss and dropout of superabrasive grains due to grinding are small.

【0023】しかも超砥粒層の砥面には溝が設けられ
て、さながら微粒の超砥粒を用いられたような揃った多
数の砥粒端に分割されているので、用いた砥粒の粒径・
集中度に対する有効砥粒数が増加されているので、所要
の切れ味、精度を発揮することができる。また上記溝は
砥面にレーザービームを照射して、碁盤目のような規則
的な乃至は不規則な形状に形成できるので、その条数、
間隔、角度を選択することにより、切れ味、研削精度共
に更に優れた超砥粒砥石を提供することができる。従っ
て、本発明の砥石は例えば前記電子、光学部品などの高
品位加工において従来用いられていた遊離砥粒加工を、
固定砥粒加工化の実現促進するものとして、大きな期待
を持つことができる。
Further, grooves are provided on the abrasive surface of the superabrasive layer, and the grooves are divided into a large number of uniform abrasive grains as if fine superabrasive grains were used. Particle size·
Since the number of effective abrasive grains with respect to the degree of concentration is increased, required sharpness and precision can be exhibited. In addition, the grooves can be formed into a regular or irregular shape such as a grid by irradiating the grinding surface with a laser beam.
By selecting the interval and the angle, it is possible to provide a super-abrasive grindstone having further excellent sharpness and grinding accuracy. Therefore, the grindstone of the present invention is, for example, the above-mentioned electronic, optical parts and the like free abrasive grain processing conventionally used in high-quality processing,
There are great expectations for promoting the realization of fixed abrasive processing.

【図面の簡単な説明】[Brief description of the drawings]

【図1】実施例の砥面を説明する超砥粒層断面の模式図
である。
FIG. 1 is a schematic diagram of a cross section of a superabrasive layer illustrating a polishing surface of an example.

【図2】実施例における砥面のレーザービーム照射後の
状態を示す顕微鏡写真である。
FIG. 2 is a micrograph showing a state after laser beam irradiation on a polishing surface in an example.

【符号の説明】[Explanation of symbols]

1 ダイヤモンド粒(超砥粒) 2 ダイヤモンド粒の溝 3 ボンド材 4 ボンド材の溝 1 diamond grains (superabrasive grains) 2 grooves of diamond grains 3 bond material 4 grooves of bond material

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 超砥粒をボンド材で結合してなる砥粒層
を有する砥石において、該ボンド材表面と略同一高さの
超砥粒表面を溝によって分割し、用いた超砥粒の粒径・
集中度に対する有効砥粒数を増加せしめてなることを特
徴とする超砥粒砥石。
1. A grindstone having an abrasive layer formed by bonding superabrasive grains with a bond material, wherein the surface of the superabrasive grain having substantially the same height as the surface of the bond material is divided by grooves, and Particle size·
A super-abrasive grinding wheel characterized by increasing the number of effective abrasive grains with respect to the degree of concentration.
【請求項2】 ボンド材表面には、超砥粒表面に設けた
溝に連ながる溝を設けてなることを特徴とする請求項1
記載の超砥粒砥石。
2. The bonding material surface is provided with a groove connected to a groove provided on the superabrasive grain surface.
The described super-abrasive grindstone.
【請求項3】 砥粒層中の超砥粒は一層で、かつ50μ
m以上の略揃った粒径のものが用いられていることを特
徴とする請求項1または2記載の超砥粒砥石。
3. The super-abrasive grains in the abrasive grain layer are one layer and 50 μm.
3. The superabrasive grinding wheel according to claim 1, wherein particles having a substantially uniform particle size of at least m are used.
【請求項4】 超砥粒をボンド材で結合してなる超砥粒
層を台金上に固定してなる超砥粒砥石面に、レーザービ
ームを照射して、超砥粒または超砥粒とボンド材表面に
溝を形成することを特徴とする請求項1、2または3記
載の超砥粒砥石の製造方法。
4. A super-abrasive grain layer formed by bonding super-abrasive grains with a bonding material is fixed to a base metal. 4. The method for producing a superabrasive grindstone according to claim 1, wherein a groove is formed on the surface of the bonding material.
【請求項5】 超砥粒層の砥面に、ツルーイングを施し
た後にレーザービームを照射することを特徴とする請求
項4記載の超砥粒砥石の製造方法。
5. The method for manufacturing a superabrasive grinding wheel according to claim 4, wherein a laser beam is irradiated after truing is performed on the abrasive surface of the superabrasive grain layer.
JP2953797A 1996-09-30 1997-01-28 Ultra-abrasive grain grinding wheel and manufacture thereof Pending JPH10202529A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2953797A JPH10202529A (en) 1997-01-28 1997-01-28 Ultra-abrasive grain grinding wheel and manufacture thereof
US09/077,024 US6312324B1 (en) 1996-09-30 1997-09-24 Superabrasive tool and method of manufacturing the same
KR1019980703950A KR100293863B1 (en) 1996-09-30 1997-09-24 Super abrasive tool and its manufacturing method
EP97941208A EP0870578A4 (en) 1996-09-30 1997-09-24 Superabrasive tool and method of its manufacture
PCT/JP1997/003369 WO1998014307A1 (en) 1996-09-30 1997-09-24 Superabrasive tool and method of its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2953797A JPH10202529A (en) 1997-01-28 1997-01-28 Ultra-abrasive grain grinding wheel and manufacture thereof

Publications (1)

Publication Number Publication Date
JPH10202529A true JPH10202529A (en) 1998-08-04

Family

ID=12278869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2953797A Pending JPH10202529A (en) 1996-09-30 1997-01-28 Ultra-abrasive grain grinding wheel and manufacture thereof

Country Status (1)

Country Link
JP (1) JPH10202529A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6793562B2 (en) 2001-04-23 2004-09-21 Mitsubishi Denki Kabushiki Kaisha Grinder and method of and apparatus for non-contact conditioning of tool
CN105149790A (en) * 2015-07-10 2015-12-16 西安交通大学 Deep machining method and system for annular diamond cutter of millimeter and submillimeter size

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6793562B2 (en) 2001-04-23 2004-09-21 Mitsubishi Denki Kabushiki Kaisha Grinder and method of and apparatus for non-contact conditioning of tool
CN105149790A (en) * 2015-07-10 2015-12-16 西安交通大学 Deep machining method and system for annular diamond cutter of millimeter and submillimeter size

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