JPH10202171A - Method for fine shaping and its device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make it possible to form a fine and highly precise shaped product by ejecting an ultrafine particle. SOLUTION: When forming a finely shaped product by ejecting an ultrafine particle material to the surface of a substrate 4 through a nozzle 6 and stacking the ultrafine particle material, a mask 5 with an opening which constitutes a specified opening pattern is arranged between the nozzle 6 and the substrate 4. Further, the ultrafine particle material is ejected to the substrate 4 through the opening of the mask 5 while the nozzle 6 is relatively displaced with the mask 5 in such a state that the distance between the mask 5 and the growth face of the shaped product or the surface of the substrate 4 is maintained constant.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microfabrication technique for forming a fine shape by spraying and depositing ultrafine particles onto a substrate through a nozzle. Such microfabrication technology is used for manufacturing micromachines, microfabrication technology, mounting semiconductor components, and the like.

[0002]

2. Description of the Related Art A technique has been developed for forming ultra-fine mechanical parts by spraying and depositing ultrafine particles of metal, ceramics, etc. from a fine nozzle onto a substrate or the like. In order to eject a superfine particle from a minute nozzle to form a molded article, there are a case where the ejection is performed on a flat substrate and a case where a hole or a groove is formed in a mold in advance.

[0003]

However, as shown in FIG. 11, the flow rate of the ultrafine particles in the nozzle is higher at the central portion than at the peripheral portion. For this reason, when the ultrafine particles are sprayed onto a flat substrate, as shown in FIG. 12, the flow rate is faster at the center than at the periphery, so that the deposition rate is large and the growth surface of the modeled object is not flat. Also, as shown in FIG. 13, when injected into the hole of the mold, the ultra-fine particle flow entering the hole of the mold is deposited from the bottom of the hole of the mold. The transported gas flow becomes turbulent in the hole of the mold, causing turbulence in the flow of ultra-fine particles to be deposited. As a result, as shown in FIG. It is difficult to obtain a shaped object. For this reason, development of an ultrafine particle deposition technique capable of forming a minute and highly accurate formed object is desired. The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an ultra-fine particle deposition technique capable of forming a fine and high-precision object by jetting ultra-fine particles.

[0004]

In response to this object, a micro-fabrication method according to the present invention is characterized in that the ultra-fine particle material is sprayed through a nozzle onto a substrate and deposited to form a micro-shaped molded article. A mask having an opening constituting a predetermined opening pattern is arranged between a nozzle and a substrate, and the distance between the mask and a growth surface of a modeled object on the substrate or the surface of the substrate is kept constant. The method is characterized in that the ultrafine particle material is ejected onto the substrate through an opening of the mask while a nozzle is relatively displaced with respect to the mask.

[0005] Further, the microfabrication apparatus of the present invention is provided with a substrate, a mask positioned opposite to the substrate, and a nozzle for jetting ultrafine material onto the substrate through an opening constituting an opening pattern of the mask. It is characterized by having a substrate driving device having a chamber and driving the substrate, a mask driving device for driving the mask, and a nozzle driving device for driving the nozzle.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The details of the present invention will be described below with reference to the drawings showing an embodiment. First, a description will be given of a bonded microfabrication apparatus used in the microfabrication method of the present invention. 1 and 2, reference numeral 1 denotes a fine modeling device.
The microfabrication apparatus 1 has a chamber 2. Chamber 2
Is depressurized by the vacuum device 3. Chamber 2
A substrate 4, a mask 5, and a nozzle 6 are provided therein.
The substrate 4 is for supporting the formed object,
The mask 5 is located opposite to the substrate and is for blocking a part of the ultra-fine particle flow reaching the substrate 4 from the nozzle 6 and has an opening 7 forming an opening pattern for passing the ultra-fine particle flow. .

[0007] The nozzle 6 sprays an ultra-fine particle material onto the substrate 4 through the opening 7 of the mask 5. The substrate 4 and the mask 5 are a substrate driving device 8 and a mask driving device 1, respectively.
1 and are displaceable in the chamber 2 by being driven by their driving devices. Nozzle 6 is also chamber 2
It may be configured to be displaceable within. The nozzle 6 has one or a plurality of nozzles, and operates according to the type of the super-particle material. In this embodiment, two nozzles 6 (6a, 6
b) The nozzle 6a is provided with a high-frequency induction heating device, and the nozzle 6b is provided with an aerosol heating device. Further, a laser processing device 12 is provided. The laser processing device 12 is for forming the opening 7 in the mask 5 in the chamber 2. These systems are operating system 1
3 is controlled. Helium is used as a carrier gas, and a gas supply system 14 is connected.

Next, the microfabrication method of the present invention will be described. As shown in FIG. 3, the ultrafine particle material 15 is sprayed onto the substrate 4 through the nozzle 6 and deposited thereon to form the finely shaped object 1.
6, a mask 5 having an opening 7 forming a predetermined opening pattern is arranged between the nozzle 6 and the substrate 4, and a distance D between the mask 5 and a model 16 on the substrate 4 is formed. With the nozzle 6 being relatively displaced with respect to the mask 5 while maintaining a constant
Through the substrate 4. The distance D between the mask 5 and the growth surface of the modeled object 16 on the substrate 4 is selected depending on the type of the ultrafine particle material 15, the temperature of the ultrafine particle flow in the nozzle 6, and other conditions, and is preferably 700 μm or more.

In such a configuration, the ultrafine particle material 1
5 is sprayed onto the substrate 4 through the nozzle 6 and deposited to form a fine-shaped object 16. In this case, the ultrafine particle flow 17 passing through the mask 5 is, as shown in FIGS.
By scanning the nozzle 6 with respect to the mask 5, averaging is performed. As a result, the density distribution of the ultra-fine particles in the ultra-fine particle flow 17 disappears, the deposit growth surface becomes flat, and a film that is a uniform and dense shaped object 16 is obtained. FIG.
As shown in FIG. 7 and FIG. 7, the ultrafine particle flow has a large kinetic energy, so that the flow proceeds straight after passing through the opening 7 of the mask.
When the distance D between the mask 5 and the growth surface of the object on the substrate 4 is appropriately selected, the carrier gas flow not deposited on the substrate 4 diffuses around after passing through the mask 5 and disturbs the ultrafine particle flow 17. Does not occur.

In this state, to form a desired pattern on the substrate 4, the mask 5 or the nozzle 6 is displaced relative to the substrate 4. That is, the relative displacement between the mask 5 or the nozzle 6 and the substrate 4 for forming a pattern of a modeled object is superimposed on the relative displacement between the nozzle 6 and the mask 5 for averaging the density distribution of the ultrafine particles in the nozzle 6. Is added. The pattern of the opening 7 of the mask 5 is selected depending on how the pattern of the modeled object is drawn on the substrate 4.
In the example shown in FIG. 5, an opening 7 having the same pattern as the pattern of the object to be formed on the mask 5 is formed, and the nozzle 6 is scanned with respect to the substrate 4 to form the object according to the pattern. In addition, depending on the shape of the opening 7 of the mask 5, FIG.
As shown in (5), the mask 5 and the substrate 4 may be displaced, the nozzle 6 and the mask 5 may be displaced, or the nozzle 6 and the substrate 4 may be displaced.

The opening 7 of the mask 5 can be formed in a separate step in advance. However, as shown in FIGS. May be supplied between the nozzle 6 and the substrate 4,
As shown in FIG. 9, an opening 7 may be formed in the mask material fed from the mask material roller by a laser processing device whenever necessary, and may be further fed and supplied between the nozzle 6 and the substrate 4.

Further, as shown in FIG. 10, if a plurality of opening patterns are formed in the mask 5, a plurality of the same patterns can be simultaneously drawn by scanning the nozzles 6 for all the patterns.

[0013]

[Experimental Examples] Experiments were conducted on Ag ultrafine particles and PZT ultrafine particles using the microfabrication apparatus shown in Table 1. Table 1 shows the experimental conditions. With respect to the ultrafine Ag particles, a shaped object having a height of the shaped object of 40 μm, a roughness Ra of 0.3 μm, and an inclination angle of 75 ° on the side surface of the shaped object was obtained. As for the PZT ultrafine particles, a shaped article having a roughness Ra of 0.8 μm and an inclination angle of 27 ° on the side surface of the shaped article was obtained. became.

[0014]

[Table 1]

[0015]

As is apparent from the above description, according to the present invention, it is possible to obtain an ultra-fine particle deposition technique capable of forming minute and high-precision shaped objects.

[Brief description of the drawings]

FIG. 1 is a configuration explanatory view showing a microfabrication apparatus.

FIG. 2 is a configuration explanatory view showing a relationship between a nozzle, a mask, and a substrate of the microfabrication apparatus.

FIG. 3 is an explanatory view showing the principle of the microfabrication method.

FIG. 4 is an explanatory diagram showing the behavior of a flow of ultrafine particles.

FIG. 5 is an explanatory view showing a growth process of a deposit.

FIG. 6 is an explanatory diagram showing the behavior of the ultrafine particle flow and the carrier gas.

FIG. 7 is an explanatory sectional view showing a deposit;

FIG. 8 is a configuration explanatory view showing a relationship between a nozzle, a mask, and a substrate according to another embodiment of the microfabrication apparatus.

FIG. 9 is a configuration explanatory view showing a method for creating a mask.

FIG. 10 is an explanatory view showing another example of the microfabrication method.

FIG. 11 is an explanatory diagram showing the behavior of an ultrafine particle flow.

FIG. 12 is an explanatory view showing a growth process of a deposit.

FIG. 13 is an explanatory diagram showing the behavior of the ultrafine particle flow and the carrier gas.

FIG. 14 is an explanatory sectional view showing a deposit;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Micro modeling apparatus 2 Chamber 3 Vacuum apparatus 4 Substrate 5 Mask 6 Nozzle 7 Opening 8 Substrate driving apparatus 11 Mask driving apparatus 12 Laser processing apparatus 13 Operation system 14 Gas supply system 15 Ultrafine particle material 16 Modeling object 17 Ultrafine material flow

Claims (9)

[Claims] 1. A mask having an opening forming a predetermined opening pattern between the nozzle and the substrate, when the ultrafine particle material is sprayed and deposited on the substrate through a nozzle to form a fine shaped object. The ultrafine particle material is placed on the mask while displacing the nozzle relative to the mask while maintaining a constant distance between the mask and the growth surface of the molded object on the substrate or the surface of the substrate. A microfabrication method, characterized by spraying the substrate through the opening. 2. The microfabrication method according to claim 1, wherein the ultrafine particle material is jetted onto the substrate through an opening of the mask while displacing the mask. 3. The microfabrication method according to claim 1, wherein said ultrafine particle material is sprayed onto said substrate through an opening of said mask while displacing said mask and said substrate. 4. The microfabrication method according to claim 1, wherein said ultrafine particle material is jetted onto said substrate through an opening of said mask while displacing said nozzle and said mask. 5. The microfabrication method according to claim 1, wherein the ultrafine particle material is jetted onto the substrate through an opening of the mask while displacing the nozzle and the substrate. 6. The method according to claim 1, wherein said mask has a plurality of said opening patterns. 7. The distance between said mask and said substrate is 700 μm.
2. The microfabrication method according to claim 1, wherein the length is at least m. 8. A substrate, comprising: a chamber provided with a substrate, a mask positioned opposite to the substrate, and a nozzle for jetting ultrafine particle material onto the substrate through an opening forming an opening pattern of the mask; And a mask driving device for driving the mask and a nozzle driving device for driving the nozzles. 9. The microfabrication apparatus according to claim 7, further comprising a laser processing apparatus for forming said opening of said mask in said chamber.