JP2005046696A - Nozzle for making composite structure - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a nozzle for making a composite structure, in which the shape of an aerosol passage space and/or a jet is less liable to be changed by corpuscles even if the nozzle is used consecutively. <P>SOLUTION: The nozzle 10 is formed by joining together two plate-like members 11, 12, and a heating means 13 is attached on the outer surface of each member 11, 12. A slot 16, whose one end forms a lead-in opening 14 and the other end forms a lead-out opening 15, is formed on the surface of the member 11, while no slot is formed on the member 12. The surface of the slot 16 of the member 11, the surface of the member 12, which forms the aerosol passage space jointly with the slot 16, and the front end face 19 of the nozzle 10, on which the lead-out opening 15 is formed, are coated with a coating. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a composite preparation nozzle used when a composite structure including a substrate and a structure is manufactured by spraying aerosol containing fine particles onto the substrate to form the structure on the substrate.
[0002]
[Prior art]
When a fine particle is sprayed from a nozzle onto a substrate to form a structure on the substrate, a mask having a predetermined opening pattern is provided between the nozzle and the substrate, and the structure having a predetermined shape is sprayed through the opening of the mask. A method for obtaining an object has been proposed. (Patent Document 1)
[0003]
In addition, as a nozzle used in the aerosol deposition method, an aerosol passage space having a rectangular cross section is formed, and a fine particle having a slow flux component is prevented from reaching the substrate. (Patent Document 2)
[0004]
[Patent Literature]
Patent Document 1: Japanese Patent Application Laid-Open No. 10-202171 Patent Document 2: Japanese Patent Application Laid-Open No. 2002-320879
[Problems to be solved by the invention]
The shape of the structure formed by the aerosol deposition method largely depends on the shape of the jet formed at the tip of the nozzle. However, the velocity of the fine particles ejected from the nozzle is as high as 150 m / s to 450 m / s, and the hardness of the fine particles is high.
On the other hand, when the nozzle is made of metal such as stainless steel, the inner surface of the nozzle or the periphery of the jet outlet forming the aerosol passage space is worn by the high-speed fine particles described above, or conversely, the fine particles adhere to the flow path shape or jet. The shape of the outlet changes, and this makes it impossible to produce a structure with the desired shape.
[0006]
An object of the present invention is to provide a nozzle for producing a composite structure in which the aerosol passage space and the shape of a jet outlet are not easily changed by fine particles even when used continuously.
[0007]
[Means to solve the problem]
In order to solve the above-mentioned problems, the present invention collides an aerosol in which fine particles of a brittle material are dispersed in a gas with a base material, and crushes and deforms the fine particles by the impact of the collision to join the base material surface. In the nozzle used in the composite structure manufacturing apparatus for forming the structure made of the constituent material of the fine particles, the oxide ceramics on the inner surface or the tip surface where the nozzle outlet is formed, A coating made of nitride ceramics, carbide ceramics, metal or fluorine resin was applied.
Moreover, this invention also includes the composite structure preparation apparatus provided with said nozzle.
[0008]
Changes in the shape of the aerosol passage space and the jet outlet may be due to wear or due to powder adhesion. In addition, the characteristics exhibited by each coating material were different, and we found that there are coatings that are effective in preventing adhesion of powder and coatings that are effective in preventing wear.
Therefore, it is preferable to divide the area to be coated into an area where the powder is likely to adhere and an area where the powder is likely to be worn, and a different coating is applied to each area.
[0009]
In addition, when the aerosol deposition method is performed in a state where the aerosol is heated, it has an effect of preventing powder adhesion on the inner surface of the nozzle and improving the structure forming speed. Therefore, it is effective to attach a heating means to the outer surface of the nozzle. . The knowledge of the present inventors grasps that it is most effective to heat the nozzle to about 70 ° C. to 120 ° C.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is an apparatus diagram of a composite structure manufacturing apparatus incorporating a nozzle according to the present invention. The composite structure manufacturing apparatus includes a structure forming chamber 1 for performing aerosol deposition, and aerosol in the structure forming chamber 1. The structure forming chamber 1 and the aerosol generating apparatus 2 are maintained at a high vacuum by the pumps 3 and 4, and the structure forming chamber 1 is vertically and vertically (Z), front and back, left and right ( A substrate holder 5 that can be braked to XY) and a base material 6 attached to the substrate holder 5 are arranged.
[0011]
Further, a nozzle 10 according to the present invention is disposed in the structure forming chamber 1, and a signal from a sensor 7 for measuring the concentration of the aerosol to the nozzle 10 is sent to an external feedback control circuit 8 to be processed to generate aerosol. Signals are sent to the control units of the apparatus 2 and the gas cylinders 9 filled with nitrogen gas for transport via wiring to control the aerosol concentration and control to supply an arbitrary amount of aerosol that collides with the substrate. I do.
[0012]
2 is an overall view of the nozzle 10, and FIG. 3 is a perspective view of one plate-like member constituting the nozzle. The nozzle 10 is formed by bonding two plate-like members 11 and 12 made of metal or ceramic. Thus, a heating mechanism 13 capable of heating the nozzle is attached to the outer surface of each of the plate-like members 11 and 12. As the heating means, a sheathed heater, a rubber heater, an infrared heater, or the like can be used.
[0013]
A groove 16 is formed on the surface of the one plate-like member 11, one end being an introduction opening 14 and the other end being a lead-out opening 15, and the other plate-like member 12 is not formed with a groove. A groove may be formed in both plate-like members. An insertion hole 17 is formed at one end of the plate-like member 11, and a joint 18 connected to the pipe from the aerosol generator is inserted into the insertion hole 17.
[0014]
In the range from the inlet opening 14 to the outlet opening 15, the groove 16 gradually decreases in the short side direction (X direction) toward the downstream side (along the Z direction), and the long side direction (Y direction). And the cross-sectional area of the aerosol passage space near the introduction opening 14 is set larger than the cross-sectional area of the aerosol passage space on the downstream side.
[0015]
Further, coating is applied to the surface of the groove 16 of the plate-like member 11, the surface of the plate-like member 12 that defines an aerosol passage space together with the groove 16, and the front end surface 19 of the nozzle 10 in which the outlet opening 15 is formed. Has been.
As the coating material, TiC, TiN, TiO ₂ , Al ₂ O ₃ , DLC (diamond), Si ₃ N ₄ , SiC, PTFE (fluorine resin), oxide, nitride, carbide, hard chrome, etc. are suitable. As the coating method, means such as aerosol deposition, sputtering, electron beam evaporation, thermal CVD, plasma CVD, plasma spraying, thermal spraying, plating, powder coating, dip coating, spray spray coating and the like are suitable.
[0016]
4 to 8 show different types of nozzle shapes. In the type shown in FIG. 4, the dimensions of the upstream side portion 16a of the groove 16 are changed in the short side direction (X direction) and the long side direction (Y direction). About the downstream portion 16b, the dimension in the short side direction (X direction) gradually decreases toward the downstream side (along the Z direction), and the dimension in the long side direction (Y direction). In addition, the cross-sectional area of the aerosol passage space is gradually narrowed toward the downstream side in the downstream portion 16b.
[0017]
The upstream portion 16a and the downstream portion 16b have different coating types. That is, the upstream portion 16a is provided with a coating effective for preventing adhesion of a fluorine-based resin or the like in order to prevent the adhesion of fine particles, and the downstream portion 16b is provided with a coating having a high hardness such as TiC in order to prevent wear. .
[0018]
If the surface roughness of the coating surface is poor, a sufficient powder adhesion preventing effect cannot be obtained. In some cases, the powder may easily adhere. Therefore, it is more desirable to finish the surface by performing a surface smoothing treatment after coating. When the coating material is an oxide, carbide or nitride, it is desirable to finish the surface to a mirror surface by lapping or the like. In the case of a fluorine-based resin, it is desirable to finish the coating surface in advance so that the surface is as smooth as possible, and to apply a coating method having a uniform surface roughness.
[0019]
When two or more types of coating are applied, if there are steps, joints, or gaps between the coating boundaries, the powder flow in the nozzle may be disturbed, which may cause powder adhesion and turbulence. It is preferable that no gaps or steps are formed at the joints between the surfaces. If a step or bulge occurs, it is more desirable to remove it by post-processing such as lapping and finish it flush.
[0020]
In the type shown in FIG. 5, with respect to the upstream portion 16a of the groove 16, the dimension in the short side direction is gradually decreased and the dimension in the long side direction is gradually increased toward the downstream side. In the portion 16a, the cross-sectional area of the aerosol passage space is gradually narrowed toward the downstream side, and the downstream portion 16b is made substantially equal without changing the dimensions in the short side direction and the long side direction.
The kind of coating to be applied is different between the upstream portion 16a and the downstream portion 16b as in the above embodiment.
[0021]
In the type shown in FIG. 6, the upstream side portion 16a and the downstream side portion 16b of the groove 16 are substantially equal without changing the dimensions in the short side direction and the long side direction, and the intermediate portion 16c is directed toward the downstream side. The dimension in the short side direction is gradually reduced and the dimension in the long side direction is gradually increased, and the cross-sectional area of the aerosol passage space is gradually narrowed toward the downstream side.
Also in this embodiment, the types of coating are different in the upstream portion 16a, the downstream portion 16b, and the intermediate portion 16c.
[0022]
In the type shown in FIG. 7, since the area of the outlet opening 15 is three times that of the other nozzles, when the aerosol with the same concentration is supplied, the aerosol concentration becomes 1/3 of that of the other nozzles. The film formation rate decreases. Therefore, an aerosol having an aerosol concentration of 3 times is introduced into the introduction opening 14.
Even in this embodiment, the type of coating is different between the upstream portion 16a and the downstream portion 16b.
[0023]
In the type shown in FIG. 8, three rectangular introduction openings 14 are provided for one rectangular lead-out opening 15. Even in this embodiment, the type of coating is different between the upstream portion 16a and the downstream portion 16b.
[0024]
【The invention's effect】
As described above, according to the present invention, the nozzle used in the aerosol deposition method is coated on the portion where the nozzle is likely to be worn and the portion where the fine particles are likely to adhere. A nozzle for producing a composite structure is obtained in which the shape of the space and the spout is difficult to change.
[Brief description of the drawings]
FIG. 1 is an overall configuration diagram of a composite structure manufacturing apparatus using a nozzle according to the present invention. FIG. 2 is an overall configuration diagram of a nozzle (type 1) of the present invention.
FIG. 3 is a perspective view of one plate-like member constituting the nozzle (type 1) of the present invention,
FIG. 4 is a perspective view of one plate-like member constituting the nozzle (type 2) of the present invention.
FIG. 5 is a perspective view of one plate-like member constituting the nozzle (type 3) of the present invention.
FIG. 6 is a perspective view of one plate-like member constituting the nozzle (type 4) of the present invention.
FIG. 7 is a perspective view of one plate-like member constituting the nozzle (type 5) of the present invention.
FIG. 8 is a perspective view of one plate-like member constituting the nozzle (type 6) of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Structure formation chamber, 2 ... Aerosol generator, 3, 4 ... Pump, 5 ... Substrate holder, 6 ... Base material, 7 ... Sensor, 8 ... Feedback control circuit, 9 ... Gas cylinder, 10 ... Nozzle, 11, 12 DESCRIPTION OF SYMBOLS ... Plate-like member, 13 ... Heating means, 14 ... Introducing opening, 15 ... Deriving opening, 16 ... Groove, 16a ... Upstream part of groove, 16b ... Downstream part of groove, 16c ... Middle part of groove, 17 ... Insertion Hole, 18 ... joint, 19 ... front end face of nozzle.

Claims (4)

An aerosol in which fine particles of a brittle material are dispersed in a gas is caused to collide with a base material, and the fine particles are crushed and deformed by the impact of the collision to be joined, and a structure made of the constituent material of the fine particles is formed on the surface of the base material. In the nozzle used in the composite structure manufacturing apparatus to be formed, an oxide ceramic, a nitride ceramic, a carbide ceramic, a metal is formed on the inner surface forming the aerosol passage space of the nozzle or the tip surface on which the ejection port is formed. A nozzle for producing a composite structure, characterized in that a coating made of either fluorine resin is applied. The nozzle for producing a composite structure according to claim 1, wherein an area to be coated is divided into an area where powder is likely to adhere and an area where the powder is easily worn, and a different coating is applied to each area. Nozzle for making composite structures. 3. The composite structure manufacturing nozzle according to claim 1, wherein a heating means is attached to an outer surface of the nozzle. A composite structure manufacturing apparatus comprising the nozzle according to claim 1.

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