KR100964060B1 - Apparatus and method of depositing powder through transient supply of conveying gas - Google Patents

Abstract

PURPOSE: A powder laminating apparatus using a discontinuous carrier gas supply, and a method thereof are provided to secure the efficiency and economical effect of the apparatus without using expensive carrier gas including helium. CONSTITUTION: A powder laminating apparatus using a discontinuous carrier gas supply comprises the following: a chamber; a vacuum pump(20) forming the inside of the chamber into a vacuum environment; a substrate supporting unit(30) formed in the inside of the chamber to support a substrate; a spraying nozzle(40) spraying powder to the substrate; a gas injection unit(50) injecting gas from the exterior of the chamber to the inside; a piping(60) enabling the gas injected from the gas injection unit to the spraying nozzle; a powder supplying unit(70) supplying the powder to the piping; and a controlling valve(90) on/off controlling the gas inserted to the gas injection unit.

Description

Powder laminating apparatus and method using discontinuous transfer gas supply {APPARATUS AND METHOD OF DEPOSITING POWDER THROUGH TRANSIENT SUPPLY OF CONVEYING GAS}

The present invention relates to a device and a method for laminating a predetermined powder on a substrate, and more particularly, to powder to the substrate by discontinuously spraying a high-pressure transfer gas to the substrate through a nozzle of a powder such as ceramic or metal at room temperature A powder laminating apparatus and method using a discontinuous transfer gas supply for lamination.

As a method of laminating a predetermined material on a substrate, there have been conventional chemical vapor deposition, thermal spraying, gas deposition, and the like.

Chemical vapor deposition is a method widely used in the semiconductor manufacturing process and chemically reacts a gaseous material with a heated substrate surface to deposit a predetermined material on the surface of the substrate, and thermal spraying uses a high temperature heat source of a powder material. To a molten state, impinge on the surface of the substrate at high speed, and then rapidly cool and solidify to deposit a predetermined material on the surface of the substrate. It is a method of laminating a predetermined material on a substrate by inducing bonding between the vaporized ultrafine particles after making.

However, chemical vapor deposition does not allow the deposition of various materials such as metals on the surface of the substrate because of the deposition of gaseous materials on the surface of the substrate. Has the disadvantage of causing unexpected chemical reactions.

In addition, the thermal spraying method or the gas deposition method is also carried out in a high temperature state has the disadvantage that it can damage the heat-sensitive substrate like the chemical vapor deposition method described above.

Cold spray method has been developed to overcome this conventional problem, but when the temperature is low, there is a need to significantly increase the injection speed, and thus there is a disadvantage that additional equipment or cost may be required.

The present invention is designed to overcome the above problems of the prior art, an object of the present invention is to use a large pressure difference that occurs instantaneously by discontinuously supplying the transfer gas from the gas inlet through a control valve at room temperature The present invention provides a powder laminating apparatus and method using a discontinuous transfer gas supply capable of obtaining a high injection speed even at low pressure without additional equipment such as heating means by accelerating a ceramic or metal powder through a nozzle as a transfer gas and impinging on a substrate. There is.

According to an aspect of the present invention, there is provided a powder laminating apparatus, the powder laminating apparatus comprising: a chamber; A vacuum pump connected to the chamber to create a vacuum environment inside the chamber; A substrate support formed in the chamber and supporting the substrate; An injection nozzle formed in the chamber and configured to spray predetermined powder on the substrate; A gas injection unit formed outside the chamber and injecting a predetermined gas; A pipe connected to each of the gas injection unit and the injection nozzle to move the gas injected from the gas injection unit to the injection nozzle; A powder supply unit connected to the pipe and supplying powder to a pipe through which the gas moves; And a control valve controlling on / off the gas injected between the powder supply part and the gas injection part.

The injection nozzle includes a first opening connected to the pipe, a second opening for injecting powder onto the substrate, and a nozzle neck formed between the first opening and the second opening, and the nozzle at the first opening. The aperture may gradually decrease to the neck, and the aperture may gradually increase or be maintained from the nozzle neck to the second opening.

The powder laminating apparatus may further include a heating unit for heating the powder to 300 ° C. in the powder supply unit.

The injection nozzle may be configured to be tilted relative to the substrate surface.

The substrate support may be formed to be movable in the X-axis, Y-axis, and Z-axis.

The powder lamination apparatus may further include a mask providing unit that provides a mask having a specific pattern between the substrate and the nozzle.

The powder supply unit includes a first powder supply unit for supplying a first powder and a second powder supply unit for supplying a second powder, and the pipe includes a first pipe connected to the first powder supply unit, and the second powder supply unit. And a second pipe connected to each other, and a third pipe integrated with the first pipe and the second pipe, and the injection nozzle may be connected with the third pipe.

The injection nozzle and the control valve may be provided in plural, and the powder may be laminated to have a pattern on the substrate by controlling each of the control valves.

According to another aspect of the present invention, a powder lamination method is provided, the powder lamination method comprising: a first step of supplying powder; A second step of transporting the supplied powder to the injection nozzle by discontinuously injecting a transport gas at room temperature; And a third step of spraying the transported powder on a substrate using the injection nozzle at room temperature and atmospheric pressure or in a vacuum state, wherein the size of the powder is 0.01 to 20 μm, and in the third step, the transfer The time until the complete opening of the valve for the control of the gas is 2 seconds or less and the supply time of the gas is 10 seconds or less from opening and closing the valve for the transfer gas, the pressure of the transfer gas may be 2 to 30 bar. .

The powder may include a metal, a ceramic, or a mixture of the metal and a ceramic, and the substrate may include a metal, a ceramic, or a polymer.

The injection nozzle may have an opening connected to the pipe larger than an opening for injecting powder into the substrate.

The third step may include spraying the powder at an inclined angle with respect to the substrate surface.

The third step may include moving the substrate so that powder is laminated to have a pattern on the substrate.

The injection nozzle and the control valve may be provided in plural, and the powder may be laminated to have a pattern on the substrate by controlling each of the control valves.

The first step includes supplying a first powder and the supply of a second powder, wherein the second step includes conveying the first powder in a first path, and transporting the second powder in a second path Conveying the first powder and the second powder, and the third step includes spraying the mixed first powder and the second powder through one spray nozzle. By changing the amount of the first powder and the second powder to be injected by changing the amount of the first powder and the second powder supplied in the step of supplying the first powder and the second powder, The amount of the first powder and the second powder applied to the substrate may be varied or the ratio may be continuously changed.

The method may further include providing a mask between the substrate and the jet nozzle to form a pattern on the substrate.

As described above, the powder stacking apparatus and method using the discontinuous conveying gas supply according to the present invention forms a large pressure difference instantaneously by discontinuously controlling the supply of the conveying gas supplied from the gas injection unit through the control valve. By using this, ceramics and metal powders are accelerated through the nozzles at room temperature to be laminated on the substrate to obtain high injection speeds at low pressure. Therefore, helium or the like does not require a separate device such as a heating means for improving the injection speeds. There is no need to use expensive transfer gas, so the efficiency and economic effect are excellent.

Hereinafter, the same reference numerals will be described in detail with reference to the accompanying drawings, with reference to the same components preferred embodiments of the present invention. The terms and words used in the present specification and claims should not be construed as limited to ordinary or dictionary meanings and should be construed in accordance with the technical meanings and concepts of the present invention.

The embodiments described in the specification and the configuration shown in the drawings are preferred embodiments of the present invention, and do not represent all of the technical idea of the present invention, various equivalents and modifications that can be substituted for them at the time of the present application are There may be.

1 is a view showing a schematic configuration of a powder laminating apparatus using a discontinuous transfer gas supply according to an embodiment of the present invention.

Referring to FIG. 1, the powder laminating apparatus 1 according to an exemplary embodiment of the present invention may include a chamber 10, a vacuum pump 20, a substrate support 30, an injection nozzle 40, and a gas injection unit 50. ), A pipe 60, a powder supply unit 70, and a control valve 90.

The chamber 10 accommodates the substrate support 30 and the injection nozzle 40, and the chamber 10 is connected to a vacuum pump 20 for vacuuming the inside of the chamber 10.

The substrate support part 30 is formed inside the chamber 10 to support a predetermined substrate S, and is configured to be movable on the X and Y axes by the predetermined driving device 31. In this way, since the substrate S fixed to the substrate support 30 is also movable, powder may be laminated on the substrate S in a predetermined pattern.

As the substrate S, a metal, a ceramic, or a polymer material may be used.

The spray nozzle 40 is formed in the chamber 10 to spray powder onto the substrate S to stack the powder on the substrate S. The injection nozzle 40 may include a first opening 41, a second opening 42, and a nozzle neck 43.

The first opening 41 is connected to the pipe 60 and serves to receive powder from the pipe 60. The second opening 42 serves to spray the powder received through the first opening 41 onto the substrate S, and the nozzle neck 43 is disposed between the first opening 41 and the second opening 42. It is formed in the interconnection between the first opening 41 and the second opening 42.

As the diameter gradually decreases from the first opening 41 to the nozzle neck 43, the diameter from the nozzle neck 43 to the second opening 42 increases or becomes the same so that the powder sprayed through the injection nozzle 40 For example, it may be able to be injected at an injection speed of 200 to 2000m / sec.

In addition, the first opening 41 may be larger than the second opening 42.

In FIG. 1, the spray nozzle 40 is formed perpendicular to the surface of the substrate S. However, the present invention is not limited thereto, and the spray nozzle 40 may be tilted at a predetermined angle with respect to the surface of the substrate S. It may be formed and thus the powder to be sprayed may be sprayed so that it can be tilted with respect to the substrate (S) surface.

In addition, the present invention is not limited thereto, but may be disposed so that the injection nozzle 40 is perpendicular to the horizontal plane and the substrate S may be tilted at a predetermined angle.

The gas injection unit 50 is formed outside the chamber 10 to inject a gas to transport the powder. By properly adjusting the gas pressure injected from the gas injection unit 50 and using the injection nozzle 40, it is possible to appropriately control the injection speed of the powder injected through the injection nozzle 40.

As the gas injected from the gas inlet 50, helium, nitrogen, oxygen, air, or the like may be used, but not limited thereto.

The pipe 60 is connected to the gas injection unit 50 and the injection nozzle 40 so that the gas supplied from the gas injection unit 50 can move to the injection nozzle 40.

The powder supply unit 70 is connected to the pipe 60 to supply the powder to the pipe (60). The powder supplied may include a metal or a ceramic , the size of which may be in the range of 0.1 to 10 μm, for example.

In FIG. 1, only one powder supply unit 70 is provided. However, the present invention is not limited thereto and may include a plurality of powder supply units.

In this case, the pipe 60 may also be composed of a plurality of pipes to connect each of the plurality of powder supply unit and may also include a pipe in which the plurality of pipes are integrated, and such integrated pipes may be connected to the injection nozzle 40. Can be.

In addition, the powder laminating apparatus 1 according to the present invention may further include a filter 80, and the filter 80 is disposed between the chamber 10 and the vacuum pump 20 to collect the powder having been laminated. can do.

The control valve 90 is disposed between the powder supply unit 70 and the gas injection unit 50 to control on / off the supply of the transfer gas supplied from the gas injection unit 50.

On the other hand, it may further include a heating (not shown) between the injection nozzle 40 and the powder supply unit 70, and the powder conveyed through it may be heated to, for example, room temperature to 300 ℃.

In this way, by additionally configuring the heating unit, when the powder is heated in the range of the predetermined temperature, the spraying speed of the powder can be set slightly slower, for example, the spraying speed range is set to 300 to 1200 m / sec. That is, the heated powder can move at a higher speed than the unheated powder, so that when the powder is heated to a predetermined temperature range, the desired speed can be obtained when the powder finally collides with the substrate even if the spraying speed range is set slightly slower. do.

In addition, when the powder is heated to a predetermined temperature range, when the powder collides with the substrate, the particle is smoothly deformed to improve the lamination efficiency on the substrate.

In addition, it may further include a filter portion (not shown) in the pipe 60 between the injection nozzle 40 and the powder supply portion 70. The filter unit may filter the powder having a predetermined size or more by floating the conveyed powder in a gas.

Further, a mask providing part (not shown) may be further provided between the substrate S and the spray nozzle 40 to provide a mask having a specific pattern for an etching process.

In addition, in the embodiment with reference to FIG. 1, only one injection nozzle 40 is provided, but the present invention is not limited thereto, and a plurality of injection nozzles may be provided. In this case, a separate control valve 90 may be provided for each of the plurality of injection nozzles, and thus, powder may be laminated in a predetermined pattern on the substrate S by controlling the plurality of control valves, respectively.

The size of the powder used in the powder lamination method using the discontinuous transfer gas supply according to the embodiment of the present invention may be, for example, in the range of 0.01 to 20 μm, and control of the transfer gas when the powder is sprayed onto the substrate S. The time from the full opening of the control valve 90 for example may be 2 seconds or less, and the supply time of the conveying gas may be, for example, 10 seconds or less from the opening of the control valve 90 to the closing, and the pressure of the conveying gas may be, for example, 2 To 30 bar.

Hereinafter, a powder lamination method using a discontinuous transfer gas supply according to an embodiment of the present invention will be described with reference to the powder lamination apparatus 1 shown in FIG. 1. However, the powder lamination method using the discontinuous transfer gas supply according to the present invention is not limited to being performed by the powder lamination apparatus 1 shown in FIG. 1 and may be performed by other apparatuses.

First, a predetermined powder is supplied. The size of the powder is as described above, and metal or ceramic powder may be used as the kind. Powder may be supplied through the pipe 60 from the powder supply unit 70 shown in FIG.

The step of supplying the predetermined powder may include supplying a plurality of powders each including, for example, supplying a first powder and supplying a second powder. In this case, the method may include transporting the first powder in the first path, transporting the second powder in the second path, and mixing the first powder and the second powder.

In this case, the first powder and the second powder may use different materials from each other, and the amount supplied may be variously changed.

Next, the gas is injected through the pipe 60 through the gas injection unit 50 at room temperature to transport the supplied powder to the injection nozzle 40.

The gas pressure of the injected gas may be appropriately adjusted in view of the injection speed of the powder injected through the injection nozzle 40.

On the other hand, the powder may be heated to a range of, for example, from room temperature to 300 ° C. during the conveyance of the powder. In this case, the injection speed of the powder injected through the injection nozzle may be set to be somewhat slow, specifically, for example, in the range of 300 to 1200 m / sec. have.

In addition, the powder may be suspended in the gas during the transport of the powder to filter the powder of a predetermined size or more.

Next, the powder is sprayed onto the substrate S using the spray nozzle 40.

This process may be performed in the chamber 10 in a vacuum state using the vacuum pump 20.

If the step of transporting the powder as described above includes the step of transporting each of the plurality of powders, such as transporting the first powder and transporting the second powder, the substrate using the spray nozzle 40 Injecting the powder onto (S) may be implemented by injecting the mixed first powder and the second powder using one injection nozzle, wherein the amount of the first powder and the second powder supplied By changing the amounts of the first powder and the second powder sprayed by changing, the ratios of the first powder and the second powder applied onto the substrate S may be changed differently or continuously.

Experimental Example

Hereinafter, the experimental results of powder lamination using a discontinuous transfer gas supply according to an embodiment of the present invention will be described with reference to FIGS. 2 to 6.

First, FIG. 2 is a view showing a result of laminating a metal aluminum (Al) powder on a polypropylene (PP) substrate using a discontinuous transfer gas supply according to an embodiment of the present invention. FIG. 2A is an Al powder on a PP substrate. The lamination result is visually observed, and FIG. 2B is a view showing the observation of the lamination result of Al powder on a PP substrate under a microscope.

The lamination result in FIG. 2 was a compressed air of 0.6 MPa as the conveying gas, a vacuum of -0.09 MPa, and a supersonic nozzle having a nozzle neck of 1 × 1 mm and an outlet of 1 × 2 mm as the injection nozzle. The SOD was 3 mm and the valve was opened. The time was within 1 second and the duration was within 5 seconds.

As shown in FIG. 2, the lamination of the Al powder onto the PP substrate was clearly observed with the naked eye through a microscope through a discontinuous transfer gas supply according to an embodiment of the present invention.

Next, FIG. 3 is a diagram illustrating a result of laminating ceramic TiO ₂ powders using various types of substrates using a discontinuous transfer gas supply according to an embodiment of the present invention. FIG. 3A illustrates that TiO ₂ powders are stacked on a PP substrate. 3b shows the result of lamination of TiO ₂ powder on a glass substrate, and FIG. 3c shows the result of lamination of TiO ₂ powder on a copper (Cu) substrate.

In the lamination result in FIG. 3, TiO ₂ powder having a diameter of less than 5 μm was used, 0.6 MPa of compressed air was used as a conveying gas, and a vacuum degree of −0.09 MPa was used as the injection nozzle. The SOD was 3mm and the valve opening time was within 1 second and the duration was within 5 seconds.

As shown in FIG. 3, it was possible to clearly check the lamination of the TiO ₂ powder onto the PP, glass, and copper substrates by visually discontinuous supply of gas according to an embodiment of the present invention.

4 is a view showing the result of laminating a metal graphite powder using a discontinuous transfer gas supply in a polypropylene (PP) and a glass substrate according to an embodiment of the present invention, Figure 4a is a graphite powder is laminated on a PP substrate 4B shows the result of visual observation of the result of lamination of graphite powder on the glass substrate, and FIG. 4C shows the result of the observation of the result of lamination of graphite powder on the glass substrate under a microscope. One drawing.

The lamination result in FIG. 4 used 0.6 MPa of compressed air as the conveying gas, the vacuum degree was -0.09 MPa, and a slit nozzle having an outlet of 10 × 0.4 mm was used as the injection nozzle. The SOD was 3 mm and the valve opening time was 1 Within seconds, the duration was within 5 seconds.

As shown in FIG. 4, it was possible to clearly check the lamination of the graphite powder on the PP and the glass substrate through the naked eye to the microscope through the discontinuous transfer gas supply according to the embodiment of the present invention.

Next, referring to Figures 5 and 6, the lamination result by the powder lamination apparatus using the discontinuous transfer gas supply according to an embodiment of the present invention and the lamination result by the conventional powder lamination apparatus is compared.

Here, as a substrate (S), for example, a printed circuit board (PCB), polymethyl methacrylate (PMMA), and a glass substrate prepared by sigma-Aldrich, which have a size of several tens of nm to several μm, as a powder for lamination. Was used.

Compressed air or helium gas was used as the transport gas, and a slit type supersonic nozzle of 10 mm × 0.4 mm size was used as the injection nozzle.

In addition, the distance between the substrate and the injection nozzle 40 was 2 mm, the gas pressure was 700 kPa for compressed air, 500 kPa for helium, and 10 to 30 kPa in the chamber. The stacking shape was linear of 10 mm, the stacking repeat time was less than 10 seconds, and a discontinuous transfer gas supply was performed to have a valve opening time within 1 second. In addition, speed and pressure were analyzed by CFD analysis.

FIG. 5 is a comparative view comparing pressures when laminating powders to a substrate through a powder laminating apparatus using a discontinuous transfer gas supply according to an embodiment of the present invention. FIG. 5A is a powder laminating apparatus according to the present invention. The pressure generated when passing through and FIG. 5B shows the pressure generated when passing through the conventional lamination apparatus.

As can be seen in FIG. 5, the maximum pressure of 1.136 MPa is instantaneously when supplying discontinuous conveying gas when the maximum pressure is compared, and in the conventional case, that is, when supplying continuous conveying gas. It could be confirmed that a pressure of 0.6 MPa was generated.

Through this, it was found that when using the powder laminating apparatus and method using the discontinuous transfer gas supply according to the present invention, almost twice as much pressure could be obtained than the conventional powder laminating apparatus and method.

6 is a comparative view comparing the injection speed when the powder is laminated on the substrate through a powder lamination apparatus using a discontinuous transfer gas supply according to an embodiment of the present invention, Figure 6a is a powder lamination apparatus according to the present invention The injection speed generated when through and Figure 6b shows the injection speed generated when through the conventional lamination device.

As can be seen in Figure 6 when the injection speed is compared according to the present invention, that is, the injection speed of 1296m / sec when supplying discontinuous delivery gas, and 725.5m when supplying continuous delivery gas in the conventional case It was confirmed that the injection speed of / sec is generated.

Through this, it was found that when using the powder laminating apparatus and method using the discontinuous conveying gas supply according to the present invention, an improvement in the injection speed of nearly twice that of the conventional powder laminating apparatus and method can be obtained.

From the results of Figs. 5 and 6, the powder lamination apparatus and method using the discontinuous transfer gas supply according to the present invention can achieve a much higher speed for a very short time than the case of the continuous transfer gas supply.

The technical spirit of the present invention has been described above with reference to the accompanying drawings, but this is only illustrative of the preferred embodiments of the present invention and is not intended to limit the present invention. In addition, it is a matter of course that various modifications and variations are possible without departing from the scope of the technical idea of the present invention by anyone having ordinary skill in the art.

1 is a view showing a schematic configuration of a powder lamination apparatus using a discontinuous transfer gas supply according to an embodiment of the present invention;

2 is a view showing a result of laminating a metal aluminum (Al) powder on a polypropylene (PP) substrate using a discontinuous transfer gas supply according to an embodiment of the present invention, Figure 2a is Al powder is laminated on a PP substrate Figure 2b is a visual observation of the result and Figure 2b is a view showing a state observed with a microscope the result of the Al powder laminated on the PP substrate;

3 is a view showing the result of laminating ceramic TiO 2 powder using various types of substrates using a discontinuous transfer gas supply according to an embodiment of the present invention, and FIG. 3A shows a result of laminating TiO 2 powder on a PP substrate. 3b shows a result of lamination of TiO 2 powder on a glass substrate, and FIG. 3c shows a result of lamination of TiO 2 powder on a copper (Cu) substrate;

4 is a view showing the result of laminating a metal graphite powder using a discontinuous transfer gas supply in a polypropylene (PP) and a glass substrate according to an embodiment of the present invention, Figure 4a is a graphite powder is laminated on a PP substrate 4B shows the result of visual observation of the result of lamination of graphite powder on the glass substrate, and FIG. 4C shows the result of the observation of the result of lamination of graphite powder on the glass substrate under a microscope. One drawing

FIG. 5 is a comparative view comparing pressures when laminating powders to a substrate through a powder laminating apparatus using a discontinuous transfer gas supply according to an embodiment of the present invention. FIG. 5A is a powder laminating apparatus according to the present invention. Figure 5b shows the pressure generated when passing through and a conventional laminated device; And

6 is a comparative view comparing the injection speed when the powder is laminated on the substrate through a powder lamination apparatus using a discontinuous transfer gas supply according to an embodiment of the present invention, Figure 6a is a powder lamination apparatus according to the present invention Figure 6b is a view showing the injection speed generated when passing through the conventional laminated device.

Claims (16)

chamber; A vacuum pump connected to the chamber to create a vacuum environment inside the chamber; A substrate support formed in the chamber and supporting the substrate; An injection nozzle formed in the chamber and configured to inject metal or ceramic powder onto the substrate; A gas injection unit formed outside the chamber and injecting a gas for transporting the powder ; A pipe connected to each of the gas injection unit and the injection nozzle to move the gas injected from the gas injection unit to the injection nozzle; A powder supply unit connected to the pipe and supplying powder to a pipe through which the gas moves; And It includes a control valve for controlling the on / off gas injected between the powder supply and the gas injection, The injection nozzle includes a first opening connected to the pipe, a second opening for injecting powder onto the substrate, and a nozzle neck formed between the first opening and the second opening, and the nozzle at the first opening. The aperture is gradually reduced to the neck, and the aperture is gradually increased or maintained from the nozzle neck to the second opening . delete The method of claim 1, And a heating unit for heating the powder to 300 ° C. in the powder supply unit. The method of claim 1, The spray nozzle is characterized in that the powder stacking device, characterized in that configured to be inclined with respect to the substrate surface. The method of claim 1, The substrate support is powder laminating apparatus, characterized in that formed to be movable in the X-axis, Y-axis, and Z-axis. The method of claim 1, And a mask providing part for providing a mask having a specific pattern between the substrate and the nozzle. The method of claim 1, wherein the powder supply unit comprises a first powder supply unit for supplying a first powder and a second powder supply unit for supplying a second powder, The pipe includes a first pipe connected to the first powder supply part, a second pipe connected to the second powder supply part, and a third pipe integrated with the first pipe and the second pipe, The spray nozzle is a powder stacking device, characterized in that connected to the third pipe. The powder laminating apparatus according to claim 1, wherein the injection nozzle and the control valve are each provided in plural, and the powder is laminated to have a pattern on the substrate by controlling each of the control valves. A first step of feeding powder; A second step of transporting the supplied powder to the injection nozzle by discontinuously injecting a transport gas at room temperature; And And a third step of spraying the transported powder on a substrate using the spray nozzle at room temperature and atmospheric pressure or in a vacuum state. The size of the powder is 0.01 to 20 ㎛, in the third step, the pressure of the conveying gas is 2 to 30 bar, And a plurality of control valves for controlling injection of the injection nozzle and the conveying gas, respectively, and controlling the respective ones of the control valves to laminate powder to have a pattern on the substrate . The method of claim 9, Wherein said powder comprises a metal, a ceramic, or a mixture of said metal and a ceramic, and said substrate comprises a metal, a ceramic, or a polymer. The method of claim 9, The spray nozzle is powder opening method, characterized in that the opening connected to the pipe is larger than the opening for injecting powder to the substrate. The method of claim 9, And wherein said third step comprises spraying said powder at an inclined angle with respect to said substrate surface. The method of claim 9, And said third step comprises moving said substrate such that powder is laminated to have a pattern on said substrate. delete The method of claim 9, The first step includes supplying a first powder and supplying a second powder, The second step includes conveying the first powder in a first route, conveying the second powder in a second route, and mixing the first powder and the second powder, The third step includes the step of spraying the mixed first powder and the second powder through one spray nozzle, By changing the amount of the first powder and the second powder to be injected by changing the amount of the first powder and the second powder supplied in the step of supplying the first powder and the second powder, A method of laminating powders, characterized in that the amounts of the first powder and the second powder applied to the substrate are varied or continuously changed. A first step of feeding powder; A second step of transporting the supplied powder to the injection nozzle by discontinuously injecting a transport gas at room temperature; And And a third step of spraying the transported powder on a substrate using the spray nozzle at room temperature and atmospheric pressure or in a vacuum state. The size of the powder is 0.01 to 20 ㎛, in the third step, the pressure of the conveying gas is 2 to 30 bar, And providing a mask between the substrate and the jet nozzle to form a pattern on the substrate .

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