JPH10188671A - Copper conductive paste and board printed therewith - Google Patents

Copper conductive paste and board printed therewith

Info

Publication number
JPH10188671A
JPH10188671A JP2953197A JP2953197A JPH10188671A JP H10188671 A JPH10188671 A JP H10188671A JP 2953197 A JP2953197 A JP 2953197A JP 2953197 A JP2953197 A JP 2953197A JP H10188671 A JPH10188671 A JP H10188671A
Authority
JP
Japan
Prior art keywords
copper
average particle
particle diameter
range
powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2953197A
Other languages
Japanese (ja)
Inventor
Yuusei Yagiyuu
裕聖 柳生
Masato Kawahara
正人 川原
Toru Noguchi
徹 野口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Belting Ltd
Original Assignee
Mitsuboshi Belting Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Belting Ltd filed Critical Mitsuboshi Belting Ltd
Priority to JP2953197A priority Critical patent/JPH10188671A/en
Publication of JPH10188671A publication Critical patent/JPH10188671A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a copper conductive paste, whose electric resistance is lowered, and a board printed with the copper conductive paste by making it easy to print the paste on the board to enable its shaped to be maintained thereafter, making it easy to pack the paste into a through hole provided in the board, so as to enable the paste to be fixed into place, and preventing cohesion of particles to form dense burned film. SOLUTION: A copper conductive paste comprises particles made of copper, copper oxide, or their mixture with an average particle diameter in the range of 1 to 500nm, to which mixed copper powders to which at least one kind or more of auxiliary copper powders composed mainly of base copper powders with an average powder diameter in the range of 0.5 to 10μm and having a smaller range of average powder diameters than the auxiliary copper powder, a binder resin, and an organic solvent are added.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は銅導体ペースト及び
これを印刷した基板に係り、詳しくは基板上に印刷しや
すく、印刷後の形状保持ができ、しかもセラミックス基
板に設けたスルーホールに穴埋めしやすくし、緻密な焼
成膜を形成しその電気抵抗値を小さくした銅導体ペース
ト及び該銅導体ペーストを印刷した基板に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a copper conductor paste and a substrate on which the copper conductor paste is printed, and more particularly, to a copper conductor paste which can be easily printed on a substrate, retains its shape after printing, and is filled in a through hole provided in a ceramic substrate. The present invention relates to a copper conductor paste which is easy to form, forms a dense fired film, and has a reduced electric resistance value, and a substrate on which the copper conductor paste is printed.

【0002】[0002]

【従来の技術】今日、セラミックス基板上に回路を印刷
したり、また基板に設けた貫通穴であるスルーホールに
導体を穴埋めするために、導体ペーストが用いられてい
る。この導体ペーストとしては、銀とパラジウムを主成
分とするAg−Pd系ペーストを始め、銀系ペースト、
金系ペースト、銀と白金を主成分とするAg−Pt系ペ
ースト、銅系ペーストがある。
2. Description of the Related Art Today, a conductor paste is used for printing a circuit on a ceramic substrate or filling a conductor in a through hole provided in the substrate. Examples of the conductor paste include an Ag-Pd paste containing silver and palladium as main components, a silver paste,
There are a gold-based paste, an Ag-Pt-based paste containing silver and platinum as main components, and a copper-based paste.

【0003】このうち、Ag−Pd系ペーストは配線用
途として代表的なものであるが、いくつかの不具合点も
備えている。例えば、ペーストを基板上の配線に使用し
た場合、空気中の水分などを介して銀がイオン化し、こ
のイオン化した銀が隣の導体路へ移行して回路をショー
トさせるマイグレーションと呼ばれる現象が発生してい
た。このため、導体路間の距離を狭くできなかった。ま
た、導体路上に他の部品を搭載したり接続するためのハ
ンダ付け部分では、銀がハンダに浸食されやすく、耐ハ
ンダ性が劣っていた。
[0003] Among them, the Ag-Pd-based paste is typical for use in wiring, but has some disadvantages. For example, when the paste is used for wiring on a substrate, silver is ionized through moisture in the air and the like, and a phenomenon called migration occurs in which the ionized silver moves to an adjacent conductor path to short circuit. I was For this reason, the distance between the conductor paths could not be reduced. Further, in a soldered portion for mounting or connecting other components on the conductor path, silver was easily eroded by the solder, and solder resistance was poor.

【0004】また、上記ペーストを基板へ接着する場合
には、本来ミクロンサイズの金属微粒子は、セラミック
ス基板と反応接着することができないために、ペースト
内に約4〜10重量%のガラス粉末を配合し、印刷後基
板にあるガラス粉末が焼成後に基板と金属膜とを接着す
る役割を与えていた。しかし、その反面ガラス粉末が焼
成後の金属膜内にも多量に残存するため、金属膜の電気
抵抗値が高くなり、またガラス層で金属膜と基板とを接
着しているため、熱膨張差による歪みが出やすくなっ
て、熱衝撃性が弱くなると言った問題が発生した。
When the paste is adhered to a substrate, metal particles having a micron size cannot be reacted and adhered to a ceramic substrate. Therefore, about 4 to 10% by weight of glass powder is mixed into the paste. However, the glass powder on the substrate after printing has given a role of bonding the substrate and the metal film after firing. However, on the other hand, a large amount of glass powder remains in the metal film after firing, so that the electrical resistance value of the metal film increases, and since the metal film and the substrate are bonded by the glass layer, the difference in thermal expansion is increased. As a result, there was a problem that the heat shock was weakened.

【0005】このような不具合点を一部解消したペース
トとして銅系ペーストが知られている。このペースト
は、例えば特開昭60−70746号公報に記載されて
いるように、銅、ガラス粉末、そしてタングステン、モ
リブデン、レニウム等の非銅系物質を有機溶媒中に分散
させた組成からなっており、また特公平3−50365
号公報に記載されているように、銅酸化物を被覆した金
属銅粒子、銅酸化物粒子、ガラス等のガラス粉体を有機
溶媒中に分散させた組成からなっている。
[0005] A copper-based paste is known as a paste partially resolving such disadvantages. This paste has a composition in which copper, glass powder, and a non-copper-based material such as tungsten, molybdenum, and rhenium are dispersed in an organic solvent, as described in, for example, JP-A-60-70746. Also, Japanese Patent Publication 3-50365
As described in Japanese Patent Application Laid-Open Publication No. H10-209, the composition is composed of a metal oxide particle coated with a copper oxide, a copper oxide particle, and a glass powder such as glass dispersed in an organic solvent.

【0006】また、他のスルーホールを穴埋めした基板
の製造方法としては、アルミナのスルーホールにタング
ステンを埋設したものを同時に焼成する方法が提案され
ている。
As another method of manufacturing a substrate in which through-holes are filled, a method of simultaneously firing alumina having through-holes buried in through-holes has been proposed.

【0007】[0007]

【発明が解決しようとする課題】上記銅系ペーストもガ
ラス粉体として好ましくは4〜10重量%の多くのガラ
ス粉体を添加して基板と導体との接着の役割を果してい
る。しかし、上記ペーストは印刷性を改善するために動
的粘度を低くしているが、静的粘度も低くなるために、
これを基板にスクリーン印刷した場合にペーストがたれ
て印刷した後の導体のエッジがシャープに出現しにくく
正確な印刷ができなくなった。そのために、回路設計
上、導体断面積がつかみにくいという問題につながり、
一方粘度を高くすると、印刷性が低下するため、導体路
に凹凸が発生し、この凹凸により電気信号にノイズが入
ってしまうことがあった。
The above-mentioned copper-based paste also plays a role of adhesion between the substrate and the conductor by adding a large amount of glass powder, preferably 4 to 10% by weight, as glass powder. However, the paste has a low dynamic viscosity to improve printability, but also has a low static viscosity.
When this is screen-printed on a substrate, the edge of the conductor after the paste is dripped and printed hardly appears sharply, and accurate printing cannot be performed. This leads to the problem that the conductor cross-sectional area is difficult to grasp in circuit design,
On the other hand, when the viscosity is increased, the printability deteriorates, so that irregularities are generated in the conductor path, and the irregularities may cause noise in the electric signal.

【0008】また、スルーホールの中に穴埋めした後に
焼成してこの中を充填する場合には、ガラス粉末が焼成
後のスルーホール中の導体内に多量に残存するために導
体の電気抵抗値が高く、更に導体と基板との界面に存在
するガラス層の熱膨張差による歪みが出やすくて耐熱性
や耐熱衝撃性が弱く、充填された導体がスルーホールに
付着しない問題があった。この耐熱衝撃性は、導体をも
つ基板を低温雰囲気から高温雰囲気へ、またその逆方向
へ繰り返し移動させた後における導体と基板との接着力
から評価される。また、上記ガラス粉末も低い軟化点を
有する硼珪酸鉛ガラスが使用されていることから、酸化
防止やAuワイヤボンディングのために行うメッキ工程
では、上記ガラス内の鉛がメッキを阻害していた。
[0008] Further, in the case of firing and filling the through hole after filling in the through hole, a large amount of glass powder remains in the conductor in the through hole after firing, so that the electric resistance value of the conductor is reduced. In addition, there is a problem that the glass layer existing at the interface between the conductor and the substrate is easily distorted due to the difference in thermal expansion, the heat resistance and the thermal shock resistance are weak, and the filled conductor does not adhere to the through hole. This thermal shock resistance is evaluated based on the adhesive force between the conductor and the substrate after repeatedly moving the substrate having the conductor from a low-temperature atmosphere to a high-temperature atmosphere and in the opposite direction. In addition, since lead glass borosilicate having a low softening point is also used for the glass powder, lead in the glass hinders plating in a plating step performed for oxidation prevention and Au wire bonding.

【0009】本発明は、このような問題点を改善するも
のであり、基板上に印刷しやすくしてその後の形状保持
ができ、基板に設けたスルーホールに穴埋めしやすくし
て固着することができ、そして微粒子の凝集を防止して
緻密な焼成膜を形成しその電気抵抗値を低下させた銅導
体ペースト及び該銅導体ペーストを印刷した基板を提供
することを目的とする。
The present invention has been made to solve such a problem, and it is easy to print on a substrate so that the shape can be maintained thereafter, and it is easy to fill a through hole provided in the substrate and fix it. It is an object of the present invention to provide a copper conductor paste in which a dense fired film is formed by preventing aggregation of fine particles and its electric resistance value is reduced, and a substrate on which the copper conductor paste is printed.

【0010】[0010]

【課題を解決するための手段】即ち、本願の請求項1記
載の発明では、平均粒子径1〜500nmの範囲にある
銅、銅酸化物、もしくはこれらの混合物からなる微粒子
に、平均粒子径0.5〜10μmの範囲にあるベース銅
粉を主にしこれより上記平均粒子径の範囲が小さい補助
銅粉を少なくとも1種類以上添加した混合銅粉、バイン
ダー樹脂、そして有機溶剤を添加してなる銅導体ペース
トにあり、静的粘度が高く、印刷後の膜のエッジがシャ
ープに出現して形状保持が良好になり、しかも動的粘度
が高くならないために印刷性も良好である。また、補助
銅粉がベース銅粉の配列により生じる間隙や空隙を充填
し、内部欠陥がなく、焼き締まりも良好な焼成膜を得る
ことができる。更には、銅導体ペーストの粘度を調節す
ることで、スルーホールに充填しやすくして、しかもス
ルーホールに充填されたペーストの焼成後の体積変化も
少ないことから穴埋め性が良好である。
That is, according to the first aspect of the present invention, fine particles made of copper, copper oxide, or a mixture thereof having an average particle size of 1 to 500 nm are added to a fine particle having an average particle size of 0 to 500 nm. Copper mixed with at least one kind of auxiliary copper powder containing at least one auxiliary copper powder having a smaller average particle diameter in the range of 0.5 to 10 μm, a binder resin, and an organic solvent. In the conductive paste, the static viscosity is high, the edge of the film after printing appears sharply, the shape retention is good, and the printability is also good because the dynamic viscosity is not high. In addition, the auxiliary copper powder fills the gaps and voids generated by the arrangement of the base copper powder, so that a fired film having no internal defects and good compaction can be obtained. Further, by adjusting the viscosity of the copper conductor paste, the filling into the through-holes is facilitated, and the volume filling of the paste filled in the through-holes after firing is small, so that the fillability is good.

【0011】本願の請求項2記載の発明では、銅、銅酸
化物、もしくはこれらの混合物からなる微粒子の平均粒
子径が100〜200nmの範囲にある銅導体ペースト
であり、特に平均粒子径の大きい微粒子が混合銅粉と混
在しても凝集することがなく、その結果緻密な焼成膜が
形成され、その電気抵抗値も小さくなる。
According to the second aspect of the present invention, there is provided a copper conductor paste having an average particle diameter of fine particles made of copper, copper oxide or a mixture thereof in the range of 100 to 200 nm, and particularly having a large average particle diameter. Even if the fine particles are mixed with the mixed copper powder, they do not agglomerate. As a result, a dense fired film is formed, and the electric resistance value is reduced.

【0012】本願の請求項3記載の発明では、バインダ
ー樹脂として熱分解温度の相違する樹脂を少なくとも2
種類以上含んでいる銅導体ペーストであり、銅導体ペー
ストを焼成した場合でもバインダー樹脂が一度に熱分解
せず環境温度に応じて分解するため、焼成膜中に残存す
ることがない。
According to the third aspect of the present invention, at least two resins having different thermal decomposition temperatures are used as the binder resin.
It is a copper conductor paste containing more than one kind. Even when the copper conductor paste is fired, the binder resin does not thermally decompose at once but decomposes in accordance with the environmental temperature, and therefore does not remain in the fired film.

【0013】本願の請求項4記載の発明では、混合銅粉
が平均粒子径2〜5μmの範囲で最も平均粒子径が大き
いベース銅粉と、平均粒子径1〜2μmの範囲にある第
1の補助銅粉と、そして平均粒子径0.5〜1μmの範
囲にある第2の補助銅粉から構成されているため、補助
銅粉がベース銅粉の配列により生じる間隙や空隙を充填
し、内部欠陥がなく、焼き締まりも良好な焼成膜を得る
ことができる。
In the invention according to claim 4 of the present application, the mixed copper powder has a base copper powder having the largest average particle diameter in the range of 2 to 5 μm and a first copper powder having the average particle diameter of 1 to 2 μm. Since the auxiliary copper powder is composed of the auxiliary copper powder and the second auxiliary copper powder having an average particle diameter of 0.5 to 1 μm, the auxiliary copper powder fills gaps and voids generated by the arrangement of the base copper powder, and It is possible to obtain a fired film having no defects and good shrinkage.

【0014】本願の請求項5記載の発明では、混合銅粉
が平均粒子径0.5〜1μmの範囲で最も平均粒子径が
大きいベース銅粉と、平均粒子径0.1〜0.5μmの
範囲で補助銅粉とから構成され、請求項4記載の発明と
同様に焼き締まりも良好な焼成膜を得ることができる。
In the invention according to claim 5 of the present application, the mixed copper powder has a base copper powder having the largest average particle diameter in the range of 0.5 to 1 μm and a base copper powder having an average particle diameter of 0.1 to 0.5 μm. In the same manner as in the fourth aspect of the present invention, it is possible to obtain a fired film which is composed of the auxiliary copper powder in the range and has good compaction.

【0015】本願の請求項6記載の発明では、ガラス粉
末が混合銅粉と平均粒子径1〜500nmの範囲にある
銅、銅酸化物、もしくはこれらの混合物からなる微粒子
合計量100重量部に対して0.1〜2.0重量部添加
され、焼成膜のひび割れや焼き締めを改善する。
In the invention according to claim 6 of the present application, the glass powder is mixed with the mixed copper powder and copper, copper oxide having an average particle diameter in the range of 1 to 500 nm, or a total of 100 parts by weight of fine particles comprising a mixture thereof. 0.1 to 2.0 parts by weight to improve cracking and baking of the fired film.

【0016】本願の請求項7記載の発明では、バインダ
ー樹脂と有機溶剤からなる有機分が2〜16重量%の範
囲にあり、粘度を調節した銅導体ペーストをスルーホー
ルに充填しやすく、またスルーホールに充填した銅導体
ペーストの収縮を適度にして穴埋め性を改善する。
In the invention according to claim 7 of the present application, the organic content of the binder resin and the organic solvent is in the range of 2 to 16% by weight, and the copper conductor paste whose viscosity has been adjusted is easily filled in the through-hole. The shrinkage of the copper conductor paste filled in the holes is moderate to improve fillability.

【0017】本願の請求項8記載の発明では、平均粒子
径1〜500nmの範囲にある銅、銅酸化物、もしくは
これらの混合物からなる微粒子に、平均粒子径0.5〜
10μmの範囲にあるベース銅粉を主にしこれより上記
平均粒子径の範囲が小さい補助銅粉を少なくとも1種類
以上添加した混合銅粉、バインダー樹脂、そして有機溶
剤を添加してなる銅導体ペーストを基板に印刷し、焼成
した銅導体ペーストを印刷した基板であり、緻密な焼成
膜が形成され、また電気抵抗値も小さくなる。
According to the invention of claim 8 of the present application, fine particles made of copper, copper oxide, or a mixture thereof having an average particle diameter of 1 to 500 nm are added to an average particle diameter of 0.5 to 500 nm.
A copper conductor paste obtained by adding a mixed copper powder, a binder resin, and an organic solvent to which at least one kind of auxiliary copper powder, which is mainly a base copper powder in a range of 10 μm and has a smaller average particle diameter than the above, is added. This is a substrate on which a copper conductor paste printed and fired on a substrate is printed, a dense fired film is formed, and the electric resistance value is small.

【0018】本願の請求項9記載の発明では、銅、銅酸
化物、もしくはこれらの混合物からなる微粒子の平均粒
子径が100〜200nmの範囲にあり、より一層緻密
な焼成膜が形成され、またその電気抵抗値も小さくな
る。
According to the invention of claim 9 of the present application, the fine particles made of copper, copper oxide or a mixture thereof have an average particle diameter in the range of 100 to 200 nm, and a more dense fired film is formed. The electric resistance value also decreases.

【0019】[0019]

【発明の実施の形態】本発明における銅導体ペースト及
び本発明の基板に印刷する銅導体ペーストの第1の成分
となる銅、銅酸化物、もしくはこれらの混合物からなる
微粒子は、例えば沈殿法と呼ばれる方法、即ち金属塩溶
液から還元剤を用いて直接金属微粒子を沈殿析出させる
方法である。ホルマリン、ヒドラジン、次亜リン酸ソー
ダ、水素化ホウ素塩などの還元剤を、金属イオンを含む
水溶液に適当な条件のもとで添加することにより、金属
微粒子を得ることができる。また、上記微粒子は耐酸化
性、分散性等の改善のため、有機脂肪酸やカップリング
剤により表面処理が行われる。上記微粒子の平均粒子径
は1〜500nmの範囲である。好ましくは、100〜
200nmの範囲にあり、この範囲であれば微粒子の凝
集がなくなって緻密な焼成膜が形成され、その電気抵抗
値も小さくなる。
DETAILED DESCRIPTION OF THE INVENTION Fine particles composed of copper, copper oxide, or a mixture thereof, which are the first component of the copper conductor paste of the present invention and the copper conductor paste to be printed on the substrate of the present invention, are prepared, for example, by a precipitation method. This is a method called precipitation of metal fine particles directly from a metal salt solution using a reducing agent. Fine metal particles can be obtained by adding a reducing agent such as formalin, hydrazine, sodium hypophosphite, or borohydride salt to an aqueous solution containing metal ions under appropriate conditions. The fine particles are subjected to a surface treatment with an organic fatty acid or a coupling agent to improve oxidation resistance, dispersibility, and the like. The average particle diameter of the fine particles is in the range of 1 to 500 nm. Preferably, 100-
It is in the range of 200 nm, and within this range, the aggregation of the fine particles is eliminated, a dense fired film is formed, and the electric resistance value is reduced.

【0020】本発明の銅導体ペーストの第2の成分であ
る混合銅粉は、平均粒子径0.5〜5μmの範囲にある
銅粉をベースにし、これより平均粒子径の範囲が小さい
補助銅粉を少なくとも1〜3種類以上添加したものであ
る。具体的な混合銅粉は、平均粒子径2〜5μmの範囲
にある最も平均粒子径が大きいベース銅粉と、平均粒子
径1〜2μmの範囲で次に平均粒子径が大きい第1の補
助銅粉と、そして平均粒子径0.5〜1μmの範囲で最
も平均粒子径が小さい第2の補助銅粉の三段階の粒子径
範囲から構成されている場合や、平均粒子径0.5〜1
μmの範囲にあるベース銅粉と、平均粒子径0.1〜
0.5μmの範囲にある補助銅粉の二段階の粒子径範囲
から構成されている。上記混合銅粉を三段階の粒子径範
囲から構成した場合では、混合銅粉中、ベース銅粉が8
0〜98重量%に対して第1の補助銅粉が1〜19重量
%、第2の補助銅粉が1〜19重量%になっている。特
に、補助銅粉については、これに限定されることなく、
これらの平均粒子径の範囲以下の第3の補助銅粉を使用
してもよい。
The mixed copper powder, which is the second component of the copper conductor paste of the present invention, is based on copper powder having an average particle diameter in the range of 0.5 to 5 μm, and auxiliary copper having an average particle diameter smaller than this. It is a powder to which at least 1 to 3 kinds of powder are added. Specific mixed copper powder is a base copper powder having the largest average particle diameter in the range of average particle diameter of 2 to 5 μm, and a first auxiliary copper having the next largest average particle diameter in the range of average particle diameter of 1 to 2 μm. Powder and the second auxiliary copper powder having the smallest average particle diameter in the range of 0.5 to 1 μm in the three-stage particle diameter range, or the average particle diameter of 0.5 to 1 μm.
base copper powder in the range of μm and an average particle diameter of 0.1 to
The auxiliary copper powder has a two-stage particle size range of 0.5 μm. In the case where the mixed copper powder is composed of three ranges of particle diameters, the base copper powder in the mixed copper powder has a particle size of 8%.
The first auxiliary copper powder is 1 to 19% by weight and the second auxiliary copper powder is 1 to 19% by weight based on 0 to 98% by weight. In particular, for auxiliary copper powder, without being limited to this,
You may use the 3rd auxiliary copper powder below the range of these average particle diameters.

【0021】上記補助銅粉の各銅粉は、比較的球形に近
いものが望ましい。これは各銅粉が空隙を少なくして配
列するためである。平均粒子径の異った銅粉を使用する
と、平均粒子径の小さな補助銅粉が平均粒子径の最も大
きなベース銅粉が配列したときに生じる隙間や空隙を充
填するため、焼成後の膜は内部欠陥が少なく、焼き締ま
りも良好になる効果がある。
It is desirable that each copper powder of the auxiliary copper powder be relatively spherical. This is because the copper powders are arranged with a reduced number of voids. When copper powders having different average particle diameters are used, auxiliary copper powder having a small average particle diameter fills gaps and voids generated when the base copper powder having the largest average particle diameter is arranged. There is an effect that the number of internal defects is small and the compaction becomes good.

【0022】ベース銅粉の平均粒子径が5μmを超える
と、酸化の影響を受けにくく焼成条件設定が広くなる
が、低い温度では充分に焼結せず焼き締まり不足が生じ
て焼成膜と基板との密着力が低下する。また、インクロ
ール工程で銅粉がつぶれてしまって銅箔状となり、スク
リーン印刷時にメッシュずまりが発生することがある。
一方、ベース銅粉の平均粒子径が0.5μm未満では、
混合銅粉の総粒子面積が大きくなり過ぎて、酸化の影響
が大きくなり、電気抵抗値が高くなる。また、カサ密度
が大きいため焼き締まり性が悪くなる。
If the average particle diameter of the base copper powder exceeds 5 μm, the influence of oxidation is less likely to be exerted, and the setting of firing conditions is wide. Of the adhesive decreases. Further, the copper powder may be crushed in the ink roll process to form a copper foil, which may cause mesh displacement during screen printing.
On the other hand, when the average particle diameter of the base copper powder is less than 0.5 μm,
Since the total particle area of the mixed copper powder becomes too large, the influence of oxidation increases, and the electric resistance value increases. In addition, since the bulk density is high, the compaction property deteriorates.

【0023】ベース銅粉の添加量が98重量%を超える
と、低い温度では充分に焼結せずに焼き締まり不足が生
じて焼成膜と基板、またスルーホールとの接着力が低下
し、一方80重量%未満では混合銅粉の総粒子面積が大
きくなり過ぎることになり、前述と同様の不具合が起こ
る。尚、補助銅粉はベース銅粉が配列したときに生じる
間隙や空隙を充填するために添加するものであり、その
平均粒子径と添加量はベース銅粉のそれらに大きく影響
を受ける。
If the amount of the base copper powder exceeds 98% by weight, sintering will not be sufficient at a low temperature, resulting in insufficient tightening, resulting in a decrease in the adhesive strength between the fired film and the substrate or through hole. If it is less than 80% by weight, the total particle area of the mixed copper powder becomes too large, and the same problem as described above occurs. The auxiliary copper powder is added to fill gaps and voids generated when the base copper powder is arranged, and the average particle size and the amount added are greatly affected by those of the base copper powder.

【0024】本発明の銅導体ペーストの第3の成分であ
るバインダー樹脂は、例えばニトロセルロース、エチル
セルロース、酢酸セルロース、ブチルセルロース等のセ
ルロース類、ポリオキシメチレン等のポリエーテル類、
ポリブタジエン、ポリイソプレン等のポリビニル類、ポ
リブチルメタクリレート、ポリメチルメタクリレート等
のアクリル類、ナイロン6、ナイロン6.6、ナイロン
11等のポリアミドであり、特に制限されないが、焼成
中で分解する必要がある。
The binder resin as the third component of the copper conductor paste of the present invention includes, for example, celluloses such as nitrocellulose, ethylcellulose, cellulose acetate and butylcellulose; polyethers such as polyoxymethylene;
Polyvinyls such as polybutadiene and polyisoprene; acrylics such as polybutyl methacrylate and polymethyl methacrylate; and polyamides such as nylon 6, nylon 6.6, and nylon 11, but are not particularly limited, but need to be decomposed during firing. .

【0025】このバインダー樹脂としては、熱分解温度
の相違する樹脂を少なくとも2種類以上含めることが好
ましい。これは焼成した場合でもバインダー樹脂が一度
に熱分解せず環境温度に応じて分解するため、焼成膜中
に残存することがない。
It is preferable that the binder resin contains at least two kinds of resins having different thermal decomposition temperatures. This is because even when fired, the binder resin does not thermally decompose at once but decomposes according to the environmental temperature, so that it does not remain in the fired film.

【0026】上記バインダー樹脂を溶かす有機溶剤とし
ては、カルビトール、カルビトールアセテート、ターピ
ノール、メタクレゾール、ジメチルイミダゾリジノン、
ジメチルホルムアミド、ターピノール、ジアセトンアル
コール、トリエチレングリコール、パラキシレン、乳酸
エチル、イソホロン等の高沸点の有機溶剤であり、2種
類以上混合してもよい。
Examples of the organic solvent for dissolving the binder resin include carbitol, carbitol acetate, terpinol, metacresol, dimethylimidazolidinone,
It is a high boiling organic solvent such as dimethylformamide, terpinol, diacetone alcohol, triethylene glycol, paraxylene, ethyl lactate, and isophorone, and may be used in combination of two or more.

【0027】本発明に添加される第4の成分であるガラ
ス粉末は、焼成膜のひび割れを改善したり、焼き締めを
改善する補助的な役割を担持させるために添加してもよ
い。このガラス粉末は、鉛を含有しておらず、平均粒子
径1〜10μmの範囲で軟化点200〜700°Cを有
しており、その添加量は全ての銅粉と超微粒子化した銅
酸化物、銅、もしくはこれらの混合物の合計量100重
量部に対して0.1〜2.0重量部が好ましい。2.0
重量部を超えると、ガラス粉末が焼成後の焼成膜内に残
存するため、焼成膜の電気抵抗値が上昇する傾向があ
り、また焼成膜と基板との界面にガラス層を形成し、熱
膨張による歪みをおこしやすく、熱衝撃性が弱くなる。
一方、0.1未満では、焼成膜のひび割れや焼き締めの
改善が期待できない。
The glass powder, which is the fourth component added to the present invention, may be added to improve the cracks in the fired film or to carry an auxiliary role to improve the hardening. This glass powder does not contain lead, has a softening point of 200 to 700 ° C. in an average particle diameter of 1 to 10 μm, and is added in the amount of all copper powder and ultrafine copper oxide. 0.1 to 2.0 parts by weight with respect to 100 parts by weight of the total amount of the substance, copper, or a mixture thereof. 2.0
If the amount is more than 10 parts by weight, the glass powder remains in the fired film after firing, so that the electrical resistance of the fired film tends to increase, and a glass layer is formed at the interface between the fired film and the substrate, resulting in thermal expansion. Easily cause distortion and weak thermal shock.
On the other hand, if it is less than 0.1, improvement of cracking and baking of the fired film cannot be expected.

【0028】そして、本発明の銅導体ペーストは、バイ
ンダー樹脂と有機溶剤からなる有機分が2〜16重量%
の範囲にして粘度調節されている。有機分が2重量%未
満の場合には、銅導体ペーストの粘度が高くなり、スル
ーホールに充填されにくくなり、また有機分が16重量
%を超えると、スルーホールに充填されたペーストが焼
成により収縮するため、穴埋め性が悪くなる。
The copper conductor paste of the present invention has an organic content of 2 to 16% by weight comprising a binder resin and an organic solvent.
And the viscosity is adjusted. When the organic content is less than 2% by weight, the viscosity of the copper conductor paste becomes high, making it difficult to fill the through-hole. When the organic content exceeds 16% by weight, the paste filled in the through-hole is fired. Due to shrinkage, fillability is poor.

【0029】また、含有している全ての銅粉と銅酸化
物、銅、もしくはこれらの混合物からなる微粒子が84
〜98重量%の範囲にある。98重量%を超えると、ペ
ーストが高粘度となり焼き締まり不足が生じて焼成膜と
基板、またスルーホールとの接着力が低下し、一方84
重量%未満ではスルーホールに充填されたペーストが焼
成により収縮するために、前述と同様の不具合が起こ
る。
Further, fine particles composed of all the contained copper powder and copper oxide, copper, or a mixture thereof are 84%.
9898% by weight. If the content exceeds 98% by weight, the paste becomes too viscous to cause insufficient tightening, and the adhesive strength between the fired film and the substrate or through hole is reduced.
When the content is less than the percentage by weight, the paste filled in the through-holes shrinks by firing, so that the same problem as described above occurs.

【0030】このようにして得られた銅導体ペースト
は、アルミナ、窒化アルミ、炭化珪素、窒化珪素、サイ
アロン、チタン酸バリウム、PBZT等のセラミックス
基板にスクリーン印刷等の方法で塗布される。スクリー
ン印刷の手順は、水平に置かれたスクリーン(例えば、
ステンレス平織物、300メッシュ)の下に、数ミリメ
ートルの間隔をもたせて印刷基板を設置する。このスク
リーンの上に銅導体ペーストをのせた後、スキージーを
用いてスクリーン全面に広げる。この時には、スクリー
ンと印刷基板とは間隔を有している。続いて、スクリー
ンが印刷基板に接触する程度にスキージーでスクリーン
を押さえ付けて移動させ、印刷をする。以後これを繰り
返す。
The copper conductor paste thus obtained is applied to a ceramic substrate such as alumina, aluminum nitride, silicon carbide, silicon nitride, sialon, barium titanate, PBZT or the like by screen printing or the like. The screen printing procedure involves a screen placed horizontally (eg,
The printed circuit boards are placed under a stainless steel plain fabric (300 mesh) at intervals of several millimeters. After the copper conductor paste is placed on the screen, it is spread over the entire screen using a squeegee. At this time, the screen and the printed circuit board have an interval. Subsequently, printing is performed by pressing and moving the screen with a squeegee to such an extent that the screen contacts the print substrate. Thereafter, this is repeated.

【0031】これを従来のように予備焼成することなく
直接、基板をベルト炉に入れ、窒素中、600〜100
0°Cの温度下で5〜20分間(ピーク保持時間)焼成
し、銅粉を焼結させるとともに基板と反応接着させる。
この時この炉には所定量の酸素が送り込まれ、焼成膜と
基板との密着力を高めて焼成膜の電気抵抗値を減少させ
る。
The substrate is directly placed in a belt furnace without pre-baking as in the prior art, and is placed in a nitrogen furnace at 600 to 100
The powder is fired at a temperature of 0 ° C. for 5 to 20 minutes (peak retention time) to sinter the copper powder and make it react with the substrate.
At this time, a predetermined amount of oxygen is fed into the furnace, and the adhesion between the fired film and the substrate is increased to decrease the electric resistance value of the fired film.

【0032】[0032]

【実施例】次に、本発明を具体的な実施例により更に詳
細に説明する。 実施例1〜8、比較例1〜2 (銅導体ペーストの作製)粒径40nmのCuもしくは
Cu2 0、混合銅粉、そしてガラス粉末を表1に示すよ
うに混合した。混合銅粉としてベース銅粉と2種類の補
助銅粉からなる3種を使用した。また、アクリル樹脂を
ターピノール、カルビトールアセテートで溶かしたもの
を用意した。上記これらを混合し、更にインクロールに
て均一に混合することによって茶色の銅導体ペーストを
作製した。
Next, the present invention will be described in more detail with reference to specific examples. Examples 1 to 8 and Comparative Examples 1 and 2 (Preparation of Copper Conductor Paste) Cu or Cu 20 having a particle size of 40 nm, mixed copper powder, and glass powder were mixed as shown in Table 1. Three kinds of base copper powder and two kinds of auxiliary copper powder were used as the mixed copper powder. In addition, a resin prepared by dissolving an acrylic resin with terpinol and carbitol acetate was prepared. These were mixed and further uniformly mixed with an ink roll to produce a brown copper conductor paste.

【0033】(焼成膜の作製)銅導体ペーストをポリエ
ステル200のスクリーンを用いて密着力評価用のアル
ミナ基板の上に2×2mmに印刷し、また電気抵抗値評
価用のアルミナ基板は銅導体ペーストをポリエステル2
00のスクリーンを用いて直径15mmに印刷した。更
に、スルーホール評価用基板は銅導体ペーストをポリエ
ステル200のスクリーンを用いて直径0.3mmのス
ルーホールを複数個有するアルミナ基板上にスクリーン
印刷し、同時にスルーホール内に銅導体ペーストを押し
込んだ。これらを直接ベルト炉に入れ、窒素中で酸素濃
度150ppm、900°Cの焼成温度でピーク保持時
間10分間焼成して基板を作製した。
(Preparation of fired film) A copper conductor paste was printed at 2 × 2 mm on an alumina substrate for adhesion evaluation using a polyester 200 screen, and an alumina substrate for electric resistance evaluation was a copper conductor paste. To polyester 2
Using a 00 screen, printing was performed to a diameter of 15 mm. Further, as the through-hole evaluation substrate, a copper conductor paste was screen-printed on an alumina substrate having a plurality of through-holes having a diameter of 0.3 mm using a polyester 200 screen, and the copper conductor paste was simultaneously pushed into the through-holes. These were placed directly in a belt furnace and fired in nitrogen at a firing temperature of 900 ppm and an oxygen concentration of 150 ppm for a peak holding time of 10 minutes to produce a substrate.

【0034】(評価方法)焼成膜の密着力、焼成膜の電
気抵抗値、そしてスルーホール穴埋め部の接着性、穴埋
め性、そして印刷エッジを以下の方法で測定した。
(Evaluation Method) The adhesion of the fired film, the electric resistance of the fired film, the adhesiveness of the through-hole filling portion, the fillability, and the printing edge were measured by the following methods.

【0035】1.焼成膜の密着力(L型ピール強度) L型に曲げた直径0.8mmのスズメッキ銅線を2mm
×2mmの大きさに焼成した焼成膜の表面にハンダ付し
て固定し、垂直に折り曲げた銅線の付着力をバネ計りで
計測し基板と焼成膜間の接着力を求めた。
1. Adhesion strength of fired film (L-peel strength) Tin-plated copper wire with a diameter of 0.8 mm bent into L-shape is 2 mm
The adhesive strength of the copper wire which was fixed to the surface of the fired film fired to a size of × 2 mm by soldering and was bent vertically was measured with a spring meter to determine the adhesive force between the substrate and the fired film.

【0036】2.焼成膜の電気抵抗値 窒化アルミ基板上の厚さ10μm、直径15mmの焼成
膜を用いて、四探針法により電気抵抗値を測定した。
2. Electric Resistance Value of Fired Film Using a fired film having a thickness of 10 μm and a diameter of 15 mm on an aluminum nitride substrate, the electric resistance value was measured by a four-point probe method.

【0037】3.スルーホール穴埋め部の接着性 スルーホール穴埋め部をテーバー摩耗試験機にて100
0回摩耗した後の状態を肉眼で観察した。評価は三段階
で、◎は優、○は良、△は不良である。
3. Adhesiveness of the through-hole filling part The through-hole filling part is 100 with Taber abrasion tester
The state after abrasion 0 times was visually observed. The evaluation was made in three stages, ◎ is excellent, ○ is good, and Δ is bad.

【0038】4.穴埋め性 スルーホールの穴埋め部を顕微鏡で観察した。評価は三
段階で、◎は優、○は良、△は不良である。
4. Filling ability The filling part of the through hole was observed with a microscope. The evaluation was made in three stages, ◎ is excellent, ○ is good, and Δ is bad.

【0039】5.印刷エッジ 水平に置かれたスクリーン(ポリエステル平織物、20
0メッシュ)の下に、数ミリメートルの間隔をもたせて
印刷基板を設置し、このスクリーンの上に銅導体ペース
トをのせた後、スキージーを用いてスクリーン全面に広
げ、続いてスクリーンが印刷基板に接触する程度にスキ
ージーでスクリーンを押さえ付けて移動させ、印刷をす
る。焼成した後の基板を顕微鏡で拡大して膜のエッジを
観察した。エッジがシャープで角張っているものは◎、
エッジが丸くなり、中央部が平坦になっているものは
○、エッジが丸くなり、中央部が窪んでいるものは△と
して評価した。
5. Printing edge Horizontally laid screen (polyester plain fabric, 20
0 mesh), a printed circuit board is placed at a distance of several millimeters, a copper conductor paste is placed on this screen, and then spread over the entire screen using a squeegee. Then, the screen contacts the printed circuit board. Press the screen with a squeegee to move it, and print. The substrate after baking was magnified with a microscope and the edge of the film was observed. If the edge is sharp and angular,
When the edge was round and the central part was flat, it was evaluated as ○, and when the edge was round and the central part was depressed, it was evaluated as Δ.

【0040】6.粘度 東京計器社製の粘度計(DVO−E型)を用い、銅導体
ペーストを入れた容器にNo.9のロータを入れて回転
させ、静的粘度(ロータ回転1rpm)と動的粘度(ロ
ータ回転5rpm)を測定した。測定温度は温度25°
Cである。上記の評価方法によって得られた結果を表1
に示す。
6. Viscosity Using a viscometer (DVO-E type, manufactured by Tokyo Keiki Co., Ltd.), place No. in a container containing a copper conductor paste. No. 9 rotor was inserted and rotated, and the static viscosity (rotor rotation 1 rpm) and dynamic viscosity (rotor rotation 5 rpm) were measured. Measurement temperature is 25 °
C. Table 1 shows the results obtained by the above evaluation methods.
Shown in

【0041】[0041]

【表1】 [Table 1]

【0042】この結果によると、実施例では、スルーホ
ールに充填しやすく、この中に充填されたペーストの焼
成後の穴埋め性も良好であり、また基板上に印刷しやす
く、印刷した後も形状保持ができることが判る。しか
し、比較例では、印刷エッジが悪いものがある。
According to the results, in the examples, the through holes are easily filled, the filling properties of the paste filled therein are good after firing, the printing is easy on the substrate, and the shape after printing is good. It turns out that it can hold. However, in some of the comparative examples, the printing edge is poor.

【0043】実施例9〜15 所定粒径の銅、混合銅粉、そしてガラス粉を表2に示す
ように混合した。混合銅粉としてベース銅粉と2種類の
補助銅粉からなる3種を使用した。また、アクリル樹
脂、フェノール樹脂を重量比9:1の割合でターピノー
ル、カルビトールアセテートで溶かしたものを用意し
た。上記これらを実施例1と同様に混合して茶色の銅導
体ペーストを作製し、同様に焼成膜の作製した。得られ
た焼成膜の密着力、焼成膜の電気抵抗値を表2に示す。
Examples 9 to 15 Copper having a predetermined particle size, mixed copper powder, and glass powder were mixed as shown in Table 2. Three kinds of base copper powder and two kinds of auxiliary copper powder were used as the mixed copper powder. Further, a resin prepared by dissolving an acrylic resin and a phenol resin in a weight ratio of 9: 1 with terpinol and carbitol acetate was prepared. These were mixed in the same manner as in Example 1 to produce a brown copper conductor paste, and a fired film was similarly produced. Table 2 shows the adhesion of the obtained fired film and the electric resistance value of the fired film.

【0044】[0044]

【表2】 [Table 2]

【0045】この結果によると、実施例のように100
ないし200nmの粒径をもつ銅微粒子を使用したり、
また熱分解温度の相違する樹脂を2種類使用すると、焼
成膜の密着力が向上し、更に電気抵抗値も低下している
ことは判る。
According to the result, as in the embodiment, 100
To use fine copper particles having a particle size of
It can also be seen that the use of two types of resins having different thermal decomposition temperatures improves the adhesion of the fired film and further reduces the electric resistance.

【0046】[0046]

【発明の効果】以上のように本発明では、平均粒子径1
〜500nmの範囲にある銅、銅酸化物、もしくはこれ
らの混合物からなる微粒子に、平均粒子径0.5〜10
μmの範囲にあるベース銅粉を主にしこれより上記平均
粒子径の範囲が小さい補助銅粉を少なくとも1種類以上
添加した混合銅粉、バインダー樹脂、そして有機溶剤を
添加した銅導体ペーストおよびこのペーストを印刷した
基板であるため、(1)静的粘度が高く、印刷後の膜の
エッジがシャープに出現して形状保持が良好で、しかも
動的粘度が高くならないために印刷性も良好で、(2)
微粒子が基板と反応接着し、混合銅粉を焼き締め、
(3)補助銅粉がベース銅粉の配列により生じる間隙や
空隙を充填し、内部欠陥がなく、焼き締まりも良好な焼
成膜になり、(4)銅導体ペーストの粘度を調節するこ
とで、スルーホールに充填しやすくして、しかもスルー
ホールに充填されたペーストの焼成後の体積変化も少な
いことから穴埋め性が良好である、といった効果を有し
ている。
As described above, according to the present invention, the average particle size of 1
Fine particles made of copper, copper oxide or a mixture thereof having a mean particle size of 0.5 to 10
Copper conductor paste containing a base copper powder in the range of μm and at least one kind of auxiliary copper powder having a smaller average particle size in the range above, a binder resin, and a copper conductor paste containing an organic solvent and the paste (1) The static viscosity is high, the edge of the film after printing appears sharply and the shape retention is good, and the printability is good because the dynamic viscosity does not increase. (2)
The fine particles react and adhere to the substrate, bake the mixed copper powder,
(3) The auxiliary copper powder fills the gaps and voids generated by the arrangement of the base copper powder, resulting in a fired film having no internal defects and good compaction. (4) By adjusting the viscosity of the copper conductor paste, This has the effect of facilitating filling of the through-holes, and of having good fillability since the volume of the paste filled in the through-holes after firing is small.

【0047】また、特に銅導体ペースト中に平均粒子径
100〜200nmの範囲にある銅、銅酸化物、もしく
はこれらの混合物からなる微粒子が混合銅粉と混在する
ことにより、(5)微粒子が凝集することがなく、緻密
な焼成膜が形成され、その電気抵抗値も減少する、ま
た、バインダー樹脂として熱分解温度の相違する樹脂を
少なくとも2種類以上使用すると、(6)バインダー樹
脂が一度に熱分解せず環境温度に応じて分解するため、
焼成膜中に残存することがなく、緻密な焼成膜が形成さ
れ、その電気抵抗値も減少する、といった優れた効果を
有している。
In addition, when fine particles composed of copper, copper oxide, or a mixture thereof having an average particle diameter of 100 to 200 nm are mixed with the mixed copper powder in the copper conductor paste, (5) the fine particles are agglomerated. This results in the formation of a dense fired film and a decrease in the electric resistance value. When at least two kinds of resins having different thermal decomposition temperatures are used as the binder resin, (6) the binder resin is heated at a time. Decomposes according to environmental temperature without decomposing,
There is an excellent effect that a dense fired film is formed without remaining in the fired film, and the electric resistance value is reduced.

Claims (9)

【特許請求の範囲】[Claims] 【請求項1】 平均粒子径1〜500nmの範囲にある
銅、銅酸化物、もしくはこれらの混合物からなる微粒子
に、平均粒子径0.5〜10μmの範囲にあるベース銅
粉を主にしこれより上記平均粒子径の範囲が小さい補助
銅粉を少なくとも1種類以上添加した混合銅粉、バイン
ダー樹脂、そして有機溶剤を添加してなることを特徴と
する銅導体ペースト。
1. Fine particles comprising copper, copper oxide or a mixture thereof having an average particle diameter of 1 to 500 nm, and a base copper powder having an average particle diameter of 0.5 to 10 μm. A copper conductor paste comprising a mixed copper powder to which at least one kind of auxiliary copper powder having a small average particle diameter is added, a binder resin, and an organic solvent.
【請求項2】 銅、銅酸化物、もしくはこれらの混合物
からなる微粒子の平均粒子径が100〜200nmの範
囲にある請求項1記載の銅導体ペースト。
2. The copper conductor paste according to claim 1, wherein the average particle diameter of the fine particles made of copper, copper oxide, or a mixture thereof is in the range of 100 to 200 nm.
【請求項3】 バインダー樹脂として、熱分解温度の相
違する樹脂を少なくとも2種類以上含んでいる請求項1
または2記載の銅導体ペースト。
3. A binder resin containing at least two kinds of resins having different thermal decomposition temperatures.
Or the copper conductor paste according to 2.
【請求項4】 混合銅粉が平均粒子径2〜5μmの範囲
で最も平均粒子径が大きいベース銅粉と、平均粒子径1
〜2μmの範囲にある第1の補助銅粉と、そして平均粒
子径0.5〜1μmの範囲にある第2の補助銅粉から構
成されている請求項1または2記載の銅導体ペースト。
4. The base copper powder having the largest average particle diameter in the range of 2 to 5 μm in the mixed copper powder, and the base copper powder having an average particle diameter of 1 to 5 μm.
3. The copper conductor paste according to claim 1, comprising a first auxiliary copper powder having a size in a range of from 2 μm to 2 μm, and a second auxiliary copper powder having an average particle size in a range of from 0.5 to 1 μm.
【請求項5】 混合銅粉が平均粒子径0.5〜1μmの
範囲で最も平均粒子径が大きいベース銅粉と、平均粒子
径0.1〜0.5μmの範囲で補助銅粉とから構成され
ている請求項1または2記載の銅導体ペースト。
5. The mixed copper powder comprises a base copper powder having the largest average particle diameter in the range of 0.5 to 1 μm in average particle diameter and an auxiliary copper powder in the range of 0.1 to 0.5 μm in average particle diameter. The copper conductor paste according to claim 1, wherein
【請求項6】 ガラス粉末が混合銅粉と平均粒子径1〜
500nmの範囲にある銅、銅酸化物、もしくはこれら
の混合物からなる微粒子の合計量100重量部に対して
0.1〜2.0重量部添加されている請求項1または2
記載の銅導体ペースト。
6. The glass powder is mixed copper powder with an average particle size of 1 to 6.
3. The composition according to claim 1, wherein 0.1 to 2.0 parts by weight is added to 100 parts by weight of the total amount of fine particles comprising copper, copper oxide, or a mixture thereof in the range of 500 nm.
The copper conductor paste as described in the above.
【請求項7】 バインダー樹脂と有機溶剤からなる有機
分が2〜16重量%の範囲にある請求項1または2記載
の銅導体ペースト。
7. The copper conductor paste according to claim 1, wherein the organic content of the binder resin and the organic solvent is in the range of 2 to 16% by weight.
【請求項8】 平均粒子径1〜500nmの範囲にある
銅、銅酸化物、もしくはこれらの混合物からなる微粒子
に、平均粒子径0.5〜10μmの範囲にあるベース銅
粉を主にしこれより上記平均粒子径の範囲が小さい補助
銅粉を少なくとも1種類以上添加した混合銅粉、バイン
ダー樹脂、そして有機溶剤を添加してなる銅導体ペース
トを基板に印刷し、焼成したことを特徴とする銅導体ペ
ーストを印刷した基板。
8. Fine particles comprising copper, copper oxide or a mixture thereof having an average particle diameter in the range of 1 to 500 nm, and a base copper powder having an average particle diameter in the range of 0.5 to 10 μm. Copper characterized in that a copper conductor paste obtained by adding at least one kind of auxiliary copper powder having a small range of the average particle diameter, a binder resin, and an organic solvent to a substrate is printed and fired, Substrate printed with conductive paste.
【請求項9】 銅、銅酸化物、もしくはこれらの混合物
からなる微粒子の平均粒子径が100〜200nmの範
囲にある請求項8記載の銅導体ペーストを印刷した基
板。
9. The printed circuit board according to claim 8, wherein the fine particles made of copper, copper oxide or a mixture thereof have an average particle diameter in the range of 100 to 200 nm.
JP2953197A 1996-10-29 1997-01-28 Copper conductive paste and board printed therewith Pending JPH10188671A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2953197A JPH10188671A (en) 1996-10-29 1997-01-28 Copper conductive paste and board printed therewith

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP8-304105 1996-10-29
JP30410596 1996-10-29
JP2953197A JPH10188671A (en) 1996-10-29 1997-01-28 Copper conductive paste and board printed therewith

Publications (1)

Publication Number Publication Date
JPH10188671A true JPH10188671A (en) 1998-07-21

Family

ID=26367742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2953197A Pending JPH10188671A (en) 1996-10-29 1997-01-28 Copper conductive paste and board printed therewith

Country Status (1)

Country Link
JP (1) JPH10188671A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001274035A (en) * 2000-03-28 2001-10-05 Murata Mfg Co Ltd Conductive paste for laminated ceramic capacitor and laminated ceramic capacitor using it
JP2009194859A (en) * 2008-02-18 2009-08-27 Seiko Instruments Inc Method for manufacturing piezoelectric vibrator, the piezoelectric vibrator, oscillator, electronic apparatus and radio-controlled clock
JP2010018675A (en) * 2008-07-09 2010-01-28 Mitsuboshi Belting Ltd Paste for forming thick film
JPWO2009116349A1 (en) * 2008-03-21 2011-07-21 旭硝子株式会社 Copper nanoparticle-coated copper filler, method for producing the same, copper paste, and article having metal film
JP2015062230A (en) * 2010-03-02 2015-04-02 株式会社トクヤマ Composition for formation of wiring pattern
US9301390B2 (en) 2009-03-30 2016-03-29 Tokuyama Corporation Process for producing metallized substrate, and metallized substrate
US11270809B2 (en) 2017-03-16 2022-03-08 Asahi Kasei Kabushiki Kaisha Dispersing element, method for manufacturing structure with conductive pattern using the same, and structure with conductive pattern
US11328835B2 (en) 2017-03-16 2022-05-10 Asahi Kasei Kabushiki Kaisha Dispersing element, method for manufacturing structure with conductive pattern using the same, and structure with conductive pattern

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001274035A (en) * 2000-03-28 2001-10-05 Murata Mfg Co Ltd Conductive paste for laminated ceramic capacitor and laminated ceramic capacitor using it
JP4576660B2 (en) * 2000-03-28 2010-11-10 株式会社村田製作所 Conductive paste for multilayer ceramic capacitor and multilayer ceramic capacitor using the same
JP2009194859A (en) * 2008-02-18 2009-08-27 Seiko Instruments Inc Method for manufacturing piezoelectric vibrator, the piezoelectric vibrator, oscillator, electronic apparatus and radio-controlled clock
JPWO2009116349A1 (en) * 2008-03-21 2011-07-21 旭硝子株式会社 Copper nanoparticle-coated copper filler, method for producing the same, copper paste, and article having metal film
JP2010018675A (en) * 2008-07-09 2010-01-28 Mitsuboshi Belting Ltd Paste for forming thick film
US9301390B2 (en) 2009-03-30 2016-03-29 Tokuyama Corporation Process for producing metallized substrate, and metallized substrate
JP2015062230A (en) * 2010-03-02 2015-04-02 株式会社トクヤマ Composition for formation of wiring pattern
US9374893B2 (en) 2010-03-02 2016-06-21 Tokuyama Corporation Production method of metallized substrate
US11270809B2 (en) 2017-03-16 2022-03-08 Asahi Kasei Kabushiki Kaisha Dispersing element, method for manufacturing structure with conductive pattern using the same, and structure with conductive pattern
US11328835B2 (en) 2017-03-16 2022-05-10 Asahi Kasei Kabushiki Kaisha Dispersing element, method for manufacturing structure with conductive pattern using the same, and structure with conductive pattern

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