JPH10181839A - Planar article transfering device, planar article transfering method and planar article - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce slip phenomena of a carried planar article by constituting a carrier to transport a planar article having side surfaces parallel each other at fixed speed by impressing carrying force by friction on the bottom surface of the planar article. SOLUTION: By driving force of a driving motor 18, this device is started to interlock the revolution operations of a motor side toothed belt 8, a toothed pulley 22, idler pulleys 7a to 7d and toothed idler pulleys 12a and 12b with a toothed belt part 8 of the opposed side through a driving shaft 21b. As a result, all the carrying driving rollers 101f to 101j are revolved by the same timing, carrier force is obtained at the surface edge part of a carried object and the carried object is transported to downstream. At this time, all the revolution driving speed of each driving roller 101f to 101j which is arranged on each of an entrance side and an exit side can be made the same by transmitting power to all the rollers on a driven side via a driving shaft 21c. The edge part of the carried object is guided by guide rollers 102g to 102j and a location regulation is performed for the carrier object.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plate-like article transport apparatus, a plate-like article transport method, and a plate-like article. The present invention relates to a conveyor for transporting a work.

[0002]

2. Description of the Related Art In a conveyor for transporting components such as thin glass, a plurality of transport drive rollers are simultaneously in contact with a transported object.

In a conventional conveyor, a driving belt having a low transmission accuracy, such as a round belt, is used to transmit a driving force. Therefore, a speed difference is generated between the driving rollers for conveyance driven by the same motor, and a difference between the conveyance driving conveyance objects is generated. Slip occurred and dust was generated due to scraping of the roller material.

In addition, when transferring goods between conveyer modules having different driving motors, the rotation speed of the motors cannot be the same, so that a difference in the conveying speed occurs, and a slip occurs between the driving rollers for transferring the conveyed goods. Dust was generated due to scraping of the material.

Further, in the conventional technique, static electricity is generated due to friction between a conveyed object and a non-conductive driving roller and guide roller for conveyance, and the static electricity is accumulated on the surface of the conveyed object. In addition, static electricity that has already accumulated on the surface of the conveyed material other than on the transport conveyor remains without being discharged inside the transport conveyor.

[0006]

In the prior art, low-cost and widely used round belts are used for a driving force transmission path element to a plurality of transport driving rollers driven by the same motor, In many cases, one belt is hung between each pair of roller shafts. For this reason, the belt with elasticity and uneven transmission is hanged at several places or tens of places depending on the length of the conveyor, and the rider rides on the belt, causing fluctuations in the rotational torque and rotational speed of the shaft. As the rotation of the drive roller becomes slower and more unstable, the conveyance speed at the entrance and exit of one conveyor module cannot be the same. As a result, there has been a difference in transport speed when the workpiece is transferred between adjacent conveyor modules except for the drive motor.

For this reason, there are the following problems.

[0008] The surface of the conveyed object absorbs dust generated from the driving roller for conveyance, thereby impairing the clean state of the conveyed object.
The required quality of the conveyed goods cannot be maintained.

In addition, there is a problem in that the conveyed articles on the conveyer conveyor are charged with static electricity and are discharged all at once, thereby damaging the conveyed articles. In particular, a substrate on which a fine printed circuit pattern is formed becomes a defective product. . In addition, the static electricity on the surface of the plate-like article has a problem that it absorbs nearby dust and impairs the cleanness of the conveyed object.

Therefore, the present invention has been made in view of the above-mentioned problems, and has as its object to perform stable conveyance by reducing the slip phenomenon of a plate-shaped article to be conveyed.

It is another object of the present invention to gradually discharge static electricity from the plate-shaped article and prevent the article from being charged again.

[0012]

Means for Solving the Problems The above-mentioned problems are solved,
In order to achieve the object, according to the present invention, there is provided a plate-like article transfer device that applies a transfer force by friction to a bottom surface of a plate-like article having side surfaces parallel to each other and transfers the plate-like article at a constant speed downstream. A plurality of transport rollers that generate the transport force from a drive motor disposed on a pair of bases disposed opposite to each other, and a widthwise positioning of opposed side edges of the plate-shaped article. Means, detecting means for detecting an end of the plate-like article, and control means connected to the detecting means and the drive motor.

Further, there is provided a plate-like article conveying apparatus for applying a conveying force by friction to a bottom surface of a plate-like article having side surfaces parallel to each other to convey the sheet at a constant speed downstream. A pair of bases, a driving motor disposed on at least one of the bases, and driving motors disposed on opposing side surfaces of the base, and driving force from the driving motor being transmitted through power transmission means. A plurality of transport rollers that generate the transport force by being performed, and a plurality of rollers that regulate the width of the plate-shaped article in the width direction by abutting and driven rotation against opposite side edges of the plate-shaped article. A guide roller, detection means arranged downstream to detect the end of the plate-shaped article before and after conveyance, and control means connected to the detection means and the drive motor. And

The power transmission means includes a first power transmission shaft connected via a joint to an output shaft of the drive motor disposed downstream, and a second power transmission shaft disposed upstream. A power transmission shaft, a toothed belt stretched between the first power transmission shaft and the second power transmission shaft, and tensioning means for tensioning the toothed belt. It is characterized by being composed.

In order to make the base movable in the width direction of the plate-like article, the base is fixed on at least one pair of connecting members having a dovetail groove, and a collar having a predetermined width is interposed. The feature is to adjust the width.

Further, the control means performs control to reduce the rotation speed of the drive motor and stop when the detection means detects the trailing end of the plate-shaped article.

In addition, a plurality of plate-like article transfer devices are arranged in series, and the front end of the transfer of the plate-like article is detected by the detecting means of the plate-like transfer device provided on the upstream side. Then, the control means controls the rotation speed of the drive motor to be increased to a constant speed.

A plate-like article transfer apparatus for applying a transfer force by friction to a bottom surface of a plate-like article having side surfaces parallel to each other and transferring the plate-like article at a constant speed downstream, which is disposed to face each other. A pair of bases, a driving motor disposed on at least one of the bases, and driving motors disposed on opposing side surfaces of the base, and driving force from the driving motor being transmitted through power transmission means. A plurality of transport rollers that generate the transport force by being performed, and a plurality of rollers that regulate the width of the plate-shaped article in the width direction by abutting and driven rotation against opposite side edges of the plate-shaped article. A guide roller, detection means disposed downstream to detect the end of the plate-shaped article before and after conveyance, control means connected to the detection means and the drive motor, and Removes static electricity Is characterized by comprising a that static electricity removing means.

Further, the static elimination means is configured such that at least one of the transport roller or the guide roller and one of the power transmission means have high conductivity and are grounded via the base. It is characterized by.

A plate-like article conveying method for applying a conveying force by friction to a bottom surface of a plate-like article having side surfaces parallel to each other and conveying the plate-like article at a constant speed downstream, wherein a pair of bases are opposed to each other. Disposed, a drive motor is disposed on at least one of the bases, a plurality of transport rollers are disposed on opposite side portions of the base, respectively, and a driving force from the drive motor is transmitted via power transmission means. By generating the conveying force by transmitting, by arranging a plurality of guide rollers that abut against and rotate on opposite side edges of the plate-shaped article, positioning control of the plate-shaped article in the width direction is performed. In this case, the end of the plate-shaped article before and after the conveyance is detected by detection means disposed on the downstream side, and conveyance is performed by control means connected to the detection means and the drive motor.

The power transmission means includes a first power transmission shaft connected via a joint to an output shaft of the drive motor disposed downstream, and a second power transmission shaft disposed upstream. A power transmission shaft, a toothed belt stretched between toothed pulleys fixed to the first power transmission shaft and the second power transmission shaft, and tensioning of the toothed belt. And a rotation means for rotating the transport rollers at the same speed.

Further, the base is fixed on at least one pair of connecting members having a dovetail groove so that the base can be freely moved in the width direction of the plate-like article, and the base is fixed via a collar having a predetermined width. The feature is to adjust the width.

Further, the control means performs control to reduce the rotation speed of the drive motor and stop when the detection means detects the trailing end of the plate-shaped article.

Further, a plurality of the plate-shaped article conveying devices are arranged in series, and the front end portion of the plate-shaped article is detected by the detecting means of the plate-shaped article conveying device arranged upstream. Then, the control means controls the rotation speed of the drive motor to be increased to a constant speed.

A plate-like article conveying method for applying a conveying force by friction to a bottom surface of a plate-like article having side surfaces parallel to each other to convey the sheet at a constant speed downstream, wherein a pair of bases are opposed to each other. Disposed, a drive motor is disposed on at least one of the bases, a plurality of transport rollers are disposed on opposite side portions of the base, respectively, and a driving force from the drive motor is transmitted via power transmission means. By generating the conveying force by transmitting, by arranging a plurality of guide rollers that abut against and rotate on opposite side edges of the plate-shaped article, positioning control of the plate-shaped article in the width direction is performed. Performing, detecting the front and rear ends of the plate-like article before and after the detection by the detection means disposed on the downstream side, and performing the conveyance by the control means connected to the detection means and the drive motor, and to the plate-like article Static electricity It is characterized by removing the electrical removal means.

Further, the static electricity removing means is configured such that at least one of the transport roller or the guide roller and one of the power transmission means have high conductivity and are grounded via the base. It is characterized by.

[0027] The plate-shaped article is characterized in that it is a thin glass including a color filter substrate and a TFT substrate.

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the present invention will be described below with reference to the accompanying drawings.

First, FIG. 1 is an external perspective view showing a part of a conveyor unit 200 as a transfer device, which is cut away.

In this figure, nuts 5 are placed on a frame 55 made of iron angle material or the like installed on the floor of a factory or the like.
A total of four conveyor legs 30 are provided, the height of which can be adjusted by the rotation of 3. On these conveyor legs 30, a base fixed by bolts or nuts inserted into one of a plurality of dovetail grooves 29a formed in advance on a pair of connecting plates 29 serving as a base of the conveyor unit 200 is provided. Blocks 52 are provided respectively.

On the connecting plate 29, a pair of conveyor frames 23, which are formed as a left and right base of the conveyor unit 200, are fixed by bolts and nuts using the dovetail grooves 29a. With the above configuration, the interval between the conveyor frames 23 can be set freely, and the configuration can be adjusted to fit the width of the conveyed object.

Next, on the conveyor frame 23, each of the driving rollers 101a to 101j rotatably supported by the flange holder 24 (however, 101f to 101f).
1j) are provided as shown in the figure so that a total of ten rows are in two rows. In addition, as described later, all of the driving rollers 101a to 101j are driven at the same speed, so that a conveying force is applied to the edge of the bottom surface of the conveyed object.

The conveyor frame 23 is provided with a total of ten guide rollers 102a to 102j so as to be rotatable at the end of the guide roller mounting shaft 35. Each guide roller includes a guide roller positioning fixing portion and a guide roller width changing collar 6 described later.
The guide rollers are fixed on the guide roller width adjusting plates 2a and 2b which are fixed to the conveyor frame 23 by using 0 and 0.

For this purpose, as shown in the main part plan view of FIG. 4, the guide roller width adjusting plate 2b and the plate 61 are provided with long holes 4a to 4d. By setting the plate mounting screws 3a to 3d, the brackets are fixed to a bracket shown by a broken line and fixed to the conveyor frame 23. Also, guide roller width adjusting plate 2
A and 2b are fixed to a fixed portion 1d and 1f by a predetermined number of collars 60 so as to be parallel.

Referring again to FIG. 1, the conveyed article presence / absence sensor 6 is fixed on the connecting plate 29, and the presence / absence detection is performed by detecting the rear end of the conveyed article.

Next, the drive motor 18 is fixed by a motor mounting bracket 19, and is connected to a toothed pulley 22 via a coupling 20. An endless toothed belt 8 is stretched over the toothed pulley 22 as shown in the figure, and is configured to transmit power to each toothed pulley 22.

Still referring to the front view of FIG. 7, idler pulleys 7a to 7d and toothed idler pulleys 12a, 1
2b is fixed on the tension adjustment plate 9 so as to be rotatable, respectively. After setting the tension adjustment plate mounting screws 10a and 10b in the elongated holes 9b and 9c formed in the adjustment plate 9, respectively. A screw is screwed into a screw hole formed in the conveyor frame 23 to fix the pulley so that each pulley is stretched with respect to the belt.

Further, pins are implanted in the adjustment plate 9, and grooves 9j and 9k for guiding in the vertical direction are formed by the pins as shown in the figure.

FIG. 3 is a sectional view taken along the line XX of FIG.
, The drive motor 18 is mounted on the motor mounting bracket 1.
9, and is fixed to the drive shaft 21a via a coupling 20. This drive shaft 21
a is a drive-side connecting shaft 2 for driving the roller of the facing portion;
1b and the driven-side connecting shaft 21c shown in FIG.
Is transmitted by a toothed belt 8.

A labyrinth collar 2 for preventing dust from entering is provided between the flange holder 24 and the driving roller 101.
7 are provided. A toothed pulley 22 is fixed to the drive shaft 21a. The drive shaft 21a is rotatably supported by a bearing 25 built in a flange holder 24.

Next, in the sectional view of the main part of FIG. 5, a frame cover 32c is screwed on the conveyor frame 23 to prevent the fine dust generated from the toothed belt drive from leaking to the outside. ing. 6, the guide roller bearing 25 is fixed to the upper end of the guide roller mounting shaft 35, and the guide rollers 102 are each rotatable.

The conveyor 20 constructed as described above
Operation 0 is further described with reference to the operation explanatory diagram of FIG. Idler pulleys 12a, 12b
, And the toothed belt portion 8 on the opposite side is activated through the drive shafts 21a and 21b.

As a result, the transport drive rollers 101a-1
01j are all rotated at the same timing, and a transport force is obtained at the bottom edge portion 100d to be transported downstream in the arrow H direction. At this time, by transmitting power to all the driven rollers via the drive shaft 21c, the occurrence of synchronization deviation is eliminated, and the drive rollers 101a to 101j disposed on the entrance side and the exit side, respectively. The speed of all the rotary drives can be made the same. The edges 100c and 100b are guided by guide rollers 102 and their positions are regulated.

This transport speed control is configured to be performed by drive control of the drive motors 18. By arranging a plurality of conveyors in series, each drive motor 18 is controlled to be individually turned on and off.

FIG. 8 shows an example in which a plurality of conveyors are arranged side by side.
FIG. 7A is a plan view (a) and FIG.

In this figure, conveyors 200-1 and 200
As shown in the figure, 0-2 and 200-3 are arranged in series at a pitch P of 600 mm. In addition, the conveyed article 10
0 has a width of 360 mm and a length L of 465 m
m, the interval W between the conveyed objects 100 is at least 1
The motor is connected to a control unit 300 having a built-in motor driver for individually controlling the driving of each drive motor 18 so as to be 20 mm and a maximum of 135 mm. The presence / absence sensor 6 is also connected to the control unit 300. Further, the presence / absence sensor 6 is fixed to the connecting plate 29 at a position of a minimum of 60 mm which is a distance W1 from the end of the conveyor frame 23.

In the above configuration, in order to transport the article 100 in the direction of arrow H, in the control flowchart of FIG. 9, first, in step S1, the upstream conveyor 200-1 is started, and in step S2, Proceed to the motor drive routine. In this step S2, time 0.
The driving motor 18 of the conveyor 200-1 is activated so that the desired constant speed V of 100 mm / sec is reached after the actual running distance of about 25 mm for 5 seconds is conveyed. As a result, the conveyed object 100 is conveyed at a constant speed V of 100 mm / sec downstream by about 550 mm in the direction of arrow H.

Thereafter, when the presence / absence sensor 6 is turned off by passing the rear end of the conveyed object, the conveyance speed is stopped within 6.5 seconds and the conveyance speed becomes zero within about 25 mm as an actual distance. Is done. However, during this deceleration, the transported object 100
Is moving downstream and is not affected by deceleration.

When the sensor 6 of the upstream conveyor 200-1 is turned off as described above, this signal is used to start the downstream conveyor 200-2, and the process proceeds to step S3 where the downstream conveyor 200-1 is turned off. -2 is activated,
Next, the process proceeds to step S4, and the drive motor 18 of the conveyor 200-2 is started in substantially the same manner as in step S2.

[0050] Similarly, the downstream conveyor 200-3 is similarly started and finished.

By driving the drive motor as described above, the rotation can be gradually reduced and the conveyed object can be stopped. Further, when the detection of the stationary state of the conveyed material on the upstream conveyor is released, the motor starts to rotate slowly and accelerates to a certain speed.

At this time, the conveyed article 100 is conveyed without slipping. At this time, the dust is prevented from being adhered to the surface of the conveyed article 100 by the dust prevention labyrinth collar 27 and a dust suction device (not shown) for sucking dust generated in the frame. Can be completely prevented from adhering.

Referring again to FIG. 1, the shafts 21b, 21c
By increasing the rigidity of the one body with the coupling 28,
The twist error was reduced to 0.001% or less. Further, a high-precision motor was used so that the rotation fluctuation of the drive motor 18 alone was set to 2.5% or less and the eccentric amount of the transport roller 101 was set to 0.1% or less. The toothed belt 8 is a micro-pitch timing belt containing a Kevlar cord, and has a rotation fluctuation rate of 1.5% or less and an elongation rate of 0.15% or less.

The speed of the drive motor 18 is variable. In order to reduce the mutual error between the two motors to 2% or less, the transfer speed of the transfer object 100 such as a glass substrate is measured by a laser speedometer. The speed difference between the conveyors is adjusted to 2% or less by finely adjusting the speed of each conveyor.

In the operation explanatory diagram of FIG. 2, measures for charging the conveyor will be described.

In the figure, the same components as those already described are denoted by the same reference numerals, and description thereof will be omitted.

As described above, when the drive motor 18 is started, all the conveying rollers 101 rotate in the direction of the arrow D1. Further, the guide roller 102 rotates clockwise (in the direction of arrow D4) by contact with the edge of the conveyed object 100, and conveys the conveyed object 100 downstream. At this time, static electricity due to friction is charged at a contact portion with the transported object 100.

Therefore, the driving roller 101, the guide roller 102, the bearing, the flange holder, the frame, the belt and the like are made of very low-resistance conductive material, so that static electricity due to friction is fixed to the frame 55 by the lug 56. It is configured so as to be gradually discharged to the ground via the ground 57 to prevent recharging.

More specifically, the charge generated by the frictional action of the belt is discharged by being grounded via the timing belt, the conductive pulley 7 and the frame 23. In addition, the charge generated by the frictional action between the glass substrate of the conveyed object, the conveyance roller 101 and the guide roller 102 is discharged by being grounded via the glass substrate, the conveyance roller, the guide roller, and the frame. In this way, spark generation due to sudden discharge can be prevented.

The other charges are grounded via the glass substrate and the conveying roller, the guide roller, and the frame and discharged.

It should be noted that the present invention is not limited to the case where the transported object 100 is made of thin glass, and the present invention is not limited thereto.
Preventing charging as described above has the advantage of preventing dust from adsorbing due to static electricity. Also, if a sudden discharge is caused from the charged glass substrate, the film, element and circuit pattern formed on the substrate surface will be damaged, but basically there is no friction as described above, and moreover, By taking thorough measures against discharge, it is particularly suitable for a transport process of a substrate for a color filter, a substrate for a TFT or the like.

Further, since the transfer speed of the inlet and the outlet in the conveyor module, which is a conventional problem, cannot be made the same,
The transfer speed occurs when the workpiece is transferred between adjacent conveyor modules except for the drive motor, and the transfer object surface is
Dust generated from the transport drive roller is absorbed to impair the clean state of the transported object, and the point corresponding to the point where the required quality of the transported object cannot be maintained is transmitted to the right and left by two points per module. By configuring the transmission element of the book and providing the endless toothed belt to the transmission element of the drive roller,
Since the speed stability at the time of transfer between the modules is good and the fine adjustment of the speed can be surely performed, the speed stability is further improved, which is greatly effective in improving the quality of the product. There is also a great advantage that the model can be changed by replacing the spacer member of the roller guide width corresponding to the size of the conveyed object.

As described above, the transfer of the driving force for conveyance is performed by the two right and left transmission elements per module, the transmission elements are high-precision toothed pulleys and toothed belts, and the driving motor is speed-stabilized. By making it possible to finely adjust the speed with good performance, it is possible to convey at a constant speed.

Further, the transport driving roller 101 and the guide roller 102 which are in direct contact with the transported object have a conductive resistance of 10 (-4) Ω or 10 (-8) Ω, where (...) indicates a power. And the drive shaft, bearings, bearing case, and frame are made conductive, and the material of the toothed belt 8 is made conductive.

As described above, the transfer object 10 on the transfer conveyor
The static electricity of 0 is gradually released, and it can be prevented from being charged again, thereby greatly improving the quality of the conveyed object.

[0066]

As described above, according to the present invention,
Stable conveyance can be performed by reducing the slip phenomenon of the conveyed plate-like article.

Further, it is possible to gradually discharge the static electricity of the plate-shaped article and prevent the plate-shaped article from being charged again, thereby preventing damage.

[0068]

[Brief description of the drawings]

FIG. 1 is an external perspective view of a conveyor unit 200. FIG.

FIG. 2 is an external perspective view for explaining the operation of the conveyor unit 200.

FIG. 3 is a sectional view taken along line XX of FIG. 1;

FIG. 4 is a plan view of a main part of the conveyor unit 200, which is cut away.

5 is a cutaway view of a main part of the conveyor unit 200. FIG.

FIG. 6 is a fragmentary cutaway view of a conveyor unit 200.

7 is a front view of the conveyor unit 200. FIG.

FIG. 8 is a schematic diagram showing a use state.

FIG. 9 is a control flowchart of FIG.

[Explanation of symbols]

 1b, 1d, 1f Guide roller positioning fixing part 1a, 1c, 1e, 1g Guide roller width changing collar 2a, 2b Guide roller width adjustment plate 3a-3d Guide roller width adjustment plate mounting screw 4a-4h Slot 6 Presence sensor 7a to 7d Idler pulley 8 Conductive toothed belt 9 Tension adjusting plate 10a, 10b Mounting screw 12a, 12b Toothed idler pulley 19 Motor mounting bracket 20 Coupling 21a, 21b, 21c Drive shaft 22 Toothed pulley 23 Conveyor frame Reference Signs List 24 Flange holder 25 Bearing 27 Dust prevention labyrinth collar 28 Coupling 29 Connecting plate 29a Dovetail 30 Conveyor leg 32c Frame cover 34 Guide roller bearing 35 Guide roller mounting shaft 52 Base block 53 Nut 55 Frame 57 Ground wire 60 Collar 100 Conveyed object 101a to 101j Conductive transport drive roller 102a to 102j Conductive guide roller 200 Conveyor unit 300 Control unit

Claims (16)

[Claims] 1. A plate-like article transfer apparatus for applying a transfer force by friction to a bottom surface of a plate-like article having side surfaces parallel to each other and transferring the plate-like article at a constant speed downstream, and arranged to face each other. A plurality of transport rollers that generate the transport force from a drive motor disposed on a pair of bases; a unit that regulates widthwise positioning of opposite side edges of the plate-shaped article; A plate-like article transport device comprising: a detection unit that detects an end; and a control unit that is connected to the detection unit and the drive motor. 2. A plate-like article transfer device for applying a transfer force by friction to a bottom surface of a plate-like article having side surfaces parallel to each other and transferring the plate-like article at a constant speed downstream, wherein the plate-like article transfer devices are arranged to face each other. A pair of bases, a drive motor provided on at least one of the bases, and a drive motor provided on opposite side portions of the base, and a driving force from the drive motor being transmitted via power transmission means. A plurality of transport rollers that generate the transport force by being performed, and a plurality of rollers that regulate the width of the plate-shaped article in the width direction by abutting and driven rotation against opposite side edges of the plate-shaped article. A guide roller; detection means disposed downstream to detect an end of the plate-shaped article before and after conveyance; and control means connected to the detection means and the drive motor. Plate-like article transport apparatus. 3. A power transmission means, comprising: a first power transmission shaft connected via a joint to an output shaft of the drive motor disposed downstream; and a second power transmission shaft disposed upstream. A power transmission shaft, a toothed belt stretched between a toothed pulley fixed to the first power transmission shaft and the second power transmission shaft, and a toothed belt; 3. The plate-like article conveying apparatus according to claim 2, further comprising a stretching means for stretching the degree of stretching. 4. The base is fixed on at least one pair of connecting members having a dovetail groove so that the base can be freely moved in the width direction of the plate-like article, and the base is fixed via a collar having a predetermined width. The plate-shaped article conveying device according to claim 2, wherein the width is adjusted. 5. The control device according to claim 1, wherein the control unit controls the rotation speed of the drive motor to be reduced and stopped when the detection unit detects the conveyance rear end of the plate-shaped article. Item 3. The plate-like article conveying device according to Item 2. 6. A plate-like article transport apparatus according to claim 5, wherein a plurality of the plate-like article transport apparatuses are arranged in series, and the detection means of the plate-like article transport apparatus arranged on an upstream side detects the plate-like articles. A plate-like article transport apparatus, wherein when the transport front end is detected, the control means controls the rotational speed of the drive motor to be increased to a constant speed. 7. A plate-like article transfer device that applies a transfer force by friction to a bottom surface of a plate-like article having side surfaces parallel to each other and transfers the plate-like article at a constant speed downstream, and is disposed to face each other. A pair of bases, a drive motor provided on at least one of the bases, and a drive motor provided on opposite side portions of the base, and a driving force from the drive motor being transmitted via power transmission means. A plurality of transport rollers that generate the transport force by being performed, and a plurality of rollers that regulate the width of the plate-shaped article in the width direction by abutting and driven rotation against opposite side edges of the plate-shaped article. A guide roller, detection means disposed downstream to detect the end of the plate-shaped article before and after conveyance, control means connected to the detection means and the drive motor, and Removes static electricity Plate-like article conveying apparatus characterized by comprising a that static electricity removing means. 8. The static electricity removing means is configured such that at least one of the transport roller or the guide roller and one of the power transmission means have high conductivity and are grounded via the base. The plate-like article conveying device according to claim 7, characterized in that: 9. A plate-like article conveying method for applying a conveying force by friction to a bottom surface of a plate-like article having side surfaces parallel to each other and conveying the plate-like article at a constant speed downstream, wherein a pair of bases are opposed to each other. A drive motor is provided on at least one of the bases, a plurality of transport rollers are provided on opposing side surfaces of the base, respectively, and a driving force from the drive motor is transmitted through power transmission means. The conveyance force is generated by transmitting the sheet-shaped article, and a plurality of guide rollers that abut against and rotate on opposite side edges of the plate-shaped article are disposed to regulate positioning of the plate-shaped article in the width direction. Detecting the end of the plate-shaped article before and after the conveyance by detecting means disposed on the downstream side, and performing conveyance by the control means connected to the detection means and the drive motor. Article transport method. 10. A power transmission means, comprising: a first power transmission shaft connected via a joint to an output shaft of the drive motor disposed downstream; and a second power transmission shaft disposed upstream. A power transmission shaft; a toothed belt stretched between the toothed pulley fixed to the first power transmission shaft and the second power transmission shaft; and the toothed belt. 10. The method according to claim 9, further comprising: a stretching unit configured to stretch the stretching condition, wherein all the rotation speeds of the transport rollers are the same. 11. The base is fixed on at least one pair of connecting members having a dovetail groove so as to allow the base to be movable in the width direction of the plate-like article, and via a collar having a predetermined width. The width adjustment is carried out, The plate-like article conveyance method in any one of Claim 9 or 10 characterized by the above-mentioned. 12. The apparatus according to claim 1, wherein the control means performs control to reduce the rotation speed of the drive motor and stop when the rear end of the plate-shaped article is detected by the detection means. Item 10. The plate-like article conveying method according to Item 9. 13. A plate-like article transport device according to claim 2, wherein a plurality of the plate-like article transport devices are arranged in series, and the plate-like article transport device provided on an upstream side detects the plate-like articles by detecting means of the plate-like article transport device. A plate-like article conveying method, wherein when the front end of conveyance is detected, the control means controls the rotation speed of the drive motor to be increased to a constant speed. 14. A plate-like article conveying method for applying a conveying force by friction to a bottom surface of a plate-like article having side surfaces parallel to each other and conveying the plate-like article at a constant speed downstream, wherein a pair of bases face each other. A drive motor is provided on at least one of the bases, a plurality of transport rollers are provided on opposing side surfaces of the base, respectively, and a driving force from the drive motor is transmitted through power transmission means. The conveyance force is generated by transmitting the sheet-shaped article, and a plurality of guide rollers that abut against and rotate on opposite side edges of the plate-shaped article are disposed to regulate positioning of the plate-shaped article in the width direction. The detecting means disposed on the downstream side detects the front and rear ends of the plate-shaped article before and after the conveyance, and the detection means and the control means connected to the drive motor perform the conveyance, and the detection is performed on the plate-shaped article. Static electricity Plate-like article conveyor wherein the removing the static electricity removing means. 15. The static elimination means is configured such that at least one of the transport roller or the guide roller and one of the power transmission means have high conductivity and are grounded via the base. The plate-like article conveying method according to claim 14, wherein: 16. The plate-like article according to claim 1, wherein the plate-like article is a thin glass including a color filter substrate and a TFT substrate.