JPH10178275A - Composite sheet for multilayered wiring board - Google Patents

Composite sheet for multilayered wiring board

Info

Publication number
JPH10178275A
JPH10178275A JP33825096A JP33825096A JPH10178275A JP H10178275 A JPH10178275 A JP H10178275A JP 33825096 A JP33825096 A JP 33825096A JP 33825096 A JP33825096 A JP 33825096A JP H10178275 A JPH10178275 A JP H10178275A
Authority
JP
Japan
Prior art keywords
resin
thermosetting
wiring board
foil
metal foil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP33825096A
Other languages
Japanese (ja)
Inventor
Shozo Kinoshita
昌三 木下
Teruo Katayose
照雄 片寄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chemical Industry Co Ltd filed Critical Asahi Chemical Industry Co Ltd
Priority to JP33825096A priority Critical patent/JPH10178275A/en
Publication of JPH10178275A publication Critical patent/JPH10178275A/en
Withdrawn legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To prevent surface contamination of a metal foil coated with resin for a multilayered wiring board by covering the thermosetting resin surface of the metal foil with an easily strippable resin surface protective sheet. SOLUTION: A thermosetting polyphenylene ether resin layer 2 is formed on one surface of an electrolytic copper foil 3 for a printed board by applying a resin varnish composed of a thermosetting polyphenylene ether resin and a toluene solvent and drying the applied varnish film. Then the easily strippable protective sheet of the metallic foil 3 carrying the thermosetting polyphenylene ether resin layer 2 is formed by press contacting a polyethylene film with the surface of the resin layer 2 with a hot roll maintained at 100 deg.C. Therefore, the reliability of the metallic foil 3 can be improved because the surface of the foil 3 is not contaminated with the thermosetting resin at the time of preserving the foil 3.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は多層配線板製造に用
いられる複合シートに関する。
The present invention relates to a composite sheet used for manufacturing a multilayer wiring board.

【0002】[0002]

【従来の技術】近年、通信用、民生用、産業用等の電子
機器の分野における実装方法の小型化、高密度化への指
向は著しいものがあり、それに伴って材料の面でもより
優れた耐熱性、高周波領域での電気特性が要求されつつ
ある。電気用配線板産業の分野でも、めっきスルーホー
ル工法よりも高密度な配線を形成しうる積層ビルドアッ
プ工法の確立が急務とされているが、高速ディジタル回
路および高周波アナログ回路に用いることができる適切
な多層配線板用樹脂付金属箔がなかった。例えば、熱硬
化性の樹脂膜を有する樹脂付基材および樹脂シートとし
ては、従来のエポキシ樹脂を用いたものがあるが、エポ
キシ樹脂は電気特性、特に高周波領域での電気特性が悪
く、ハンドリングの際に樹脂の粉落ちが起こりやすいと
いう欠点があった。
2. Description of the Related Art In recent years, there has been a remarkable trend toward miniaturization and high-density mounting methods in the field of electronic devices for communication, consumer use, industrial use, and the like, and accordingly, materials have become more excellent. Heat resistance and electrical characteristics in a high frequency range are being demanded. In the electric wiring board industry, it is urgent to establish a laminated build-up method that can form higher-density wiring than the plated through-hole method, but it can be used for high-speed digital circuits and high-frequency analog circuits. There was no metal foil with resin for a multilayer wiring board. For example, as a resin-attached base material and a resin sheet having a thermosetting resin film, there are those using a conventional epoxy resin, but the epoxy resin has poor electric characteristics, particularly in a high-frequency region, and is difficult to handle. In this case, there is a drawback that resin powder easily falls off.

【0003】[0003]

【発明が解決しようとする課題】本発明は、以上の事情
に鑑みてなされたものであり、熱硬化性樹脂表面を容易
に剥離可能な保護シートで被覆されることにより、取り
扱いの際に粉落ちすることがなく、保存の際に熱硬化性
樹脂で金属箔の表面が汚染されることもなく、実用上極
めて扱いやすい容易に剥離可能な樹脂面保護シートを有
することを特徴とする多層配線板用複合シートを提供し
ようとするものである。
DISCLOSURE OF THE INVENTION The present invention has been made in view of the above-mentioned circumstances, and has been described in detail. A multilayer wiring characterized by having an easily peelable resin surface protection sheet that is not easily dropped, does not contaminate the surface of the metal foil with a thermosetting resin during storage, and is extremely easy to handle in practical use It is intended to provide a composite sheet for a board.

【0004】[0004]

【課題を解決するための手段】本発明者らは、上述のよ
うな課題を解決するため鋭意検討を重ねた結果、多層配
線板用樹脂付金属箔の熱硬化性脂面に容易に剥離可能な
樹脂面保護シートで被覆することにより、本発明の多層
配線板用複合シートを完成するに至った。すなわち、本
発明は、金属箔上に熱硬化性樹脂層、さらにその樹脂面
上に容易に剥離可能な保護シートが設けられていること
を特徴とする多層配線板用複合シートである。
Means for Solving the Problems The present inventors have made intensive studies to solve the above-mentioned problems, and as a result, they can easily peel off the thermosetting grease surface of the resin-attached metal foil for a multilayer wiring board. By coating with a suitable resin surface protection sheet, the composite sheet for a multilayer wiring board of the present invention was completed. That is, the present invention is a composite sheet for a multilayer wiring board, wherein a thermosetting resin layer is provided on a metal foil, and a protective sheet which can be easily peeled off is provided on the resin surface.

【0005】また、熱硬化性樹脂が比誘電率が1メガヘ
ルツ以上の周波数領域で3.3以下で、樹脂フロー量が
1%以上50%以下である熱硬化性樹脂である上記の多
層配線板用複合シートは、本発明の好ましい態様であ
る。以下に本発明を詳細に説明する。本発明に用いられ
る金属箔としては、例えば、銅箔、アルミ箔、錫箔、金
箔などが挙げられる。
The above-mentioned multilayer wiring board, wherein the thermosetting resin is a thermosetting resin having a relative dielectric constant of 3.3 or less in a frequency region of 1 MHz or more and a resin flow amount of 1% to 50%. Is a preferred embodiment of the present invention. Hereinafter, the present invention will be described in detail. Examples of the metal foil used in the present invention include a copper foil, an aluminum foil, a tin foil, and a gold foil.

【0006】金属箔の厚みは、扱い易さの点から500
μm以下が好ましく、200μm以下がより好ましく、
105μm以下が最も好ましい。金属箔において熱硬化
性樹脂の膜が形成される側の面は、該樹脂との密着性を
強めるため粗面化および/またはカップリング処理され
ていてもよい。配線板製造用として製造販売されている
粗化処理電解銅箔は本発明の樹脂付金属箔の製造にその
まま用いることができる。
[0006] The thickness of the metal foil is 500 in terms of ease of handling.
μm or less, more preferably 200 μm or less,
Most preferably, it is 105 μm or less. The surface of the metal foil on which the thermosetting resin film is formed may be roughened and / or subjected to a coupling treatment in order to enhance the adhesion to the resin. The roughened electrolytic copper foil manufactured and sold for manufacturing a wiring board can be used as it is for manufacturing the metal foil with resin of the present invention.

【0007】本発明に用いられる熱硬化性樹脂としては
例えば、熱硬化性ポリフェニレンエーテル樹脂、フェノ
ール樹脂、低誘電率化エポキシ樹脂、ジアリルフタレー
ト樹脂、ジビニルベンゼン樹脂、多官能性アクリロイル
樹脂、多官能性メタクリロイル樹脂、多官能性マレイミ
ド樹脂、多官能性シアン酸エステル樹脂、多官能性イソ
シアネート樹脂、不飽和ポリエステル樹脂、ポリブタジ
ェン樹脂、スチレン―ブタジェン・スチレンーブタジェ
ンースチレン等の架橋性ポリマーなどが挙げられる。こ
れらの樹脂は、工業技術上、単一の化合物とは限らず、
所望の性質を得るために様々な他の物質が添加され、あ
るいは変性が施されて用いられている。熱硬化性樹脂に
熱可塑性樹脂がブレンドされてもよい。
As the thermosetting resin used in the present invention, for example, thermosetting polyphenylene ether resin, phenol resin, epoxy resin having a low dielectric constant, diallyl phthalate resin, divinylbenzene resin, polyfunctional acryloyl resin, polyfunctional resin Examples include methacryloyl resins, polyfunctional maleimide resins, polyfunctional cyanate ester resins, polyfunctional isocyanate resins, unsaturated polyester resins, polybutadiene resins, and crosslinkable polymers such as styrene-butadiene-styrene-butadiene-styrene. . These resins are not limited to a single compound due to industrial technology,
Various other substances have been added or modified to obtain the desired properties. A thermoplastic resin may be blended with the thermosetting resin.

【0008】上記の熱硬化性樹脂の例のうち、本発明の
樹脂付金属箔に用いられる熱硬化性樹脂として好ましい
ものは、熱硬化性ポリフェニレンエーテル樹脂、ポリス
チレン系重合体を含む熱硬化性ポリフェニレンエーテル
樹脂、ポリブタジェンを含む樹脂組成物、トリアリルシ
アヌレートおよび/またはトリアリルイソシアヌレート
の重合体および/または共重合体を含む樹脂組成物であ
る。
[0008] Among the above examples of the thermosetting resin, the thermosetting resin used in the resin-coated metal foil of the present invention is preferably a thermosetting polyphenylene ether resin or a thermosetting polyphenylene containing a polystyrene-based polymer. A resin composition containing an ether resin, a resin composition containing polybutadiene, and a polymer and / or copolymer of triallyl cyanurate and / or triallyl isocyanurate.

【0009】本発明では熱硬化性樹脂に、その用途に応
じて所望の性能を付与させる目的で本来の性質を損なわ
ない範囲の量の充填剤や添加剤を配合して用いることが
できる。充填剤は繊維状であっても粉末状であってもよ
く、シリカ、アルミナ、タルク、雲母、ガラスビーズ、
ガラス中空球等を挙げることができる。また、添加剤と
しては、難燃剤、酸化防止剤、熱安定剤、帯電防止剤、
可塑剤、顔料、染料、着色剤等が挙げられる。
In the present invention, fillers and additives can be blended and used in the thermosetting resin in an amount that does not impair the original properties for the purpose of imparting desired performance according to the use. The filler may be fibrous or powdery, and may be silica, alumina, talc, mica, glass beads,
Glass hollow spheres and the like can be given. In addition, as additives, flame retardants, antioxidants, heat stabilizers, antistatic agents,
Plasticizers, pigments, dyes, coloring agents, and the like are included.

【0010】より高い信頼性を有する多層配線板を得る
ためには、熱硬化性樹脂の比誘電率が3.3以下であっ
て、かつ、多層配線板用樹脂付金属箔となされたときに
樹脂フロー量が1%以上50%以下であることが好まし
い。熱硬化性樹脂の比誘電率が1メガヘルツ以上の周波
数領域で3.3以下、好ましくは3.0以下であること
により、熱硬化後の樹脂も比誘電率が小さい。絶縁層の
比誘電率が小さいと配線の幅を広げることができるた
め、配線形成について同一のプロセスのもとで製造して
も特性インピーダンスのばらつきが小さくなる。また、
クロストークが小さくなる。
In order to obtain a multilayer wiring board having higher reliability, a thermosetting resin having a relative dielectric constant of 3.3 or less and a resin-coated metal foil for a multilayer wiring board are required. It is preferable that the resin flow amount is 1% or more and 50% or less. When the relative permittivity of the thermosetting resin is 3.3 or less, preferably 3.0 or less in a frequency region of 1 MHz or more, the resin after thermosetting also has a small relative permittivity. If the relative permittivity of the insulating layer is small, the width of the wiring can be widened, and therefore, even if the wiring is manufactured under the same process, the variation in the characteristic impedance is reduced. Also,
Crosstalk is reduced.

【0011】熱硬化性樹脂の樹脂フロー量が1%以上5
0%以下であれば、多層配線板製造用としては好適であ
り、樹脂フロー量が5%以上50%以下がさらに好まし
く、7%以上45%以下が最も好ましい。1%未満の樹
脂フロー量では内装回路の埋め込み不良を発生させ、多
層配線板の形成が困難である。樹脂フロー量が大きい方
が内層回路の埋め込みが容易であるが、50%を越える
樹脂フロー量では絶縁層の厚みを配線板内で一定に保つ
ことができず、配線の特性インピーダンスを一定に保つ
ことができない。
[0011] The resin flow amount of the thermosetting resin is 1% or more 5
If it is 0% or less, it is suitable for manufacturing a multilayer wiring board, and the resin flow rate is more preferably 5% or more and 50% or less, most preferably 7% or more and 45% or less. If the resin flow amount is less than 1%, defective embedding of the internal circuit occurs, and it is difficult to form a multilayer wiring board. A larger amount of resin flow facilitates embedding of the inner layer circuit. However, with a resin flow amount exceeding 50%, the thickness of the insulating layer cannot be kept constant in the wiring board, and the characteristic impedance of the wiring is kept constant. Can not do.

【0012】樹脂フロー量は、以下の方法で測定され
る。 1)10cm×10cmの金属箔の重量を測定し、この
重量をaとする。 2)10cm×10cmの樹脂付金属箔の重量を測定
し、この重量をbとする。 3)上記の樹脂付金属箔を温度170℃において圧力2
2kg/cm2 で10分間加圧した後、金属箔からはみ
出した樹脂分を取り除き、残った樹脂分の樹脂付金属箔
の重量を測定し、この重量をb’とする。
The resin flow amount is measured by the following method. 1) The weight of a metal foil of 10 cm × 10 cm is measured, and this weight is defined as a. 2) The weight of the metal foil with resin of 10 cm × 10 cm is measured, and this weight is defined as b. 3) The above resin-coated metal foil was heated at a temperature of 170 ° C. and a pressure of 2
After pressurizing at 2 kg / cm 2 for 10 minutes, the resin protruding from the metal foil is removed, and the weight of the resin-coated metal foil of the remaining resin is measured, and this weight is referred to as b ′.

【0013】4)下記に示す式により、樹脂フロー量を
求める
4) The amount of resin flow is determined by the following equation.

【0014】[0014]

【数1】 (Equation 1)

【0015】熱硬化脂膜の厚さは、ハンドリングのしや
すさから乾燥後の厚さが10μm以上が好ましく、20
μm以上がより好ましく、30μm以上が最も好まし
い。ワニスの製作に用いる溶剤としては、ベンゼン、ト
ルエン、キシレンなどの芳香族系炭化水素、ジクロロメ
タン、クロロホルム、トリクロロエチレンなどのハロゲ
ン系溶剤、さらにはTHF等があげられるが、これらは
単体もしくは混合して使用できる。熱硬化性樹脂と溶剤
とからなるワニスを塗布する方法としては、エアードコ
ータ、ブレードコータ、ロッドコータ、ナイフコータ、
グラビアコータ、リバースコータ、キャストコータなど
の装置を用いる方法が挙げられる。塗布膜を乾燥する方
法としては、熱風乾燥、ロール加熱乾燥、赤外線乾燥、
遠赤外線乾燥等の装置を用いる方法が挙げられ、実施に
あたってはこれらの装置を単独で、あるいは2種以上を
組み合わせて用いてもよい。
The thickness of the thermosetting fat film is preferably 10 μm or more after drying from the viewpoint of easy handling.
μm or more is more preferable, and 30 μm or more is most preferable. Examples of the solvent used for producing the varnish include aromatic hydrocarbons such as benzene, toluene, and xylene; halogen solvents such as dichloromethane, chloroform, and trichloroethylene; and THF. it can. As a method of applying a varnish comprising a thermosetting resin and a solvent, an aired coater, a blade coater, a rod coater, a knife coater,
A method using a device such as a gravure coater, a reverse coater, or a cast coater may be used. Hot air drying, roll heating drying, infrared drying,
A method using a device such as far-infrared drying may be mentioned, and in practice, these devices may be used alone or in combination of two or more.

【0016】本発明の複合シートは、熱硬化性樹脂膜表
面を容易に剥離可能な保護シートで被覆されることによ
り、実用上極めて扱いやすい、有用な多層配線板用資材
となる。この、金属箔、熱硬化性樹脂膜、樹脂膜から容
易に剥離可能な保護シートがこの順に密着してなる複合
シートがすなわち本発明である。製造法としては、樹脂
付金属箔に保護シートを加熱加圧等により圧着する手順
と、逆に保護シート上に熱硬化性樹脂膜が先に形成され
たものに金属箔を密着させる手順との両方が可能であ
る。
The composite sheet of the present invention becomes a useful material for a multilayer wiring board which is extremely easy to handle practically because the surface of the thermosetting resin film is covered with a protective sheet which can be easily peeled off. The present invention is a composite sheet in which a metal foil, a thermosetting resin film, and a protective sheet that can be easily peeled off from the resin film are adhered in this order. As a manufacturing method, a procedure in which a protective sheet is pressure-bonded to a resin-coated metal foil by heating and pressurizing, and a procedure in which a metal foil is closely attached to a previously formed thermosetting resin film on the protective sheet are used. Both are possible.

【0017】容易に剥離可能なシートとしては、樹脂フ
ィルムが好ましい。そのなかでも耐熱性の観点から、ポ
リエチレン、ポリプロピレン、ポリエチレンテレフタレ
ートなどが好ましい。さらに、フィルム表面が水ガラ
ス、シリコン樹脂、フッ素樹脂で剥離加工されていても
よい。図1に本発明の多層配線板用複合シートの模式図
を示す。
As the easily peelable sheet, a resin film is preferable. Among them, polyethylene, polypropylene, polyethylene terephthalate and the like are preferable from the viewpoint of heat resistance. Further, the film surface may be peeled with water glass, silicone resin, or fluorine resin. FIG. 1 shows a schematic view of a composite sheet for a multilayer wiring board of the present invention.

【0018】[0018]

【発明の実施の形態】以下、本発明をさらに明確にする
ために実施例を挙げて説明する。
BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described with reference to examples to further clarify the present invention.

【0019】[0019]

【実施例1】厚さ12μmのプリント基板用電解銅箔の
片面に、乾燥後の樹脂厚さが50μmとなるように熱硬
化性ポリフェニレンエーテル樹脂とトルエン溶剤からな
る樹脂ワニスを塗布した。塗布膜を乾燥するにあたって
は、熱風乾燥機を用いた。得られた熱硬化性ポリフェニ
レンエーテル樹脂付金属箔の樹脂面に厚み10μmのポ
リエチレンフィルムを100℃のホットロールにて圧着
し、該樹脂付金属箔塗の保護シートとした。保護シート
を付けたまま、直径10cmの円筒に巻き付けて23℃
にて1週間保存したところ、金属箔の表面が熱硬化性ポ
リフェニレンエーテル樹脂で汚染されることもなく、複
合シートのカットなどの加工時や保護シートを剥離し逐
次積層による多層配線板を作製する際のハンドリングに
おいて樹脂粉落ちはなく、信頼性の高い多層配線板を作
製することができた。また、圧着したポリエチレンフィ
ルムの縁を指で擦ったところ、端から容易に剥離するこ
とができた。
EXAMPLE 1 A resin varnish comprising a thermosetting polyphenylene ether resin and a toluene solvent was applied to one side of a 12 μm thick electrolytic copper foil for printed circuit boards so that the resin thickness after drying was 50 μm. In drying the coating film, a hot air drier was used. A 10 μm-thick polyethylene film was pressure-bonded to the resin surface of the obtained metal foil with thermosetting polyphenylene ether resin using a hot roll at 100 ° C. to obtain a protective sheet coated with the resin-coated metal foil. With the protective sheet attached, wrap it around a 10 cm diameter cylinder at 23 ° C
For one week, the surface of the metal foil is not contaminated with the thermosetting polyphenylene ether resin, and the multi-layer wiring board is manufactured by successive lamination during processing such as cutting of the composite sheet or by peeling off the protective sheet. There was no resin powder drop during handling, and a highly reliable multilayer wiring board could be manufactured. When the edge of the pressed polyethylene film was rubbed with a finger, it could be easily peeled off from the end.

【0020】[0020]

【比較例1】厚さ12μmのプリント基板用電解銅箔の
片面に、乾燥後の樹脂厚さが50μmとなるように熱硬
化性ポリフェニレンエーテル系脂とトルエン溶剤からな
る樹脂ワニスを塗布した。塗布膜を乾燥するにあたって
は、熱風乾燥機を用いた。得られた熱硬化性ポリフェニ
レンエーテル系樹脂付金属箔を直径10cmの円筒に巻
き付けて23℃にて1週間保存したところ、金属箔の表
面が熱硬化性ポリフェニレンエーテル系樹脂で汚染さ
れ、樹脂付金属箔のカットなどの加工時や逐次積層によ
る多層配線板を作製する際のハンドリングにおいて樹脂
粉落ちが見られ、作製した多層配線板の断面を観察した
ところ回路部に樹脂の埋込み不良が発生していた。
Comparative Example 1 A resin varnish composed of a thermosetting polyphenylene ether-based fat and a toluene solvent was applied to one side of a 12 μm-thick electrolytic copper foil for printed circuit boards so that the resin thickness after drying was 50 μm. In drying the coating film, a hot air drier was used. When the obtained metal foil with thermosetting polyphenylene ether-based resin was wound around a cylinder having a diameter of 10 cm and stored at 23 ° C. for one week, the surface of the metal foil was contaminated with the thermosetting polyphenylene ether-based resin, Resin powder fall was observed during processing such as cutting of foil or when manufacturing multilayer wiring boards by sequential lamination, and when the cross section of the manufactured multilayer wiring board was observed, resin embedding failure occurred in the circuit part. Was.

【0021】[0021]

【発明の効果】本発明の多層配線板用複合シートは、金
属箔への樹脂の汚染がなく、加工時およびハンドリング
に際して粉落ちのしない、信頼性の高い多層配線板用資
材としての特徴を有する。従って、本発明の多層配線板
用複合シートは、高速ディジタル回路および高周波アナ
ログ回路に用いることができる配線板用樹脂付資材とし
て好適に用いられる。
The composite sheet for a multilayer wiring board of the present invention is characterized as a highly reliable material for a multilayer wiring board, which is free from contamination of the metal foil with resin, does not fall off during processing and handling, and has no characteristic. . Therefore, the composite sheet for a multilayer wiring board of the present invention is suitably used as a resin material for a wiring board that can be used for high-speed digital circuits and high-frequency analog circuits.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の多層配線板用複合シート模式図であ
る。
FIG. 1 is a schematic view of a composite sheet for a multilayer wiring board of the present invention.

【符号の説明】[Explanation of symbols]

1 容易に剥離可能な保護シート 2 熱硬化性樹脂層 3 金属箔 DESCRIPTION OF SYMBOLS 1 Protective sheet easily peelable 2 Thermosetting resin layer 3 Metal foil

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 金属箔上に熱硬化性樹脂層、さらにその
樹脂面上に容易に剥離可能な保護シートが設けられてい
ることを特徴とする多層配線板用複合シート。
1. A composite sheet for a multilayer wiring board, wherein a thermosetting resin layer is provided on a metal foil, and a protective sheet which can be easily peeled off is provided on the resin surface.
【請求項2】 熱硬化性樹脂が比誘電率が1メガヘルツ
以上の周波数領域で3.3以下で、樹脂フロー量が1%
以上50%以下である熱硬化性樹脂からなる請求項1記
載の多層配線板用複合シート。
2. The thermosetting resin has a relative dielectric constant of 3.3 or less in a frequency region of 1 MHz or more and a resin flow amount of 1%.
The composite sheet for a multilayer wiring board according to claim 1, comprising a thermosetting resin having a content of at least 50%.
JP33825096A 1996-12-18 1996-12-18 Composite sheet for multilayered wiring board Withdrawn JPH10178275A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33825096A JPH10178275A (en) 1996-12-18 1996-12-18 Composite sheet for multilayered wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33825096A JPH10178275A (en) 1996-12-18 1996-12-18 Composite sheet for multilayered wiring board

Publications (1)

Publication Number Publication Date
JPH10178275A true JPH10178275A (en) 1998-06-30

Family

ID=18316351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33825096A Withdrawn JPH10178275A (en) 1996-12-18 1996-12-18 Composite sheet for multilayered wiring board

Country Status (1)

Country Link
JP (1) JPH10178275A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6770380B2 (en) 1998-08-11 2004-08-03 Nikko Materials Usa, Inc. Resin/copper/metal laminate and method of producing same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6770380B2 (en) 1998-08-11 2004-08-03 Nikko Materials Usa, Inc. Resin/copper/metal laminate and method of producing same

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