JPH10169702A - アクテイブ型防振装置 - Google Patents

アクテイブ型防振装置

Info

Publication number
JPH10169702A
JPH10169702A JP8346711A JP34671196A JPH10169702A JP H10169702 A JPH10169702 A JP H10169702A JP 8346711 A JP8346711 A JP 8346711A JP 34671196 A JP34671196 A JP 34671196A JP H10169702 A JPH10169702 A JP H10169702A
Authority
JP
Japan
Prior art keywords
vibration
disturbance
vibration isolator
active
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8346711A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10169702A5 (enExample
Inventor
Takashi Ozaki
隆志 尾崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP8346711A priority Critical patent/JPH10169702A/ja
Publication of JPH10169702A publication Critical patent/JPH10169702A/ja
Publication of JPH10169702A5 publication Critical patent/JPH10169702A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Vibration Prevention Devices (AREA)
JP8346711A 1996-12-10 1996-12-10 アクテイブ型防振装置 Pending JPH10169702A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8346711A JPH10169702A (ja) 1996-12-10 1996-12-10 アクテイブ型防振装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8346711A JPH10169702A (ja) 1996-12-10 1996-12-10 アクテイブ型防振装置

Publications (2)

Publication Number Publication Date
JPH10169702A true JPH10169702A (ja) 1998-06-26
JPH10169702A5 JPH10169702A5 (enExample) 2005-06-09

Family

ID=18385299

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8346711A Pending JPH10169702A (ja) 1996-12-10 1996-12-10 アクテイブ型防振装置

Country Status (1)

Country Link
JP (1) JPH10169702A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014021471A1 (en) * 2012-08-03 2014-02-06 Canon Kabushiki Kaisha Active anti-vibration apparatus, anti-vibration method, processing device, inspection device, exposure device, and workpiece manufacturing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014021471A1 (en) * 2012-08-03 2014-02-06 Canon Kabushiki Kaisha Active anti-vibration apparatus, anti-vibration method, processing device, inspection device, exposure device, and workpiece manufacturing method
JP2014043946A (ja) * 2012-08-03 2014-03-13 Canon Inc アクティブ除振装置、除振方法、加工装置、検査装置、露光装置及びワークの製造方法

Similar Documents

Publication Publication Date Title
KR101719380B1 (ko) 능동형 진동 차단 및 감쇠 시스템
JP7477670B2 (ja) 床フィードフォワード補助を備えた精密振動絶縁システム
US4929874A (en) Vibration control system
US5121898A (en) Method of controlling positions and vibrations and active vibration control apparatus therefor
US20100211225A1 (en) Combined motion sensor for use in feedback control systems for vibration isolation
JP2001027280A (ja) アクティブ除振装置
JP3696928B2 (ja) 能動除振装置および半導体露光装置
JP6550397B2 (ja) 半導体ウェハ重量計測装置および方法
JPH10169702A (ja) アクテイブ型防振装置
JPS5997341A (ja) 構造物の振動抑制装置
NL2004415C2 (en) Active vibration isolation system, arrangement and method.
JP4714611B2 (ja) アクティブ除振装置
JP2729378B2 (ja) 能動制御精密制振方法とその方法を使用したアクチュエータ並びに制振台
JP2864038B2 (ja) 微振動試験方法とその装置
JP2006138769A (ja) 地震予知方法、地震予知装置、および防振装置
JPH06280931A (ja) 能動型除振装置
JPH09237757A (ja) 半導体製造装置
JPH0712175A (ja) 精密防振装置
JPH10141428A (ja) 能動除振装置
JP3983637B2 (ja) 触針式プローブ機構の制御方法及び装置
JP2001271870A (ja) 能動除振装置
JP2002048184A (ja) 制振装置
JPH06288433A (ja) 除振装置
JPH09177879A (ja) 除振装置
JP2857154B2 (ja) 能動制御精密制振台

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040902

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20050607

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20050719

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060221

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060420

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20060801