JPH1015894A - Punching device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow to give a punching of less than 1 millipitch, precisely a punching with the size about 30μ to 100μ, at a pitch interval 0.3mm to 0.6mm, to a work at a high accuracy, by improving rectilinear property and durability of punching, and preventing rolling of the work. SOLUTION: The guide of a plunger 94a when a punch 84 is hit is carried out by the point contact with minute diameter of balls 500 which are scattered around the upper and the lower two positions of a retainer 94d, and deformed a little elastically by the plunger 94a. The guide of the retainer 94d when the punch 84 is hit is carried out by the point contact of the balls 500 to the inner peripheral surface of the larger diameter part 33a and the inner peripheral surface of the smaller diameter part 33b, of a pinching unit holder 3. The contact of a work removing plate 11 and a work 100 is limited only when the work 100 at the punch pulling out time is lifted up a little by the adhesive strength with the punch 84.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a drilling device for drilling holes which are closely related to a work such as a thin plate. More specifically, a size of about 30 to 100 microns is applied to a thin plate such as a wiring board, a flexible film, a metal foil, or a ceramic green sheet at a pitch of 1 mm or less, more specifically, for example, 0.3 to 0.6 mm. The present invention relates to a punching device for making a hole.

[0002]

2. Description of the Related Art Japanese Unexamined Patent Publication (Kokai) No. 63-267195 discloses a punching device for punching a circular hole, a square hole, an elliptical hole, or the like at a predetermined position in a thin plate such as a wiring board, a flexible film, a metal foil, and a ceramic green sheet. The one disclosed in Japanese Unexamined Patent Publication (KOKAI) No. 9-205,894 is known. In this prior art, a punching unit having a punch and a die is opposed to an upper half and a lower half of a U-shaped support rod, respectively, so that the punch and the die are opposed to each other with a reference surface therebetween. A plurality of punches having different shapes are installed in each of the punch units in a row in the axial direction, and the punch is driven by controlling the movement of the work and the operation of the punch. Are punched one after another by each punch.

[0003]

Today, precision devices such as semiconductor chips are becoming more precise and smaller, and as a result, the size of workpieces, the space between holes, and the size of holes are all smaller and denser. It is in the current situation. However, since the punching apparatus described above has a structure in which punches having different shapes are individually supported on each punch unit, the punching efficiency for punching holes of various shapes scattered in the work is naturally limited. Also, it takes time to drill many holes of the same shape. This punching device is called a gang die in which a fine-diameter punch is slidably inserted into a through hole by a metal guide method. This gang die adopts a structure in which the punch itself is vertically movably fitted so as to come into surface contact with the through-hole that has been opened so that it is possible to form a fine hole with a close pitch interval. However, sliding resistance increases due to surface contact.
Therefore, it is necessary to secure a clearance between the punch and the through-hole opened in the support portion.As a result, the punch is inclined by the clearance, so that straightness is deteriorated, and there is a problem that accurate drilling cannot be performed. It will lead to early breakage. Conversely, if the clearance is reduced, a problem arises in terms of abrasion, and continuous drilling of fine holes cannot be performed.

SUMMARY OF THE INVENTION The present invention has been made in view of the conventional circumstances, and has as its object the purpose of concentrating perforations of the same shape, concentrating perforations of different shapes, and one per hole of different diameters. A variety of drillings such as basic drilling can be selected in accordance with the drilling pattern of the workpiece.In addition, the straightness and durability of the punch are improved, and the rolling of the workpiece is prevented by using a very small diameter punch. An object of the present invention is to provide a punching device that can perform high-precision drilling with a narrow pitch interval.

[0005]

The technical means taken to achieve the above object are a punch having a punch of an arbitrary shape, and a punch which supports a plurality of the punches in close proximity on a plurality of columns and rows. A holder, a driving source that is separately communicated with each punch and selectively drives a punch thereof, a die provided on a reference surface facing the punch, and a workpiece that is gripped to move in X and Y directions along the reference surface. And a control unit for controlling the movement of the moving unit and a desired punch based on required data to drive a desired punch at a desired punching position, and the piercing tool holder has a large diameter. The retainer is provided with a fitting hole in which the hole portion and the small-diameter hole portion are connected concentrically, and the retainer has a cylindrical shape in which a large-diameter cylindrical portion and a small-diameter cylindrical portion are connected to each other. Projecting in and out of the cylindrical part and small-diameter cylindrical part Are scatteredly and rotatably supported, and a retainer is fitted inside the large-diameter hole inner peripheral surface and the small-diameter hole inner peripheral surface of the piercing tool holder so that the ball can be slidably contacted with the piercing tool holder. A plunger having a punch is formed in an external shape in which a large-diameter shaft portion and a small-diameter shaft portion are connected to each other, and the large-diameter shaft portion and the small-diameter shaft portion of the plunger are slightly elastically deformed with the ball. A large-diameter cylindrical portion of the retainer is slidably fitted in the small-diameter cylindrical portion, and a work removal plate provided with a punch through hole corresponding to the punch is provided so as to be adjustable in height. The gist of the present invention is to lower the workpiece when the punch is pulled out from the work so as to approach the work.

According to the above technical means, the punching position based on the required data, the movement of the moving section based on the shape of the punch, and the drive source for selectively driving each punch are controlled. Therefore, under the control of the control unit, the moving unit moves the work in the X direction and the Y direction so that the desired punching position is located immediately below the desired punch, and the punch is moved to the position when the desired punching position of the work is located immediately below. Drill holes of desired shape. Many punches are supported in close proximity to each other in rows and columns, and by replacement, concentrated drilling of holes of the same shape, concentrated drilling of holes of different diameters, drilling holes of different shapes one by one, etc. Can be performed in accordance with the drilling pattern of the workpiece based on the required data. Further, the guide of the plunger at the time of punching is performed by point contact with a fine-diameter ball which is scattered around the upper and lower two places of the retainer and is slightly elastically deformed by the plunger. The retainer is guided by point contact of the ball with the inner peripheral surface of the large-diameter hole and the inner peripheral surface of the small-diameter hole of the piercing tool holder. Therefore, the retainer slides with respect to the piercing tool holder, and the plunger slides with small hitting resistance due to point contact with the retainer, and repeats a rectilinear motion without inclination during punching. Furthermore, the contact between the work removal plate and the work is limited only when the work at the time of punching is slightly lifted by viscous force with the punch, and otherwise the work removal plate is kept away from the work. Therefore, unlike the conventional stripper, which continuously presses the work from drilling to punching, rolling by cumulative deformation does not occur at all, enabling high-precision micro-pitch drilling and moving the work directly below the drilling tool group In this case, it is possible to prevent a work supporting means such as a work frame provided with a work locking pin from colliding with the work removal plate and hindering the movement of the work.

[0007]

Next, an embodiment of the present invention will be described with reference to the drawings. 1 to 5 show a punching device according to an embodiment of the present invention, and reference numeral A denotes the punching device.

[0008] The drilling device A includes a machine base 1, a work table 2,
A piercing tool holder 3 integrally provided with the machine base 1, a piercing tool 4 detachably supported by the piercing tool holder 3, an X moving mechanism 5, and a Y moving mechanism 6 to grip the work 100 and
A moving unit 7 for moving in the direction and the Y direction, an air driving source 8 connected to the punch 4, a control unit 9, and the like.

As shown in FIG. 1, the piercing tool holder 3 is provided at the tip of the upper half portion 10a of a support rod 10 having a U-shaped front view in which a transfer space 200 for a work 100 is secured in an intermediate portion. A work table 2 is fixed to the lower half 10b of the machine base 1 at one side of the machine base 1 and at the tip of the lower half 10b of the support rod 10 so as to face the piercing tool holder 3.

The machine base 1 is provided with a moving section 7 on its upper surface, which is linked to an X moving mechanism 5 and a Y moving mechanism 6 to grip the work 100 and move it in the X and Y directions.

As shown in FIG. 2, the X moving mechanism 5 is a platform fitted over two guide portions 15, 15 parallel to the Y direction.
25 Attach the servo motor 35 to one end,
Is connected to a screw 45 rotatably supported at the other end of the table 25, and a moving body 17 having a work holder 300 is screwed into the screw 45, and a screw driven by a servo motor 35 is used. The moving body 17 is moved in the X direction by the rotation of 45, and the Y moving mechanism 6 is configured by screwing a screw 65 connected to a servo motor 55 provided on the machine base 1 into the base 25. Then, the table 25 is rotated by the rotation of the screw 65 driven by the servo motor 55.
The body itself moves on the guides 15, 15 in the Y direction.

The piercing tool holder 3 includes a lower piece 401 of an L-shaped bracket 400 provided at the tip of the upper half 10a of the support rod 10.
The L-shaped bracket 400 has a hole 40
A large number of communication holes 13 communicating with 2 are opened in rows and columns with the communication holes 13 approaching each other, and a sleeve 23 is fitted and fixed in the communication holes 13 and a fitting insertion hole 33 for the piercing tool 4 is inserted into the sleeve 23. Is formed. The insertion holes 33 are opened in a grid pattern in a plan view by approaching each other, but they are not equally spaced but may be irregularly opened at intervals. .

The insertion hole 33 is vertically communicated with a large-diameter hole 33a.
And a small-diameter hole 33b, and a stepped portion having a retainer return spring 34 interposed between the large-diameter hole 33a and the small-diameter hole 33b.
33c is formed stepwise.

The piercing tool 4 includes a lower piece 40 of an L-shaped bracket 400.
The lower opening of the cylinder 14 supported by 1 is closed by a closing fitting 44 having the sliding guide space of the rod 24 as a center.
The upper opening of the rod 14 is connected to the driving source 8 of the air, and the piston 54 is slidably inserted into the cylinder 14. A plunger mechanism 94 provided with a punch 84 is attached to the hammer 74. Reference numeral 104 denotes a spring for returning the punch.

The plunger mechanism 94 has an inner hollow plunger 94a having a screw 94b screwed into an outer peripheral surface of a connection portion 74a at a lower end of the hammer 74 at an upper end opening and a support hole 94c of a punch 84 at a lower end. It has a retainer 94d for guiding the plunger 94a in the vertical direction, and a punch 84 supported by the plunger 94a.

The retainer 94d has a cylindrical shape in which a large-diameter cylindrical portion 94d 'corresponding to the large-diameter hole 33a of the insertion hole 33 and a small-diameter cylindrical portion 94d "corresponding to the small-diameter hole 33b are provided in series. The large-diameter cylindrical portion 94d 'and the small-diameter cylindrical portion 94d "project a fine-diameter ball 500 inward and outward to support them in a scattered and rotatable manner. And the boundary step
94e and the step 33c, the retainer return spring 34
Is interposed.

The balls 500 are steel balls having a diameter of about 0.6 mm, and are rotatably supported in such a manner that they project about 0.1 mm inward and outward from the inner and outer peripheral surfaces of the retainer 94d. .

The plunger 94a has a hollow shape in which the inner periphery of the upper end opening is screwed into the hammer 74 and the lower end area is formed with a support hole 94c of a punch 84, and the large-diameter cylindrical portion 94d 'of the retainer 94d has a small diameter. The outer shape is such that a large-diameter shaft portion 94a 'is continuously formed in the upper half portion and a small-diameter shaft portion 94a "is continuously formed in the lower half portion corresponding to the cylindrical portion 94d".

The punch 84 has a punch diameter of about 30 to 100 microns and is fitted into the support hole 94c.
The plunger 94a is stopped in a state where the tip protrudes from the plunger 94a by a set screw 600 provided laterally from the outside of the plunger 94a.

The retainer 94d described above has its ball 50
Are fitted so as to be able to slide on the inner peripheral surface of the large-diameter hole portion 33a and the inner peripheral surface of the small-diameter hole portion 33b of the insertion hole 33. The plunger 94a is connected to the large-diameter shaft portion 94a '. With the small diameter shaft portion 94a ″ slightly deforming the balls 500...
A stopper which is slidably fitted in the large-diameter cylindrical portion 94d 'and the small-diameter cylindrical portion 94d "of 94d, and protrudes from the inner surface of the upper end of the sleeve 23.
The 700 prevents it from falling out.

In this embodiment, the punch interval is 12.5 mm.
I have to.

Reference numeral 11 denotes a work removing plate, which is formed in a plate shape having a desired thickness having a larger area than the group of punches 4 as shown in the figure, and a punch through hole 11 is formed in a portion corresponding to the punch 84.
a is opened and four corners are air cylinders
It is supported horizontally so that the height can be adjusted by 11b.

The air cylinder 11b has a rod 11f projecting upward from the cylinder 11e as a screw rod as shown in the figure, and an operation knob 11g is screwed onto the screw rod 11f, and the lower end of the operation knob 11g has the L-shape. The bracket 400 can be lowered until it comes into contact with the flange 11h 'of the cylindrical guide 11h attached to the upper surface of the lower piece 401 of the bracket 400. Therefore, this air cylinder
In the case of 11b, the bottom dead center of the work removal plate 11 connected to the lower end of the rod 11i can be set arbitrarily by rotating the operation knob 11g to change the height position with respect to the screw rod 11f. The air cylinder 11 waits at a predetermined height position apart from the workpiece 100, that is, at the top dead center, until the workpiece 100 moves below the group of punches 4 and pierces, and pulls out the punch from the workpiece 100. It is controlled by a control unit 9 described later so as to approach the work 100 at times.
The top dead center is a height at which the work supporting means 101 such as a work frame provided with a locking pin 101 ′ of the work 100 does not collide with the work removal plate 11 when the work 100 is moved by the moving section 7. The amount of approach Z to the work is arbitrary, but in this embodiment, it is 0.1 mm from the surface of the work 100.
To about 0.5 mm.

The work table 2 is a reference surface on which the work 100 moves on the upper surface.
The punched holes 12a of the dies 12 are connected to a vacuum device (not shown) for collecting punched chips.

Reference numeral 9 denotes a control unit.
Drilling position data of the workpiece 100 stored in the RAM in advance,
The control is performed based on data of the punch shape at the time of hitting each punching position, movement / stop data of the moving unit 7 for moving the work 100 immediately below a predetermined punch from the reference point, and the like.
That is, the moving unit 7 is based on the X moving mechanism 5 and the Y-axis moving mechanism 6.
By moving a plurality of punches 84 of the same shape with a time difference while moving the workpiece 100, the punches of the same shape having the same pitch 84 interval or the punches of the same shape having different pitch intervals are concentrated, Similarly, while moving the workpiece 100, a plurality of punches 84 having different shapes can be beaten with a time lag to perform concentrated punching of holes having different shapes by exchanging programs. Only the round hole is pierced at the round hole punching position) by a punch corresponding to the hole, then the square hole, the small round hole, and then the elliptical hole. Drilling can be performed by exchanging punch programs. Needless to say, the punches are exchanged as necessary in the above-described drilling.

The above data may be obtained by teaching. In this case, as shown in the figure, the operation is performed by an offset microscope 800 installed adjacent to the group of punches 4 on the work table 2 side. In order to perform punching mark and punch-shaped teaching using the offset microscope 800, the workpiece 100 is moved from the reference point in the X and Y directions while the respective punch marks are sequentially aligned with the center of the offset microscope 800. The teaching of the punches 84 having a shape corresponding to the hole shape to be punched in the punching mark and the control of the drive source 8 are selectively taught so that only the punches 84 that have been taught are driven. Note that, instead of the offset microscope 800, a CCD and an image processing device connected to the CCD are used to binarize the reflection image of the perforated mark by the image processing device, and the binarized image is searched on a monitor screen. Alternatively, the center may be detected. Further, the control unit 9 is configured to move each of the perforated marks taught at the center of the offset microscope 800 to a position immediately below a punch for perforating a taught hole having a predetermined shape based on the positional relationship with each punch center. Necessary moving distances in the X direction and the Y direction are calculated, and based on the calculation results, when each punch mark moves immediately below a punch having a predetermined shape, the corresponding punch can be selectively hit. The drive source 8 opens and closes an air path by an electromagnetic valve (not shown) so as to selectively punch the punches 84... So that air can be freely supplied to each of the punches 4.

In the drilling apparatus A having such a configuration, the movement of the workpiece 100 is controlled by the moving section 7, and the air drive source 8 is driven to push the piston 54, thereby lowering the plunger 94a. A predetermined punching position of the workpiece 100 is punched out by the punch 84 in accordance with the program of the section 9. At that time, the work removal plate 11 is in a state of being separated from the work 100 (top dead center), and the work support means 101 such as a work frame having a locking pin 101 ′ of the work 100 moves on the reference plane. Also, there is no possibility that the work supporting means 101 collides with the work removing plate 11 and is hindered from moving. Further, the work removal plate 11
When the punch 100 comes close to the work 100 when the punch is pulled out from the work 100, the work 100 comes into contact with the
Can be pulled out. The plunger 94a is guided along with the movement of the punch 84.
A fine-diameter ball 500 that is scattered around the place and is slightly elastically deformed (about several microns) by the plunger 94a.
The guide of the retainer 94d at that time is performed by the point contact of the ball 500 with the inner peripheral surface of the large-diameter hole 33a and the inner peripheral surface of the small-diameter hole 33b of the insertion hole 33.
The 84 slides with a small striking resistance and repeats rectilinear movement without inclination.

As described above, according to the embodiment of the present invention, the moving unit 7 is driven according to the program or the teaching by hitting in the selected order stored with the required data from the group of focused punches 84 exhibiting high straightness. The hole 100 is automatically pierced at a predetermined piercing position or a piercing mark while moving in the X and Y directions as shown in FIG. Therefore, only when the workpiece 100 is slightly lifted, there is no cumulative deformation caused by continuously pressing the workpiece 100 from the time of punching to the time of punching out. Therefore, a punch having an extremely fine diameter having a short side and a long side having a diameter of 30 μm to 100 μm or the same size may cause a decrease in durability or a pitch of 0.3 to 0.6 mm without rolling the work. It is possible to continuously drill fine holes in a thin plate at high precision with an interval.

[0029]

As described above, the present invention has the following advantages. A large number of punches are supported close to each other in rows and columns so that the amount of movement of the work during the drilling process is reduced, so that high-speed punching is possible and punching work can be significantly increased, and the pitch interval can be improved. Is not only optimal for drilling small holes, but also punching by selecting punches from multiple types of punches supported in a large number of rows and columns. It can be performed efficiently. In addition, the plunger is smoothly guided in the vertical direction with little resistance due to ball point contact with the retainer, and the retainer is smoothly guided in the vertical direction with the ball contacting with the piercer holder. As a result, even if the punch has a fine diameter, it can exhibit high straight-line guideability. In addition, the work removal plate is made to approach the work when the punch is pulled out of the work, and otherwise is separated from the work, so that the work is continuously pressed from the time of punching to the time of punch removal. There is no rolling of the work due to cumulative deformation. Therefore, existing punches having an extremely small diameter of about 30 to 100 microns may cause a decrease in durability, or a wiring board or a flexible film having a pitch of 0.3 to 0.6 mm without rolling a work. In addition, fine holes can be continuously formed with high precision in a thin plate such as a metal foil or a ceramic green sheet.

[Brief description of the drawings]

FIG. 1 is a front view of a punching device.

FIG. 2 is a plan view of the same.

FIG. 3 is a partially enlarged cross-sectional view of the drilling tool in an attached state.

FIG. 4 is a partially enlarged cross-sectional view of the piercing device showing a piercing state.

FIG. 5 is an enlarged front sectional view of FIG. 1;

[Explanation of symbols]

A: Punching device 4: Punching tool 84: Punch 3: Punching tool holder 8: Driving source 12: Dice 100: Work 7: Moving part 9: Control part 94d: Retainer 33a: Large diameter hole part 33b: Small diameter hole part 500: Ball 94a: Plunger 94a ': Large-diameter shaft 94a ": Small-diameter shaft 33: Fitting hole 12a: Punched hole

Claims (1)

[Claims] 1. A piercing tool provided with a punch having an arbitrary shape, a piercing holder for supporting a plurality of piercing tools in close proximity in a row and a row, and a driving device which is individually connected to each piercing tool and selectively drives the punch. A source, a die provided on a reference surface facing the punch, a moving unit for grasping a work and moving the work in the X and Y directions along the reference surface, and the moving unit based on required data. A control unit for controlling the punching motion of the punch and for punching the desired punch at a desired punching position, wherein the piercing tool holder has a fitting hole in which the large-diameter hole portion and the small-diameter hole portion are concentrically continuous. The retainer is provided with a retainer, and the retainer has a cylindrical shape in which a large-diameter cylindrical portion and a small-diameter cylindrical portion are connected to each other. Shape and rotatably supported,
The retainer is fitted inside the large-diameter hole inner peripheral surface of the piercing tool holder and the small-diameter hole inner peripheral surface so that the ball can be slidably contacted with the piercing tool holder. The plunger is formed into an external shape that is connected continuously, and the large-diameter shaft portion and the small-diameter shaft portion of the plunger slide on the large-diameter cylindrical portion and the small-diameter cylindrical portion of the retainer with the ball slightly elastically deformed. A work removing plate provided with a punch through hole corresponding to the punch is provided so as to be adjustable in height, and the work removing plate is lowered when the punch is pulled out of the work to approach the work. A punching device characterized by the above-mentioned.