JPH08174493A - Punching device - Google Patents

Abstract

PURPOSE: To provide a punching device capable of selecting a punching hole rich in variety by the punching pattern of a work, and having high availability. CONSTITUTION: The movement of a moving part 5 and a driving source for making selectively hitting respective punches are controlled on the basis of the punching position based on the specified data input into a control unit and the shapes of the punches. The work 100 is moved in the X direction and in the Y direction by the moving part 5 so that the punching position may be positioned just under the punch set by control of the control unit, and the set punch forms a hole having the desired shape in the punching position just under the punch. Many respective punches are mutually adjacent to each other and supported in the longitudinal and lateral lines, can be exchanged, and performs the concentration punching of the holes having the different shapes and the punching work wherein the holes having the different shapes are sequentially punched one by one according to the punching pattern of the work 100 in addition to the concentration punching of the holes having the same shapes by the exchange of the data.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a drilling device capable of drilling holes of various shapes in close relation to a work such as a thin plate.

[0002]

2. Description of the Related Art Japanese Patent Application Laid-Open No. 63-267195 discloses a punching device for punching a round hole, a square hole, an elliptical hole, or the like at a predetermined position in a wiring board, a flexible film, a metal foil, or the like. Are known. In this prior art, a punch unit having a punch and a die is opposed to an upper half and a lower half of a U-shaped support rod, respectively, so that the punch and the die face each other with a reference plane interposed therebetween. A plurality of punches having different shapes are provided in each of the punch units, and the movement of the work and the operation of the punch are controlled so that the punch is driven, so that the punch is driven. Holes of the same shape are punched one after another by each punch, and a large number of holes of various shapes are punched in a work such as a wiring board, a flexible film, and a metal foil as a whole.

[0003]

Today, precision devices such as semiconductor chips are becoming more precise and smaller, and as a result, work pieces, hole intervals, and hole sizes are all smaller and more compact. It is in the present condition. However, since the punching device described above has a structure in which punches having different shapes are individually supported by punch units having different shapes, it is possible to improve the efficiency of punching holes of various shapes scattered on a work. Naturally, there is a limit, and it takes time to drill a large number of holes of the same shape, and there is also a limit to the use depending on the drilling pattern that differs depending on the type of work. Further, in this punching device, there is a device called a gang die in which a fine-diameter punch is slidably fitted in a through-hole by a metal guide method. . This gang die employs a structure in which the punch itself is vertically movably fitted so as to make surface contact with the through-hole that has been opened by approaching, and it is possible to form a fine hole with a close pitch interval. . However, the surface contact increases the sliding resistance. Therefore, it is necessary to secure a clearance between the punch and the through hole opened in the support portion, and as a result, the punch is inclined by the clearance,
There is a problem that the straightness is deteriorated, and it is not possible to perform accurate drilling, and a breakage occurs quickly. Conversely, when the clearance is reduced, a problem occurs in the frictional surface, and it becomes impossible to continuously drill the fine holes.

The present invention has been made in view of the conventional circumstances, and the object thereof is to provide concentrated perforated holes of the same shape, concentrated perforated holes of different shapes, and one hole for each hole having a different diameter. An object of the present invention is to provide a highly-utilizable punching device in which a wide variety of punching such as basic drilling which is sequentially performed can be selected according to a drilling pattern of a work. Further, another object of the present invention is to provide a punching device capable of punching fine holes with high precision in accordance with a punching pattern of a work by improving straightness and durability of the punch.

[0005]

The technical means taken in order to achieve the above object is as follows. Claim 1 discloses a punching tool having a replaceable punch having an arbitrary shape, and a plurality of punching tools arranged close to each other. Punch holders supported in rows and columns, a drive source that is individually connected to each punch and selectively drives the punches, a die that is exchangeably provided on the reference surface facing the punches, and a workpiece that is gripped and used as a reference. A moving section for moving in the X and Y directions along the surface, and a control section for controlling the moving section and the punching of the desired punch based on required data to strike the desired punch at the desired punching position. That is the main point. According to a second aspect, the punch tool holder according to the first aspect includes a fitting insertion hole in which a large diameter hole portion and a small diameter hole portion are concentrically continuous with each other, and a retainer, and the retainer is a large diameter tube. And a small-diameter tubular portion are connected to each other in a tubular shape, and the large-diameter tubular portion and the small-diameter tubular portion project inwardly and outwardly to support fine-diameter balls in a scattered and rotatably manner. The retainer is internally fitted so that it can be slidably contacted with the inner peripheral surface of the large-diameter hole portion and the inner peripheral surface of the small-diameter hole portion of the tool holder, and the punching tool has a plunger having a punch with a large-diameter shaft portion and a small-diameter shaft portion. Formed in a continuous appearance, the large-diameter shaft part and the small-diameter shaft part of the plunger are slidable inside the large-diameter and small-diameter cylinders of the retainer with the ball slightly elastically deformed. The main point is to fit them. A third aspect of the present invention is summarized in that the punch according to the first or second aspect has a diameter, a long side length or a short side length of 100 μm or less.

[0006]

According to the above technical means, there are the following actions. (Claim 1) The movement of the moving unit and the drive source for selectively hitting each punch are controlled based on the punching position and the shape of the punch according to the required data of the control unit. Therefore, the control unit controls the moving unit to move the work in the X and Y directions so that the desired punching position is located immediately below the desired punch, and
When the desired punching position of the work is located immediately below, the punch punches a hole of a desired shape at that position. Since each punch is closely supported in multiple rows and columns and can be exchanged, it is possible to perform concentrated drilling of holes of the same shape, concentrated drilling of holes of different diameters, sequential drilling of holes of different shapes, etc. It is possible to perform the punching work of (1) according to the drilling pattern of the work based on the required data. (Claim 2) The guide of the plunger at the time of punch punching is performed by point contact with fine balls which are scattered around the upper and lower portions of the retainer and are slightly elastically deformed by the plunger. The guide of the retainer at the time of striking is performed by point contact between the inner peripheral surface of the large diameter hole portion and the inner peripheral surface of the small diameter hole portion of the punch holder with the ball. Therefore, the retainer slides with respect to the punch holder and the plunger slides with small striking resistance due to point contact with the retainer, and repeats straight movement without inclination during punching. (Claim 3) There is no clearance as in the conventional example, and due to high straightness, even if the punch is 100 microns or less, it will not break due to inclination.

[0007]

As described above, the present invention has the following advantages. (Claim 1) Since a punch to be driven can be selected from a plurality of types of punches supported in a large number of columns and rows,
Punching work optimal for the drilling pattern of the work can be performed efficiently in a short time. Moreover, since a large number of punches are supported close to each other in the vertical and horizontal rows to reduce the amount of movement of the work during the punching process, high-speed punching is possible, and the punching work can be significantly improved, and the pitch can be increased. Most suitable for drilling with small intervals. (Claim 2) The plunger is smoothly guided in the vertical direction with respect to the retainer and the retainer with respect to the punch holder with little resistance due to the point contact of the ball, respectively. It is possible to achieve both high performance and high linearity guideability even with a punch having a fine diameter. Therefore, in addition to the advantage of claim 1, highly accurate continuous perforation with a fine diameter is enabled. (Claim 3) As a result of having the structure of claim 2, the punch is 10
Even if it is less than 0 micron, in particular, the existing one of about 30 microns, it does not break due to its high straightness, and continuous punching can be performed with a very fine diameter punch without deteriorating durability.

[0008]

Embodiments of the present invention will now be described with reference to the drawings. FIGS. 1 to 4 show a punching apparatus according to the present embodiment.
Is a punching device.

The drilling device A includes a machine base 1, a work table 2,
The piercing tool holder 3 provided integrally with the machine base 1, the piercing tool 4 detachably supported by the piercing tool holder 3, the X moving mechanism 5a, and the Y moving mechanism 5b are linked to grip the workpiece 100 and X
It comprises a moving unit 5 for moving in the direction and the Y direction, a driving source 6 for air connected to the punch 4, a control unit 7, and the like.

As shown in FIG. 1, the punch tool holder 3 is provided at the front end of the upper half of the support rod 13 having a U-shaped front view, which secures a transfer space 102 for the work 100 in the middle thereof.
The lower half 13a of the support 13 is fixed to one side of the machine base 1, and the work table 2 is disposed at the tip of the lower half 13b of the support rod 13 so as to face the punch holder 3.

The machine base 1 is provided with a moving unit 5 on its upper surface, which is linked to an X moving mechanism 5a and a Y moving mechanism 5b, and grips and moves the work 100 in the X and Y directions.

As shown in FIG. 2, the X moving mechanism 5a is a stand fitted across two guide portions 15, 15 parallel to the Y direction.
25 A servo motor 35 is attached to one end and the servo motor 35
Is connected to a screw 45 that is rotatably supported at the other end on the base 25, and a moving body 55 having a work holder 55a is screwed into the screw 45, and the screw is driven by the servo motor 35. The moving body 55 is moved in the X direction by the rotation of 45, and the Y moving mechanism 5b is configured by screwing a screw 75 connected to the servo motor 65 provided on the machine base 1 onto the table 25. Then, by rotating the screw 75 driven by the servo motor 65, the table 25
It is adapted to move on the guide portions 15, 15 in the Y direction.

The piercing tool holder 3 is fixed to the lower surface of a bracket 9 provided at the end of the upper half portion 13b of the support rod 13, and is opened in the bracket 9 and has a connection hole in which a mounting screw 19a is screwed into the upper inner surface. A large number of holes are opened in rows and columns with the communication holes 23 communicating with 19 close to each other.
33 is fitted and fixed, and a fitting insertion hole 43 for the piercing tool 4 is formed in the sleeve 33. In the drawing, the fitting holes 43 are opened in a grid pattern close to each other, but the invention is not limited to this. Irregular holes are formed at regular intervals not in rows and columns. It is a good thing.

The insertion hole 43 is vertically communicated with a large-diameter hole 43a.
And a small-diameter hole 43b, and a step 43c for mounting the first return spring 10 is formed between the large-diameter hole 43a and the small-diameter hole 43b.

The piercing tool 4 has an external screw 44a for closing the upper opening of the cylinder 14, connecting the inside of the cylinder 14 to the driving source 6 for air, and screwing the lower opening of the cylinder 14 to the mounting screw 19a. The cover is covered with the closing fitting 44, and a cylinder rod 54 is protruded from the closing fitting 44 so as to be slidably inserted into the cylinder 14, and a second return spring is provided between the head 54a of the cylinder rod 54 and the closing fitting 44. A hammer 74 is connected to the end of the cylinder rod 54 via a coupling 64, and a plunger mechanism 84 having the punch 12 is attached to the hammer 74.

The plunger mechanism 84 has a connecting screw 94a screwed onto the outer peripheral surface of the hammer 74 at the upper end opening, and an internally hollow plunger 94 having a support hole 94b for the punch 12 at the lower end.
And a retainer 104 for guiding the plunger 94 in the vertical direction, and the punch 12 supported by the plunger 94.

The retainer 104 has a cylindrical shape in which a large-diameter cylindrical portion 104a corresponding to the large-diameter hole 43a of the fitting hole 43 and a small-diameter cylindrical portion 104b corresponding to the small-diameter hole 43b are connected. Diameter tube
Balls 105 having a small diameter are projected inward and outward between the small diameter cylindrical portion 104b and the small diameter cylindrical portion 104b, and are rotatably supported in a scattered manner. A boundary step portion 104c between the large diameter cylindrical portion 104a and the small diameter cylindrical portion 104b is provided. The first return spring 10 is interposed between the step portion 43c and the step portion 43c.

The balls 105 are steel balls having a diameter of about 0.6 mm, and are rotatably supported so as to protrude from the inner and outer peripheral surfaces of the retainer 104 inward and outward by about 0.1 mm. .

The plunger 94 has an upper end opening which is screwed into the hammer 74 and a support hole for the punch 12 in the lower end region.
The large-diameter shaft portion 94b is formed in the upper half corresponding to the large-diameter cylindrical portion 104a and the small-diameter cylindrical portion 104b of the retainer 104.
c has an external shape in which a small-diameter shaft portion 94d is continuously formed in a lower half portion, and is provided with a stripper 22 at a lower end.

The punch 12 mainly has a punch diameter of 100 microns or less, is fitted in the support hole 94b, and has a plunger 94.
Set screw 94f that is screwed into the horizontal stop hole 94e from outside
It is stopped with the tip protruding from the plunger 94.

The retainer 104 described above has a ball 10
5 are fitted inside the large-diameter hole portion 43a and the small-diameter hole portion 43b of the fitting insertion hole 43 so as to be able to slidably contact the inner peripheral surface. The plunger 94 has a small-diameter with the large-diameter shaft portion 94c. Shaft 94d is the ball
105 are slidably fitted in the large-diameter cylindrical portion 104a and the small-diameter cylindrical portion 104b of the retainer 104 in a state of being slightly elastically deformed, and are prevented from being pulled upward by a stopper 33a protruding from the upper inner surface of the sleeve 33. It has become.

In this embodiment, the interval between the punches 12 is 12.5 m.
It is set to m.

The plunger mechanism 84 has an air flow path 114 communicating with the cylinder rod 54 and the hammer 74 and communicating with the plunger 94.
A small air passage 124 along the punch 12 is provided around b, and an outlet 124a of the small air passage 124 is opened at the lower end of the plunger 94 so that a part of the air for hammering will be the air passage 114 and the small air passage 124.
Through the stripper 22.

The stripper 22 is formed in a bag shape from an elastic material such as a soft resin, and has a punch 12 and an outlet 12 of a small air passage 124.
An open edge is removably locked to the lower end of the plunger 94 so as to surround 4a, and a punch hole 22a is opened in a bottom portion facing the punch 12.

The work table 2 has an upper surface serving as a reference surface on which the work 100 moves, and a large number of dies 12 facing the punch 12.
a is exchangeably fitted in a flush manner, and the punching hole 12b of the die 12a is connected to a vacuum device (not shown) for collecting the punching tip.

When the air drive source 6 is operated, the cylinder rod 54 is pushed by the compressed air to lower the plunger 94 of the piercing tool 4 having such a configuration, and the plunger 94 is stored in the control unit 7 by a program. A predetermined punching position of the work 100 is punched. At the same time that the punch hole 22a is closed by being crushed by the work 100, a part of the compressed air enters the inside of the stripper 22 via the air flow path 114 and the small air path 124, and the punch 4 returns. Punch hole that opens when moving
The high pressure air retained inside is blown at a stretch from 22a toward the attached chip attached to the back surface of the work 100, and the attached chip is dropped from the punched hole 12b of the die 12a. Further, the guide of the plunger 94 accompanying the hitting movement of the punch 12 is scattered around the upper and lower portions of the retainer 104, and the ball 105 having a small diameter is slightly elastically deformed (about several microns) by the plunger 94. The guide of the retainer 104 at that time is performed by the point contact of the ball 105 with the inner peripheral surface of the large-diameter hole 43a and the inner peripheral surface of the small-diameter hole 43b of the insertion hole 43, and 12 slides with small striking resistance and repeats rectilinear movement without inclination.

The drive source 6 can selectively supply air to a desired piercing tool 4 by an electromagnetic valve (not shown).

The moving section 5 and the driving source 6 are connected to a control section (microcomputer) 7.

The control unit 7 stores the punching position data of the work 100 stored in the RAM in advance, the data of the punch shape at the time of hitting each punching position, and the work 100 just below a predetermined punch from the reference point.
Is controlled based on the movement / stop data of the moving unit 5 for moving the. That is, the work 100 is moved by the moving unit 5.
While moving the punches, a plurality of punches 12 of the same shape are beaten with a time lag to perform punching of the same shape with the same pitch interval or punching of the same shape with a different pitch interval. The punching operation is performed with a time lag with a plurality of punches 12 of different shapes while moving the tool, so that concentrated punching of holes having different shapes can be performed by exchanging the program, and a predetermined punching position (round hole punching) can be performed. Position) 101
First, only the round hole is punched by the punch 12 corresponding to the punching, then the square hole, the small round hole, and then the elliptical hole. Of course.

The above data may be obtained by teaching. In this case, work table 2
This is carried out by an offset microscope 200 installed on the side next to the group of perforators 4. To perform punch-shaped teaching with the punch mark 101, the workpiece 100 is moved in the X and Y directions from the reference point while the punch mark 101 is sequentially aligned with the center of the offset microscope 200. Of punches 12 ... of the shape corresponding to the hole shape to be punched and the punches thus taught
The control of the drive source 6 is selectively taught so that only 12 is driven. A CCD and an image processing device connected to the CCD are used instead of the offset microscope 200 to binarize the reflection image of the perforation mark by the image processing device, and the binarized image is searched on the monitor screen. Alternatively, the center may be detected. Further, the control unit 7 moves each punching mark 101 taught at the center of the offset microscope 200 to a position right below the punch 12 for punching a hole of a predetermined shape taught, based on the positional relationship with the center of each punch. The required moving distances in the X and Y directions are calculated, and based on the calculation results, when each punch mark 101 moves directly below the punch 12 having the predetermined shape, the corresponding punch is punched.
12 will be able to be selectively beaten.

As described above, in the embodiment of the present invention, required data is obtained from a group of focused punches 12 having a short side and a long side having a diameter of 30 μm to 100 μm and the same size and exhibiting high straightness. By hitting in the stored selection order, the moving unit 5 automatically pierces a predetermined piercing position or piercing mark 101 while moving in the X and Y directions as in teaching, so that the pitch interval is reduced. Holes of various shapes can be formed at high speed, and in each case, the chips attached to the punch 12 and the back surface of the work 100 can be surely peeled off.

[Brief description of drawings]

FIG. 1 is a front view of a punching device.

FIG. 2 is a plan view of the same.

FIG. 3 is a partially enlarged cross-sectional view of the punching tool in an attached state.

FIG. 4 is a partially enlarged sectional view of a punching tool showing a punched state.

[Explanation of symbols]

A: Punching device 4: Punching tool 12: Punch 3: Punching tool holder 6: Driving source 12a: Dice 100: Work piece 5: Moving section 101: Punching mark 7: Control section 104: Retainer 43a: Large diameter hole section 43b: Small diameter Hole 104a: Large-diameter cylinder 104b: Small-diameter cylinder 105: Ball 94: Plunger 94c: Large-diameter shaft 94d: Small-diameter shaft 43: Fitting hole

[Procedure amendment]

[Submission date] February 28, 1995

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be amended] Claims

[Correction method] Change

[Correction content]

[Claims]

[Procedure Amendment 2]

[Document name to be amended] Statement

[Name of item to be corrected] 0002

[Correction method] Change

[Correction content]

[0002]

2. Description of the Related Art Japanese Patent Application Laid-Open No. 63-267195 discloses a punching device for punching a round hole, a square hole, an elliptical hole, or the like at a predetermined position in a wiring board, a flexible film, a metal foil, or the like. Are known. In this prior art, a punch unit having a punch and a die is opposed to an upper half and a lower half of a U-shaped support rod, respectively, so that the punch and the die face each other with a reference plane interposed therebetween. A plurality of punches having different shapes are provided in each of the punch units, and the movement of the work and the operation of the punch are controlled so that the punch is driven, so that the punch is driven. Holes of the same shape are punched one after another by each punch, and a large number of holes of various shapes are punched in a work such as a wiring board, a flexible film, and a metal foil as a whole.

[Procedure 3]

[Document name to be amended] Statement

[Name of item to be corrected] 0003

[Correction method] Change

[Correction content]

[0003]

Today, precision devices such as semiconductor chips are becoming more precise and smaller, and as a result, work pieces, hole intervals, and hole sizes are all smaller and more compact. It is in the present condition. However, since the punching device described above has a structure in which punches having different shapes are individually supported by punch units having different shapes, it is possible to improve the efficiency of punching holes of various shapes scattered on a work. Naturally, there is a limit, and it takes time to drill a large number of holes of the same shape, and there is also a limit to the use depending on the drilling pattern that differs depending on the type of work.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0004

[Correction method] Change

[Correction content]

The present invention has been made in view of the conventional circumstances, and the object thereof is to provide concentrated perforated holes of the same shape, concentrated perforated holes of different shapes, and one hole for each hole having a different diameter. An object of the present invention is to provide a highly-utilizable punching device in which a wide variety of punching such as basic drilling which is sequentially performed can be selected according to a drilling pattern of a work.

[Procedure Amendment 5]

[Document name to be amended] Statement

[Name of item to be corrected] 0005

[Correction method] Change

[Correction content]

[0005]

Means for Solving the Problems Technical means taken to achieve the above-mentioned object are as follows: A punching tool provided with interchangeable punches of arbitrary shape, and supporting the punching tool in close proximity on a plurality of rows and columns. Punch tool holder, a drive source that is individually connected to each punch tool to selectively drive the punch, a die that is replaceably provided on the reference surface facing the punch, and grips the work piece and moves along the reference surface X , A moving unit for moving in the Y direction, and a control unit for controlling the moving unit and the punching motion of a desired punch on the basis of required data to move the desired punch at a desired punching position. To do.

[Procedure correction 6]

[Document name to be amended] Statement

[Correction target item name] 0006

[Correction method] Change

[Correction content]

[0006]

According to the above technical means, the movement of the moving unit and the drive source for selectively driving each punch are controlled based on the punching position and the punch shape according to the required data of the control unit. Therefore, by the control of the control unit, the moving unit moves the work in the X direction and the Y direction so that the desired punching position is located immediately below the desired punch, and when the punch is located immediately below the desired punching position of the work. Drill a hole of the desired shape at the location. Since each punch is closely supported in multiple rows and columns and can be exchanged, it is possible to perform concentrated drilling of holes of the same shape, concentrated drilling of holes of different diameters, sequential drilling of holes of different shapes, etc. It is possible to perform the punching work of (1) according to the drilling pattern of the work based on the required data.

[Procedure Amendment 7]

[Document name to be amended] Statement

[Correction target item name] 0007

[Correction method] Change

[Correction content]

[0007]

Since the present invention is configured as described above, it is possible to select a punch to be driven from among a plurality of types of punches supported in a large number of rows and columns, so that the punching work most suitable for the punching pattern of the work is performed. Can be done efficiently in a short time. Moreover, since a large number of punches are supported close to each other in the vertical and horizontal rows to reduce the amount of movement of the work during the punching process, high-speed punching is possible, and the punching work can be significantly improved, and the pitch can be increased. Most suitable for drilling with small intervals.

Claims (3)

[Claims] 1. A perforator having exchangeable punches of arbitrary shape, a perforator holder for supporting the perforators close to each other on a plurality of rows and columns, and a punch which is separately communicated with each punch and selectively punches the punch. A driving source, a die which is provided on the reference surface so as to be exchangeable with the punch, a moving section which holds a workpiece and moves the workpiece in the X and Y directions along the reference surface, and the moving section based on required data. And a control unit for controlling the movement of a desired punch to drive the desired punch at a desired punching position. 2. The punch tool holder includes a fitting insertion hole in which a large diameter hole portion and a small diameter hole portion are concentrically continuous with each other, and a retainer, and the retainer includes a large diameter tubular portion and a small diameter tubular portion. The large-diameter tubular portion and the small-diameter tubular portion project inwardly and outwardly to support fine-diameter balls in a scattered and rotatably manner. The retainer is internally fitted so that it can be slidably contacted with the inner peripheral surface of the small diameter hole portion and the inner peripheral surface of the small diameter hole portion, and the punching tool has an outer appearance in which a plunger having a punch is continuously provided with a large diameter shaft portion and a small diameter shaft portion. The plunger has a large-diameter shaft part and a small-diameter shaft part slidably fitted into the large-diameter cylinder part and the small-diameter cylinder part of the retainer with the ball slightly elastically deformed. The punching device according to claim 1, wherein 3. The punching device according to claim 1, wherein the punch has a diameter, a long side length and a short side length of 100 μm or less.