JPH1015673A - Resonator for ultrasonic frequency vibration welding - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve quality feeling and reliability by suppressing diffusion of a base material. SOLUTION: A joining part 3 is formed on a base material 2 consisting of either die steel or high-speed steel, with a resistance layer 5 formed on the surface of this joining part 3. The resistance layer 5 is formed either by brazing a superalloy chip to the joining part 3 or by vapor-depositing a ceramic film by PVD. In the case of vapor deposition, a superalloy chip may be preliminarily brazed to the joining part 3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resonator used in a device for joining ultrasonically-operated members to be joined to each other.

[0002]

2. Description of the Related Art As shown in Japanese Patent Publication No. 54-13349, a member to be joined which is superposed between a resonator and a mounting table coupled to a vibrator for generating ultrasonic vibration is pressurized therebetween. 2. Description of the Related Art There is known an ultrasonic vibration bonding apparatus configured to hold and transmit ultrasonic vibration from a vibrator to a resonator to bond between overlapping surfaces of members to be bonded.

[0003]

The resonator used in such an ultrasonic vibration bonding apparatus is a die steel, a high-speed steel,
Although it is made of any one material such as cemented carbide, the base material of the resonator diffuses at the joining temperature,
It has also been pointed out that the wear resistance, oxidation resistance, welding resistance, etc. are insufficient.

Therefore, the present invention suppresses the diffusion of the base material and increases the wear resistance, oxidation resistance and welding resistance,
It is an object of the present invention to provide an ultrasonic vibration bonding resonator capable of improving quality and reliability.

[0005]

According to a first aspect of the present invention, there is provided a resonator for ultrasonic vibration joining, wherein a joining action portion is formed on a base material made of one of a die steel and a high-speed steel, and the surface of the joining action portion is resistant. It is characterized in that a layer is formed. According to the first aspect of the present invention, the resistance layer on the surface of the joining portion can increase the diffusion resistance temperature of the base material while making use of the strength and toughness of the base material. Quality, oxidation resistance, welding resistance, etc., and the quality and reliability can be improved.

[0006]

FIG. 1 shows a first embodiment, in which an ultrasonic horn 1 constituting a resonator is formed in a rod shape using either a die steel or a high-speed steel as a base material 2 and is provided at both ends thereof. An external booster is coaxially connected, and both boosters are mounted on a holder of an ultrasonic vibration bonding apparatus (not shown). The ultrasonic horn 1 is a piezoelectric element or a magnetostrictive device that generates longitudinal ultrasonic waves of a predetermined frequency by using electric power supplied from an ultrasonic generator (not shown) to one booster and converts the output electric energy into mechanical energy. A vibrator, which is an electroacoustic transducer or an electric vibration transducer composed of elements or the like, is coaxially coupled, and a maximum vibration amplitude point f1 to a maximum vibration amplitude point f5 that resonate with ultrasonic vibration transmitted from the vibrator via a booster. And has a length of one wavelength up to and a bonding action portion 3 protruding from the outer peripheral surface at the position of the central maximum vibration amplitude point f3. A cemented carbide tip 5 has a brazed resistant layer formed on the joint 3.

In the case of this embodiment, silver, copper, nickel, and other brazing materials are interposed between the cemented carbide tip 5 formed substantially in the same shape as the joining section 3 and the joining section 3 on the base material 2 side. 4 and a flux (not shown) are interposed, and the cemented carbide tip 5 is positioned with respect to the joining action portion 3 using a jig (not shown),
After this is placed inside a vacuum furnace or an inert gas atmosphere furnace (not shown), the brazing material 4 is heated and melted, and the cemented carbide tip 5 is attached to the joining section 3 to improve the strength of the base material 2. The abrasion resistance, oxidation resistance, welding resistance, and the like of the bonding portion 3 can be improved while utilizing the toughness. Further, by performing the brazing in a vacuum furnace or an inert gas atmosphere furnace, the components constituting the ultrasonic horn 1 such as the base material 2, the cemented carbide chip 5, the brazing material 4, etc. are prevented from being oxidized. Can be used, and the brazing material 4
Since no bubbles are generated in the cemented carbide alloy chip 5, the bonding strength between the cemented carbide tip 5 and the joining action part 3 can be improved. The same effect can be obtained by brazing an artificial diamond tip instead of the cemented carbide tip 5 in the same manner as described above.

FIG. 2 shows a second embodiment. An ultrasonic horn 1A is formed in a rod shape using either a die steel or a high-speed steel as a base material 2, and a booster (not shown) is coaxially connected to both ends thereof. Both boosters are mounted on a holder of an ultrasonic vibration bonding apparatus (not shown). The ultrasonic horn 1A is configured such that a vibrator (not shown) is coaxially coupled to one of the boosters, and from the maximum vibration amplitude point f1 to the maximum vibration amplitude point f5 that resonates with the ultrasonic vibration transmitted from the vibrator via the booster. The joining action portion 3 having a length of one wavelength and protruding from the outer peripheral surface at the position of the central maximum vibration amplitude point f3.
It has. TiN is applied to the bonding action portion and its surroundings by PVD (physical vapor deposition; ion plating).
(Titanium nitride, TiC (titanium carbide), TiC-TiN
(Titanium carbonitride), Al ₂ O ₃ (alumina), (Al-T
i) A resistant layer is formed by coating a ceramic film 5A formed by depositing any one of N (alumina titanium nitride) and the like to a thickness of about 1 to 10 μm.

In the case of this embodiment, after the base material 2 having the joining action part 3 is quenched so as to have a Rockwell hardness of 60 or more, it is put into a PVD apparatus together with a vapor deposition material, and the PVD apparatus is operated to operate the vacuum. The deposited material is ionized and reacted in an atmosphere. The deposited material is vapor-deposited at a temperature of about 500 ° C. or less on and around the bonding action portion 3 of the base material 2. With a certain resistant layer, the abrasion resistance, oxidation resistance, welding resistance, etc. can be improved.

According to an experiment conducted by the applicant, when the base material 2 is either a die steel or a high-speed steel and the deposited material is TiC, the wear resistance is high. When the base material 2 was either a high-speed steel or a cemented carbide, and the deposition material was Al ₂ O ₃ , the high wear at high temperatures was high. Base material 2 is die steel (SKD11),
When one of the high-speed steels and the deposition material was TiN, the heat and wear resistance was high even when the heat rose. When the base material 2 is either a die steel (SKD11) or a high-speed steel and the deposited material is TiC-TiN, it has both the wear resistance by TiC and the heat wear resistance by TiN. The base material 2 is either high-speed steel or cemented carbide, and the deposition material is (Al
In the case of -Ti) N, the wear resistance at high temperatures was high.
Further, a cemented carbide chip 5 is brazed to the joining action portion 3 of the base material 2 as in the first embodiment, and one of the above-described vapor deposition materials is deposited on the surface of the cemented carbide chip 5 by PVD. It was confirmed that the same effect was obtained.

FIG. 3 shows a third embodiment. An ultrasonic horn 1B is formed in a rod shape using either a die steel or a high-speed steel as a base material 2, and a booster (not shown) is coaxially connected to one end of the ultrasonic horn 1B. It is a single support type in which the booster is mounted on a holder of an ultrasonic vibration bonding device (not shown). The ultrasonic horn 1B is configured such that a vibrator (not shown) is coaxially coupled to one booster, and from the maximum vibration amplitude point f1 to the maximum vibration amplitude point f3 which resonates with the ultrasonic vibration transmitted from the vibrator via the booster. A cemented carbide tip having the same length as that of the first embodiment, having a joining action portion 3 protruding from the outer peripheral surface at the position of the maximum vibration amplitude point f3. Reference numeral 5 denotes a resistance layer formed by brazing with the brazing material 4, which has the same effect as in the first embodiment.

It should be noted that the ultrasonic horn is not limited to the form used for joining metal parts in each embodiment, and the joining action portion is determined by the physical properties such as the material, area, and thickness of the members to be joined. From the matching, for example, 5 /
There are various forms such as two wavelength length, square rod shaped upper and lower joining action parts, or used to join synthetic resin parts together. The shape can be optimized for the physical properties of the member.

[Brief description of the drawings]

FIG. 1 is a side view showing a first embodiment.

FIG. 2 is a side view showing the second embodiment with a part cut away.

FIG. 3 is a side view showing a third embodiment.

[Explanation of symbols]

 1,1A, 1B Ultrasonic horn 2,2A Base material 3 Joining part 4 Brazing material 5,5A Resistance layer.

Claims (1)

[Claims] 1. A resonator for ultrasonic vibration bonding, wherein a joining action portion is formed on a base material made of one of die steel and high-speed steel, and a resistance layer is formed on a surface of the joining action portion.