JPH10150049A - Fixing structure of heat conductive plate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fixing structure of heat conductive plate capable of increasing heat conduction from the heating wall to the heat conductive plate and reducing heating time and providing uniform temperature distribution to a material heated. SOLUTION: An uniformly heated plate 2 is horizontally mounted, toward a heating chamber 4, on a heating wall 1 constructed vertically. The fixing of the end of the uniformly heated plate 2 is made by a fixture 3 of L-shaped metal in section and a bolt 5. The contact faces 6 of the fixing metal 3 and the heating wall 1 and the contact faces 6 of the fixing metal 3 and the uniformly heated plate 2 are corrugated, having projections and recessed. Therefore there are fitted to each other. As the contact face 6 between the fixture metal 3 and the heating wall 1 and the uniformly heated plate 2 are corrugated, and in contact with each other through wide contact area, the heat conduction efficiency is good and the heat is satisfactorily conducted from the heating wall 1 to the uniformly heated plate 2 through the fixture metal 3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an LCD (Liquor).
The present invention relates to a structure for mounting a heat transfer plate used in a heating chamber of an apparatus for manufacturing an id crystal display, a semiconductor device, and various other manufacturing apparatuses. In particular, a heat transfer plate for improving heat transfer from a heating wall to a heat transfer plate. Mounting structure.

[0002]

2. Description of the Related Art In an apparatus for manufacturing LCDs, semiconductor devices, and the like,
In order to heat a plurality of works at the same time, the heating chamber is partitioned by a soaking plate (heat transfer plate), and the work is placed on the soaking plate for heating.

FIG. 3 shows an example of a conventional structure for mounting a heat equalizing plate, in which a heating wall 11 forming an inner wall surface of a heating chamber is formed.
The heat equalizing plate 12 is mounted on the mounting plate 13 using a mounting bracket 13 having an L-shaped cross section. The work set on the soaking plate 12
It is surrounded by the heating wall 11 and the soaking plate 12, and is heated from the surroundings.

[0004]

However, in the above structure, the heating wall 11 and the heat equalizing plate 12 (and the mounting bracket 1) are not provided.
The heat transfer in the contact portion (attachment portion) with 3) was not sufficient, the heat loss to the outside of the heating chamber was large, and the heat transfer to the soaking plate 12 was insufficient. For this reason, a sufficient amount of heat is not supplied to the work from the heat equalizing plate 12, so that it takes a long time to heat the work, and furthermore, the temperature distribution of the work varies, which has a problem of adversely affecting the film forming process of the work. Was.

The present invention has been made in view of the above-mentioned problems of the prior art, and can increase the amount of heat transferred to a heat transfer plate, shorten the heating time, and make the temperature distribution of an object to be heated uniform. It is an object of the present invention to provide a heat transfer plate mounting structure that can achieve the above.

[0006]

In order to achieve the above object, the present invention is directed to a mounting structure of a heat transfer plate mounted on a heating wall and transmitting the heat to a heating chamber side. The contact surface between the wall side and the heat transfer plate side is formed in an uneven shape.

In the above description, the uneven contact surface is intended to increase the contact area, and the surface on the side of the heating wall and the surface on the side of the heat transfer plate have a corresponding shape and are fitted to each other. Be close. As the uneven contact surface,
For example, a groove-shaped recess having a rectangular cross section or a wavy shape,
A large number may be formed on the contact surface in parallel or in a lattice. Further, the above-mentioned heating wall includes a wall-shaped member having a built-in heater, a heater itself, or a wall-shaped member which is externally heated by a heater or the like.

Since the contact surface between the heating wall side and the heat transfer plate side is not flat but uneven, the contact area between them is large, and heat is efficiently transmitted from the heating wall to the heat transfer plate.

Further, the present invention is a mounting structure of a heat transfer plate mounted on a heating wall and transmitting the heat to the heating chamber side, wherein the heat transfer plate is mounted on the heating wall using a mounting bracket. The contact surface between the mounting bracket, the heating wall and the heat transfer plate is formed in an uneven shape.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

FIG. 2 shows the overall configuration of a heating chamber to which the heat transfer plate mounting structure according to the present invention is applied. In the figure,
Reference numeral 1 denotes a heating wall having a built-in heater, and two heating walls 1
1 are opposed to each other. Between the heating walls 1 and 1, a soaking plate (heat transfer plate) 2 is provided horizontally in a plurality of stages so as to heat a plurality of works (objects to be heated) at a time.
The heating chamber 4 is vertically divided into a plurality of sections by the heat equalizing plate 2 and divided.

FIG. 1 is an enlarged sectional view of a portion A in FIG. 2, which is a portion where the heating wall 1 and the heat equalizing plate 2 are attached. Soaking plate 2
As shown in the figure, the ends of the mounting brackets 3 and 3 have an L-shaped cross section.
To the heating wall 1. Reference numeral 5 denotes a bolt for fixing the mounting bracket 3 to the heating wall 1 and the heat equalizing plate 2. Contact surface 6 between mounting bracket 3 and heating wall 1 and mounting bracket 3 and soaking plate 2
The contact surfaces 6 are provided with corrugations of a rectangular cross-section alternately in a corrugated shape, so that the contact surfaces 6 are closely fitted to each other.

As described above, since the contact surface 6 between the mounting bracket 3 and the heating wall 1 and the heat equalizing plate 2 is in uneven contact with a large area, the heat transfer efficiency is good, and the heat from the heating wall 1 is reduced. Good transmission to the heat equalizing plate 2 through the mounting bracket 3. Therefore, the amount of heat supplied to the work set on the heat equalizing plate 2 increases, and the heating time is shortened. Furthermore, the soaking plate 2 can be soaked,
The temperature distribution of the work becomes uniform. Also, since the heat equalizing plate 2 is fixedly mounted on the uneven contact surface 6 in close contact, the fixing position of the heat equalizing plate 2 is determined, and play is eliminated.

[0014]

As is apparent from the above description, according to the present invention, since the contact surface between the heating wall side and the heat transfer plate side is formed in an uneven shape, the heat transfer from the heating wall to the heat transfer plate can be efficiently performed. Heat is transmitted, so that heat loss can be reduced and the heat transfer plate is effectively and uniformly heated. Therefore, the amount of heat supplied to the object to be heated (work) increases, and the heating time can be shortened.
Further, the temperature distribution of the object to be heated is made uniform, and the quality thereof can be improved.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing one embodiment of a heat transfer plate mounting structure according to the present invention.

FIG. 2 is a schematic perspective view showing the entire configuration of a heating chamber to which the heat transfer plate mounting structure of FIG. 1 is applied.

FIG. 3 is a cross-sectional view showing a conventional heat transfer plate mounting structure.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Heating wall 2 Heat equalizing plate (heat transfer plate) 3 Mounting bracket 4 Heating chamber 5 Bolt 6 Contact surface 11 Heating wall 12 Heat equalizing plate 13 Mounting bracket

Claims (2)

[Claims] 1. A heat transfer plate attached to a heating wall and transmitting the heat to a heating chamber, wherein a contact surface between the heating wall and the heat transfer plate is formed in an uneven shape. Heat transfer plate mounting structure. 2. A heat transfer plate attached to a heating wall and transmitting the heat to a heating chamber side, wherein the heat transfer plate is attached to the heating wall by using an attachment, and the attachment, the heating wall and the heat An attachment structure for a heat transfer plate, wherein a contact surface with the transfer plate is formed in an uneven shape.