CN108550549A - A kind of heating plate pedestal having the type of cooling - Google Patents
A kind of heating plate pedestal having the type of cooling Download PDFInfo
- Publication number
- CN108550549A CN108550549A CN201810477329.5A CN201810477329A CN108550549A CN 108550549 A CN108550549 A CN 108550549A CN 201810477329 A CN201810477329 A CN 201810477329A CN 108550549 A CN108550549 A CN 108550549A
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- CN
- China
- Prior art keywords
- cooling tube
- heater
- heating plate
- cooling
- slot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
- C23C16/463—Cooling of the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Control Of Resistance Heating (AREA)
Abstract
The invention discloses a kind of heating plate pedestals having the type of cooling, including base plate, base plate is clamped by heating plate and coldplate fixation, clamping having heaters and heater protecting set in heater insertion groove, heating plate offers heat sensor slot on the inside of heating space groove, it is connected with heat sensor in heat sensor slot, it is connected with cooling tube and cooling tube protective case in cooling tube indentation slot, the circular hole on heating space groove face coldplate in heating plate, the present invention utilizes cooling tube, water inlet end and water outlet, facilitate and enters cooling circulation liquid in cooling tube, and then improve the cooling radiating efficiency of this device, this device can shorten the cooling required technique stand-by period, improve process recovery ratio, and then the efficient operation of the person of being conveniently operated, it is heated using the multiply heater strip of heater, to ensure the efficiency of heating surface of this device.
Description
Technical field
The present invention relates to semiconductor or liquid crystal display panel manufacturing equipment pedestal technical fields, more particularly to one kind has cold
But the heating plate pedestal of mode.
Background technology
The technique that film is deposited or etched on the glass substrate is usually in the semiconductor technology comprising vacuum chamber
It is carried out in equipment.Therefore this technique needs heating plate pedestal to carry out heating operation, semiconductor technology dress during processing
Standby can be the chamber for having support glass substrate and being furnished with by chemical vapor deposition as an example, form the device system of film
Weighed justice.
Heating plate pedestal in industrial processes production using than wide, in order to the indoor device of chamber or equipment into
Row heating, traditional heating plate pedestal only has the function of heating, therefore substrate has a single function, some chambers indoor heating plates
Pedestal after the heating cannot be quickly be restored to normal temperature, be also inconvenient to radiate, will result in the heating plate pedestal moment is in
In the environment of high temperature, seriously affect the service life of heating plate pedestal, in consideration of it, we provide it is a kind of have the type of cooling plus
Hot plate pedestal.
Invention content
To solve the above-mentioned problems, the present invention provides a kind of heating plate pedestal having the type of cooling.
A kind of heating plate pedestal having the type of cooling in the present invention, including base plate, the base plate is by heating plate
It is clamped with coldplate fixation, having heaters insertion groove, the centre of the heating plate is opened up in the one side wall of the heating plate
Heating space groove is offered, wherein heater insertion groove is connected to heating space groove, is connected in the heater insertion groove
Heater and heater protecting set, wherein heater protecting set are wrapped in heater in heater insertion groove, the heating
Plate offers heat sensor slot on the inside of heating space groove, heat sensor is connected in the heat sensor slot, wherein hot
One end of sensor is connected with heat sensor guide, and one end of the heat sensor guide is connected with heat sensor wire；
Cooling tube indentation slot is offered in the one side wall of the coldplate, the intermediate fixation of the coldplate offers circular hole,
Middle cooling tube indentation slot is connected to circular hole, cooling tube and cooling tube protective case is connected in the cooling tube indentation slot, wherein cooling
Protection of pipe set is wrapped in cooling tube in cooling tube indentation slot, and the lateral wall edge of the circular hole is fixedly connected with vertical first
Supporting rack and the second supporting rack, wherein the first supporting rack and the second supporting rack are pressed into the one side wall of slot far from cooling tube, it is described
The circular hole on heating space groove face coldplate in heating plate, wherein heat sensor wire is interspersed in circular hole, described
Heat sensor wire is fixed in one end of first supporting rack and the second supporting rack by nut.
In said program, the cooling tube on the heater insertion groove and coldplate in the heating plate is pressed into groove shape phase
Together, and the width of heater insertion groove is more than the width that cooling tube is pressed into slot.
In said program, shape, the size all same of first supporting rack and the second supporting rack, wherein the first supporting rack
It is fixedly welded on coldplate with the second supporting rack.
In said program, the heater is divided into tri- strands of heater strips of 90-90a, 91-91a and 92-92a, wherein 90-90a,
Tri- strands of heater strips of 91-91a and 92-92a are plugged in heater insertion groove, and the end of three strands of heater strips is each attached to heating
In the groove of space.
In said program, the shape size all same of the heating plate and coldplate, in the heating plate and coldplate
Equipped with multiple bolts hole, and the two is bolted clamping, and wherein bolt thread is interspersed in bolt hole, the circular hole and plus
Shape, the size all same of heat space groove are connected with fixed block in the circular hole.
In said program, the cooling tube is one complete pipeline, and the wherein water inlet end of cooling tube and cooling tube goes out
Water end (W.E.) connects outer water pipe in circular hole, and wherein outer water pipe is plugged between the first supporting rack and the second supporting rack.
In said program, the heater protecting set and cooling tube protective case form brazing surface in weld.
The advantages of the present invention are：Structure of the invention is novel in design, and simple, convenient people use,
Using cooling tube, water inlet end and water outlet, facilitate and enter cooling circulation liquid in cooling tube, and then improves the cooling heat dissipation of this device
Efficiency, therefore this heating plate pedestal can not only heat the service life that can also be radiated, and then ensure this substrate, this device energy
Shorten the cooling required technique stand-by period, improves process recovery ratio, and then the efficient operation of the person of being conveniently operated, utilize heater
Multiply heater strip heating, to ensure the efficiency of heating surface of this device, this base plate be arranged in order heater, heater protecting set,
Brazing surface, cooling tube protective case and cooling tube, can be such that cooling efficiency maximizes, to facilitate the use of this base plate.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention without having to pay creative labor, may be used also for those of ordinary skill in the art
With obtain other attached drawings according to these attached drawings.
Fig. 1 is the broken section structural schematic diagram of base plate of the present invention.
Fig. 2 is the side, sectional structural schematic diagram of base plate of the present invention.
Fig. 3 is the present invention looks up structural representation of heating plate of the present invention.
Fig. 4 is the overlooking structure diagram of coldplate of the present invention.
In figure：1- base plates, 2- heating plates, 20- heat sensor slots, 21- heat sensor guides, 22- heater protecting sets,
23- heating space grooves, 24- heater insertion grooves, 3- coldplates, 30- cooling tube protective cases, 31- fixed blocks, 32- cooling tubes,
320- water inlet ends, the water outlets 320a-, 33- cooling tubes are pressed into slot, 34- circular holes, the first supporting racks of 4-, the second supporting racks of 5-, 50-
Nut, 6- brazing surfaces, 7- heat sensors, 8- heat sensor wires, 9- heaters, 10- bolts hole.
Specific implementation mode
With reference to the accompanying drawings and examples, the specific implementation mode of the present invention is further described.Following embodiment is only
For clearly illustrating technical scheme of the present invention, and not intended to limit the protection scope of the present invention.
As shown in Figs 1-4, a kind of heating plate pedestal having the type of cooling, including base plate 1, base plate 1 is by heating plate 2
It is clamped with the fixation of coldplate 3, the shape size all same of heating plate 2 and coldplate 3, is all provided on heating plate 2 and coldplate 3
Have multiple bolts hole 10, and the two is bolted clamping, wherein bolt thread is interspersed in bolt hole 10, circular hole 34 and plus
Shape, the size all same of heat space groove 23 are connected with fixed block 31 in circular hole 34, using bolt hole 10, facilitate heating plate 2
Welding can be fixed between coldplate 3, dismantled.
Having heaters insertion groove 24 is opened up in the one side wall of heating plate 2, the centre of heating plate 2 offers heating space groove
23, wherein heater insertion groove 24 is connected to heating space groove 23, and having heaters 9 and heater are clamped in heater insertion groove 24
Protective case 22, wherein heater protecting cover 22 being wrapped in heater insertion groove 24 heater 9, and heater 9 divides for 90-
Tri- strands of heater strips of 90a, 91-91a and 92-92a, wherein tri- strands of heater strips of 90-90a, 91-91a and 92-92a are plugged on heating
In device insertion groove 24, and the end of three strands of heater strips is each attached in heating space groove 23, and structure of the invention is novel in design, behaviour
Work is simple, is convenient for people to use, and is heated using the multiply heater strip of heater 9, to ensure the efficiency of heating surface of this device.
Heating plate 2 offers heat sensor slot 20 in the inside of heating space groove 23, is connected in heat sensor slot 20
One end of heat sensor 7, wherein heat sensor 7 is connected with heat sensor guide 21, and one end of heat sensor guide 21 is connected with
Heat sensor wire 8, heat sensor 7 are electrically connected external power supply and display screen, and then when temperature is raised, operator can
To observe the data on display screen, then, next step operation is then carried out.
Cooling tube indentation slot 33, the heater insertion groove 24 in heating plate 2 and cooling are offered in the one side wall of coldplate 3
Cooling tube indentation 33 shape of slot on plate 3 is identical, and the width of heater insertion groove 24 is more than the width of cooling tube indentation slot 33,
Intermediate fix of coldplate 3 offers circular hole 34, and wherein cooling tube indentation slot 33 is connected to circular hole 34, and cooling tube, which is pressed into slot 33, to be blocked
It is connected to cooling tube 32 and cooling tube protective case 30, cooling tube 32 is wrapped in cooling tube and is pressed into slot 33 by wherein cooling tube protective case 30
Interior, cooling tube 32 is one complete pipeline, and the wherein water inlet end 320 of cooling tube 32 and the water outlet 320a of cooling tube 32 exists
Outer water pipe is connected in circular hole 34, wherein outer water pipe is plugged between the first supporting rack 4 and the second supporting rack 5, heater protecting set
22 and cooling tube protective case 30 form brazing surface 6 in weld, utilize cooling tube 32, water inlet end 320 and water outlet 320a, it is convenient
Enter cooling circulation liquid in cooling tube 32, and then improve the cooling radiating efficiency of this device, therefore this heating plate pedestal not only may be used
It can also be radiated with heating, and then ensure the service life of this substrate, this device can shorten the cooling required technique stand-by period,
Improve process recovery ratio, and then the efficient operation of the person of being conveniently operated.
The lateral wall edge of circular hole 34 is fixedly connected with vertical the first supporting rack 4 and the second supporting rack 5, wherein first
Support 4 and the second supporting rack 5 are pressed into the one side wall of slot 33,23 face of heating space groove in heating plate 2 far from cooling tube
Circular hole 34 on coldplate 3, wherein heat sensor wire 8 are interspersed in circular hole 34, the first supporting rack 4 and the second supporting rack 5
One end heat sensor wire 8 is fixed by nut 50, shape, the size of the first supporting rack 4 and the second supporting rack 5 are homogeneous
Together, wherein the first supporting rack 4 and the second supporting rack 5 are fixedly welded on coldplate 3, this base plate 1 be arranged in order heater 9,
Heater protecting set 22, brazing surface 6, cooling tube protective case 30 and cooling tube 32, can be such that cooling efficiency maximizes, to facilitate this
The use of base plate 1.
The operation principle of the present invention：This device when in use, base plate 1 is placed on required position, is then opened
Dynamic heater 9, when tri- strands of heater strips of 90-90a, 91-91a and 92-92a on heater 9 can be heated uniformly simultaneously, with guarantee
This equipment to be heated is evenly heated, and then ensures the efficiency of heating surface of this device, after heater 9 is heated to certain temperature,
Heat sensor 7 senses that temperature data constantly rises, and people close heater 9, and operator can be cold being passed through in outer water pipe
But liquid, then coolant liquid flow through in cooling tube 32, the coolant liquid that the heat on heater 9 is cooled in pipe 32 is taken away at this time,
Therefore this device can efficiently radiate, and ensure that this base plate 1 can quickly be restored to room temperature, while reducing this and partly leading
Time needed for body technology processing.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
With within principle, any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention god.
Claims (7)
1. a kind of heating plate pedestal having the type of cooling, including base plate（1）, it is characterised in that：The base plate（1）By adding
Hot plate（2）And coldplate（3）Fixation is clamped, the heating plate（2）One side wall on open up having heaters insertion groove（24）,
The heating plate（2）Centre offer heating space groove（23）, wherein heater insertion groove（24）It is recessed to be connected to heating space
Slot（23）, the heater insertion groove（24）Interior clamping having heaters（9）With heater protecting set（22）, wherein heater protecting
Set（22）Heater（9）Be wrapped in heater insertion groove（24）It is interior, the heating plate（2）In heating space groove（23）'s
Inside offers heat sensor slot（20）, the heat sensor slot（20）Inside it is connected with heat sensor（7）, wherein heat sensor
（7）One end be connected with heat sensor guide（21）, the heat sensor guide（21）One end be connected with heat sensor metal
Silk（8）；
The coldplate（3）One side wall on offer cooling tube indentation slot（33）, the coldplate（3）Intermediate fixation open up
There is circular hole（34）, wherein cooling tube be pressed into slot（33）It is connected to circular hole（34）, the cooling tube indentation slot（33）Inside it is connected with cooling
Pipe（32）With cooling tube protective case（30）, wherein cooling tube protective case（30）Cooling tube（32）It is wrapped in cooling tube indentation slot
（33）It is interior, the circular hole（34）Lateral wall edge be fixedly connected with the first vertical supporting rack（4）With the second supporting rack（5）,
Wherein the first supporting rack（4）With the second supporting rack（5）Slot is pressed into far from cooling tube（33）One side wall, the heating plate（2）
On heating space groove（23）Face coldplate（3）On circular hole（34）, wherein heat sensor wire（8）It is interspersed in circular hole
（34）It is interior, first supporting rack（4）With the second supporting rack（5）One end pass through nut（50）Fixed heat sensor wire
（8）.
2. a kind of heating plate pedestal having the type of cooling according to claim 1, which is characterized in that the heating plate
（2）On heater insertion groove（24）And coldplate（3）On cooling tube be pressed into slot（33）Shape is identical, and heater insertion groove
（24）Width be more than cooling tube be pressed into slot（33）Width.
3. a kind of heating plate pedestal having the type of cooling according to claim 1, which is characterized in that first support
Frame（4）With the second supporting rack（5）Shape, size all same, wherein the first supporting rack（4）With the second supporting rack（5）Fixed weldering
It is connected on coldplate（3）On.
4. a kind of heating plate pedestal having the type of cooling according to claim 1, which is characterized in that the heater
（9）It is divided into（90-90a）、（91-91a）With（92-92a）Three strands of heater strips, wherein（90-90a）、（91-91a）With（92-92a）
Three strands of heater strips are plugged on heater insertion groove（24）It is interior, and the end of three strands of heater strips is each attached to heating space groove
（23）It is interior.
5. a kind of heating plate pedestal having the type of cooling according to claim 1, which is characterized in that the heating plate
（2）And coldplate（3）Shape size all same, the heating plate（2）And coldplate（3）On be equipped with multiple bolts hole
（10）, and the two is bolted clamping, wherein bolt thread is interspersed in bolt hole（10）It is interior, the circular hole（34）And heating
Space groove（23）Shape, size all same, the circular hole（34）Inside it is connected with fixed block（31）.
6. a kind of heating plate pedestal having the type of cooling according to claim 1, which is characterized in that the cooling tube
（32）For one complete pipeline, wherein cooling tube（32）Water inlet end（320）And cooling tube（32）Water outlet（320a）
In circular hole（34）Interior connection outer water pipe, wherein outer water pipe are plugged on the first supporting rack（4）With the second supporting rack（5）Between.
7. a kind of heating plate pedestal having the type of cooling according to claim 1, which is characterized in that the heater is protected
Sheath（22）With cooling tube protective case（30）Brazing surface is formed in weld（6）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810477329.5A CN108550549A (en) | 2018-05-18 | 2018-05-18 | A kind of heating plate pedestal having the type of cooling |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810477329.5A CN108550549A (en) | 2018-05-18 | 2018-05-18 | A kind of heating plate pedestal having the type of cooling |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108550549A true CN108550549A (en) | 2018-09-18 |
Family
ID=63495140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810477329.5A Withdrawn CN108550549A (en) | 2018-05-18 | 2018-05-18 | A kind of heating plate pedestal having the type of cooling |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108550549A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112420561A (en) * | 2020-11-11 | 2021-02-26 | 宁波江丰电子材料股份有限公司 | Semiconductor cooling and heating composite device and preparation method and application thereof |
-
2018
- 2018-05-18 CN CN201810477329.5A patent/CN108550549A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112420561A (en) * | 2020-11-11 | 2021-02-26 | 宁波江丰电子材料股份有限公司 | Semiconductor cooling and heating composite device and preparation method and application thereof |
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| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20180918 |
|
| WW01 | Invention patent application withdrawn after publication |