JPH10145177A - Piezoelectric vibrator and manufacture of piezoelectric vibrator - Google Patents

Piezoelectric vibrator and manufacture of piezoelectric vibrator

Info

Publication number
JPH10145177A
JPH10145177A JP31018296A JP31018296A JPH10145177A JP H10145177 A JPH10145177 A JP H10145177A JP 31018296 A JP31018296 A JP 31018296A JP 31018296 A JP31018296 A JP 31018296A JP H10145177 A JPH10145177 A JP H10145177A
Authority
JP
Japan
Prior art keywords
solder
opening
cap
periphery
piezoelectric vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31018296A
Other languages
Japanese (ja)
Inventor
Takamasa Tanaka
隆昌 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miyota KK
Miyota Co Ltd
Original Assignee
Miyota KK
Miyota Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miyota KK, Miyota Co Ltd filed Critical Miyota KK
Priority to JP31018296A priority Critical patent/JPH10145177A/en
Publication of JPH10145177A publication Critical patent/JPH10145177A/en
Pending legal-status Critical Current

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Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain the surface mount type piezoelectric vibrator in which no gas is intruded in the package at sealing. SOLUTION: A piezoelectric vibration chip 1 is contained in a package 2 with a bottom, whose one side is open, and a cap is fitted to a metabolized layer 7 provided to a circumferential ridge 2a at an opening via a solder 8. In the piezoelectric vibrator of above, an outer circumference of the metabolized layer 7 is smaller than the outer circumference of the circumferential ridge 2a of the opening, an inner circumference of the metalized layer 7 is equal to or larger than the inner circumference of the circumferential ridge 2a of the opening, an outer circumference of a cap 9 is smaller than the outer circumference of the metalized layer 7, and most parts of the solder 8 are soldered to parts at the outside of the outer circumferential part of the cap 9 and the outer circumference of the cap of the metalized layer 7.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は圧電振動子および圧
電振動子の製造方法に関するものである。
The present invention relates to a piezoelectric vibrator and a method for manufacturing a piezoelectric vibrator.

【0002】[0002]

【従来の技術】図1は従来技術による表面実装型圧電振
動子の分解斜視図である。主な構成部品としては、圧電
振動片1、圧電振動片1を収納するための凹部2bを有
する有底保持器2、有底保持器2の開口部を塞ぐための
金属キャップ3、有底保持器2と金属キャップ3を接合
するためのハンダ4である。図2は従来技術による圧電
振動子の長手方向中央部の断面図である。有底保持器2
はセラミックスで形成され、有底保持器2の開口部の周
縁部2aには全面にメタライズ層が形成されており、ハ
ンダ4により金属キャップ3を接着封止している。接着
封止は圧電振動子の電気的特性を上げるため通常真空中
で行われる。
2. Description of the Related Art FIG. 1 is an exploded perspective view of a conventional surface mount type piezoelectric vibrator. The main components are a piezoelectric vibrating reed 1, a bottomed cage 2 having a recess 2 b for accommodating the piezoelectric vibrating reed 1, a metal cap 3 for closing an opening of the bottomed cage 2, a bottomed holding A solder 4 for joining the container 2 and the metal cap 3. FIG. 2 is a cross-sectional view of a central portion in the longitudinal direction of a conventional piezoelectric vibrator. Bottomed cage 2
Is formed of ceramics, a metallized layer is formed on the entire surface of a peripheral edge 2 a of the opening of the bottomed cage 2, and the metal cap 3 is bonded and sealed with solder 4. Adhesive sealing is usually performed in a vacuum to improve the electrical characteristics of the piezoelectric vibrator.

【0003】[0003]

【発明が解決しようとする課題】開口部周縁部2aの全
面にメタライズ層6があり、メタライズ層6とハンダ4
の巾が同じであるため接着封止の際、ハンダ4が溶けた
ときに発生するガスが真空にされた保持器内に入り、保
持器内の圧力を上昇させるとともに、圧電振動子表面に
付着し、圧電振動子の電気的特性(CI値やエージング
特性等)を劣化させる。
The metallization layer 6 is provided on the entire surface of the opening peripheral edge 2a.
During bonding and sealing, the gas generated when the solder 4 is melted enters the evacuated cage, increases the pressure inside the cage and adheres to the surface of the piezoelectric vibrator. This degrades the electrical characteristics (CI value, aging characteristics, etc.) of the piezoelectric vibrator.

【0004】有底保持器2と金属キャップ3を密着させ
るために加圧すると、ハンダ4が外周よりはみ出し外形
が変わる。また、有底保持器2内部にもはみ出し、有底
保持器2に形成されたパターン(図示せず)や導電接着剤
5等と接触しショートする可能性がある。
When pressure is applied to bring the bottomed cage 2 and the metal cap 3 into close contact with each other, the solder 4 protrudes from the outer periphery and changes its outer shape. In addition, there is a possibility that the resin may protrude into the inside of the bottomed cage 2 and come into contact with a pattern (not shown) formed on the bottomed cage 2, the conductive adhesive 5, or the like to cause a short circuit.

【0005】外周へのはみ出しを防ぐために、金属キャ
ップ3を開口部周縁部2aの外周より小さくすると、金
属キャップ3の位置決めが困難になり、金属キャップ3
の位置ずれと、それに伴う封止部でのリークが発生し易
い。本発明はこれらの課題を解決する圧電振動子の構造
と製造方法を提供することを目的としている。
If the metal cap 3 is made smaller than the outer periphery of the opening peripheral edge 2a in order to prevent the metal cap 3 from protruding to the outer periphery, it becomes difficult to position the metal cap 3 and the metal cap 3
And the leak at the sealing portion is likely to occur. An object of the present invention is to provide a structure and a manufacturing method of a piezoelectric vibrator that solve these problems.

【0006】[0006]

【課題を解決するための手段】一方が開放された有底保
持器に圧電振動片を収納し、開口部周縁部に設けたメタ
ライズ層にハンダを介してキャップ(好ましくは金属製
であるが、セラミックスに封止部にメタライズ層を設け
たものでも構わない。以下金属キャップという)を取り
付ける圧電振動子において、前記メタライズ層外周は開
口部周縁部の外周より小さく且つメタライズ層内周は開
口部周縁部の内周と等しいか大きな内周をもち、金属キ
ャップの外周は前記メタライズ層の外周より小さく、ハ
ンダは金属キャップの外周部とメタライズ層の金属キャ
ップ外周より外側の部分に付いている構造とする。
Means for Solving the Problems A piezoelectric vibrating reed is housed in a bottomed cage with one end opened, and a cap (preferably made of metal, preferably made of metal, is placed on a metallized layer provided on the periphery of the opening via solder. In a piezoelectric vibrator in which a metallized layer is provided on a sealing portion of a ceramic, a metal cap may be provided. Hereinafter, the metallized layer has an outer periphery smaller than an outer periphery of the opening peripheral portion and an inner periphery of the metallized layer has an opening peripheral portion. Having an inner circumference equal to or larger than the inner circumference of the portion, the outer circumference of the metal cap being smaller than the outer circumference of the metallization layer, and the solder being attached to the outer circumference of the metal cap and the outer portion of the metal cap outer circumference of the metallization layer. I do.

【0007】圧電振動片を収納する有底保持器の開口部
周縁部にメタライズ層が設けられ、金属キャップをハン
ダにて加熱封止する圧電振動子の製造方法において、少
なくとも、有底保持器の開口部周縁部に外周は開口部周
縁部の外周より小さく内周は開口部周縁部の内周と等し
いか大きな内周を持つメタライズ層を設ける工程と、開
口部周縁部の外周と等しいか小さな外周をもち、金属キ
ャップの外周より大きな内周をもつ平坦なドーナツ型ハ
ンダを開口部に位置決めして圧着する工程と、前記ハン
ダ内周をガイドとして金属キャップをメタライズ層上に
載置する工程と、ハンダを溶融して封止する工程を有す
る製造方法とする。
[0007] In a method of manufacturing a piezoelectric vibrator in which a metallized layer is provided on the periphery of an opening of a bottomed cage for accommodating a piezoelectric vibrating reed and a metal cap is heat-sealed with solder, at least the bottomed cage has A step of providing a metallization layer having an inner circumference smaller or larger than the outer circumference of the opening peripheral edge at the opening peripheral edge, and having an inner circumference equal to or larger than the inner circumference of the opening peripheral edge; and A step of positioning a flat donut-shaped solder having an outer periphery and having an inner periphery larger than the outer periphery of the metal cap at the opening and crimping the same; and a step of placing the metal cap on the metallized layer using the inner periphery of the solder as a guide. And a step of melting and sealing the solder.

【0008】[0008]

【発明の実施の形態】図3は本発明の製造方法を説明す
るための各工程を示す断面図である。Aは、有底保持器
2の開口部周縁部2aに外周は開口部周縁部2aの外周
より小さく内周は開口部周縁部2aの内周と等しいか大
きな内周を持つメタライズ層7を設けた状態図である。
Bは、開口部周縁部2aの外周と等しいか小さな外周を
もち、金属キャップ9の外周より大きな内周をもつ平坦
なドーナツ型ハンダ8を開口部周縁部2aに位置決めし
て圧着した状態図である。Cは、ハンダ8の内周をガイ
ドとして金属キャップ9をメタライズ層7上に載置した
状態図である。Dは、ハンダ8を溶融して封止した状態
図である。封止の際には真空槽内で金属キャップ9を加
圧しながら加熱する。
FIG. 3 is a sectional view showing each step for explaining a manufacturing method of the present invention. A shows a metallized layer 7 having an inner periphery whose outer periphery is smaller than the outer periphery of the opening periphery 2a and whose inner periphery is equal to or larger than the inner periphery of the opening periphery 2a at the opening periphery 2a of the bottomed cage 2. FIG.
B is a state diagram in which a flat donut-shaped solder 8 having an outer circumference equal to or smaller than the outer circumference of the opening peripheral edge 2a and having an inner circumference larger than the outer circumference of the metal cap 9 is positioned and crimped on the opening peripheral edge 2a. is there. FIG. 3C is a diagram showing a state in which the metal cap 9 is placed on the metallized layer 7 using the inner periphery of the solder 8 as a guide. D is a state diagram in which the solder 8 is melted and sealed. At the time of sealing, the metal cap 9 is heated while being pressed in a vacuum chamber.

【0009】本発明は少なくとも前記4工程を有する製
造方法であり、圧電振動片1を有底保持器2に取り付け
る工程、圧電振動片1の周波数調整をする工程、全体を
真空中で加熱してアニールする工程等は、工程Aと工程
Cの間にあればよい。
The present invention is a manufacturing method having at least the above four steps. The step of attaching the piezoelectric vibrating reed 1 to the bottomed holder 2, the step of adjusting the frequency of the piezoelectric vibrating reed 1, and heating the whole in a vacuum. The annealing step or the like may be performed between step A and step C.

【0010】図4は本発明の圧電振動子の封止部の拡大
断面図である。有底保持器2aと金属キャップ9は、ハ
ンダ8によりにより金属キャップ9の側面9aとメタラ
イズ層7で封止されている。メタライズ層7と金属キャ
ップ9の下面の合わせ面には加圧条件により多少ハンダ
8が侵入する可能性があるがほとんどない。(図中メタ
ライズ層7は相当な厚みで書いてあるが、実際は極薄い
層であり、表面にはハンダが付き易いメッキを施してあ
る。)
FIG. 4 is an enlarged sectional view of a sealing portion of the piezoelectric vibrator of the present invention. The bottomed cage 2 a and the metal cap 9 are sealed by the solder 8 with the side surface 9 a of the metal cap 9 and the metallized layer 7. There is little possibility that the solder 8 may enter the mating surface of the metallized layer 7 and the lower surface of the metal cap 9 depending on the pressing condition, but there is almost no possibility. (Although the metallized layer 7 is written with a considerable thickness in the figure, it is actually an extremely thin layer, and its surface is plated with solder.)

【0011】開口部周縁部2aの外周部にはメタライズ
層7がなく、ハンダ8はメタライズ層7の外周より外に
は付着しないので封止部が有底保持器2の外形より大き
くなるようなはみ出し現象は起こらない。
There is no metallized layer 7 on the outer peripheral portion of the opening peripheral portion 2a, and since the solder 8 does not adhere outside the outer periphery of the metallized layer 7, the sealing portion becomes larger than the outer shape of the bottomed cage 2. No overhang phenomenon occurs.

【0012】図5は本発明の圧電振動子の他の実施形態
であり、封止部の拡大断面図である。金属キャップ10
の封止部である側面10aは段付き形状に形成されてお
り、図4の封止部より封止面が多くなっている。
FIG. 5 shows another embodiment of the piezoelectric vibrator of the present invention, and is an enlarged sectional view of a sealing portion. Metal cap 10
The side surface 10a, which is the sealing portion, is formed in a stepped shape, and has more sealing surfaces than the sealing portion in FIG.

【0013】図6は本発明の更に他の実施形態であり、
封止部の拡大断面図である。金属キャップ11の封止部
である側面11aは斜めに形成されており、図4の封止
部より封止面が多くなっている。また、メタライズ層1
2は、開口部周縁部2aの外周より小さい外周で、開口
部周縁部12aの内周より大きい内周で形成してある。
メタライズ層12と金属キャップ11下面の合わせ面に
ハンダが侵入してもハンダが有底保持器2の凹部2bま
では侵入しにくい構造である。図5、図6の実施形態で
も製造方法はいずれも同じである。
FIG. 6 shows still another embodiment of the present invention.
It is an expanded sectional view of a sealing part. The side surface 11a which is a sealing portion of the metal cap 11 is formed obliquely, and has a larger sealing surface than the sealing portion in FIG. In addition, metallization layer 1
Reference numeral 2 denotes an outer periphery smaller than the outer periphery of the opening peripheral portion 2a and an inner periphery larger than the inner periphery of the opening peripheral portion 12a.
Even if solder enters the mating surface between the metallized layer 12 and the lower surface of the metal cap 11, the solder does not easily enter the recess 2 b of the bottomed cage 2. 5 and 6, the manufacturing method is the same.

【0014】[0014]

【発明の効果】本発明は前述のような構造にしたため、
ハンダが溶融するときに発生するガスが、真空にされた
有底保持器内に侵入することが少なく、圧電振動子の電
気特性を劣化させることがない。また、ハンダが有底保
持器の外周にはみ出すことがなくなる。
The present invention has the above-described structure,
The gas generated when the solder is melted rarely penetrates into the evacuated bottomed holder, and does not deteriorate the electrical characteristics of the piezoelectric vibrator. Further, the solder does not protrude to the outer periphery of the bottomed cage.

【0015】本発明の製造方法を採ることにより、キャ
ップがハンダにより位置決めされるので、キャップが有
底保持器の外周より小さくてもキャップ位置精度が向上
し、封止部からのリーク発生がなくなる。
By adopting the manufacturing method of the present invention, since the cap is positioned by the solder, even if the cap is smaller than the outer periphery of the bottomed cage, the positioning accuracy of the cap is improved, and the generation of a leak from the sealing portion is eliminated. .

【図面の簡単な説明】[Brief description of the drawings]

【図1】従来技術による表面実装型圧電振動子の分解斜
視図
FIG. 1 is an exploded perspective view of a conventional surface mount type piezoelectric vibrator.

【図2】図1長手方向の断面図2 is a longitudinal sectional view of FIG. 1;

【図3】本発明を説明するための各工程の断面図FIG. 3 is a sectional view of each step for explaining the present invention.

【図4】本発明の圧電振動子の封止部の拡大断面図FIG. 4 is an enlarged sectional view of a sealing portion of the piezoelectric vibrator of the present invention.

【図5】本発明の圧電振動子の他の実施形態の封止部の
拡大断面図
FIG. 5 is an enlarged sectional view of a sealing portion of another embodiment of the piezoelectric vibrator of the present invention.

【図6】本発明の圧電振動子の他の実施形態の封止部の
拡大断面図
FIG. 6 is an enlarged sectional view of a sealing portion of another embodiment of the piezoelectric vibrator of the present invention.

【符号の説明】[Explanation of symbols]

1 圧電振動片 2 有底保持器 2a 開口部周縁部 2b 有底保持器の凹部 3 金属キャップ 4 ハンダ 5 導電接着剤 6 メタライズ層 7 メタライズ層 8 ハンダ 9 金属キャップ 9a 金属キャップの側面 10 金属キャップ 10a 金属キャップの側面 11 金属キャップ 11a 金属キャップの側面 12 メタライズ層 DESCRIPTION OF SYMBOLS 1 Piezoelectric vibrating reed 2 Bottomed cage 2a Opening periphery 2b Depressed portion of bottomed cage 3 Metal cap 4 Solder 5 Conductive adhesive 6 Metallized layer 7 Metallized layer 8 Solder 9 Metal cap 9a Side face of metal cap 10 Metal cap 10a Side of metal cap 11 Metal cap 11a Side of metal cap 12 Metallized layer

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 一方が開放された有底保持器に圧電振動
片を収納し、開口部周縁部に設けたメタライズ層にハン
ダを介してキャップを取り付ける圧電振動子において、
前記メタライズ層外周は開口部周縁部の外周より小さく
且つメタライズ層内周は開口部周縁部の内周と等しいか
大きな内周をもち、キャップの外周は前記メタライズ層
の外周より小さく、ハンダの大部分はキャップの外周部
とメタライズ層のキャップ外周より外側の部分に付いて
いることを特徴とする圧電振動子。
1. A piezoelectric vibrator in which a piezoelectric vibrating reed is housed in a bottomed cage having one open side, and a cap is attached via a solder to a metallized layer provided on the periphery of the opening.
The outer periphery of the metallized layer is smaller than the outer periphery of the peripheral portion of the opening, and the inner periphery of the metallized layer has an inner periphery equal to or larger than the inner periphery of the peripheral portion of the opening. The outer periphery of the cap is smaller than the outer periphery of the metallized layer, and the size of the solder is large. A piezoelectric vibrator characterized in that the portion is attached to an outer peripheral portion of the cap and to a portion of the metallized layer outside the outer periphery of the cap.
【請求項2】 圧電振動片を収納する有底保持器の開口
部周縁部にメタライズ層が設けられ、キャップをハンダ
にて加熱封止する圧電振動子の製造方法において、少な
くとも、有底保持器の開口部周縁部に外周は開口部周縁
部の外周より小さく内周は開口部周縁部の内周と等しい
か大きな内周を持つメタライズ層を設ける工程と、開口
部周縁部の外周と等しいか小さな外周をもち、キャップ
の外周より大きな内周をもつ平坦なドーナツ型ハンダを
開口部に位置決めして圧着する工程と、前記ハンダ内周
をガイドとしてキャップをメタライズ層上に載置する工
程と、ハンダを溶融して封止する工程を有することを特
徴とする圧電振動子の製造方法。
2. A method of manufacturing a piezoelectric vibrator in which a metallized layer is provided on a peripheral portion of an opening of a bottomed cage for accommodating a piezoelectric vibrating piece and a cap is heated and sealed with solder, at least in the bottomed cage. Providing a metallized layer having an inner periphery smaller or larger than the outer periphery of the opening periphery at the outer periphery of the opening, and having an inner periphery equal to or larger than the inner periphery of the opening periphery; A step of positioning a flat donut-shaped solder having an inner periphery larger than the outer periphery of the cap and having a small outer periphery at the opening and crimping the same, and a step of placing the cap on the metallized layer using the inner periphery of the solder as a guide, A method for manufacturing a piezoelectric vibrator, comprising a step of melting and sealing solder.
JP31018296A 1996-11-05 1996-11-05 Piezoelectric vibrator and manufacture of piezoelectric vibrator Pending JPH10145177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31018296A JPH10145177A (en) 1996-11-05 1996-11-05 Piezoelectric vibrator and manufacture of piezoelectric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31018296A JPH10145177A (en) 1996-11-05 1996-11-05 Piezoelectric vibrator and manufacture of piezoelectric vibrator

Publications (1)

Publication Number Publication Date
JPH10145177A true JPH10145177A (en) 1998-05-29

Family

ID=18002166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31018296A Pending JPH10145177A (en) 1996-11-05 1996-11-05 Piezoelectric vibrator and manufacture of piezoelectric vibrator

Country Status (1)

Country Link
JP (1) JPH10145177A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013027017A (en) * 2011-07-26 2013-02-04 Kyocera Crystal Device Corp Method for manufacturing electronic device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013027017A (en) * 2011-07-26 2013-02-04 Kyocera Crystal Device Corp Method for manufacturing electronic device

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