JPH10138072A - Face plate for magnetic chuck, and manufacture thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent generation of relative position deflection between adjacent spacers and magnetic pole members. SOLUTION: A face plate 10 for a magnetic chuck includes plural spacers 12 and plural magnetic pole members 14 disposed alaternately in parallel to regulate a magnetic work surface, and one or more bolts 24 extended in the spacers 12 and the magnetic pole members 14 in their disposition directions for connecting the spacers 12 and the magnetic pole members 14 to each other, recessed parts 18 and protruded parts 20 are formed at facing positions of the spacers 12 and the magnetic pole members 14, and the recessed parts 18 and the protruded parts 20 are engaged with each other.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a face plate for defining a magnetic work surface of a magnetic chuck using permanent magnets, electromagnets, and the like, and a method of manufacturing the same.

[0002]

BACKGROUND OF THE INVENTION One such faceplate is a plurality of non-magnetic separators or spacers and a plurality of ferromagnetic pole pieces alternately and side-by-side stacked to define a magnetic work surface; There is a face plate provided with a plurality of bolts extending through the pole pieces in the arrangement direction, tightening the entire spacer and the pole pieces with bolts, filling an adhesive resin into the gaps between the face plates, and curing the resin. 1
-257540).

However, in this face plate, since the bonding resin has low rigidity, the adjacent spacer and the pole piece are relatively easily displaced by a small external force, and as a result, the relative distance between the adjacent pole piece and the spacer is relatively small. Due to the misalignment, unevenness and curvature are generated on the magnetic work surface. Such a face plate is mounted on a magnetic chuck, and using the magnetic chuck,
When processing such as grinding and cutting is performed, the processing accuracy is significantly reduced due to a decrease in the flatness of the magnetic work surface.

[0004]

SUMMARY OF THE INVENTION An object of the present invention is to prevent relative displacement between adjacent spacers and pole pieces.

[0005]

A face plate for a magnetic chuck according to the present invention includes a plurality of spacers and a plurality of pole pieces alternately arranged in parallel to define a magnetic work surface, and the spacers and the pole pieces are connected to each other. And at least one bolt extending inside the spacer and the pole piece in the direction in which the spacers and the pole piece are arranged. The spacer and the pole piece have a concave portion and a convex portion facing each other, and the concave portion and the convex portion are fitted. Features.

When an external force acts on the face plate, the external force tends to relatively displace adjacent spacers and pole pieces. However, according to the present invention, the concave portion and the convex portion are formed at the opposing portions of the spacer and the pole piece, and the concave portion and the convex portion are fitted to each other. The pole pieces are less likely to be displaced, so that there is no relative displacement between adjacent spacers and pole pieces.

[0007] The spacer and pole piece can have protrusions and recesses at a plurality of locations spaced apart in their longitudinal direction. As a result, relative displacement between the spacer and the pole piece is less likely to occur.

In the face plate as described above, concave portions and convex portions are formed by pressing at portions opposed to a plurality of long spacers and a plurality of long pole pieces, and then the concave portions and the convex portions are fitted. The spacers and the pole pieces are arranged alternately and in parallel in the assembled state, and then the spacers and the pole pieces are entirely fixed with bolts.

After the whole is fastened with bolts, a resin for adhesive resin having fluidity can be infiltrated into the gap between the pole piece and the spacer and cured.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIGS.
Numeral 0 includes a plurality of spacers 12 made of a nonmagnetic material and a plurality of pole pieces 14 made of a ferromagnetic material arranged in parallel with each other with the spacers 12 interposed therebetween. Each spacer 12 and each pole piece 14 are formed in the shape of an elongated strip-shaped plate.

The spacer 12 and the pole piece 14 are arranged in the width direction such that one side in the height direction defines a magnetic working surface for adsorbing the magnetic material, and the other side defines a surface facing the magnetic chuck body. Are stacked in the thickness direction with the vertical direction. A prismatic auxiliary member 16 is disposed at each end of the spacer 12 and the pole piece 14 in the arrangement direction. Each auxiliary member 16 is formed of a ferromagnetic material in the example shown, and thus acts as one pole piece.

Each spacer 12 and each pole piece 14 have a plurality of concave portions 18 and a plurality of convex portions 20 spaced apart in the longitudinal direction at opposing portions. The adjacent spacer 12 and the concave portion 18 and the convex portion 20 of the pole piece 14 are fitted with each other. One auxiliary member 16 has a concave portion 18 fitted with a plurality of convex portions 20 of the adjacent spacer 12.
The concave portion 18 and the convex portion 20 are formed by press working. For this reason, in the illustrated example, the concave portion 18 and the convex portion 20 are formed by a concave-convex portion integrally formed on both sides.

The face plate 10 is also inserted into each of the plurality of holes 22 extending in the direction in which the spacers 12, the pole pieces 14, and the auxiliary members 16 extend in the direction in which the spacers 12, the auxiliary members 16 are arranged. Bolt 24. Each hole 22
It is defined by a set of through holes formed in the spacer 12, the pole piece 14, and the auxiliary member 16. In the drawing, the holes 22 formed in the face plate 10 are denoted by the same reference numerals as the through holes formed in the spacer 12, the pole piece 14, and the auxiliary member 16 so as to define the holes 22 in cooperation with each other.

Each hole 22 of spacer 12 and pole piece 14
Can be formed by press working. Each hole 22 of the auxiliary member 16 can be formed by drilling. Each hole 22 of the other auxiliary member 16 is a screw hole, and in fact, is a so-called blind screw hole that opens only on one side. Each bolt 24 has a head 26 operated by a hexagon wrench at one end, and a male thread 28 screwed into a screw hole of the other auxiliary member 16 at the other end.

Each bolt 24 is inserted into the hole 22 from one of the auxiliary members 16, and the male screw portion 28 is screwed into a screw hole of the other auxiliary member 16. Each bolt 24 pulls the two auxiliary members 16 in a direction to approach each other, thereby connecting the entire spacer 12 and the pole piece 14.
In the illustrated example, the nut 26 is shown to have a circular cross-sectional shape, but may have another cross-sectional shape such as a hexagon.

The face plate 10 includes each spacer 12 and each pole piece 1.
The concave and convex portions 18 and 20 are formed by press working in a portion opposed to 4, and the spacers 12 and the pole pieces 14 are alternately and parallelly arranged between the auxiliary members 16 in a state where the concave and convex portions 18 and 20 are fitted. The spacers 12 and the pole pieces 14 can be assembled by tightening and fixing the whole of the spacers 12 and the pole pieces 14 with bolts 24.

The face plate 10 assembled as described above includes
Thereafter, a flowable adhesive resin is applied to the face plate 1 after assembly, for example, between the spacer 12 and the pole piece 14, between the spacer 12, the pole piece 14 and the auxiliary member 16, and each bolt 24.
It can be manufactured by impregnating into the gap existing at zero and curing. As the adhesive resin having fluidity, a fluid resin such as an epoxy resin or a polyester resin can be used.

The face plate 10 assembled as described above includes
The two auxiliary members 16 are assembled to the magnetic chuck body by bolts. As the magnetic chuck body, conventionally known magnetic chucks such as an electromagnetic type, a type using a permanent magnet and an electromagnet, in addition to the permanent magnet type described in JP-A-1-257540 and the like. The body can be used.

When an external force acts on the face plate 10, the external force tends to relatively displace the adjacent spacer 12 and pole piece 14. However, since the face plate 10 is fitted with the uneven portions 18 and 20 formed on the spacer 12 and the pole piece 14, the relative displacement between the adjacent spacer 12 and the pole piece 14 caused by external force is fitted. Irregularities 18,
As a result, the adjacent spacers 12 and the pole pieces 14 are relatively unlikely to be displaced, so that there is no relative displacement between the adjacent spacers 12 and the pole pieces 14.

The other auxiliary member 16 and the adjacent spacer 12 are not connected to each other by the concavo-convex portions, so that they are relatively easily displaced. In order to prevent this, as shown in FIG. 2, the other auxiliary member 16 and the spacer 1 adjacent thereto
2 may be connected by one or more pins 30.

According to the face plate 10, when an external force acts,
The relative displacement between the spacer 12 and the pole piece 14 is further caused by the fitting of a plurality of sets of uneven portions 18 and 20 formed at intervals in the longitudinal direction of the spacer 12 and the pole piece 14. It becomes difficult. In addition, since the resin closes the gap existing in the face plate 10, the movement of the spacer 12 or the pole piece 14 with respect to other members is prevented, and the face plate 10 is bent due to the bending force acting on it. Is prevented. As a result, the magnetic work surface of the face plate 10 is always maintained as a flat surface with high precision, and the processing accuracy of cutting, grinding, and the like of the workpiece sucked by the magnetic chuck using the face plate 10 is improved.

The concave portion 18 and the convex portion 20 shown in FIG.
In the embodiment, the concave portion 18 of the spacer 12 and the convex portion 20 of the pole piece 14 have substantially the same size, and the convex portion 20 of the spacer 12 and the concave portion 18 of the pole piece 14 have substantially the same size. However, as shown in FIG.
0 may be the same size. As shown in FIG. 4, when the concave portion 18 and the convex portion 20 are formed on the spacer 12 and the pole piece 14 by press working, respectively, the inner size a of the concave portion 18 and the outer size b of the convex portion 20 are set to the same size. If so, spacer 12 and pole piece 14
Are overlapped with each other and press-fitting the concave and convex portions 18 and 20 with a press makes it possible to realize inner fitting of play.

The present invention is not limited to the above embodiment. For example, the shape of the concave portion 18 and the convex portion 20 may be a shape other than a quadrangle such as a circle, a triangle, a pentagon, a hexagon, and an octagon. Further, instead of connecting the spacer and the pole piece to each other by a plurality of bolts spaced in the longitudinal direction, the spacer and the pole piece may be connected to each other by one bolt. Further, instead of forming a plurality of uneven portions on each spacer and each pole piece, one uneven portion may be formed. Further, the resin does not have to be filled in the gap.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing one embodiment of a face plate of the present invention.

FIG. 2 is a plan view showing one embodiment of the face plate of FIG. 1;

3A and 3B are views showing an embodiment of a spacer and a pole piece used in the face plate of FIG. 1, wherein FIG. 3A is a front view, FIG. 3B is a plan view, and FIG. It is an expanded sectional view.

FIG. 4 is a cross-sectional view showing another embodiment of the concave portion and the convex portion, and is a cross-sectional view similar to FIG. 3 (C).

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Face plate 12 Spacer 14 Magnetic pole piece 16 Auxiliary member 18 Concave part 20 Convex part 22 Hole 24 Bolt

Claims (4)

[Claims] A plurality of spacers and a plurality of pole pieces alternately arranged in parallel to define a magnetic work surface; and a plurality of spacers and a plurality of pole pieces within the spacers and the pole pieces to couple the spacers and the pole pieces together. 1 extending in the array direction of
A magnetic chuck face plate including the bolts described above, wherein the spacer and the pole piece have a concave portion and a convex portion at opposing portions, and the concave portion and the convex portion are fitted. 2. The face plate according to claim 1, wherein the spacer and the pole piece have the concave portion and the convex portion at a plurality of positions spaced apart in the longitudinal direction. 3. A concave portion and a convex portion are formed by pressing at a portion where the plurality of long spacers and the plurality of long pole pieces oppose each other, and then the concave portion and the convex portion are fitted. A method for manufacturing a face plate for a magnetic chuck, comprising: arranging the spacers and the pole pieces alternately and in parallel, and then fixing the spacers and the pole pieces by bolts. 4. After tightening the whole with a bolt,
The method for manufacturing a face plate for a magnetic chuck according to claim 3, further comprising impregnating a flowable adhesive resin into a gap between the face plates and curing the resin.