JPH10128950A - Screen type printing apparatus and film thickness detection method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To detect the thickness of a film after coating immediately after printing. SOLUTION: This printing apparatus 1 is constituted so that printing paste is printed and applied on the base plate P placed on a table 13 by using a screen and a squeegee. In this case, supports 53 support a screen 62 through a printing frame 62. After printing is completed, the supports 53 are moved upwardly and move the screen 62 upwardly from the upper part just near to the matter to be printed on the table 13. After the screen 62 retreats, a film thickness sensor 111 is moved to the region above the base plate P and under the screen 62 to detect the film thickness on the base plate P placed on the table 13.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a screen type printing apparatus having a function of detecting the thickness of a coating film applied to a printing substrate and a method of detecting the thickness.

[0002]

2. Description of the Related Art Conventionally, a screen-type printing apparatus is known as one of printing apparatuses for applying (or printing) a printing object such as paper or a substrate. In this printing apparatus, the squeegee slides from the printing start end side to the printing end end side on the screen on which the ink is placed, so that the application on the printing table is performed. After the application, the scraper slides on the screen from the end of printing to the end of printing, so that the remaining ink on the screen is scraped back to the end of printing. Thereafter, the same operation is alternately repeated, so that the application is continuously performed on a plurality of printing substrates.

[0003]

When the coating is performed as described above, after the coating operation is performed, it is detected whether or not the ink applied to the printing substrate has a predetermined film thickness. An application detection device is provided.

[0004] Conventionally, the printing material after the printing process is completed,
After being unloaded from a table or the like placed at the time of printing, a film thickness is detected by a coating detection device in a final inspection step. For this reason, there is a problem that the yield is deteriorated because the pass / fail of whether or not the film thickness of the application detection device is within the set allowable value is delayed. Further, there is a problem that a special space for providing the application detecting device is required.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide a screen printing apparatus and a film thickness detecting method capable of detecting a film thickness after coating immediately after printing. It is intended to provide.

[0006]

Means for Solving the Problems To achieve the above object, a first aspect of the present invention is a screen printing method in which a printing paste is printed on a printing material placed on a table using a screen and a squeegee. In the apparatus, after printing, a screen retreating means for moving the screen in a predetermined retreat direction from immediately above the printing material on the table in a predetermined retreating direction, and a moving means for moving above the printing material after the screen retreats by the screen retreating means The gist of the present invention is a screen-type printing apparatus comprising: a film thickness detecting unit that is supported by the moving unit and detects a film thickness on a printing object placed on a table.

The term "immediately above" as used in this specification refers to the relationship between the screen and the printing medium after printing is completed, and the screen is in contact with the printing medium or is not in contact with the printing medium and is in close proximity. The purpose is to include the case.

The invention according to claim 2 is a screen retreat control means for controlling the screen retreat means to move the screen in a retreat direction immediately after printing is completed, and after the screen retreats, moves the move means above the printing material. The screen-type printing apparatus according to claim 1, further comprising a movement control unit that controls movement of the screen.

A third aspect of the present invention is based on the first aspect, wherein the retreat direction of the screen is an upward direction of the table. According to a fourth aspect of the present invention, in the first or second aspect, the moving means includes an X-direction moving means and a Y-direction moving means that move in the X and Y directions on a plane above the table. I have.

According to a fifth aspect of the present invention, after printing is completed, the screen is retreated from above the print substrate, and thereafter, the film thickness detecting means for detecting the film thickness is moved above the print substrate, and thereafter, the coating applied to the print substrate is performed. The gist of the invention is a method for detecting the thickness of a printed material, which detects the thickness of the film.

(Operation) Therefore, according to the first aspect of the present invention, the screen retreating means moves the screen in a predetermined retreat direction from immediately above the printing object on the table after printing is completed. The moving means moves the film thickness detecting means above the printing medium after the screen has been withdrawn by the screen retreating means. Thereafter, the film thickness detecting means detects the film thickness of the coating film on the printing object placed on the table.

According to the second aspect of the present invention, the screen leaving control means controls the screen leaving means to move the screen in the leaving direction immediately after printing is completed. The movement control means controls the movement of the movement means above the printing medium after the screen has left.

According to the third aspect of the present invention, since the screen is retreated in the upward direction of the table and the screen does not move in the horizontal direction, it is not necessary to secure a space for moving in the horizontal direction.

According to a fourth aspect of the present invention, the film thickness detecting means moves in the X and Y directions on a plane above the table by the X direction moving means and the Y direction moving means. According to a fifth aspect of the present invention, after the printing is completed, the screen is retreated from above the printing material, and thereafter, the film thickness detecting means for detecting the film thickness is moved above the printing material, and thereafter, the coating film applied to the printing material is formed. Detect the thickness. Thus, immediately after printing, the thickness of the coating film on the substrate can be detected.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention applied to a screen printing apparatus for applying a printing paste to a substrate P as a printing material will be described below with reference to FIGS.

FIGS. 1 and 2 are a plan view and a side view of a screen type printing apparatus 1 and a carry-in apparatus 2 and a carry-out apparatus 3 for carrying in / out a substrate P, respectively. Loading device 2
The carry-out device 3 is disposed on both sides of the carry-in side and the carry-out side of the screen-type printing device 1. Since both devices have the same configuration, only the loading device 2 will be described here, and the same reference numerals will be given to the loading device 32, and description thereof will be omitted.

The loading device 2 is provided with a movable column 6 movable in the left-right direction in FIGS. 1 and 2 with respect to the base 5, and is driven by a drive motor (not shown). The elevating arm 7 is provided so as to be vertically movable with respect to the movable column 6, and is operatively connected to a drive motor (not shown). A fork 8 is provided at the tip of the lifting arm 7. The fork 8 is moved 180 degrees to the lifting arm 7 along a horizontal plane.
It is rotatably supported in the forward and reverse directions and is operatively connected to and driven by a drive motor (not shown).

Reference numeral 9 denotes a rack provided with a plurality of shelves for stocking the substrates P. The substrates P are mounted on projections (not shown) projecting from the shelves. When taking out the substrate P mounted on the shelf of the rack 9, the carry-in device 2 inserts the fork 8 between the substrate mounted on the protrusion of the shelf and the shelf. By moving upward, the substrate P is lifted off the shelf, and in this state, as shown in FIG.
Invert 80 degrees. Then, the mounting surface 1 of the table 13 of the XY-θ table device 12 to be described later for the height of the fork 8
After moving to a position slightly higher than the height of 8a, XY-
The movable column 6 is driven to a position above the table 13 of the θ table device 12. As a result, the fork 8 can position the substrate P on the upper surface of the table 13 as shown in FIG.

When the carry-out device 3 carries out the substrate P on the table 13 of the XY-θ table device, the carry-out device 3 operates in the reverse order of the operation of the carry-in device 2. FIG. 8 shows an overall outline of the screen printing apparatus 1.

In this embodiment, the screen type printing apparatus 1 includes a printing mechanism 52, an XY-θ table device 12, a film thickness detecting device 91, and a printing position detecting device. (XY-θ Table Device) First, an XY-θ table device (hereinafter, referred to as a table device) 12 will be described. FIG. 12 is a sectional view of the table device 12, and FIGS.
Is a plan view of the table 13, FIG. 15 is a cross-sectional view showing a mounting structure of the material presence sensor, FIG.
It is sectional drawing for showing the mounting structure of a lift pin.

As shown in FIG. 8, a table device 1 for mounting and fixing a substrate P at the time of printing is provided on the upper portion of the apparatus main body 11.
2 are provided. As shown in FIG. 12, the table 13 of the table device 12 is rotatably supported by a bearing 14, and is operatively connected to a drive motor (not shown). Note that the drive motor is provided with a rotary encoder, and the rotational drive amount thereof can be detected. The bearing body 14 is incorporated so as to be movable in the X and Y directions with respect to the apparatus main body 11, and is operatively connected to a drive motor (not shown). Note that the drive motor is provided with a rotary encoder, and the rotational drive amount thereof can be detected. In addition, table supports 15 are provided at four corners of the flange portion of the bearing body 14 located in the cross direction with the bearing body 14 as a center, and the lower surface of the table 13 is supported by the upper bearing 16.

The table 13 includes a table base 17 having a square shape, and an upper plate 18 fixed on the table base 17. The upper surface of the upper plate 18 is a flat mounting surface 18a. As shown in FIG. 12, the table base 17 has a peripheral wall 19 which is protruded upward at a peripheral portion and is integrally connected. Further, ribs 20 project from the table base 17 in a substantially lattice shape in the peripheral wall 19. Further, a reinforcing rib 21 is provided below the table base 17 so as to protrude downward. Then, by screwing a fixing bolt 22 inserted from below into the upper plate 18 to the intersection between the ribs 20 arranged in a lattice and the peripheral wall 19, the upper plate 19 is placed above the peripheral wall 19 and the rib 20. Closely related.

Upper plate 18, table base 17, peripheral wall 19
The intake chamber 23 surrounded by the rib 20 and the other intake chamber 23 is communicated with another adjacent intake chamber 23 through a communication hole (not shown) provided in the rib 20. The upper plate 18
As shown in FIG. 13, a large number of intake holes 24 are provided in a matrix and arranged in a matrix, and each intake hole 24 communicates with the intake chamber 23. The suction chamber 23 is connected to a vacuum pump 77 (FIG. 26) through a suction pipe (not shown).
), And air can be sucked in through the air inlet 24 by driving the vacuum pump 77.

As shown in FIG. 13 and FIG. 14, printing starts on the center line n of the width of the upper plate 18 in the X direction (left and right directions in the figure) and on the center line m of the width in the Y direction. On the side, a plurality of (four in this embodiment) material presence / absence sensors 26 and 27 are arranged at predetermined intervals from each other. As shown in FIG.
6 and 27 are fixed to the lower surface of the mounting member 29 fitted so as to be flush with the mounting hole 28 of the upper plate 17. The material presence / absence sensors 26 and 27 are constituted by reflection type optical sensors, and are connected to a central processing controller 71 described later via the optical fiber 30. In addition, 31
It is a through hole provided in the mounting member 29, and serves as an optical path of light emitted from the material presence sensors 26 and 27 and reflected light. For convenience of description, in FIGS. 13 and 14, reference numerals 26 and 27 are given to indicate the arrangement relationship of the material presence / absence sensors, but more precisely, the attachment member 29 is shown. The through-hole 31 serving as an optical path is located on the center line m, n on the mounting member 29 shown in FIG.

The positioning pins 32 are disposed at positions corresponding to the material presence sensors 27 so as to be symmetrical with respect to the center line m. That is, as shown in FIG. 14, the carry-in side of the positioning pin 32 is located at a position in contact with lines α1 to α4 orthogonal to each other on the optical path of the material presence / absence sensor 27.

A positioning pin 33 is arranged at a predetermined distance from the material presence sensor 26 on the carry-out side of the center line n corresponding to the two material presence sensors 26 located on the printing start side. I have. Also, two material presence / absence sensors 32 near the center of the positioning pins 32 are arranged corresponding to the remaining two material presence / absence sensors 26. The printing end side portions of these material presence / absence sensors 32 and 33 are located at positions that are in contact with the orthogonal β1 to β4 lines on the optical path of the material presence / absence sensor 26 as shown in FIG.

As shown in FIG.
Reference numerals 2 and 33 denote through holes 3 of the upper plate 18 and the table base 17.
4 and 35 are slidably disposed with respect to the runner 36 fitted thereto. A bulging portion 25 is formed from the reinforcing rib 21 corresponding to the positioning pins 32 and 33. Bulging part 2
An air cylinder 38 is fixed to the lower part of the air cylinder 5 via a mounting plate 37, and the positioning pins 32 and 33 are fixed to the tip of a rod 39 of the air cylinder 38.

Then, the rod 39 is moved up and down by forward and reverse driving of the air cylinder 38. As a result, the positioning pins 32 and 33 are protruded from the upper plate 18 (see FIG. 16) or flush with the upper plate 18 (FIG. 12). 2) can be arranged.

Therefore, when the predetermined positioning pins 32 and 33 are located at the protruding positions, the substrate P disposed on the table 13 is positioned with the unloading side abutting against the positioning pins 32 and positioned at the center of the table 13. From the material presence / absence sensors 26, 27 located closest to the positioning pins 32, 3
The sensors up to the material presence / absence sensor 27 corresponding to No. 3 output a "ON" detection signal indicating that material is present.

As shown in FIG. 13, in the table 13, rectangles M1,
Lift pins 41 and 42 as lift means are arranged at four corners of M2. Further, as shown in FIG. 1, the arrangement of the lift pins 41 and 42 is
When the fork (claw) 8 of the unloading device 3 is positioned on the table 13, it is arranged so as not to interfere (FIG. 1 shows a state in which the fork 8 of the loading device 2 has loaded the substrate P. ). Note that the length of the rectangle M1 in the X direction is longer than the length of M2 in the X direction, and the length of the rectangle M1 in the Y direction is smaller than the length of M2. As shown in FIG. 14, the lift pins 41 and 42 located at the four corners of each of the rectangles M1 and M2 are line-target positions with the center line m interposed therebetween. With this arrangement, substrates P of various sizes can be placed on the lift pins 41 and 42.

The lift pins 41 and 42 are slidably disposed on a runner 46 fitted in the upper plate 18 and the through holes 44 and 45 of the table base 17. A bulging portion 47 is formed from the reinforcing rib 21 corresponding to the lift pins 41 and 42. An air cylinder 49 is fixed to a lower portion of the bulging portion 47 via a mounting plate 48.
The lift pins 41 and 42 are fixed to the tip of the rod 50. The air cylinder 49 constitutes a lift driving unit.

The rod 50 is moved up and down by the forward and reverse driving of the air cylinder 49. As a result, the lift-up position (see FIG. 16) protruding from the upper plate 18 with respect to the lift pins 41 and 42 or the two positions at the flush position. It can be placed at any position. A sheet 51 made of an elastic material such as silicon rubber is fixed to the upper surfaces of the lift pins 41 and 42. When the lift pins 41, 42 protrude and are located at the lift-up position, the amount of protrusion of the table 13 from the mounting surface 18a is smaller than the amount of protrusion of the positioning pins 32, 33 from the table 13 on the mounting surface 18a. By the difference, the side portions of the substrate P can be brought into contact with the positioning pins 32 and 33. The protrusion amount of the lift pins 41 and 42 is larger than the thickness (upper limit width) of the fork 8 of the carry-in device 2.

Along the common central axis of the seat 51, the lift pins 41, 42, and the rod 50, the through holes 51a, 41
a, 42a and 50a penetrate and are connected to a vacuum pump 79 via an intake pipe (not shown). The through holes 51a, 41a, 42a, 50a, the vacuum pump 79
Constitute a material adsorption means.

(Printing Mechanism) The printing mechanism 52 will be described. As shown in FIG. 8, columns 53 are erected at the upper four corners of the apparatus main body 11 so as to correspond to the table apparatus 12. A pair of rail support frames 54 is provided between the columns 53 located in the Y direction, and a transport rail 55 is fixed on the rail support frames 54. The column 53 is operatively connected to an elevation drive motor 57 (see FIG. 26) as a drive source via an elevation mechanism (not shown) provided in the apparatus main body 11, and rotates the elevation drive motor 57 forward and reverse. By driving, ascent and descent are performed. In addition,
The elevating drive motor 57 is provided with a rotary encoder, and its rotational drive amount can be detected.

The elevating drive motor 57, the elevating mechanism (not shown), the support 53, the transport frame 59, and the like constitute a screen retreating means. In each of the rail support frames 54, a ball screw 56 is supported along the transport direction. The ball screw 56 is operatively connected to a transport drive motor (not shown). A nut 58 is screwed into the ball screw 56. Nut 5
A transfer frame 59 is fixed to 8. The upper portion of the transfer frame 59 is slidably fitted to the transfer rail 55 along the transfer direction. The nut 58 moves horizontally along the transport rail 55 according to printing conditions based on the drive of the transport drive motor, and moves the transport frame 59 in the Y direction.

A rectangular print frame 60 is provided above the table device 12, and the print frame 60 is attached to the rail support frame 54 (in FIG. 8, for convenience of explanation, The connection structure between the rail support frame 54 and the printing frame 60 is omitted).

A screen frame 61 having a rectangular shape larger than the table 12 is supported on the lower surface side of the printing frame 60, and a screen 62 on which a predetermined mask is applied is extended at a lower end of the screen frame 61. I have. The screen 62 is formed of a woven cloth, and has a surface on which a coating film of an emulsion is formed. The screen 62 approaches or separates from the table 13 as the print frame 60 moves up and down. In the position near the support column 53,
An upper limit switch 78 is provided which operates according to the operating position of the support 53 when the print frame 60 is located at the upper limit. The upper limit switch 78 is
When the print frame 60 is located at the upper limit position, an “ON” signal is output.

As shown in FIG.
A support bracket 63 constituting a print head frame is provided between the upper portions of the print head frame. A squeegee 65 for printing and applying a print paste is supported by the support bracket 63 via a squeegee support mechanism 64. A scraper (both not shown) is also supported on the support bracket 63 via a scraper support mechanism (not shown). (Thickness Detecting Device) Next, a film thickness detecting device 91 is shown in FIGS.
This will be described with reference to FIGS. 10 and 11 and FIGS.

FIG. 7 is a side view of the screen printing apparatus 1 as viewed from the Y direction, FIG. 8 is a side view of the main part of the screen printing apparatus, and FIG. 10 is a main part of the screen printing apparatus as viewed from the opposite X direction. FIG. 11 is a side view and FIG. 11 is a plan view of a main part of the screen printing apparatus.

FIG. 17 is a plan sectional view of the film thickness detecting device 91. In FIG. 17, the first print position detection device 121 is omitted for convenience of description. 18 is a side sectional view of the film thickness detecting device 91, and FIG. 19 is a sectional view of the film thickness detecting device 91 as viewed from the Y direction.

As shown in FIG. 10 and FIG.
A pair of ball screws 92 and 93 are rotatably supported on bearings 94 and 95 on both upper surfaces of the table device 12 on the upper side of the table device 1, and extend over substantially the entire length of the device main body 11. At the ends in the Y direction of the ball screws 92 and 93,
Bevel gears 92a and 93a are fixed.

On the apparatus main body 11, a rotating shaft 96 is rotatably supported via a bearing 90 on the side in the Y direction, and extends along the X direction. Bevel gears 96a are fixed to both ends of the rotating shaft 96, and the bevel gears 96a are the bevel gears 9 of the ball screws 92 and 93.
2a and 93a. A Y-axis drive motor 9 composed of a step motor capable of rotating forward and backward is provided in the apparatus main body 11.
7 are provided. A pulley is fixed to the output shaft of the Y-axis drive motor 97, and the pulley is connected to the rotation shaft 96.
A timing belt 99 is mounted between pulleys 98 fixed at the center of the belt.

Accordingly, the rotation of the Y-axis drive motor 97 causes the rotation of the rotation shaft 96 via the timing belt 99, and the drive torque thereof is changed to the bevel gears 96a, 96.
It is transmitted to ball screws 92 and 93 via 2a and 93a. The Y-axis drive motor 97 is provided with a rotary encoder, and its rotational drive amount can be detected.

The Y-direction drive means 97, the rotating shaft 96, the ball screw 93 and the like constitute a Y-direction moving means. As shown in FIG. 7, FIG. 8 and FIG.
1, a pair of guide rails 100 is fixed below the ball screws 92 and 93, and extends in the Y direction. A film thickness detecting device 91 is slidably disposed on the guide rail 100.

The slider 101 of the film thickness detecting device 91 is slidably fitted on the guide rail 100, and the upper part thereof is screwed to the ball screws 92 and 93. Therefore, the slider 101 can move in the Y direction or the anti-Y direction by the forward and reverse rotation of the ball screws 92 and 93. A side plate 102 is erected on the slider 101, and the side plate 10
As shown in FIG. 17, a horizontal member 103 is provided between the two. A ball screw 1 is provided on the side opposite to the Y side of the horizontal member 103.
05 is rotatably supported at both ends by bearings 104. Both ends of the ball screw 105 extend so as to be located near both ends of the horizontal member 103. The X-axis drive motor 106 is attached to the
And its output shaft is coupled to the coupling member 10.
The ball screw 105 is connected to the end of the ball screw 105 on the X direction side through the wire 8. The drive motor 106 is constituted by a step motor and can rotate forward and backward. The X-axis drive motor 1
06 is provided with a rotary encoder, and its rotational drive amount can be detected.

A guide rail 109 extending in the X direction is fixed to the side surface of the horizontal member 103 opposite to the Y direction.
A sensor support 110 is screwed into the ball screw 105, and a Y-direction side portion of the sensor support 110 is slidably fitted to the guide rail 109.
A film thickness sensor 111 as a film thickness detecting means is supported on the opposite side of the sensor support 110 in the Y direction. The film thickness sensor 111 includes a laser irradiation unit, and detects the film thickness of the coating film of the printing paste applied to the substrate P based on the reflected light from the substrate P when the laser is emitted downward in FIG. And known. Cover 112
Is for covering the ball screw 105, the guide rail 109, the film thickness sensor 111 and the like.
Mounted against. A window 113 is provided below the cover 112 so as to extend in the X direction and penetrate therethrough to allow the laser beam and the reflected light from the film thickness sensor 111 to enter.

The members 92 to 112 constitute a film thickness detecting device 91. With the above-described configuration, in the film thickness detecting device 91, the film thickness sensor 111 is driven over substantially the entire width of the table 12 in the X direction as shown in FIG. Can be moved.

The X-axis drive motor 106, ball screw 1
05, the X-axis direction moving means is constituted by the sensor support 110 and the like. Also, together with the Y-axis direction moving means,
A moving means is configured. (Print Position Detector) Next, the print position detector will be described. As shown in FIG. 11, the print position detecting device includes a first print position detecting device 121 and a second print position detecting device 122.

First, the first print position detecting device 121 will be described. In the first printing position detecting device 121, a pair of CCD cameras 123R and 123L are provided for the X direction side portion and the anti-X direction side portion of the horizontal member 103 in the film thickness detecting device 91, respectively. ing. This CC
FIGS. 20 to 2 show the supporting structure of the D cameras 123R and 123L.
This will be described in detail with reference to FIG.

Note that both CCD cameras 123L, 123R
11, the only difference is that the X-direction side portion and the anti-X direction side portion of the horizontal member 103 are left and right reversed as shown in FIG. The support structure of the side CCD camera 123L will be described.
The description of the support structure of the CCD camera 123R is omitted.

FIG. 20 is a plan sectional view showing the support structure of the CCD camera 123L. In the figure, a pair of bearings 125 and 126 are provided on the side of the horizontal member 103 opposite to the X direction.
Is fixed. Also, as shown in FIG.
The bearings 125 and 126 have an X-axis adjusting shaft 127 and a Y-axis.
An axial adjustment shaft 128 is supported so as to be rotatable with its position shifted in the vertical and Y directions. As shown in FIG. 20, the ends of both adjustment shafts 127 and 128 project in the anti-X direction via the side plate 102, and the operation knob 12 is manually operable at the projected end.
9, 130 are fixed.

As shown in FIGS. 20 and 21, the nut frame 132 is fixedly provided at the upper portion of the center portion of the rear surface (side surface in the Y direction) of the U-shaped outer frame 131. The X-direction adjusting shaft 127 is inserted and screwed into the nut body 132. Further, a pair of slide bodies 133 is provided on both sides in the X direction on the back surface of the outer frame 131. The slide body 133 is slidably fitted to a guide body 134 fixed to the horizontal member 103 and extended in the X direction. Therefore, when the X-direction adjusting shaft 127 rotates forward and backward, the outer frame 131 is guided by the guide body 134 via the nut body 132 and can move in the X direction and the anti-X direction.

The inner portion of the outer frame 131 (FIGS. 20 and 2)
2, the slide body 1 is provided on the inner surface of the right side 131a.
35 is fixed. Also, the outer portion of the outer frame 131 (FIG. 2)
In FIG. 22 and in FIG. 22, a slide body 137 is fixed to the inner surface of the left side (131b) 131b via a spacer 136. In FIG. 23, reference numeral 138 denotes a spacer 136.
Are fixed to the outer portion 131b of the outer frame 131.

Between the slide bodies 135 and 137,
An inner frame 140 is provided. The inner frame 140 is formed in a U-shape, and guides 141 are fixedly provided on the outer surfaces of both sides. The guide member 141 of the inner frame 140 is fitted to the slide members 135 and 137 of the outer frame 131 so as to be able to reciprocate in the Y direction.

A pair of bearings 142 project inward below the outer surface 131b of the outer frame 131, and a Y-direction rotating shaft 143 formed of a ball screw is rotatably supported on the bearings 142. Have been. A nut 144 is screwed to the Y-direction rotating shaft 143 between the bearings 142 (see FIGS. 22 and 23). The nut body 144 is connected to the inner frame 140.
It is fixed to the lower part of the side. The Y-direction rotating shaft 143
Has one end protruding from the bearing 142 in the anti-X direction, and a bevel gear 145 is fixed to the protruding end. Also, the Y
A bevel gear 146 is spline-connected to the direction adjusting shaft 128, and can be integrally rotated with respect to forward and reverse rotation of the Y direction adjusting shaft 128.
28 are relatively movable along the axial direction. The bevel gear 146 is meshed with the bevel gear 145 of the Y-direction rotation shaft 143.

Therefore, when the Y-direction adjusting shaft 128 is rotated forward and backward, the Y-direction rotating shaft 143 is rotated forward and reverse via the bevel gears 146 and 145. As a result, the nut body 144 is moved in the Y direction or the counter Y direction. , The inner frame 14
0 moves along the same direction.

As shown in FIG. 20 and FIG.
A pair of slides 1 on both sides of the inner surface of the central side wall
48 are fixedly provided. The CCD camera 123L has a case 147 formed in a box shape, and a pair of guide members 149 fixed on the back surface thereof are slidably fitted in the vertical direction (Z-axis direction) relative to the slide member 148. Have been combined. A bearing 15 is provided in the upper and lower portions of the center of the back of the case 147.
0 is fixed. On the bearing 150, a Z-axis direction adjusting shaft 151 formed of a ball screw is supported so as to be able to rotate forward and backward. A nut 152 is fixedly provided on the inner surface of the center side wall of the inner frame 140 at a position corresponding to the Z-axis adjusting shaft 151, and the nut 152 is screwed to the Z-axis adjusting shaft 151. An operation knob 153 is fixed to the upper end of the Z-axis direction adjusting shaft 151, and the CCD camera 123L can reciprocate in the vertical direction (Z-axis direction) by manually rotating the operation knob 153 forward and reverse. .

The slides 133, 135, 148
24, a tightening screw 155 is inserted as shown in FIG. The slide body 13 is provided at the tip of the tightening screw 155.
A fastening member 156 which is brought into contact with one side surface of 3,135,148 is screwed. At the base end of the tightening screw 155, a tightening member 157 which is in contact with the other surface of the slide bodies 133, 135, 148 is inserted. An operation handle 158 is fixed to a base end of the tightening screw 155.

When the tightening screw 155 is rotated in the tightening direction via the operation handle 158, the tightening member 1 is rotated.
The slide members 133, 135, and 1 are provided by holding the guide members 134, 141, and 149 on both sides.
And the relative movement of the guide members 134, 141, 149 is disabled. As a result, X,
The position can be fixed after the position adjustment in the Y and Z axis directions.

When the operating handle 158 is rotated in the direction opposite to the tightening direction, the tightening members 156 and 157 release the gripping of the guide members 134, 141 and 149 on both sides, so that the slide members 133, 135 and 148 And the guide members 134, 141, 149 can be relatively moved. As a result, the position of the CCD camera 123L in the X, Y, and Z axis directions can be adjusted.

In the case of adjusting the position of the CCD camera 123L in the X-axis direction, the position from the solid line position to the two-dot chain line position in FIG.
3 can be moved to a position above a substantially half position in the X-axis direction. When the Y-axis driving motor 97 is driven to adjust the position in the Y-axis direction, the position is indicated by a two-dot chain line in FIG. Can be moved.

For the CCD camera 123R, C
Since the CD camera 123L is different from the CD camera 123L only in that the support structure is reversed left and right, the position adjustment in the X-axis direction is substantially performed in the X-axis direction of the table 13 of the table device 12 from the solid line position as shown in FIG. It can be moved to the half position.
Further, the CCD camera 123R is provided with a Y-axis drive motor 97.
Is driven to adjust the position in the Y-axis direction, it is possible to move to a position indicated by a two-dot chain line in FIG. 11, that is, a substantially half position of the table 13 of the table device 12 in the Y-axis direction.

Next, the second print position detecting device 122 will be described. FIG. 9 is a side view of the second print position detecting device 122 viewed from the X direction. As shown in FIGS. 9 and 11, a pair of ball screws 162 and 163 are mounted on bearings 164 and 165 outside the pair of ball screws 92 and 93 on both upper surfaces of the table device 12 on the apparatus body 11. It is rotatably supported and extends over substantially half the length of the apparatus main body 11 in the Y direction. Ball screw 1
62 and 163, bevel gears 162
a, 163a are fixed.

On the apparatus main body 11, a rotation shaft 166 is rotatably supported via a bearing 161 on the side in the Y direction, and extends along the X direction. Bevel gears 166a are fixed to both ends of the rotation shaft 166,
The bevel gear 166a is connected to the ball screws 162 and 163.
Of the bevel gears 162a and 163a.

A Y-axis drive motor 167 composed of a step motor capable of rotating forward and reverse is supported via a bracket 159 at the Y-direction end of the apparatus body 11, and a pulley 167a is mounted on the output shaft of the Y-axis drive motor 167. Is fixed (Fig. 9
A timing belt 169 is mounted between the pulley 167a and a pulley 168 fixed to the center of the rotating shaft 166 (see FIG. 11). Therefore, the rotation of the Y-axis drive motor 167 causes the rotation of the rotation shaft 166 via the timing belt 169, and the driving torque is changed to bevel gears 166a, 162a, 163a.
Are transmitted to the ball screws 162 and 163 via the. Note that the Y-axis drive motor 167 has a rotary encoder, and its rotational drive amount can be detected.

As shown in FIGS. 7, 8 and 9, a pair of guide rails 170 are fixed below the ball screws 162 and 163 on the drawing apparatus main body 11, and extend in the Y direction. . A slider 171 is slidably fitted on each guide rail 170, and an upper portion of the slider 171 is screwed to the ball screws 162, 163.
Therefore, the slider 171 can move in the Y direction or the anti-Y direction by the forward / reverse rotation of the ball screws 162 and 163. A side plate 172 is provided upright on the slider 171, and a horizontal member 173 is provided between the side plates 172 as shown in FIG. 11.

A pair of CCD cameras 175R and 175L are provided for the X-direction side and the X-direction side of the lateral member 173, respectively. Note that the support structure of the two CCD cameras 175L and 175R is the same as that of the two CCD cameras 123R and 123L, and a description thereof will be omitted.

Then, both CCD cameras 175L, 175
The position adjustment range of R is the range indicated by the two-dot chain line shown in FIG. 11 in the X direction, and the range between the solid line position and the two dot chain line in the Y direction.

Further, as shown in FIG.
Inside the case 147 of 3L, 123R, 175L, 175R, a CCD sensor 180 as an image sensor,
CCD cameras 123L, 12
3R, 175L, and a detection target object located above 175R, in this embodiment, a first optical path H1 for taking in incident light from the substrate P, and a CCD camera 123L, 1
A second optical path H2 for taking in incident light from a detection / output object located below 23R, 175L, 175R.

That is, in FIG.
Windows 176 and 177 are formed in the upper and lower portions of the
6, 177, the prism 1
Numeral 78 is rotatably arranged, and the actuator 179 such as a solenoid rotates the prism 178 forward and backward by 90 degrees to change the reflection position, thereby changing the first optical path H1.
Alternatively, switching to the second optical path H2 enables detection of one of the detection targets positioned above and below. Although not shown in any of the optical path systems, a lens is provided.

Next, an electrical configuration in this embodiment will be described with reference to FIG. FIG. 26 shows an electric block diagram of this screen type printing apparatus. A central processing control device (hereinafter, referred to as a CPU) 71 includes a control unit,
ROM (not shown) for storing various control programs,
And a RAM as a readable and writable storage means for storing various input / output data and storing a calculation result
(Not shown). By the CPU 71,
A screen leaving control unit, a movement control unit, and a control unit are configured.

Each of the material presence / absence sensors 26 and 27 is a CPU.
The CPU 71 is connected to the CPU 71 and inputs a material presence / absence detection signal to the CPU 71. Operation table 7 constituting lift pin setting means
2 is provided with input keys such as numeric keys.
It is connected to the. Then, when the specific number data relating to the lift pin 42 input by the numeric keys is set and input, the CPU 71 stores each specific number data in a predetermined storage area of the RAM.

Further, in order to specify the positioning pins 32 and 33 to be used by the operation table 72, when the specific number data relating to the positioning pins 32 and 33 is set and input by input keys such as numeric keys, the respective specification pins are set. Number data to CPU
71 is stored in a predetermined storage area of the RAM. The operation table 72 also has input keys for manually operating each device provided in the screen-type printing apparatus 1. Based on an operation signal of the input keys, the CPU 71 causes the screen-type printing apparatus 1 to operate. Can be controlled.

The upper limit switch 78 is connected to the CPU 71
When the print frame 60 is located at the upper limit position, an “ON” signal is input to the CPU 71. C
Each of the CCD sensors 180 of the CD cameras 123L, 123R, 175L, and 175R is electrically connected to the CPU 71, and the CPU 71 performs image recognition based on an image signal captured by the CCD sensor 180.

Each drive motor for driving the table device 12 to X, Y, θ is electrically connected to the CPU 71, and based on a drive control signal from the CPU 71, drives the table device 12 to X, Y, θ. Drive to θ. The rotary encoder (not shown) provided for each drive motor is C
The detection signal is input to the PU 71, and the CPU 71 calculates the driving amount of each drive motor based on the detection signal.

An elevating drive motor 57 serving as a driving source for elevating the column 53 is electrically connected to the CPU 71 and drives the column 53 up and down based on an elevating drive signal from the CPU 71. Further, a rotary encoder (not shown) provided on the elevation drive motor 57 inputs the detection signal to the CPU 71. The CPU 71 calculates the drive amount of the elevation drive motor 57 based on the detection signal.

The control valves 73, 73 for the air cylinders 38, 49
Numeral 74 is provided in each of the intake pipes connecting the pneumatic pump 80 and the intake chamber. The control valves 73, 74 for the air cylinders 38, 49 are electrically connected to the CPU 71, are switched and driven based on a control signal from the CPU 71, and are switched and connected to the pneumatic pump 80. , The rods 39, 50 of the air cylinders 38, 49 are raised, lowered, or held at a stop position. The pneumatic pump 8
0 is conductively connected to the CPU 71,
It is driven based on the drive signal from. Further, the vacuum pump 77 is electrically connected to the CPU 71,
It is driven based on a drive signal from the CPU 71. The vacuum pump 79 is electrically connected to the CPU 71,
It is driven based on a drive signal from the CPU 71. The printing mechanism 52 is electrically connected to the CPU 71,
The print control is performed based on various print control signals of U71.

The control valves 75 and 76 for controlling the intake are provided on the intake pipe connecting the vacuum pump 77 and the intake chamber 23 and on the intake pipe connecting the through holes 41a and 42a of the lift pins 41 and 42, respectively. . Control valves 75 and 76
Are electrically connected to the CPU 71, and
Driven based on the control signal from the control valve 71, the control valves 75,
The valve body 76 (not shown) can be switched between an intake connection position connected to the intake circuit of the vacuum pump 77, an exhaust connection position connected to the exhaust circuit, and an intermediate position between the connection positions of the two circuits. . When the valve body is located at the intake connection position, the exhaust connection position, and the intermediate position, intake and exhaust through the intake chamber 23 and the through-holes 41a and 42a of the lift pins 41 and 42, and stop thereof are performed.

The CPU 71 controls the carry-in device 2 and the carry-out device 3 (hereinafter, referred to as a control unit).
Are also electrically connected so as to perform communication, and communication is performed between the devices.

The Y-axis drive motor 97 and the X-axis drive motor 106 of the film thickness detecting device 91 are electrically connected to the CPU 71, and rotate forward and backward based on a control signal from the CPU 71. Further, the Y-axis drive motor 167 of the second print position detecting device is electrically connected to the CPU 71,
Based on the control signal from the PU 71, the rotation is made forward and reverse.
A rotary encoder (not shown) provided in each of the drive motors 97, 106, and 167 inputs the detection signal to the CPU 71. The CPU 71 calculates the drive amount of each drive motor based on the detection signal.

The actuator 179 has a CPU
71, and is rotated 90 degrees in forward and reverse directions based on a rotation drive signal from the CPU 71. As a result, the prism 178 is rotated in the same direction, and the CCD sensor 180 can select the first optical path H1 or the second optical path H2 via the prism 178.

Now, the operation of the screen printing apparatus configured as described above will be described. Figures 27-28
9 shows a flowchart of a control routine executed by the CPU 71 when printing on the table device 12.

The control routine is broadly divided into a substrate positioning control routine (steps 10 to 130) when the substrate is loaded by the carry-in device 2, and a positioning control routine for positioning the screen 62 and the substrate P (steps 140 to 17).
0, of which step 150 constitutes a positioning mark detecting means, and step 160 constitutes a positioning control means. ), A print processing routine (step 180, which constitutes a print control means), a processing routine for film thickness measurement (steps 190 to 220, step 1)
90 and 200 constitute screen leaving control means),
Normal board unloading routine (steps 230 to 270), print update processing (steps 280 to 320, these steps constitute a print processing update unit), and faulty board unloading routine (steps 340 to 350, these steps are troubled). (A printed material discharge control means).

Before entering the control routine for printing, the printing frame 60 is arranged at a position close to the table 13 and the positioning pins 32 and 33 and the lift pins 41 and 4 are arranged.
Reference numeral 2 denotes a state in which the table 2 is located at a position flush with the mounting surface 18a of the table 12, and the intake chamber 23, the lift pins 41,
42 is a state in which the intake is not performed.

The first and second print position detecting devices 12
1,122 CCD cameras 123L, 123R, 175
L and 175R are O in FIG. 11 in the Y direction.
When the print frame 60 is located at the origin position located on the outer side of the print frame 60 indicated by reference numerals 1 and O2 and is close to the mounting surface 18a of the table 13 of the table device 12, the interference is prevented. Are located in Also, the CCD camera 123 of the first and second print position detecting devices 121 and 122
The positions L, 123R, 175L, and 175R are manually adjusted at predetermined positions in the X direction in advance so as to correspond to the positions of the positioning marks on the substrate P placed on the table device 12 in the X direction. It is fixed by fastening members 156 and 157.

(Substrate Positioning Control Routine When Loading Substrate by Loading Device 2) When entering this control routine, in step 10, various keys necessary for driving this screen type printing apparatus are input by inputting various keys on the operation table 72. Data, that is, (1) various data relating to driving of the table device 12 (for example, lift pin selection data of the lift pins 41 and 42 used in accordance with the size of the substrate P to be printed, positioning selection data, etc.), ( 2) Various data related to driving of the printing mechanism 52 (for example, squeegee 65 and doctor moving speed data, squeegee and doctor moving speed data, etc.), (3) first
And data relating to the driving of the second printing position detecting devices 121 and 122 (for example, the distances from the origin positions O1 and O2 of the positioning marks provided on the screen 62 (initial value data Y0), the CCD cameras 123L, 123R and 175.
L, the distance from the origin position in the X direction of 175R to the manually fixed position (initial value data X0);
Deviation angle (initial value data θ) related to a positioning mark provided on the screen 62 with respect to a reference line passing through the rotation center
0), data for setting the distance between positioning marks provided on the substrate P, and (4) data relating to driving of the film thickness detecting device 91 (for example, measurement direction (X direction, Y direction), movement for film thickness measurement). Distance data, measurement start position, measurement end position data, etc.), and (5) Virgin board data for indicating whether or not the board P is a virgin board without a positioning mark, etc., and store these data in the RAM. .

When the input of various data is completed, it is determined in step 20 whether or not the print frame 60 is located at the upper limit position. If there is no input of the "ON" signal of the upper limit switch 78, the process proceeds to step 30, in which the elevation drive motor 57 is driven to raise the elevation mechanism (not shown), and the screen 62 is moved relative to the table 13 with respect to the table 13. Move in the direction away from you.

If the print frame 60 is located at the upper limit position, that is, if an “ON” signal is input from the upper limit switch 78 for detecting the upper limit position, the process proceeds to step 40. In step 40, the loading device 2 takes out the substrate P from the rack 9 by using the fork 8, and places the fork 8 on which the substrate P is placed above the table device 12 (see FIG. 1). In this state, when a board positioning request signal is input from the loading device 2 to the CPU 71, the CPU 71 reads out the positioning selection data stored in the RAM based on this signal and operates the positioning pins 32 and 33 which are selected. A control signal is output to the control valve 73 to drive the control valve 73. With this drive. The positioning air cylinder 38 is driven, and the positioning pins 32 and 33 are raised via the rod 39 (see FIG. 16).

After the raising of the positioning pins 32 and 33 is completed, in step 60, the carry-in device 2 moves the fork 8 in the anti-X direction and the anti-Y direction in FIG. Hit and position. Then, the process proceeds to a step 70, wherein the lift pin selection data stored in the RAM is read, and the selected lift pin 4
A control signal is output to the control valves 74 related to the control valves 1 and 42 to drive the control valves 74. With this drive, the air cylinder 49 is driven, and the lift pins 41 and 42 are raised via the rod 50 (see FIG. 16). In step 70, a control signal is output to the control valve 76, and the valve body of the control valve 76 is connected and driven to the suction side connection position. By this connection, the lift pins 41 and 42 are communicated with the vacuum pump 79.
Is taken in through the through holes 41a and 42a.

As a result, the positioned substrate P is transferred from the fork 8 to the lift pins 41 and 42, and the through holes 41a and 4 of the lift pins 41 and 42 at the raised position.
It rises while being adsorbed by 2a.

In the next step 80, the loading device 2
Moves the fork 8 away from above the table 13 along the horizontal plane, and carries out a preparation process for carrying in the next printed substrate P stored in the rack 9. By the retreat movement along the horizontal plane, the fork 8 of the loading device 2 can move without interfering with the substrate P lifted by the lift pins 41 and 42.

At step 90, a control signal is output to the control valve 75, and the valve body of the control valve 75 is connected and driven to the suction side connection position. By this connection, the table 13 is communicated with the vacuum pump 77, so that the table 13 is suctioned through the suction chamber 23.

In the following step 100, a control signal is output to the control valve 74 related to the lift pins 41 and 42 that are rising, and the control valve 74 is driven. With this drive, the air cylinder 49 is driven, and the lift pins 41 and 42 are lowered via the rod 50. Further, after the lowering is completed, that is, after the movement to the position flush with the mounting surface 18a of the table 12, a control signal is output to the control valve 76 to drive the valve body of the control valve 76 to the intermediate position. As a result, the lift pins 4
The intake through the through holes 41a and 42a is stopped. At this time, since the suction on the table 13 side is being performed, the substrate P that has been mounted and sucked on the lift pins 41 and 42 is mounted and sucked on the table 13.
Does not shift laterally.

In the next step 110, the CPU 71
Outputs a control signal to the control valve 73 associated with the positioning pins 32 and 33 located at the ascending position to drive the control valve 73.
With this drive, the positioning air cylinder 38 is driven, and the positioning pins 32 and 33 are lowered via the rod 39.

Next, at step 120, table 1
3 It is determined whether or not the sensors from the material presence / absence sensors 26, 27 located closest to the center to the material presence / absence sensors 27 corresponding to the positioning pins 32, 33 are inputting the "ON" detection signal with material presence. If all of the “ON” detection signals indicating that there is material in the sensors from the material presence sensors 26 and 27 closest to the center of the table 13 to the material presence sensors 27 corresponding to the positioning pins 32 and 33 are not input, The CPU 71 determines that the substrate P is incompletely positioned, inputs a discharge signal to the control unit of the carry-in device 2, and performs error processing in step 130. That is, the carry-in device 2 discharges the erroneous substrate P based on the discharge signal, inputs a discharge completion signal to the CPU 71, and returns to step S20. When the CPU 71 inputs the discharge completion signal, the processing from step 20 is restarted.

If it is determined in step 120 that all the “ON” detection signals indicating the presence of a material have been input, the process proceeds to step 140. (Positioning control routine between screen 62 and substrate P)
In step 140, it is determined in step 10 whether or not the loaded substrate P is a virgin substrate based on the previously input virgin substrate data. If it is not a virgin substrate, the process proceeds to step 150, and if it is a virgin substrate, the process proceeds to step 360.

In step 360, since the input substrate P is a substrate on which the positioning mark is not printed, the input key of the operation table 72 is operated to adjust the position of the screen 62 of the printing mechanism 52 and the substrate P. That is,
The adjustment of the relative position between the printing mechanism 52 and the table device 12 is performed while confirming with the eyes of the operator. After the completion of the adjustment, an operation completion signal is sent to the CPU by a key operation from the operation table 72.
When input is made to 71, the process proceeds to the printing process of step 180.

If it is determined in step 140 that the loaded substrate P is not a virgin substrate, step 1
The process proceeds to 50, where the print position detection control by the CCD camera is performed.

Here, a print position detection control routine by the CCD camera will be described with reference to FIG. In this control routine, in step 151, the CPU 7
1 is a CCD camera 123L, 123R, 175L, 17
A rotation drive signal is input to the 5R actuator 179,
The actuator 179 is driven. Actuator 1
By driving 79, the prism 178 is rotated to switch to the first optical path H1. As a result, the CCD camera 123
L, 123R, 175L, and 175R can capture an image of the screen 62 located above.

In the next step 152, the CPU 71
Outputs a control signal to the Y-axis drive motors 97 and 167 in step 10 based on distance data (initial value data Y0) from the origin positions 01 and O2 relating to the positioning marks of the screen 62 input in advance. Then, the CCD cameras 123L, 123R, 175L, 175R are moved from the origin positions O1, O2 shown in FIG. 3 and positioned below the positioning marks on the screen 62 (see FIG. 9).

In this embodiment, the positioning mark of the substrate P employs a corner reference arranged at the corner of the substrate P, and the four positioning marks are located at the four corners as shown in FIG. Mark MA is marked. Although not shown, four positioning marks are also marked on the screen 62 at positions corresponding to the marks MA.

In the next step 153, the CCD cameras 123L, 123R, 175L, 175R take images of the positioning marks on the screen 62, and
Input the image data.

In step 154, the CPU 71 sets the input image data and the initial value data X0, Y0,
θ0 and CCD cameras 123L, 123R, 175
When the L and 175R move, the position data (X1) in the X direction and the screen 6 are determined based on a detection signal from a rotary encoder (not shown) of the Y-axis drive motors 97 and 167.
The distance (Y1) from the origin positions O1 and O2 of each of the positioning marks 2 and the deviation angle (θ1) from a reference line passing through the center of rotation of the table device 12 are calculated. The calculated values X1, Y
1, 1 are stored in the RAM.

Next, at step 155, the CPU 71
Are CCD cameras 123L, 123R, 175L, 175
A rotation drive signal is input to the R actuator 179, and the R actuator 179 is inverted. Actuator 17
9, the prism 178 is inverted, and the second
To the optical path H2. As a result, the CCD camera 123
L, 123R, 175L, and 175R image the substrate P located below.

At step 156, the CCD camera 1
23L, 123R, 175L, 175R are screen 6
An image of the positioning mark attached to 2 is taken, and the image data is input to the CPU 71. In step 157,
Based on the input imaging data, the CPU 71 determines the position data (X2) in the X direction, the distance (Y2) from the origin positions O1 and O2 of the respective positioning marks on the screen 62, and the reference line passing through the rotation center of the table device 12. Deviation angle from (θ
2) is calculated. The calculated values X2, Y2 and θ2 are stored in RAM
To be stored.

Subsequently, in step 158, deviations ΔX, ΔY, Δθ between X1, Y1, θ1 calculated in step 154 and the calculated values X2, Y2, θ2 calculated in step 157 are calculated, and the deviations are stored in the RAM. Is stored.

After the processing in step 158, the print position detection control routine ends, and the flow shifts to step 160.
Returning again to the flowchart of FIG.
Then, based on the calculated deviations ΔX, ΔY, Δθ, the driving motors related to X, Y, θ of the table device 12 are driven, and the substrate P is relatively moved with respect to the screen 62 to eliminate the deviation. And even if this relative movement is completed,
When the deviation between the positioning mark MA of the substrate P and the positioning mark of the screen 62 is large and the deviation cannot be eliminated, that is, when it is determined that the positioning is poor,
Move to step 330.

In step 330, the CPU 71 outputs a control signal to the Y-axis drive motors 97 and 167 to rotate them,
CCD cameras 123L, 123R, 175L, 175R
To the origin positions O1 and O2.

(Unsuccessful Substrate Unloading Routine) In step 340, the unloading device 3 inserts the fork 8 between the substrate P lifted by the lift pins 41 and 42 and the table 13, and sends a fork insertion completion signal to the CPU 71. To enter.

In the next step 350, the CPU
Reference numeral 71 outputs a control signal to the control valve 76 related to the lift pins 41 and 42 that are rising in response to the fork insertion completion signal, and drives the valve body of the control valve 76 to the intermediate position. As a result, the intake of the lift pins 41 and 42 through the through holes 41a and 42a is stopped. Further, the CPU 71 outputs a control signal to the control valve 74 to drive the control valve 74. With this drive, the air cylinder 49 is driven, and the lift pins 41 and 42 are lowered via the rod 50. After the descent is completed,
That is, the movement to the position flush with the mounting surface 18a of the table 12 is completed. On the other hand, the unloading device 3 lifts the fork 8 and places the substrate P on the fork 8, and then unloads the substrate P. After the completion of unloading, the control unit of the unloading device 3 inputs a unloading completion signal to the CPU 71.

The table 1 of the lift pins 41 and 42
The protrusion amount of the fork 8 from the mounting surface 18a at the lift-up position is larger than the thickness (up and down width) of the fork 8, so that the fork 8 does not interfere with the substrate P.

When step 350 ends, the process returns to step 20. In step 160, when the positioning of the substrate P is within a predetermined allowable range and the deviation can be eliminated, that is, when it is determined that the positioning has been successfully performed, the process proceeds to step 170. .

In step 170, as in step 330, the CPU 71 outputs a control signal to the Y-axis drive motors 97, 167 to rotate them, and the CCD cameras 123L, 123
R, 175L, 175R are returned to the origin positions O1, O2.

(Print Processing Routine) When the process proceeds from step 360 or from step 170 to step 180, in step 180, the squeegee 65 or the like is moved to perform print processing control. Since the printing process control is not a main part of the present invention, the description is omitted.

(Processing Routine for Film Thickness Measurement) Before entering this control routine, it is in a state immediately after the end of the printing process for the substrate P, and the printing frame 60 is arranged at a position close to the table 13. The positioning pins 32 and 33 and the lift pins 41 and 42 are in a state of being flush with the mounting surface 18a of the table 12, and the intake chamber 23 is being sucked.

At the start of this control routine, step 19
At 0, a motor (not shown) is driven to raise the elevating mechanism, and the screen 62 is moved in a direction away from the table 13 to determine at step 200 whether the printing frame 60 is located at the upper limit position. judge.

When the printing frame 60 is located at the upper limit position, that is, the upper limit switch 7 for detecting the upper limit position.
If the “ON” signal from the step 8 is input, step 2
Move to 10. In step 210, it is determined whether to perform the film thickness measurement based on the film thickness measurement determination flag. The film thickness measurement determination flag is input by an input key when film thickness is measured in step 10, and is set to "1". Therefore, it is determined whether or not this film thickness measurement determination flag is set to “1”.
If the film thickness determination flag is not set to "1", the process jumps to step 230.

If the film thickness determination flag is set to "1", in step 220 a film thickness measurement control routine is executed. Next, a film thickness measurement control routine will be described with reference to FIG.

In step 400, control signals are input to the X-axis drive motor 106 and the Y-axis drive motor 97 of the film thickness detecting device 91 based on the input measurement start position data in step 10. As a result, the horizontal member 103 moves in the Y direction,
Moves to the measurement start position (step 410).

Next, in step 420, it is determined whether the measurement direction of the film thickness of the substrate P is the X direction or the Y direction. This determination is made in advance in step 10
Is performed based on the measurement direction data set by the input of the input key. If the measurement direction is the Y direction, the process proceeds to step 480. If the measurement direction is the X direction, the process proceeds to step 430.

In step 430, the X-axis drive motor 10
6 is driven to move the film thickness sensor 111 in the X direction. For example, if the film thickness sensor 111 is at the position shown in FIGS. 5 and 6, it moves along the two-dot chain line in FIG. Step 440
During the movement in the X direction, the film thickness sensor 111
The upper film thickness is measured, and the measurement data is input to the CPU 71. When the CPU 71 reaches the measurement end position, the CPU 71 stops the X-axis drive motor 106 (step 450),
Move to step 460.

Further, steps 420 to 48 are performed.
If it has shifted to 0, in step 480, the Y-axis drive motor 106 is driven to move the film thickness sensor 111 in the Y direction. In step 490, while moving in the Y direction, the film thickness sensor 111 measures the film thickness on the substrate P, and inputs the measurement data to the CPU 71. When reaching the measurement end position, the CPU 71 controls the Y-axis drive motor 106 to stop (step 500). Move to step 460.

When the process proceeds from step 450 or step 500 to step 460, control signals are input to the X-axis drive motor 106 and the Y-axis drive motor 97 to return the film thickness sensor 111 to the origin. As a result, the horizontal member 1
03 moves to the origin position in the Y direction, and the film thickness sensor 111 moves to the origin position in the X direction (step 470). When the process of step 470 is completed, the control routine ends, and the routine goes to step 230.

Steps 400 and 410 constitute a measurement start position movement control means, and step 420 constitutes a measurement direction judging means. Step 430 constitutes the X-direction movement control means, and step 480 constitutes the Y-direction movement control means. The X-direction movement control means and the Y-direction movement control means constitute a predetermined-direction movement control means. Steps 460 and 470 constitute the origin position return control means.

(Normal Substrate Unloading Routine) Step 210
When the process proceeds from step 220 to step 230, in step 230, a control signal is output to the control valve 75, and the valve body of the control valve 75 is connected and driven to the exhaust side connection position. With this connection, exhaust is performed through the intake hole of the table 13 and the intake chamber 23. As a result, the suction of the table 13 on the substrate P is released.

Then, the process proceeds to a step 240, wherein the lift pin selection data stored in the RAM is read, a control signal is outputted to the control valve 74 relating to the selected lift pin 41, 42, and the control valve 74 is driven. . With this drive, the air cylinder 49 is driven, and the lift pins 41 and 42 are raised via the rod 50 (see FIG. 16).
In step 240, a control signal is output to the control valve 76 to connect and drive the valve body of the control valve 76 to the suction side connection position. By this connection, the air is communicated with the vacuum pump 79, so that air is sucked through the through holes 41 a and 42 a of the lift pins 41 and 42. As a result, the substrate P rises while being sucked by the through holes 41a and 42a of the lift pins 41 and 42 at the ascending position.

Next, in step 250, it is determined whether or not the result of the film thickness measurement performed in step 220 is within the allowable value. And if out of tolerance,
The process shifts to step 340 to shift to the defective substrate unloading routine of steps 340 and 350 to unload the substrate P.

If the process proceeds to step 260, in step 260, the unloading device 3 inserts the fork 8 between the substrate P lifted by the lift pins 41 and 42 and the table 13, and the control unit inserts the fork. A completion signal is input to the CPU 71.

In the following step 270, the CPU
Reference numeral 71 outputs a control signal to the control valve 76 related to the lift pins 41 and 42 that are rising in response to the fork insertion completion signal, and drives the valve body of the control valve 76 to the intermediate position. As a result, the suction through the through holes 41a, 42a of the lift pins 41, 42 is stopped.

Thereafter, the CPU 71 outputs a control signal to the control valve 74 to drive the control valve 74. With this drive,
The air cylinder 49 is driven, and the lift pins 41 and 42 descend via the rod 50. After the lowering is completed, that is, the movement to the position flush with the mounting surface 18a of the table 12 is completed. On the other hand, the control unit of the unloading device 3 lifts the fork 8 and places the substrate P on the fork 8, and then unloads the substrate P. After the completion of unloading, the control unit of the unloading device 3 inputs a unloading completion signal to the CPU 71.

The table 1 of the lift pins 41 and 42
The protrusion amount of the fork 8 from the mounting surface 18a at the lift-up position is larger than the thickness (up and down width) of the fork 8, so that the fork 8 does not interfere with the substrate P.

At 280, it is determined whether the film thickness has been measured. This determination is made based on the film thickness determination flag. When the film thickness determination flag is set to “1”, the process proceeds to step 290, and when the film thickness determination flag is not set to “1”, the process jumps to step 310.

In step 290, the result of the film thickness measurement is output to a display (not shown),
At 0, if the film thickness is within the allowable value, step 310
If the film thickness is out of the allowable range, the process returns to step 10 and returns to the initial setting step. That is, the process returns to step 10 for re-input of the initial value data.

When the process proceeds from step 280 or step 300 to step 310, in step 310, the board print count C is incremented by "1".
In step 320, it is determined whether or not the board print count C has reached the predetermined number N. This predetermined number N is determined in step 10
And stored in the RAM in advance as initial value data. If the predetermined number N has not been reached, the process returns to step 20 to start the process of preparing for printing on the next substrate P.

If the substrate print count C has reached the predetermined number N, the control routine for printing is terminated. The screen printing apparatus according to the present embodiment has the following effects.

1) In the present embodiment, step 180
After the printing process in step 190, step 200
In FIG. 6, after raising the printing frame 60 (that is, the screen 62), the film thickness detecting device 91 (the film thickness sensor 11) is disposed between the table 13 and the screen 62 as shown in FIG.
1) was inserted, and the film thickness applied to the substrate P on the table 13 was detected. As a result, the film thickness can be measured immediately after printing.

If the result of the film thickness measurement is out of the permissible range, the process returns from step 300 to step 10. Therefore, before starting the printing process of the next substrate, it is necessary to manage step initial value data and the like. Data can be changed immediately. As described above, since the film thickness is detected immediately after printing, the result of the film thickness detection can be promptly reflected in the next printing.

2) In the present embodiment, the film thickness sensor 11
1 is used for driving the first print position detection device 121 for movement in the Y direction.
Also used as the shaft drive motor 97. As a result, there is no need to provide a dedicated Y-axis drive motor for the film thickness detecting device 91, and the cost can be reduced. That is, a moving area for moving the CCD cameras 123L and 123R of the first printing position detecting device 121 in the Y direction and an area for moving the film thickness sensor 111 in the Y direction for measuring the film thickness. Since there are overlapping areas, one driving source can sufficiently cope with them. In addition, since the timings of the detection and measurement are different from each other, even when driven by one drive motor, the detection and the mutual detection are performed.
There is no hindrance to the measurement work.

3) In the present embodiment, the horizontal member 103
The film thickness sensor 111 and the CCD cameras 123L and 123R are arranged on the side surface on the side opposite to the Y direction and the side surface on the Y direction side. As a result, even if the moving regions in the X direction of the film thickness sensor 111 and the CCD cameras 123L and 123R overlap with each other moving regions for measurement and detection, they can move independently. For this reason, even if the other devices are moved in the X direction, they can be performed without any trouble.

4) In the present embodiment, the screen 62
Is positioned above and away from the table 13,
The first print position detecting device 121 and the third print position detecting device 122 are moved between the screen 62 and the table 13 to detect the positioning marks MA provided on the screen 62 and the substrate P, respectively. That is, the positioning mark is detected from below the screen 62 and from above the substrate P.

As a result, both the substrate P and the positioning mark MA of the screen 62 can be detected closer and different from the conventional one, and can be aligned by adjusting the position of the table device 12.

Further, unlike the conventional case in which the positioning mark provided on the substrate is detected via the screen, the positioning mark MA provided on the substrate P is clearly detected since the detection is not performed via the screen. Can be
The alignment between the substrate P and the screen 62 can be performed more accurately.

That is, the CCD cameras 123L, 123R, 175
L, 175R can be moved closer.
Conventionally, due to the structure of the screen printing device,
When viewed from above through the screen, other members supporting the screen are in the way, and the detection is performed at a position far away from the substrate. However, in this embodiment, such a problem is eliminated. .

5) In this embodiment, every time the substrate P to be printed is loaded, the CCD cameras 123L, 123
The positioning marks MA on the screen 62 and the substrate P are detected on the R, 175L, and 175R, and the alignment between the substrate P and the screen 62 is performed.

As a result, even if the screen 62 has undergone plate elongation during printing, the positioning of the substrate P can be adjusted in accordance with the plate elongation. 6) In the present embodiment, the first print position detecting device 12
A pair of CCD cameras are provided in each of the first and second print position detecting devices 122, and can be moved in both the X and Y directions.

As a result, the substrate P or the screen 62
Position of the positioning mark MA provided for the substrate P
, Or various arrangements such as a case where the positioning mark MA is arranged only on one half of the substrate P.

7) In the present embodiment, the CCD camera
By providing a single CCD sensor 180 and arranging to switch the prism 178, the first or second optical path H1,
H2 is selected so that the positioning mark MA on either the screen 62 or the substrate P can be detected. As a result,
Since the positioning marks MA located in opposite directions can be detected only by the configuration of the single CCD sensor 180, the configuration can be simplified, the number of parts can be reduced, and the cost can be reduced.

8) In the present embodiment, in step 80, the carry-in device 2 retreats the fork 8 from above the table 13 along the horizontal plane, and carries in the next printed substrate P stocked in the rack 9. Preparation processing was performed.
By the retreat movement along the horizontal plane, the fork 8 of the loading device 2 can move without interfering with the substrate P lifted by the lift pins 41 and 42.

9) In this embodiment, the lift pins 4
As shown in FIG. 13, the arrangement of
The length of the side in the direction is larger than the length of M2 in the X direction, and the length of the rectangle M1 in the Y direction is smaller than the length of M2. The lift pins 41 and 42 located at the four corners of each of the rectangles M1 and M2 were set as line target positions across the center line m as shown in FIG. With this arrangement, substrates P of various sizes can be placed on the lift pins 41 and 42 by appropriately selecting and using the lift pins 41 and 42.

10) In this embodiment, the positioning pins 32 are disposed at positions symmetrical with respect to the material presence / absence sensors 27 so as to be symmetrical with respect to the center line m. As shown in FIG. 14, the portion is located at a position in contact with the orthogonal α1 to α4 lines on the optical path of the material presence / absence sensor 27. In addition, positioning pins 33 are arranged at a predetermined distance from the material presence sensor 26 on the carry-out side with respect to the center line n corresponding to the two material presence sensors 26 located on the printing start side, and the remaining two Corresponding to the material presence sensor 26,
Two material presence / absence sensors 32 closer to the center of the positioning pins 32 are arranged correspondingly. These materials presence sensor 3
As shown in FIG. 14, the printing end side portions of the reference numerals 2 and 33 are located at positions in contact with orthogonal β1 to β4 lines on the optical path of the material presence / absence sensor 26.

As a result, for example, when printing substrates P1 and P2 of different sizes as shown in FIG. 14, if the positioning pins corresponding to the sizes are selected on the operation table 72, Regardless of the size of P, positioning can be performed with respect to the table 13 and printing can be performed.

11) Further, by providing through holes and the like for sucking and holding the substrate P in both of the lift pins 41 and 42 and the table 13, the substrate can be placed on the table 13 when the substrate is loaded and unloaded. The lifts 41 and 4 can be securely held on the lifts 41 and 42 and
Transfer of substrate P from 2 to table 13, table 1
Transfer of the lifts 41 and 42 from 3 can also be performed reliably.

12) In this embodiment, the positioning pins 32,
33 can be made to appear on the table 13. At the time of loading, by positioning the positioning pins 32 and 33 at the protruding positions, the substrate P that has moved from the loading side can be positioned.

When carrying out the substrate, the positioning pins 32, 3
3 can be flush with the table 13. As a result, when the substrate is unloaded, the fork 8 of the unloading device can be moved from the unloading side of the table 13 close to the table 13, and the positioning pins 32 and 33 do not interfere with the fork 8 of the unloading device 3, An unloading operation can be performed.

Note that the present invention is not limited to the configuration of the above-described embodiment, and may be as follows. (A) In the above embodiment, the CCD cameras 123L, 12
Although the movement adjustment of the 3R, 175L, and 175R in the X direction is performed manually, it may be driven by a drive source such as a motor.

(B) In the above-described embodiment, the driving source for moving the first and second printing position detecting devices 121 and 122 in the Y direction is a motor, but an air cylinder or a hydraulic cylinder is used. May go.

(C) In the above embodiment, the drive source for raising and lowering the column 53 is the lifting drive motor 57, but a hydraulic cylinder or the like may be used as the drive source. (F) In the above embodiment, before the detection movement of the film thickness detection device 91, the retreat direction of the screen 62 is set to the upward direction of the table 13, but the retreat direction of the screen 62 may be set to the side of the table 13. .

(G) In the above embodiment, the film thickness detecting device 9
1 and the first printing position detecting device are supported by moving means constituted by a rotating shaft 96, a ball screw 93 and the like, but a first moving means independently supported by each device; They may be supported by the second moving means and may move independently.

(H) In the above embodiment, the optical path of the CCD camera is switched by rotating the prism. However, a reflective mirror may be provided on the optical path to switch the reflective mirror. The reflecting mirror and the prism of the above embodiment constitute an optical path switching unit.

The CCD sensor 180 constitutes a film thickness detecting section, and the actuator 179 constitutes switching drive means for switching the optical path switching means.
Constitutes optical path switching control means for performing switching control of the switching drive means.

Next, technical ideas other than the inventions described in the claims that can be understood from the above embodiment will be described together with their effects. (1) In a screen printing apparatus that prints and applies a printing paste to a printing material placed on a table using a screen and a squeegee, the screen is moved upward from a position immediately above the printing material on the table and separated from above. Screen leaving means, by the screen leaving means,
After the screen leaves, the first to move above the substrate
Moving means, second moving means, first positioning detecting means supported by the first moving means, and detecting a positioning mark marked on a printing medium placed on a table; A second positioning detecting means supported by the moving means and detecting a positioning mark marked on an upper screen; and a second positioning detecting means supported by the second moving means and mounted on a table. A film thickness detecting means for detecting a film thickness, a table position adjusting means capable of adjusting a relative position of the table with respect to the screen, a detection result of the first positioning detecting means, and a detection result of the second positioning detecting means And a table control means for adjusting the position of the table position adjusting means based on the screen printing apparatus.

Thus, when the print medium is placed on the table, the print medium can be aligned and positioned with respect to the screen. In the above embodiment, the CPU 71
Constitute table control means. The table device 12 constitutes a table position adjusting means. Further, in the above embodiment, the first and second moving means are constituted by the rotating shaft 96, the ball screw 93 and the like.

(2) In the above (1), a screen type printing apparatus wherein the first moving means and the second moving means are constituted by a common moving means. By doing so, the number of parts can be reduced because the moving means is single, and the mounting space is not required, so that the printing apparatus can be downsized.

(3) The screen printing apparatus according to (1) or (2), wherein the first positioning detecting means and the second positioning detecting means are constituted by common positioning detecting means. By doing so, the number of parts can be reduced because the positioning means becomes single.

[0165]

According to the first, second and fifth aspects of the present invention, it is possible to detect the thickness of the film after coating immediately after printing. As a result, since the film thickness is detected immediately after printing, the result of the film thickness detection can be promptly reflected in the next printing.

According to the third aspect of the present invention, since the retreating direction of the screen is the upper direction of the table and the screen does not move in the horizontal direction, there is no need to secure a space for moving in the horizontal direction. Mounting space can be reduced.

According to the fourth aspect of the present invention, the film thickness detecting means is provided by X
The direction moving unit and the Y direction moving unit can move in the X and Y directions on a plane above the table, so that the film thickness detecting device can be detected at an arbitrary position with respect to the substrate.

[Brief description of the drawings]

FIG. 1 is a schematic plan view of a screen printing apparatus and a loading / unloading apparatus according to an embodiment.

FIG. 2 is a schematic side view of a screen type printing apparatus and a loading / unloading apparatus.

FIG. 3 is an explanatory diagram for explaining movement of a CCD camera in the screen printing device.

FIG. 4 is an explanatory diagram for explaining movement of a CCD camera in the screen printing apparatus.

FIG. 5 is an explanatory diagram for explaining movement of a film thickness detecting device in the screen printing device.

FIG. 6 is an explanatory diagram for explaining the movement of a film thickness detection device in the screen printing device.

FIG. 7 is a side view of a main part of the screen printing apparatus.

FIG. 8 is a side view of a main part of the screen printing apparatus.

FIG. 9 is a side view of a main part of a second print position detecting device.

FIG. 10 is a side view of a first printing position detecting device and a film thickness detecting device.

FIG. 11 is a plan view of a first print position detecting device, a second print position detecting device, and a film thickness detecting device.

FIG. 12 is a cross-sectional view of the XY-θ table device shown in FIG.
FIG.

FIG. 13 is a plan view of a table.

FIG. 14 is a plan view of the table.

FIG. 15 is a sectional view showing an attached state of the material presence sensor.

FIG. 16 is a sectional view showing an assembled state of a positioning pin and a lift pin.

FIG. 17 is a cross-sectional plan view of a film thickness detection device.

FIG. 18 is a side sectional view of a film thickness detecting device.

FIG. 19 is a front sectional view of the film thickness detecting device.

FIG. 20 is a plan view showing a support structure of the CCD camera.

FIG. 21 is a rear view showing a support structure of the CCD camera.

FIG. 22 is a side sectional view showing a support structure of the CCD camera.

FIG. 23 is an essential part cross-sectional view showing a support structure of the CCD camera.

FIG. 24 is a side view showing a tightening member of the CCD camera.

FIG. 25 is a schematic explanatory view of a CCD camera.

FIG. 26 is an electric circuit block diagram showing an electric configuration of the screen printing apparatus.

FIG. 27 is a flowchart of a control routine during printing.

FIG. 28 is a flowchart of a control routine for printing.

FIG. 29 is a flowchart of a control routine for printing.

FIG. 30 is a flowchart of a positioning control routine.

FIG. 31 is a flowchart of a film thickness measurement control routine.

[Explanation of symbols]

1. Screen printing device. 2 ... loading device, 3 ... unloading device, 8 ... fork, 11 ... device body, 12 ... XY-θ
Table device, 57 ... Elevating drive motor, 53 ... Post, 5
9: transport frame 59 (elevation drive motor 57, column 53
Together with the above, it constitutes a screen leaving means. ). 71
... CPU constituting screen leaving control means and movement control means, 91... Film thickness detecting device, 92.
... Ball screw, 96 ... Rotating shaft, 97 ... Y-axis drive motor (moving means is constituted by the rotating shaft 96, the ball screw 93, etc.), 103 ... Horizontal member, 105 ... Ball screw, 106 ... X-axis drive motor, 111 ... film thickness sensor as film thickness detecting means, 121 ... first printing position detecting device, 122 ... second printing position detecting device, 123R, 12
3L, 175R, 175L ... CCD camera, 167 ... Y
Shaft drive motor, 180: CCD sensor, P: substrate.

Claims (5)

[Claims] 1. A screen printing apparatus for printing and applying a printing paste to a printing material placed on a table by using a screen and a squeegee. Screen retreating means for moving the screen in the retreating direction; moving means for moving the screen upward by the screen retreating means, after which the screen retreats; and a printing material supported by the moving means and placed on a table A screen type printing apparatus comprising: a film thickness detecting means for detecting an upper film thickness. 2. A screen retreat control means for controlling the screen retreating means to move the screen in a retreating direction immediately after printing is completed, and a movement for controlling the movement of the moving means to a position above a printing material after the screen retreats. The screen-type printing apparatus according to claim 1, further comprising: control means. 3. The screen-type printing apparatus according to claim 1, wherein the retreat direction of the screen is an upward direction of the table. 4. The screen printing apparatus according to claim 1, wherein the moving unit includes an X-direction moving unit that moves in the X and Y directions on a plane above the table, and a Y-direction moving unit. 5. After printing is completed, the screen is retreated from above the printing material, and thereafter, a film thickness detecting means for detecting the film thickness is moved above the printing material, and then the film thickness of the coating film applied to the printing material is measured. A method for detecting the thickness of a printed material to be detected.