JPH10128697A - Drilling device for soft sheet such as ceramic green sheet, flexible board - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a drilling device drilling at a high speed a soft sheet of ceramic green sheet, flexible board, etc., wound in a roll shape. SOLUTION: A drill tool unit 21 is moved by a mechanism considering only a Y-axis line direction, a soft sheet X is moved by a mechanism considering only an X-axis line direction. In the soft sheet X, in the upstream/downstream of the drill tool unit 21, a U-shaped sagging part x by dead weight adjusted to the prescribed by a detection means 7 is generated. By the sagging part x, a drilling objective location of the soft sheet X is fixedly fed from both sides, in the case of applying drilling to the drilling objective location by the drill tool unit 21, a surplus margin without tension acting in a delivery mechanism 3 and a winding mechanism is formed, feed movement by light feed resistance (feed force) can be performed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a punching apparatus for punching a soft sheet such as a ceramic green sheet or a flexible substrate, and more particularly to a punching apparatus for punching out a soft sheet wound in a roll shape in a predetermined punching pattern. It is about.

[0002]

2. Description of the Related Art Conventionally, as a punching apparatus for punching while feeding a soft sheet such as a ceramic green sheet or a flexible substrate wound in a roll shape, for example, Japanese Patent Publication No. 7-4
No. 7279 (the former) and Japanese Patent Publication No. 7-47280 (the latter) are known. Both the former and the latter basically use a winding mechanism (winding roll) provided on the other side while feeding a roll-shaped soft sheet provided on one side of the machine base in the X-axis direction by a feeding mechanism (feeding roll). This is a structure in which the flexible sheet is perforated at the perforated portion between the feeding mechanism and the winding mechanism while being wound.

[0003]

However, in the former case, the punching unit is fixed at the punching portion, and a feeding mechanism, a winding mechanism, a soft sheet wound in a roll shape, and a machine itself for supporting them are X. A system for moving in the Y-axis direction, the latter is a system for moving the punch unit in the X and Y-axis directions because the feeding mechanism, the winding mechanism, and the flexible sheet wound in a roll form a fixed type, Both require a large-scale, high-output drive mechanism. As described above, the method of moving the perforated portion side (the feeding mechanism, the winding mechanism, the soft sheet wound in a roll, and the machine base supporting them) and the perforator unit in the X and Y axis directions requires high weight,
There is a problem that it cannot cope with today's high-speed drilling required due to high power.

[0004] The present invention has been made in view of the conventional circumstances, and an object thereof is to provide a punching device for punching a soft sheet such as a ceramic green sheet or a flexible substrate wound in a roll at a high speed. It is in.

[0005]

The present inventors have conducted intensive studies to enable high-speed drilling. As a result, the X-axis direction moving function and the Y-axis direction The inventor of the present invention has found out an effective function of imparting tension to a portion to be perforated after sharing the transfer function and suppressing the feeding resistance of the soft sheet to a small value. That is, the technical means taken to achieve the above-mentioned object is that the claim 1 is a feeding mechanism for feeding a soft sheet wound in a roll shape such as a ceramic green sheet or a flexible substrate in the X-axis direction, and a roll-out mechanism. A winding mechanism that winds in a shape, a feeding mechanism, a punching unit that is disposed between the winding mechanism and moves a punching tool unit back and forth in the Y-axis direction to punch a target portion of the soft sheet. A sheet feeding mechanism that can fix and release both sides of the perforation target portion in the soft sheet and horizontally feed the sheet in the X-axis direction, and a sheet between the feeding mechanism and the upstream sheet feeding mechanism and the sheet on the downstream side Detects the space secured between each of the feed mechanism and the winding mechanism to create a U-shaped hanging part by its own weight in the middle of the soft sheet, and the amount of sagging of the soft sheet Its feeding mechanism to the sag amount is maintained at a predetermined range, movement amount of the take-up mechanism, and summarized in that and a detection means for the amount sag of adjusting the winding amount Te. In addition, claim 2 corresponds to claim 1
The sheet feeding mechanism according to the item 2 includes two pairs of approachable / separable clamp arms for vertically sandwiching both side portions of the perforation target portion with respect to the X-axis direction from above and below, and support portions of the two pairs of clamp arms. The gist of the present invention is to provide an arm moving mechanism for individually moving in the X-axis direction. According to a third aspect of the present invention, there is provided a vacuum arm in which the sheet feeding mechanism according to the first aspect suctions both sides of the perforation target portion at right angles to an X-axis direction from an upper surface side or a lower surface side, and support of the vacuum arm. And a moving mechanism for an arm for individually moving each part in the X-axis direction. According to a fourth aspect of the present invention, the sheet feeding mechanism according to the second or third aspect is provided at a central portion of the arm facing the soft sheet, and is provided before a stage of completely clamping or a stage of complete suction. A piercing member that retreats by receiving a clamping force or a suction force lower than the clamping force or the complete suction force to retreat semi-fixed the soft sheet, and a perforation of the soft sheet provided between each of the support portions and the arm moving mechanism. A movement mechanism for correcting movement of the target portion in the Y-axis direction, wherein the protrusion is supported by the arm so as to be freely rotatable in a circumferential direction in a state of being biased by a spring in a protruding direction, and the perforated portion is The gist of the invention is to provide an edge detecting means for detecting an edge of the soft sheet, and to control the moving mechanism for correcting movement at the time of the semi-fixing based on an output signal of the edge detecting means. Further, claim 5
In the above-mentioned claim 4, the configuration wall portion of the space portion corresponding to the end portion of the U-shaped hanging portion upstream of the piercing device unit and the U-shaped hanging portion downstream of the piercing device unit. An air blow vacuum device that is provided on each of the constituent wall portions of the space portion corresponding to the start end and that can switch the blow-off and suction to avoid contact with the perforated portion of the soft sheet; The gist of the present invention is to include an air blow device that presses the sheet from above against the sheet. According to a sixth aspect of the present invention, there is provided an air blow vacuum apparatus and an air blow apparatus according to the fifth aspect, in which a static electricity removing unit that emits ions for removing static electricity is connected. Claim 7
The component wall portion of the space corresponding to the terminal portion of the U-shaped hanging portion upstream of the piercing device unit according to any one of claims 1 to 6, and the downstream portion of the piercing device unit. The gist of the present invention is to provide a guide mechanism for positioning a position in the Y-axis direction at the time of setting the soft sheet in each of the constituent wall portions of the space corresponding to the start end of the U-shaped hanging portion.

According to the above technical means, the following effects are obtained. (Claim 1) The perforator unit is moved by a mechanism considering only the Y-axis direction, and the soft sheet is moved by a mechanism considering only the X-axis direction. At this time, the soft sheet creates a U-shaped hanging portion due to its own weight, which is adjusted by the detecting means on the upstream side and the downstream side of the punching unit. When the perforation target portion of the soft sheet is fixed and fed from both sides by this hanging portion and the perforation target portion is perforated by the perforator unit when the perforation target portion is perforated, a margin is created in which no tension acts on the feeding mechanism and the winding mechanism, Enables feed movement with light feed resistance (feed force). Therefore, the moving mechanism is shared between the punch unit moving in the Y-axis direction and the soft sheet moving in the X-axis direction, and the hanging portion of the soft sheet due to its own weight is placed on both sides of the punching target site corresponding to the punch unit. And the need for control by a high-output moving mechanism is eliminated because of the low feed force required to fix and feed the soft sheet during punching, thereby enabling high-speed punching. Further, the hanging portion gives tension to a portion to be pierced corresponding to the piercing device unit in the soft sheet, and effectively eliminates causes of a perforation error such as wrinkles and waving phenomenon. (Claim 2) Clamping (fixing) both sides of the soft sheet perforated portion from the vertical direction perpendicular to the X-axis direction.
Since the two pairs of clamp arms are individually moved in the X-axis direction by the arm moving mechanism, they can be moved while gripping the soft sheet. For example, even if the clamp arm collides with the lower half of the piercing tool unit (the lower half having a die) during the feed movement, the clamp arm can be switched, so that it can be moved from one corner to the other corner of the piercing target site. Holes (circles, squares, triangles, long squares, etc.) can be formed at predetermined positions within a wide range of. (Claim 3) A vacuum arm is used instead of the clamp arm of claim 2. (Claim 4) Before the soft sheet is completely fixed (nipped) (sucked) by the clamp arm and the vacuum arm, the soft sheet protrudes against the urging force of the spring member by receiving the holding force or the sucking force. The child is retracted, and the repulsive force of the spring member generates a semi-fixing force of the flexible sheet. This semi-fixing force gently presses the center of the soft sheet in the width direction at the left and right portions of the perforation target portion, and serves as a rotation fulcrum when operating the correction movement moving mechanism based on the output signal of the edge detection means. At the time of the correction, the protrusion slides in the circumferential direction, and the inclination correction in the width direction, which is apt to occur at the time of feeding unique to the soft band-like material, is performed without generating wrinkles or the like. (Claim 5) Further, at the time of perforation (at the time of feeding), the blow function of the air blow vacuum device is operated and the air blow device is operated to hold the soft sheet in a floating state above the perforated portion and at the time of feeding. Prevents contact with the perforated part that becomes a resistance. The blow from the air blow device is effectively used as a pressing force for forming a U-shaped hanging portion. Then, when re-gripping the clamp arm and the vacuum arm, the air blow vacuum device is switched to activate the vacuum function, and the soft sheet is immovably pressed in cooperation with the air blow device to the perforated portion so that the clamp sheet can be re-gripped. Even if the vacuum arm comes into contact with the soft sheet, it is not dragged and does not cause a perforation error. (Claim 6) When the air blow vacuum device and the air blow device are operated, ions that do not generate static electricity are emitted, and the feeding of the soft sheet is performed more smoothly. (Claim 7) In addition, U on the upstream side of the piercing tool unit
Positions in the Y-axis direction on the constituent wall portion of the space portion corresponding to the end portion of the U-shaped hanging portion and the constituent wall portion of the space portion corresponding to the starting end of the U-shaped hanging portion downstream of the piercing tool unit. When a flexible sheet is provided with a guide mechanism, the self-weight of the hanging portion cooperates with the flexible sheet at the time of setting the flexible sheet to correct the positional deviation (tilt) in the width direction, which is likely to occur in the flexible sheet.

[0007]

Next, an embodiment of the present invention will be described with reference to the drawings. 1 to 7 show an embodiment of a punching device for a soft sheet such as a ceramic green sheet or a flexible substrate, and FIG. 8 shows a modified embodiment of a sheet feeding device. A is a punching device, 1 is a punching unit, 2 is an edge detecting means, 3 is a feeding mechanism, 4 is a winding mechanism,
Reference numeral 5 denotes a sheet feeding mechanism, 6 denotes a space, and 7 denotes a hanging amount detecting means.

As shown in FIG. 1, the perforated portion 1 has a stepped portion 11a having a horizontal reference surface (mounting surface) 11b as an upper surface. The piercing unit 21 is provided movably in the Y-axis direction via a moving mechanism 31.

In the present embodiment, the perforator unit 21 is shown as a type in which a required number of punch units 21a are arranged side by side in the X-axis direction. Although not shown in the drawing, the punch unit 21a has a U-shape in a side view, and a central space is a transfer space 21a-1 for a work (soft sheet), and an upper arm portion directly facing the transfer space 21a-1. A die 100 (not shown) is provided with a punch 100 on the lower arm 21a 'and an upper surface of the lower arm 21a "facing the punch 100, flush with the upper surface.
Is buried. Of course, the punch 100 and the dice are interchangeable. Each of the punch units 21a is provided with a punch 100 having a different shape so that holes having different shapes can be formed. The punch unit 21 includes a centering camera unit 21b provided with a CCD camera in one of the punch units 21a.
The punch unit 21 is not limited to a punch, but may be a drill or a punch press type.

The moving mechanism 31 has a screw rod as shown in FIG.
By rotating the motor 31b forward and backward by a servo motor 31b, a support 21c for supporting the piercing tool unit 21 has a well-known structure that moves in the Y-axis direction.

As shown in FIG. 1, the feeding mechanism 3 and the winding mechanism 4 are provided on the upstream and downstream sides of the perforated portion 1.

The feeding mechanism 3 rotatably mounts a winding shaft 13 of a soft sheet X such as a ceramic green sheet or a flexible substrate wound in a roll shape.
Is provided with a pinch roller 23 for measuring the feeding amount while feeding out the soft sheet X, and the winding shaft 13 and the pinch roller 23 are both supported by a loader case 33 as shown in the figure.

The winding mechanism 4 has a function symmetrical to the feeding mechanism 3, and includes a pinch roller 14 for measuring a winding amount of the soft sheet X perforated in the perforating section 1,
A winding shaft 24 is provided, and the pinch roller 14 and the winding shaft 24
Are supported by the unloader case 34, respectively.

The winding shaft 13 and the winding shaft 24 are each driven by a motor.

A space where a U-shaped hanging portion x as shown in FIG. 1 is formed in the soft sheet X between the feeding mechanism 3 and the perforated portion 1 and between the perforated portion 1 and the winding mechanism 4. Section 6 is secured.

The space 6 is formed by separating the perforated portion 1 from the loader case 33 and the unloader case 34 in the drawing.

The both space portions 6 have a desired detecting means 7 for detecting the amount of the hanging portion x, such as an ultrasonic sensor, at the bottom thereof. The detecting means 7 detects the amount of the hanging portion x based on an output signal. , 14 and adjusts the feeding amount and the winding amount to constantly maintain the sag amount within a predetermined range.

The edge detecting means 2 is provided with the piercing tool unit.
The edge (long side) of the soft sheet X is detected by a linear sensor or the like installed above the machine base 11 with the 21 interposed therebetween.

As shown in FIGS. 1 to 3, the sheet feeding mechanism 5 has a pair of upper and lower clamp arms 15, 15 disposed on both sides of the perforator unit 21, and a Z for moving the upper and lower clamp arms 15, 15 toward and away from each other. Axial actuator 25, arm moving mechanism 45 for moving support 35 of two pairs of clamp arms 15, 15 in the X-axis direction, and correction provided between arm moving mechanism 45 and support 35. Moving mechanism 55,
A semi-fixing mechanism 65 for semi-fixing the soft sheet X.

Each of the clamp arms 15, 15 is a pair of upper and lower horizontal strips which are perpendicular to the X-axis direction and can be approached and separated from each other. As shown in FIG. Have been. Each of its support parts 35 is a parallel piece
A Z-axis actuator (linear motor, servomotor, etc.) 25 is provided at the upper end of 35a, 35a, and a guide space 35b is formed below the Z-axis actuator to contact the upper clamp arm 15 with the lower clamp arm 15. The drive shaft 25a of the actuator 25 is connected to the upper clamp arm 15. The Z-axis actuator 25 is controlled so as to make a complete clamping time when the opposing faces of the clamp arms 15 and 15 are indirectly contacted with the soft sheet X therebetween, and a semi-fixing (clamping) time described later.

The supporting portion 35 is provided with a moving mechanism 55 for correcting movement.
, Can be finely adjusted in the Y axis direction, and the arm moving mechanism 45 can be individually moved in the X axis direction.

As shown in FIG. 3, the correcting movement moving mechanism 55 includes a fixing base 55a, and a nut portion vertically suspended from a bottom piece 35c of the support portion 35.
55b, a screw bar 55c provided along the Y-axis direction on the fixed base 55a and screwed into the nut portion 55b, and a drive source (for example, a servomotor) 55d for rotating the screw bar 55c.

The fixed base 55a is a vertical body 55 having a hollow inside.
a 'is suspended along the Y-axis direction, and a guide rail 55a "of the support portion 35 is provided on the upper surface so as to project in the Y-axis direction, and the guide rail 55a" connects the support portion 35 to the Y-axis line. It is movably supported in the direction.

The correcting movement moving mechanism 55 is linked to the edge detecting means 2 and receives a driving force from a driving source 55d.
The rotation of 55c finely adjusts the support portion 35 integrally having the nut portion 55b in the Y-axis direction.

As shown in FIGS. 1 to 3, the arm moving mechanism 45 is supported in parallel with the reference surface (mounting surface) 11b in the X-axis direction and penetrates the front part and the rear front part of the vertical body 55a '. Guide shafts 45a, 45a, a screw rod 45b penetrating an intermediate portion of the vertical body 55a ', and a drive source 45c housed in the vertical body 55a'.

The drive source 45c is connected to a pulley and a sprocket provided on a screw rod 45b and an actuator 45 such as a servomotor.
The driving force of c ′ is transmitted, and the guide shafts 45a, 45a are driven by driving the actuator 45c ′.
The guides are used as guides to individually move the support portions 35 provided with the pair of upper and lower clamp arms 15, 15 in the X-axis direction so that the soft sheet X can be fed and re-gripped.

The semi-fixing mechanism 65 is provided at the center of the upper and lower clamp arms 15, 15 as shown in FIGS. The semi-fixing mechanism 65 supports a protrusion 65a projecting from the facing surface of each of the clamp arms 15, 15 rotatably (i.e., idles in the circumferential direction) by guide means 65b such as a linear guide. When the spring (compression spring) 65c is urged in the projecting direction and pressed against the reaction force of the spring 65c, the projection 65a accommodates the projection 65a, the guide means 65b, and the spring (compression spring) 65c. The clamp arm 15, 15 completely clamps both sides of the target portion of the soft sheet X to be pierced (FIG. 4 (c)). Soft sheet X under force
The soft sheet X is semi-fixed by utilizing the repulsive force of the spring of the projection 65a which recedes from each other with the interposition therebetween ((b) in FIG. 4). Then, as shown in FIG. 5, the edge detecting means 2 detects the left and right edge portions of the soft sheet X with the piercing tool unit 21 interposed therebetween, and activates each correction movement moving mechanism 55 on the basis of the output signal to make the soft sheet X softer. Rotation center of flexible sheet X when correcting displacement (inclination) in the width direction of sheet X (fulcrum of rotation)
Is configured. The Z-axis actuator 25 is completely sandwiched between the lower surface of the upper crank arm 15 on the upper surface of the soft sheet X and the upper surface of the lower clamp arm 15 on the lower surface of the soft sheet X (state (c) in FIG. 4). Semi-fixed (Semi-clamping:
The control is performed so as to execute three modes, that is, the state shown in FIG. 4B and the state at the time of gripping (the state shown in FIG. 4A). One end of the spring (compression spring) 65c is a storage case.
In 65d, it is connected to the inner end of the projection 65a,
Is a stopper for preventing the guide means 65b from coming off.

A guide mechanism (see FIG. 7) 8 and an air blow vacuum device are provided at the upstream end and the downstream end of the perforated portion 1 for setting the soft sheet X at a regular position in the Y-axis direction when setting the sheet. 9. An air blow device (see FIGS. 1 and 6) 10 is provided.

The air blow vacuum device 9 is accommodated in a cover body 19 provided at a height equal to the height of the transfer space 21a-1 of the piercing device unit 21, as shown in the figure.

The cover body 19 has an upper surface and an outer surface opposed to the feeding mechanism 3 and the winding mechanism 4 which have a continuous curved surface shape which does not sharply bend the end and the beginning of the hanging portion. The upper surface portion has the same height as the transfer space 21a-1, and the upper surface portion has a large number of air ejection suction holes 39 scattered therein. The blow vacuum device 9 is accommodated.

The curved surface 29 of the cover body 19 becomes the component wall 16 of the space 6 corresponding to the end of the hanging portion x on the upstream side of the perforated portion 1, and on the downstream side of the perforated portion 1. It becomes the constituent wall 16 of the space 6 corresponding to the start end of the hanging part x.

The static eliminator 39 is a well-known device that mixes ions that do not generate static electricity into the air blown from the air blow vacuum device 9.

This air blow vacuum device 9 is configured to be switchable between ejection and suction.

The air blow device 10 is installed at an upper position corresponding to the air blow vacuum device 9 with the soft sheet X interposed therebetween.
In the same way, the static elimination unit 10 'is connected.

The air blow vacuum device 9 activates a blow function at the time of punching (at the time of feeding) while completely clamping the soft sheet X by the clamp arms 15, 15, and cooperates with the air blow device 10 to form a soft air. The sheet X is held so as to float above the curved surface 29. Also, clamp arms 15, 15
When regripping, the air blow vacuum device 9 is switched to operate the vacuum function, the soft sheet X is pressed against the curved surface 29 in cooperation with the air blow device 10, and the soft sheet X is softened by friction with the clamp arms 15, 15 when regripping. Sheet X
Is not dragged.

The guide mechanism 8 bears a screw rod 28 engraved with a half screw and a reverse screw 28b in a half of the housing 18 recessed in the outer surface of the cover 19 and the other half. The screw 28 has a positive screw 28a and a reverse screw 28b, which are screwed into the width adjusters 38, 38, so that the driving force of a drive source 48 such as a servomotor is transmitted to the screw rod 28. I have. The width shifters 38, 38 are non-rotatably supported so as to shift in the approaching direction and the separating direction in response to the forward rotation and reverse rotation of the screw rod 28, and are set normally when setting the soft sheet X. A positive screw 28a symmetrically positioned with respect to an intermediate position of the screw rod 28 located on the same X-axis as the virtual center in the width direction of the soft sheet X;
The threaded rods 28b are threadedly engaged with each other. When the screw rod 28 is rotated in the forward direction, they approach each other, and when they are rotated in the opposite direction, they move in parallel in a direction away from each other. In the present embodiment, the accommodating portion 18 has a triangular shape, and
Is formed in a triangular shape corresponding to the shape thereof, whereby the width approaching members 38, 38 approach and separate without rotating.

In the punching apparatus for a soft sheet such as a ceramic green sheet or a flexible substrate having the above structure, the soft sheet X wound in a roll shape is first passed through a pinch roller (a pinch roller of a feeding mechanism) 23. In a state where the hanging portion x is formed in the space 6 on the upstream side of the perforation unit 1, between the clamp arms 15 and 15 of the sheet feeding mechanism 5, the transport space 21 a-1 of the perforator unit 21, the clamp arm 15,
15 and further through a pinch roller (a pinch roller of a winding mechanism) 14 in a state where a hanging portion x is formed in the space 6 on the downstream side of the perforated portion 1, and the free end thereof is taken up by a winding shaft 24.
Wrap around. In this state, the guide mechanism 8 is operated to move the width-shifting members 38, 38 in parallel to position the soft sheet X in the Y-axis direction properly.

Next, when the apparatus itself is operated, first, the edge detecting means 2 detects the edge portions of the soft sheet X on both sides sandwiching the piercing device unit 21, and the left and right clamp arms 1.
5, 152 pairs make the soft sheet X in a semi-fixed state ((b) in FIG. 4), and based on the output signal, actuate the correction dynamic moving mechanism 55 to adjust the displacement (tilt) in the width direction (FIG. 5). At this time, the protrusions 65a are connected to each other by a spring (compression spring) 65.
c, the soft sheet X is semi-fixed (semi-clamped) with a light force and the protrusions 65a idle in the circumferential direction, so that the displacement in the width direction without generating wrinkles or the like ( Inclined)
Can be modified. And two pairs of upper and lower crank arms 15,
At 15, both sides of the soft sheet X to be pierced are completely clamped ((c) in FIG. 4), and each is slightly moved in a slightly separated direction to apply tension. , 15 in the X-axis direction and relative movement with the piercing tool unit 21 moving back and forth in the Y-axis direction, a hole having a desired shape is pierced at a predetermined position of a piercing target portion. The above-mentioned left and right movement can be performed by simply moving the two pairs of upper and lower clamp arms 15, 15 in the feed direction (one direction) while maintaining a fixed interval with tension (FIG. 6 (a) (b)). )), The two pairs of upper and lower clamp arms 15 and 15 can be pierced while being moved in the left-right direction while maintaining a constant interval. This can be set by a program built in the control unit Y. Further, at the time of this perforation, a hole having a desired shape is perforated at a perforation target portion while feeding the soft sheet X while grasping the clamp arm 15, 15 so as not to collide with the lower arm portion 21a ″ of the perforator unit 21 (FIG. 6 (c) (d)).

At the time of perforation, the air blow vacuum device 9 has a blowing function to keep it slightly floating from the curved surface 29 of the cover body 19 and to prevent the generation of static electricity (FIG. 6A). )).

The operation of the correction movement moving mechanism 55 by the edge detecting means 2 is performed every time the clamp arms 15, 15 are gripped and replaced.

The hanging portion x secured on the upstream side and the downstream side of the perforated portion 1 has a function of applying tension to the perforated portion of the soft sheet X to be wrinkled, and a soft portion for gripping the clamp arms 15, 15. The pinch roller 2 is provided so as to achieve a function of ensuring a feed margin of the sheet X so that the detection means 7 always keeps the amount of sag in a predetermined range.
The winding amount is controlled for the feeding amount of 3, 14.

When one of the clamp arms 15, 15 is gripped and replaced, the other clamp arm 15, 15 is brought into a complete clamping state, and both air blow vacuum devices 9, 9 are switched to a vacuum function to perform air blow. Device 10
By pressing the flexible sheet X against the curved surface 29 in combination with the above, the flexible sheet X is fixed. As a result, even if the clamp arms 15 to be gripped have a relationship in which the soft sheet X is pulled by friction, they do not slightly move in the gripping direction, and do not cause a perforation error. When the gripping is completed, both air blow vacuum devices 9 and 9 are switched to the blow function (FIGS. 6A and 6B).

Referring now to FIG. 8, this embodiment is an example in which the clamp arms 15, 15 are vacuum arms 75.

The above embodiment differs from the clamp arm 1 of the first embodiment.
Since there is no change except that the vacuum arms 75 are used for 5 and 15, the same reference numerals are given and the description is omitted.

The vacuum arm 75 has a hollow shape in which both ends are supported at the upper ends of the parallel pieces 35a, 35a of the support 35.
Adsorption holes 75a are scattered and opened on the upper surface, and a semi-fixing mechanism 65 is provided in the central portion as a solid portion. Of course, a suction device 85 is connected to the vacuum arm 75.

The semi-fixing mechanism 65 supports a projection 65a projecting from the upper surface of the vacuum arm 75 so as to be rotatable (rotating in the circumferential direction) by guide means (not shown) such as a linear guide, and to support the projection 65a. When the spring (compression spring) 65c is urged in the protruding direction by an interposed spring (compression spring) and presses the projection 65a against the repulsive force of the spring (compression spring) 65c, the projection 65a becomes The suction device 85 is configured to be immersed in the recess 65d.
Is actuated to generate a vacuum force to the extent that the soft sheet X is lightly pressed against the protruding member 65a, and the repulsive force of the spring 65c is generated to create a semi-fixed state of the soft sheet X between the protruding member 65a and the soft sheet X In the same manner as described above, the frictional force due to the repulsive force of the projection 65a activates the correction movement moving mechanism 55 to correct the displacement (inclination) in the width direction of the soft sheet X, and the center of rotation (fulcrum) of the soft sheet. ). It is to be noted that one end of a spring (compression spring) is connected to the inner end of the projection 65a, and the guide means is prevented from coming off by a stopper (not shown), as in the above embodiment. The suction device 85 is used for completely sucking the soft sheet X on the entire upper surface of the vacuum arm 75, the above-mentioned semi-fixation (semi-adsorption), and changing the grip (at the time of stopping).
This is similar to the above-described embodiment in that the three modes are controlled to be executed.

[0047]

As described above, the present invention has the following advantages. (Claim 1) Since the perforator unit is moved by the moving mechanism in the Y-axis direction and the soft sheet is moved by the moving mechanism in the X-axis direction, the object to be moved is the X-axis direction,
Lighter in both the Y-axis direction. Therefore, high-speed drilling can be performed without driving with a high-output driving source. In addition, when the soft sheet is fed, the U-shaped hanging portion functions as a feed allowance in the X-axis direction (allowance allowance), and a feeding mechanism is provided.
Since the sheet supporting system does not apply tension to the winding mechanism, the moving target portion (soft sheet) in the X-axis direction is further reduced in weight, and more speedy perforation can be performed. Moreover, since the U-shaped hanging portion of the soft sheet on both sides of the punching unit naturally applies tension to the punching target portion, fine wrinkles and waving phenomenon can be avoided, and the punching can be performed with high precision. (Claims 2 and 3) A clamp arm or a vacuum arm that fixes (sandwiches or adsorbs) both sides of a portion to be pierced of the soft sheet at right angles to the X-axis direction and feeds the soft sheet while re-gripping the soft sheet. It has a structure to move. Therefore, even if the clamp arm or the vacuum arm is moved to the downstream side, for example, even if the clamp arm or the vacuum arm collides with the side surface of the lower half portion of the piercing tool unit (the lower half portion having the dice), the area to be pierced is wide and narrow. Irrespective of this, a hole having a desired shape can be drilled in a wide range from one corner to the other corner of the drilling target region by the drill unit. (Claim 4) In addition, when the soft sheet is fixed (nipped or sucked) by the clamp arm or the vacuum arm, a state in which the soft sheet is semi-fixed (lightly pressed) at the central portion of the arm is created as a pre-stage, and the fulcrum is provided. Is the center of rotation of the soft sheet when the clamp arm or the vacuum arm is finely moved in the Y-axis direction by the moving mechanism for correcting movement based on the detection result of the edge detecting means, and is likely to occur at the time of feeding unique to a soft strip. Since the inclination in the width direction is corrected and the fulcrum idles in the circumferential direction, drilling can be performed with higher accuracy without generating wrinkles or the like at the time of correction. (5) In addition, since the soft sheet is held in a floating state above the perforated portion by the blowing function of the air blow vacuum device and the air blow device at the time of perforating or normal feeding, the perforating device is used. And no wrinkles or the like due to the contact can be prevented. Alternatively, the air blow vacuum device is switched to the vacuum function, and the soft sheet is clamped at the perforated portion in cooperation with the air blow from above, so even if the soft sheet may come into contact with the clamp arm or the vacuum arm when it is grasped and replaced. There is no slight movement of the soft sheet due to contact. (Claim 6) In addition, since no static electricity is generated between the perforated portion and the soft sheet, the feeding of the soft sheet becomes smoother and more accurate perforation can be expected. (Claim 7) A guide mechanism for positioning a position in the Y-axis direction at the time of setting a soft sheet is provided by forming a wall portion and a punch of a space corresponding to an end of a U-shaped hanging portion on the upstream side of the punch unit. Since it is provided on the constituent wall portion of the space corresponding to the start end of the U-shaped hanging portion on the downstream side of the unit, the positional displacement (tilt) in the width direction, which is likely to occur on the soft sheet due to its own weight, is prevented. Modifiable and convenient. In addition, when the guide mechanism is provided, the correction operation can be performed promptly when correcting the positional displacement in the width direction by the edge detecting means at the time of punching.

[Brief description of the drawings]

1 schematically shows a front view of a drilling device.

FIG. 2 schematically shows a plan view of the drilling device.

FIG. 3 is a partially enlarged sectional view of a main part.

FIG. 4 is an enlarged view of a semi-fixed mechanism, and FIG. (B) shows the case of semi-fixation. (C) shows the state of complete clamping.

FIGS. 5A and 5B are plan views showing a state in which a positional deviation of a soft sheet in a width direction is corrected by using a semi-fixing mechanism. FIG. (B) shows a case in which it has been corrected.

FIG. 6 is a schematic diagram showing a relationship between a clamp arm, an air blow vacuum device, and an air blow device,
(B) shows a state in which a hole is being drilled. (C) shows a state in which one clamp arm has been grasped and replaced. (D) shows a state in which the other clamp arm has been grasped and replaced.

FIG. 7 is a perspective view of a guide mechanism portion.

FIG. 8 is an enlarged sectional view of a main part when a clamp arm is a vacuum arm.

[Explanation of symbols]

X: Soft sheet 3: Unwinding mechanism 4: Rewinding mechanism 1: Punching unit 21: Punch unit 5: Sheet feeding mechanism 6: Space x: Sagging part (soft sheet sagging part) 7: Detecting means (the amount of sagging) Detection means) 15, 15: Clamp arm 35: Support part 45: Movement mechanism for arm 65a: Protrusion 55: Movement mechanism for correction movement 2: Edge detection means 16: Constituent wall of space 11b: Reference surface of perforated part ( 9: Air blow vacuum device 10: Air blow device 49, 10 ': Static eliminator 7: Guide mechanism

Claims (7)

[Claims] An unwinding mechanism for unwinding a soft sheet wound in a roll shape such as a ceramic green sheet or a flexible substrate in the X-axis direction, a winding mechanism for winding the same in a roll shape, a unwinding mechanism and a winding mechanism. A punching unit that is disposed between the punching unit and is provided with a punching tool and moves forward and backward in the Y-axis direction to punch a punching target site of the soft sheet, and both sides of the punching target site in the soft sheet. A sheet release mechanism that can be fixed and released horizontally in the X-axis direction and that can be released, and between the feeding mechanism and the upstream sheet feed mechanism and between the downstream sheet feed mechanism and the winding mechanism. A space portion that creates a U-shaped portion that sags under its own weight in the middle of the soft sheet, and detects the amount of sag of the soft sheet and maintains the amount of sag within a predetermined range. A perforation device for a soft sheet such as a ceramic green sheet or a flexible substrate, comprising a feeding mechanism, a feeding amount of a winding mechanism, and a hanging amount detecting means for adjusting a winding amount. 2. A pair of approachable / separable clamp arms, which sandwiches both sides of the perforated portion from above and below at right angles to the X-axis direction, and two pairs of clamp arms, The perforating apparatus for a soft sheet such as a ceramic green sheet or a flexible substrate according to claim 1, further comprising an arm moving mechanism for individually moving each of the support portions in the X-axis direction. 3. A vacuum arm, wherein the sheet feeding mechanism adsorbs both sides of the perforation target portion at right angles to an X-axis direction from an upper surface side or a lower surface side, and supports each of the vacuum arm support portions with an X-axis line. The punching device for a soft sheet such as a ceramic green sheet or a flexible substrate according to claim 1, further comprising an arm moving mechanism for individually moving the arm in the direction. 4. The sheet feeding mechanism is provided at a central portion of the arm facing the soft sheet, and has a complete clamping force and a clamping force weaker than a complete clamping force in a stage before completely clamping or in a stage before completely adsorbing. Or, a projection which retreats by receiving the attraction force and semi-fixes the soft sheet, and is provided between each of the support portions and the arm moving mechanism to correct and move the target portion of the soft sheet to be punched in the Y-axis direction. A moving mechanism, wherein the projection is supported by an arm so as to be freely rotatable in a circumferential direction in a state where the projection is biased by a spring in a projecting direction, and the perforated portion includes an edge detecting means for detecting an edge of the soft sheet. 4. The soft green substrate according to claim 2, wherein the correction moving mechanism is controlled at the time of the semi-fixing based on an output signal of the edge detecting means. Sheet punching machine. 5. A configuration wall portion of a space corresponding to an end portion of a U-shaped hanging portion upstream of the piercing device unit and a starting end of a U-shaped hanging portion downstream of the piercing device unit. Air blow vacuum device that is provided in each of the constituent wall portions of the space portion corresponding to and that can switch the jet suction to avoid contact with the perforated portion of the soft sheet,
The ceramic green sheet according to any one of claims 1 to 4, further comprising an air blow device that presses the soft blow sheet from above against the air blow vacuum device. Perforator for soft sheet. 6. A soft sheet such as a ceramic green sheet or a flexible substrate according to claim 5, wherein a static electricity removing unit for emitting ions for removing static electricity is connected to said air blow vacuum device and said air blow device. Perforator. 7. A configuration wall portion of a space corresponding to an end portion of a U-shaped hanging portion upstream of the piercing device unit and a starting end of a U-shaped hanging portion downstream of the piercing device unit. The ceramic green sheet according to any one of claims 1 to 6, further comprising a guide mechanism for positioning a position of the soft sheet in the Y-axis direction at the time of setting the soft sheet in each of the constituent wall portions of the space corresponding to the ceramic green sheet and the flexible substrate. Perforator for soft sheets such as.