JPH10127069A - 振動アクチュエータ - Google Patents

振動アクチュエータ

Info

Publication number
JPH10127069A
JPH10127069A JP27226396A JP27226396A JPH10127069A JP H10127069 A JPH10127069 A JP H10127069A JP 27226396 A JP27226396 A JP 27226396A JP 27226396 A JP27226396 A JP 27226396A JP H10127069 A JPH10127069 A JP H10127069A
Authority
JP
Japan
Prior art keywords
elastic body
vibration
piezoelectric
actuator
ultrasonic actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27226396A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10127069A5 (enExample
Inventor
Kenichi Muramatsu
研一 村松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP27226396A priority Critical patent/JPH10127069A/ja
Publication of JPH10127069A publication Critical patent/JPH10127069A/ja
Publication of JPH10127069A5 publication Critical patent/JPH10127069A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP27226396A 1996-10-15 1996-10-15 振動アクチュエータ Pending JPH10127069A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27226396A JPH10127069A (ja) 1996-10-15 1996-10-15 振動アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27226396A JPH10127069A (ja) 1996-10-15 1996-10-15 振動アクチュエータ

Publications (2)

Publication Number Publication Date
JPH10127069A true JPH10127069A (ja) 1998-05-15
JPH10127069A5 JPH10127069A5 (enExample) 2004-10-21

Family

ID=17511417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27226396A Pending JPH10127069A (ja) 1996-10-15 1996-10-15 振動アクチュエータ

Country Status (1)

Country Link
JP (1) JPH10127069A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006311746A (ja) * 2005-04-28 2006-11-09 Taiyo Yuden Co Ltd 駆動装置及びその駆動方法
JP2012135072A (ja) * 2010-12-20 2012-07-12 Canon Inc 振動型駆動装置の振動体及び振動型駆動装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006311746A (ja) * 2005-04-28 2006-11-09 Taiyo Yuden Co Ltd 駆動装置及びその駆動方法
JP2012135072A (ja) * 2010-12-20 2012-07-12 Canon Inc 振動型駆動装置の振動体及び振動型駆動装置

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