JPH10127069A5 - - Google Patents

Info

Publication number
JPH10127069A5
JPH10127069A5 JP1996272263A JP27226396A JPH10127069A5 JP H10127069 A5 JPH10127069 A5 JP H10127069A5 JP 1996272263 A JP1996272263 A JP 1996272263A JP 27226396 A JP27226396 A JP 27226396A JP H10127069 A5 JPH10127069 A5 JP H10127069A5
Authority
JP
Japan
Prior art keywords
elastic body
conversion element
electromechanical conversion
vibration actuator
hydrothermal synthesis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1996272263A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10127069A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP27226396A priority Critical patent/JPH10127069A/ja
Priority claimed from JP27226396A external-priority patent/JPH10127069A/ja
Publication of JPH10127069A publication Critical patent/JPH10127069A/ja
Publication of JPH10127069A5 publication Critical patent/JPH10127069A5/ja
Pending legal-status Critical Current

Links

JP27226396A 1996-10-15 1996-10-15 振動アクチュエータ Pending JPH10127069A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27226396A JPH10127069A (ja) 1996-10-15 1996-10-15 振動アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27226396A JPH10127069A (ja) 1996-10-15 1996-10-15 振動アクチュエータ

Publications (2)

Publication Number Publication Date
JPH10127069A JPH10127069A (ja) 1998-05-15
JPH10127069A5 true JPH10127069A5 (enExample) 2004-10-21

Family

ID=17511417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27226396A Pending JPH10127069A (ja) 1996-10-15 1996-10-15 振動アクチュエータ

Country Status (1)

Country Link
JP (1) JPH10127069A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4616693B2 (ja) * 2005-04-28 2011-01-19 太陽誘電株式会社 駆動装置及びその駆動方法
JP5665522B2 (ja) * 2010-12-20 2015-02-04 キヤノン株式会社 振動体及び振動型駆動装置

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