JPH10120173A - Substrate press fitting jig and substrate holder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent cracking and breaking of a resin part making contact with a non-magnetic substrate, etc., and to improve press fitting force by providing a ferromagnetic plate on a back surface of the non-magnetic substrate and functionally separating a magnet part applying press fitting force to a portion making contact with a surface of the non-magnetic substrate. SOLUTION: A substrate press fitting jig 1 is constituted of a ferromagnetic plate 5 arranged on a main surface of a non-magnetic substrate 2, a magnet 3 buried in the non-magnetic substrate 2, a spring 6 and a spring body a head end of which is constituted of a spherical resin member 4 and projected on the other main surface of the substrate 2, and the head end of the resin member 1 makes contact with a glass substrate, etc. The magnet 3 is buried at a position where a magnetic line of force comes to be in a roughly vertical direction against the ferromagnetic plate 5 to improve press fitting force of the substrate press fitting jig 1. A non-magnetic thin plate 7 is on the side of the glass substrate of the magnet 3 for prevention of direct contact of the magnet 3 to the glass substrate, etc., and falling of magnet powder due to production of cracks of the magnet 3, etc., and improvement of press fitting force.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a jig for holding a substrate and a jig for holding a substrate, and more particularly to a jig and a jig for holding a non-magnetic substrate such as a glass substrate.

[0002]

2. Description of the Related Art In recent years, display devices such as liquid crystal display devices and plasma displays have been widely used for display devices of OA equipment such as Japanese word processors and personal computers because of their features of being thin and light and having low power consumption. Accordingly, there has been a strong demand for improvements in manufacturing techniques and productivity of components used in these display devices. In particular, a display portion of a liquid crystal display device is manufactured through a process of forming a transparent conductive film, a TFT element, wirings for signal lines and scanning lines, a color filter, an alignment film, and the like on a substrate surface such as a glass substrate. For this reason, the glass substrate holder used in each step involving the heat treatment does not cause the glass surface to warp or undulate while following the expansion and contraction of the glass substrate during the heat treatment, and the substrate is damaged. Must be securely held. As described above, the glass substrate holder has become an important component in the field of manufacturing a display device in order to smoothly carry out the operation and improve the product yield.

A conventional glass substrate pressing jig will be described with reference to FIGS. 6 and 7. FIG. FIG. 6 is a perspective view of a conventional glass substrate crimping jig 12, and FIG. 7 is an enlarged sectional view of a portion A in FIG. The glass substrate crimping jig 12 is provided with a magnet portion 14 on an aluminum frame 13 having a handle 15 for detachment.
Is attached. The magnet 3 accommodates the magnet 3 in a heat-resistant plastic container 16. Conventionally, a glass substrate is held by placing a glass substrate on a ferromagnetic plate such as an iron plate, placing a crimping jig 12 on the glass substrate, and crimping the magnet portion 14 of the crimping jig 12 and the ferromagnetic plate. It was done by doing.

[0004]

However, for example, when a transparent conductive film such as ITO or tin oxide is formed on a glass substrate by a spray method or the like, the glass substrate must be pressed and held under a temperature condition of several hundred degrees. No. For this reason, when the conventional substrate pressure bonding jig is used, the following problem occurs.

The magnet 3 is housed in a heat-resistant plastic container 16 in order to prevent the glass surface from being damaged due to the magnet 3 coming into direct contact with the glass substrate.
Since the pressure is always applied from the glass surface and the magnet surface having different thermal expansion coefficients, the surface of the container 16 may be easily cracked. In such a case, the container 16
There is a problem that the surface of the glass substrate is contaminated or damaged by the magnet powder dropped from the cracked portion of the glass substrate. In addition, the attachment and detachment of the glass substrate is performed manually by the handle 15, but there is a problem that a part of the aluminum frame 13 comes into contact with the surface of the glass substrate and damages the surface. In particular, as the definition of liquid crystal display devices has advanced,
There is a problem in that even a scratch on the surface that cannot be discerned by the naked eye has a significant effect on display characteristics.

To avoid damaging the surface, the container 16
When the thickness is increased, the magnetic force of the magnet 3 is weakened, and the holding force of the glass substrate is reduced. Conversely, if a magnet with a strong coercive force is used to improve the coercive force, the glass substrate itself with a thickness of 0.7 mm or 0.4 mm in recent years tends to crack, making it possible to securely fix the glass substrate. There is a problem that can not be.

Further, with the recent increase in size of the liquid crystal display device, the size of the glass substrate has been increased, and since multiple substrates have been formed in order to improve the productivity, the conventional substrate pressing jig and substrate holding jig require a glass substrate. There is a problem that the substrate cannot be easily detached or held without damaging the substrate.

SUMMARY OF THE INVENTION The present invention has been made in order to address such a problem. When a surface of a non-magnetic substrate such as a glass substrate is processed, the surface is not damaged and the substrate itself is damaged. It is an object of the present invention to provide a substrate crimping jig and a substrate holder which can be held without any problem.

[0009]

A substrate pressing jig according to the present invention comprises a non-magnetic substrate, a ferromagnetic plate disposed on one principal surface of the substrate, and a line of magnetic force substantially parallel to the ferromagnetic plate. It is characterized by comprising a magnet which is located in the vertical direction and which is embedded in the base, and a spring body which is arranged in a predetermined arrangement with the magnet and has a pressing force in the direction of the other main surface of the base. A substrate holder according to the present invention includes a ferromagnetic plate and a pressing plate hinged to the ferromagnetic plate, and a substrate for pressing and holding a non-magnetic substrate between the ferromagnetic plate and the pressing plate. A holding tool, characterized in that the above-mentioned substrate pressing jig is provided on a surface of the holding plate which is in contact with the non-magnetic substrate.

Another substrate crimping jig according to the present invention is a substrate crimping jig having magnets arranged on a ferromagnetic plate in a predetermined arrangement at a position where lines of magnetic force are substantially perpendicular to the ferromagnetic plate. The ferromagnetic plate is formed of a spring body, and the magnet is attached to the ferromagnetic plate via an insulating material.

[0011] Still another substrate pressing jig according to the present invention is a substrate pressing jig having projections made of a non-magnetic material and arranged on a permanent magnet plate in a predetermined arrangement. It is characterized by being constituted by a spring body.

Further, another substrate holder according to the present invention is a substrate holder comprising a ferromagnetic plate and a pressing plate for pressing and holding a non-magnetic substrate between the ferromagnetic plate, It is characterized in that the holding plate is the above two other substrate pressing jigs.

The present invention is based on the finding that when a ferromagnetic plate is provided on the back surface, the pressing force of a substrate pressing jig by a magnet embedded in a base is significantly improved.
Further, in the present invention, when a non-magnetic substrate such as a glass substrate is pressed and held, a portion that comes into contact with the surface of the glass substrate and a magnet portion that applies a pressing force to the contact portion are functionally separated. This makes it possible to hold the substrate without damaging the substrate surface, damaging the substrate itself, and causing cracking of the resin, and facilitates various processes such as forming a transparent electrode layer on a glass substrate. Can be Furthermore, the substrate crimping jig and the substrate holder according to the present invention, when crimping and holding a non-magnetic substrate such as a glass substrate, by imparting the function of the base and the spring body to the ferromagnetic plate, Alternatively, by imparting the function of a spring body to the permanent magnet plate, it is possible to hold the glass substrate surface with a simple structure that can reduce the number of components without damaging or damaging the glass substrate surface. Various processes such as formation of a transparent electrode layer thereon can be facilitated. In the present invention, non-magnetic means a property that does not exhibit ferromagnetism.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A substrate pressing jig according to the present invention will be described with reference to FIGS. FIG. 1 is a sectional view of a substrate pressing jig according to the present invention, and FIG. 2 is a perspective view thereof. FIG. 3 is a plan view showing a modification of the magnet arrangement. The substrate pressing jig 1 includes a ferromagnetic plate 5 disposed on one main surface of a non-magnetic substrate 2, a magnet 3 embedded in the non-magnetic substrate 2,
And a spring body protruding from the other main surface. Here, the spring body comprises a spring 6 and a resin member 4 having a spherical tip. The tip of the resin member 4 comes into contact with the glass substrate or the like. The magnet 3 is embedded at a position where the lines of magnetic force are substantially perpendicular to the ferromagnetic plate 5. By embedding the magnet 3 in this manner, the pressing force of the substrate pressing jig 1 can be improved. On the glass substrate side of the magnet 3, a non-magnetic thin plate 7 for preventing the magnet 3 from directly contacting the glass substrate or the like is provided. This thin plate 7 allows the magnet 3
This can prevent the magnetic powder from dropping when a crack is formed in the magnet. Further, the use of the non-magnetic thin plate 7 can improve the pressure bonding force as compared with the case where a ferromagnetic thin plate or the like is used.

The ferromagnetic plate 5 provided on the non-magnetic substrate 2
Any ferromagnetic material can be used. For example, a ferromagnetic stainless steel plate, an iron plate, a nickel plate, a chromium plate and the like can be mentioned. In particular, a ferromagnetic stainless steel plate is preferable from the viewpoint of rust prevention. The ferromagnetic plate 5 preferably has a shape substantially equal to the width and length of the non-magnetic substrate 2. By arranging the ferromagnetic plate 5 having such a shape, the magnetic force of the magnet 3 can be further increased. As for the magnet 3 embedded in the non-magnetic substrate 2, it is preferable that a plurality of magnets are linearly arranged at a constant interval. By arranging the magnets in this manner, the lines of magnetic force act in the direction of pressing the substrate, so that the pressing force can be further increased together with the action of the ferromagnetic plate 5. Further, as shown in FIGS. 3A and 3B, the shape of the magnet depends on the size and shape of the substrate crimping jig 1.
It can be square or elliptical.

The spring 6 constituting the spring body can be used as long as it exerts a spring action in the retreating direction of the resin member 4 at the processing temperature of the glass substrate or the like. Stainless steel springs are particularly preferred over rustproof surfaces. Further, the strength of the spring can be arbitrarily selected according to the size and shape of the substrate pressing jig 1. The resin member 4 having a spherical tip connected to the spring 6 is provided such that the tip applies a pressing force in the surface direction of the non-magnetic base 2 on the substrate pressing side. Thereby, the impact force at the time of press bonding is absorbed, and the excessive stress is not applied to the glass substrate or the like. The resin member 4 having a spherical tip connected to the spring 6 has a tip portion of 0 mm to 1.0 mm when pressed against the surface of the non-magnetic base 2 on the substrate pressing side.
Experiments have shown that it is preferable to protrude in the range of 2 mm. That is, the resin member 4 having a spherical tip can be used as a member for absorbing an impact force at the time of pressure bonding, or as a member for contacting the surface with a glass substrate or the like. In the latter case, it is preferable that the resin member 4 having a spherical tip connected to the spring 6 be provided with the tip always protruding from the surface of the non-magnetic base 2 on the substrate pressing side. In this case, if the distal end portion is excessively protruded, the pressing force is weakened. Therefore, the spring body is brought into a state where the glass substrate can be fixed while preventing the surface of the nonmagnetic substrate 2 from contacting the surface of the glass substrate or the like. Need to be set. As a result of the experiment, in the present invention, it is preferable that the spherical end portion of the resin member protrudes in a range of 1 mm or less while being pressed, and more preferably, protrudes by about 0.5 mm. By configuring the spring body in this manner, it is possible to prevent the surfaces of the non-magnetic base 2 and the glass substrate or the like from coming into contact with each other, and to maintain the pressing force.

The arrangement of the spring body and the magnet 3 is not particularly limited, but in the present invention, in order to further increase the pressing force together with the action of the ferromagnetic plate 5, the spring body and the magnet 3 are alternately linearly arranged. Preferably, they are arranged in a pattern. The material of the magnet 3 can be selected according to the heat treatment conditions of the glass substrate or the like. That is, any permanent magnet having a Curie point equal to or higher than the glass substrate processing temperature can be used. For example, alnico, ferrite, rare earth-
Cobalt-based, iron-chromium-cobalt-based magnets and the like can be used.

The nonmagnetic base 2 preferably has a width slightly larger than the size of the spring body and the magnet 3 in order to prevent contact with a glass substrate or the like. The material of the non-magnetic substrate 2 can be selected from materials that do not cause thermal deformation or thermal degradation at a heat treatment temperature such as a glass substrate. In particular, a heat-resistant resin material that does not damage the surface even when it comes into contact with a glass substrate or the like is preferable. Examples of the heat-resistant resin include a thermoplastic resin and a thermosetting resin, and a preferable thermoplastic resin is polyphenylene sulfide (PP
S), polyetheretherketone (PEEK), polyhydroxyphenyleneether (PPO), polyethersulfone (PES), polyethernitrile (PE
N), aromatic polyesters such as polyarylate and polyoxybenzoyl, liquid crystal polymers, polyetherimide and the like. Examples of the thermosetting resin include an epoxy resin, a polyimide resin, a maleimide resin, a silicone resin, and a phenol resin. These resins may be used alone or in combination, and in these resins, a curing agent, a catalyst,
It can also contain plasticizers, colorants, flame retardants, fillers, low stress additives, and other various additives. Among these, as the material of the nonmagnetic substrate 2 according to the present invention, a resin composition containing polyetheretherketone (PEEK) as a main component has a high tensile strength and a high deflection temperature under load, and does not damage the glass surface or the like. It is particularly preferred.
Note that the resin member 4 constituting the spring body can also use the same resin composition as the material of the nonmagnetic base 2.

The substrate pressing jig 1 according to the present invention is disposed on a non-magnetic substrate such as a glass substrate placed on a ferromagnetic plate, thereby providing the magnetic force of the ferromagnetic plate 5 and the magnet 3 and the spring body. , The non-magnetic substrate can be firmly fixed and held without damaging the surface. Examples of the nonmagnetic substrate to which the present invention can be applied include a ceramic substrate, a semiconductor substrate, a plastic substrate, and the like, in addition to a glass substrate.

Next, the substrate holder according to the present invention will be described with reference to FIG. FIG. 4 shows a perspective view of the substrate holder according to the present invention. The substrate holder has a structure in which a nonmagnetic substrate 10 such as a glass substrate is pressed and held between a ferromagnetic plate 9 having a window for surface treatment and a holding plate 8 hinged to the ferromagnetic plate 9. The substrate pressing jig 1 is provided on a surface of the holding plate 8 which is in contact with the non-magnetic substrate 10. Further, a pin 11 for mounting the non-magnetic substrate 10 and a suspender 12 for suspending the substrate holder are provided. Here, the pin 11 can be composed of a pin body 11a and an urging body 11b having an urging force on the side surface of the non-magnetic substrate 10. In this case, since the pressing is performed from the side surface of the substrate 10, the attachment and detachment of the substrate 10 and the like are facilitated, and the working efficiency is improved.

The substrate pressing jig 1 provided on the holding plate 8 includes:
The pressing plate 8 and the ferromagnetic plate 9 are fixed to each other by the magnetic force while being brought into contact with the surface of the non-magnetic substrate 10 and pressed. The number of the jigs 1 required for performing such an operation may be set, and at least one jig 1 is required. The holding plate 8 is hinged to the ferromagnetic plate 9 and can be freely opened and closed.
May be a ferromagnetic plate or a non-magnetic plate.

Referring to FIG. 8, another substrate pressing jig according to the present invention will be described. FIG. 8A is a perspective view of another substrate pressing jig according to the present invention as viewed from the glass substrate side, and FIG.
FIG. 9 is a perspective view seen from the opposite side of FIG. The substrate pressing jig 1a is provided with a ferromagnetic plate 17 having a function as a spring body.
And a magnet body 18 disposed in a hole formed at a predetermined position of the ferromagnetic plate 17. The magnet body 18 includes a heat-resistant resin container 19 protruding from the glass substrate pressure-bonding side, the magnet 3 housed in the heat-resistant resin container 19, and a magnet holding plate 20. After being inserted, it is fixed by a snap retainer 21 or the like. The magnet 3 is housed at a position where the lines of magnetic force are substantially perpendicular to the ferromagnetic plate 17. By housing the magnet 3 in this manner, the pressing force of the substrate pressing jig 1a can be improved.

The ferromagnetic plate 17 is made of a material having a function as a spring body. Further, a material whose coefficient of thermal expansion does not greatly differ from that of glass or ceramics is preferable. Such materials include 42 alloy, ferritic stainless steel, iron alloy and the like. Specifically, the tensile strength is about 5
About 00 ~ 600MPa, elongation about 30%, thermal expansion coefficient
A material of about 10 ^-6 to 10 ^-5 K ^-1 is preferable. As such a ferromagnetic plate, an alloy plate with iron or nickel is preferable, and for example, a 42 alloy which is an iron alloy containing 41 to 43% by weight of nickel is most preferable.

The heat-resistant resin container 19 can be made of the same material as the non-magnetic substrate 2 shown in FIG.
Further, the same material as that shown in FIG. 1 can be used for the magnet 3.

If the strength of the magnetic force of the magnet 3 used can be adjusted, a non-magnetic material having a function as a spring body can be used instead of the ferromagnetic plate 17. Examples of such a material include a titanium-based alloy.

Further, a permanent magnet plate having a function as a spring body can be used instead of the ferromagnetic plate 17. In this case, a magnet attached via an insulating material is not required, and the projection made of a non-magnetic material is attached to the permanent magnet plate. As the non-magnetic material, the above-described non-magnetic substrate 2
The same material can be used.

In the present invention, for example, the holding plate 8 shown in FIG. In this case, since the ferromagnetic plate 17 has a function as a spring body,
The glass substrate or the like can be more easily pressed and held. In this case, the magnet body 18 is disposed at a position where a glass substrate or the like can be pressed and held from the surroundings, and is directly attached to the ferromagnetic plate 17 as shown in FIG.

[0028]

【Example】

Example 1 Using a resin composition containing polyetheretherketone (PEEK) as a main component, a nonmagnetic substrate was 9 mm (width) × 5 mm.
(Thickness) × 110 mm (length). Six cylindrical magnets with a diameter of 7 mm were embedded in this non-magnetic substrate at intervals of 18 mm. In addition, a spring body made of polyetheretherketone (PEEK) was disposed linearly at equal intervals between the columnar magnets. The spring body was arranged such that the tip protruded 0.5 mm when pressed. 7mm (width) × 1mm (thickness) ×
A 110 mm (length) iron plate was stuck to obtain a substrate crimping jig according to the present invention.

Comparative Example 1 A non-magnetic substrate having the same width, thickness and length as in Example 1 was prepared, and the same columnar magnet as in Example 1 was made of polyetheretherketone (PEEK). Then, six such containers were attached to the non-magnetic substrate at the same intervals as in Example 1 to obtain a substrate pressing jig. Using the obtained substrate pressing jigs according to Example 1 and Comparative Example 1, the pressing force with the ferromagnetic substrate via the glass substrate was measured. The measuring method is shown in FIG.

Wires are applied to both ends of the substrate crimping jig 1 according to the first embodiment and the substrate crimping jig 12 according to the comparative example 1 which are fixed to the ferromagnetic substrate 9 via a glass substrate 10 having a thickness of 0.7 mm. At the center of the wire, the adhesive force was measured with a spring weigher to determine the pressure. As a result, in the substrate crimping jig 1 according to the first embodiment, 500 g (in the case of FIG. 5B), and in the substrate crimping jig 12 according to the comparative example 1, 400 g.
g (case of FIG. 5A). In Example 1, the pressing force was improved by 25% compared to Comparative Example 1 by the iron plate adhered behind the spring body and the columnar magnet.

Example 2 A 42 alloy plate having a thickness of 0.5 mm was processed into a shape of 12 mm (width) × 200 mm (length), and both ends 20 mm were bent at an angle of 90. Seven holes of 4.5 mmφ were made at regular intervals on the main surface of the 42 alloy plate. Polyetheretherketone (P) containing a cylindrical magnet with a diameter of 5 mm in each hole
An EEK) heat-resistant resin container was inserted and fixed with a snap retainer to obtain a substrate pressure bonding jig.

Example 3 A 42 alloy plate having a thickness of 0.5 mm was processed into a shape of 420 mm (width) × 520 mm (length), and one glass substrate of 320 mm (width) × 480 mm (length) was used. In order to be able to hold, a plurality of holes are drilled at locations located around these glass substrates,
A polyetheretherketone (PEEK) heat-resistant resin container containing a cylindrical magnet having a diameter of 5 mm was inserted into each of the holes, and fixed with a snap retainer. On the other hand, one glass substrate was placed between the 42 alloy plate and the 42 alloy ferromagnetic plate, and held by the magnetic force of the 42 alloy ferromagnetic plate and the 42 alloy plate. A transparent conductive film was formed on the glass substrate while holding it. Thereafter, the glass substrate was taken out from the substrate holder, but no scratches or cracks were found on the glass substrate surface. A substrate holder capable of processing four glass substrates was also manufactured with the above configuration, and a transparent conductive film was formed. However, no scratches or cracks were found on the glass substrate surface.

[0033]

The substrate pressure-bonding jig according to the present invention has a ferromagnetic plate provided on the back surface of a non-magnetic substrate, and has a function of a portion in contact with the surface of the non-magnetic substrate and a magnet portion for applying a pressure to the portion in contact with the non-magnetic substrate. Since it is separated, it is possible to prevent cracking and breakage of the resin portion and the like in contact with the surface of the non-magnetic substrate, and it is possible to improve the pressing force.

In the substrate holder according to the present invention, since the above-described substrate pressing jig is provided on the holding plate hinged to the ferromagnetic plate, the substrate holding member is non-magnetic without damaging the substrate surface or damaging the substrate itself. The substrate can be pressed and held on the ferromagnetic plate. As a result, a process of forming a transparent electrode layer on a non-magnetic substrate such as a glass substrate can be easily performed.

Another substrate pressing jig according to the present invention has a simple structure in which the number of parts is reduced because a magnet provided on a ferromagnetic plate composed of a spring body with an insulating material interposed therebetween is used. It can be held without damaging or damaging the surface. Further, since a permanent magnet plate capable of integrating the spring body and the magnet is used, the structure becomes simpler.

In another substrate holder according to the present invention, since the holding plate for pressing and holding the non-magnetic substrate is the other substrate pressing jig described above, a large number of glass substrates can be easily formed by the action of the spring body. Can be processed simultaneously.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a substrate pressure bonding jig according to the present invention.

FIG. 2 is a perspective view of a substrate pressing jig according to the present invention.

FIG. 3 is a plan view showing a modified example of a magnet arrangement of the substrate pressing jig according to the present invention.

FIG. 4 is a perspective view of a substrate holder according to the present invention.

FIG. 5 is a diagram showing a method for measuring a pressure bonding force.

FIG. 6 is a perspective view of a conventional glass substrate pressure bonding jig.

FIG. 7 is an enlarged sectional view of a portion A in FIG. 6;

FIG. 8 is a perspective view of another substrate pressing jig according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Substrate crimping jig 2 Non-magnetic base 3 Magnet 4 Resin member 5 Ferromagnetic plate 6 Spring 7 Non-magnetic thin plate 17 Ferromagnetic plate having a function as a spring body 18 Magnet 19 Heat-resistant resin container 20 Magnet holding plate 21 Snap retainer

Claims (5)

[Claims] 1. A non-magnetic substrate, a ferromagnetic plate disposed on one principal surface of the substrate, and a ferromagnetic plate embedded in the substrate at a position where lines of magnetic force are substantially perpendicular to the ferromagnetic plate. A substrate crimping jig comprising: a magnet; and a spring disposed in a predetermined arrangement with the magnet and having a pressing force in a direction of another main surface of the base. 2. A substrate holder comprising a ferromagnetic plate and a holding plate hinged to the ferromagnetic plate, and holding a non-magnetic substrate by pressing between the ferromagnetic plate and the holding plate. And
2. A substrate holder, wherein the substrate pressing jig according to claim 1 is provided on a surface of the holding plate that is in contact with the non-magnetic substrate. 3. A substrate crimping jig having a magnet arranged on a ferromagnetic plate in a predetermined arrangement at a position where lines of magnetic force are substantially perpendicular to the ferromagnetic plate, wherein the ferromagnetic plate is a spring. A substrate crimping jig comprising a body, wherein the magnet is attached to the ferromagnetic plate via an insulating material. 4. A substrate crimping jig having a projection made of a non-magnetic material disposed in a predetermined arrangement on a permanent magnet plate, wherein the permanent magnet plate is constituted by a spring body. Board crimping jig. 5. A substrate holder comprising a ferromagnetic plate and a pressing plate for pressing and holding a non-magnetic substrate between the ferromagnetic plate and the pressing plate, wherein the pressing plate is provided. A substrate holding jig, which is the substrate crimping jig according to any one of the preceding claims.