JP4528467B2 - Substrate crimping jig, substrate crimping jig mounting apparatus, and substrate crimping jig mounting method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a substrate crimping jig, a substrate crimping jig mounting apparatus, and a substrate crimping jig mounting method used when processing a nonmagnetic substrate such as a glass substrate.
[0002]
[Prior art]
In recent years, display devices such as liquid crystal display devices and plasma displays have been widely used in display devices of office automation equipment such as Japanese word processors and personal computers because of their thin, light weight and low power consumption. Accordingly, it is strongly desired to improve the manufacturing technology and productivity of the parts used in these display devices. In particular, a display portion of a liquid crystal display device is manufactured through a formation process of a transparent conductive film, a TFT element, signal lines and scanning lines, a color filter, an alignment film, and the like on a substrate surface such as a glass substrate. For this reason, the glass substrate holder used in each process involving heat treatment can follow the expansion and contraction of the glass substrate during the heat treatment without causing warping or undulation on the glass surface and damaging the substrate. It is necessary to hold it securely. In this way, jigs, devices, etc. for surface treatment of non-magnetic substrates such as glass substrates and ceramic substrates in order to facilitate work and improve product yield are important parts in the display device manufacturing field. It has become.
[0003]
Conventionally, when processing the surface of a non-magnetic substrate such as a glass substrate, the substrate pressing jig and the substrate holder that can hold the substrate without damaging the surface and without damaging the substrate itself are non-magnetic. A base, a ferromagnetic plate disposed on one main surface of the base, a magnet embedded in the base at a position where the lines of magnetic force are substantially perpendicular to the ferromagnetic plate, and the magnet and a predetermined A substrate crimping jig provided with a spring body arranged in an array and having a pressing force in the direction of another main surface of the substrate and a substrate holder using this substrate crimping jig are known (Japanese Patent Laid-Open No. 10-120173). .
[0004]
[Problems to be solved by the invention]
However, as the size of liquid crystal display devices has increased, mobile computers and mobile phones have become popular. However, it has become necessary to process glass substrates of different sizes and shapes with one production line or one substrate holder. In the substrate holder using the conventional substrate crimping jig, there is a problem that it is difficult to frequently replace and attach the substrate crimping jig.
In addition, when a transparent conductive film such as ITO or tin oxide is formed on a glass substrate by a spray method or the like, the glass substrate must be held under pressure at a temperature of several hundred degrees, and the glass substrate is made thinner. As the process proceeds, the conventional substrate crimping jig tends to crack in the glass substrate itself during the processing operation, and there is a problem that the glass substrate cannot be securely fixed and held.
[0005]
The present invention has been made to cope with such a problem, and when processing the surface of a non-magnetic substrate such as a glass substrate, the substrate itself is not damaged by a substrate crimping jig having a simpler structure and is large. An object of the present invention is to provide a substrate crimping jig, a substrate crimping jig mounting apparatus, and a substrate crimping jig mounting method capable of processing glass substrates having different sheath shapes with one production line or one substrate holder.
[0006]
[Means for Solving the Problems]
A substrate crimping jig according to the present invention is a substrate crimping jig for a non-magnetic substrate comprising a thin plate-shaped holder and a plurality of magnetic bodies held independently of each other by a holding portion of the plate-shaped holder. The magnetic body has at least a surface in contact with the non-magnetic substrate covered with a heat-resistant resin, and a concave portion having a semicircular cross section is formed on the outer periphery of the magnetic body, and the plate-shaped holder is formed on the inner peripheral surface. A hole having a protrusion is formed, and the magnetic body is held by the protrusion of the plate-shaped holder with a gap in the concave portion of the magnetic body .
[0007]
The surface of the magnetic body that is in contact with the non-magnetic substrate is covered with a heat-resistant resin, and the holding portion of the thin plate-like plate-like holder is held in the concave portion having a semicircular arc-shaped cross section formed on the outer periphery of the magnetic body The thin plate-like plate holder is in a spring state, and a plurality of magnetic bodies can move loosely without being fixed to each other. Therefore, even a thin glass substrate is not cracked or damaged in the process of forming a transparent conductive film or the like.
[0008]
The substrate crimping jig attachment device according to the present invention attaches a substrate crimping jig made of a magnetic material having a magnet surface coated with a heat-resistant resin to a predetermined position of a nonmagnetic substrate placed on a substrate holder on a gantry. Used for a substrate holding device for holding the non-magnetic substrate, and the substrate crimping jig mounting device includes a gantry on which a ferromagnetic substrate holder can be placed, an inner door that can be placed in order on the substrate holder, and The upper door is formed of a ferromagnetic material, and the inner door is formed of a non-magnetic material.
The middle door and the upper door are hinged to one side of the gantry. In the present invention, non-magnetic means a property that does not show ferromagnetism.
[0009]
A substrate crimping jig attachment device for attaching a substrate crimping jig to a predetermined position such as a glass substrate placed on a ferromagnetic plate, a substrate holder made of a ferromagnetic frame, and the substrate holder in turn. A non-magnetic material is provided by including a non-magnetic middle door and a ferromagnetic upper door that are hinged to one frame of the substrate holder. The attachment location of the substrate crimping jig can be reversed and moved through the inner door, and the next glass substrate can be processed while maintaining the arbitrarily set location of the substrate crimping jig. For this reason, even if it is a glass substrate from which a kind differs, it can process with one substrate holder.
[0010]
The substrate crimping jig attaching method according to the present invention is a method of attaching a substrate crimping jig made of a magnetic material coated with a heat-resistant resin to a predetermined position of a nonmagnetic substrate placed on a substrate holder, 1) a step of placing the raw non-magnetic substrate on a substrate holder, (2) such that the heat-resistant resin-coated magnetic member surface and the untreated non-magnetic substrate surface are in contact, the substrate bonding A step of superimposing the middle door and the upper door on which the jig is attached at a predetermined position on the untreated non-magnetic substrate; and (3) the middle of the upper door with the middle door being superimposed on the untreated non-magnetic substrate. A step of peeling from the door, and (4) a step of attaching the non-processed non-magnetic substrate onto the substrate holder by the magnetic force of the substrate suction jig by peeling the middle door from the substrate crimping jig. And
[0011]
According to the method of the present invention, glass substrates having different sizes and shapes can be processed with one production line or one substrate holder without changing the substrate holder.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
A substrate crimping jig according to the present invention will be described with reference to FIG. FIG. 1A is a plan view of a substrate crimping jig, FIG. 1B is an AA sectional view, and FIG.
The substrate crimping jig 1 is composed of a plurality of magnetic bodies 3 held by a plate-like holder 2 independently of each other.
The plate-like holder 2 can be used as long as the material and shape can hold the magnetic body 3 while processing the glass substrate. In particular, a material whose thermal expansion coefficient is not significantly different from that of glass or ceramics is preferable. Examples of such materials include 42 alloy, ferritic stainless steel, and iron alloy.
Moreover, the plate-shaped holder 2 is thin plate shape, and the hole part 2b which has the processus | protrusion 2a is formed in the internal peripheral surface. The magnetic body 3 is held by a protrusion 2a that is held with a gap in a recess 3a having a semicircular cross section. In particular, by having a gap, even if the plate-like holder 2 expands and contracts, the magnetic body 3 fixed by the magnetic force is not displaced with respect to the glass substrate, so that the glass substrate is cracked during the processing operation. It becomes difficult.
[0013]
A sectional view of the magnetic body 3 is shown in FIG. In the magnetic body 3, at least the surface of the permanent magnet 3c that contacts the nonmagnetic substrate is covered with a heat resistant resin 3b. Further, a cover portion 3d for holding the permanent magnet 3c in the heat resistant resin 3b is formed integrally with the heat resistant resin 3b. The covering portion 3d may be a heat resistant resin layer or a metal material having a rust prevention ability. A recess 3a having a semicircular cross section is formed on the outer periphery of the magnetic body 3, that is, on the outer periphery of the heat resistant resin 3b or the covering portion 3d. The heat-resistant resin 3b or the cover portion 3d can be used as long as it has a shape in which the permanent magnet 3c is incorporated and the recess 3a can be formed on the outer periphery. In addition, it is preferable to press-fit the heat-resistant resins 3b to each other because production man-hours can be reduced.
About the material of the permanent magnet 3c, it can select according to heat processing conditions, such as a glass substrate. That is, any permanent magnet having a Curie point equal to or higher than the glass substrate processing temperature can be used. For example, alnico, ferrite, rare earth-cobalt, iron-chromium-cobalt magnets, etc. can be used.
[0014]
As the heat-resistant resin 3b, a material that does not undergo thermal deformation or thermal degradation at a heat treatment temperature such as a glass substrate can be selected. In particular, a heat-resistant resin material that does not damage the surface even when it comes into contact with a glass substrate or the like is preferable. Examples of heat-resistant resins include thermoplastic resins and thermosetting resins, and suitable thermoplastic resins include polyphenylene sulfide (PPS), polyether ether ketone (PEEK), polyhydroxyphenylene ether (PPO), and polyether sulfone. Examples include phon (PES), polyether nitrile (PEN), aromatic polyesters such as polyarylate and polyoxybenzoyl, liquid crystal polymers, and polyetherimide. Moreover, as a thermosetting resin, an epoxy resin, a polyimide resin, a maleimide resin, a silicone resin, a phenol resin etc. can be mentioned, for example. These resins may be used alone or in combination, and in these resins, curing agents, catalysts, plasticizers, colorants, flame retardants, fillers, low stress additives, other various additives, etc. Can also be contained. Among these, as the heat resistant resin 3b that can be used in the present invention, the resin composition mainly composed of polyether ether ketone (PEEK) has high tensile strength and deflection temperature under load, and does not damage the glass surface or the like. Particularly preferred.
[0015]
A substrate crimping jig mounting apparatus according to the present invention will be described with reference to FIG. FIG. 3 is a perspective view of the substrate crimping jig mounting apparatus.
The substrate crimping jig attachment device 4 attaches the substrate crimping jig 1 on the non-processed surface of the glass substrate in order to fix the nonmagnetic substrate 6 such as a glass substrate placed on the substrate holder 5 during the processing. It is a device for.
The substrate crimping jig attachment device 4 includes a gantry 7 on which the substrate holder 5 can be placed, and an intermediate door 8 and an upper door 9 that are hinged on one frame of the gantry 7. The upper door 9 and the substrate holder 5 are made of 42 alloy, ferritic stainless steel, iron alloy, etc., which are the same material as the plate-like holder 2, and the middle door 8 is made of a non-magnetic material.
The middle door 8 and the upper door 9 may be any structure that can be placed on the substrate holder 5 in order.
[0016]
A magnet 10 is arranged on the upper door 9 along at least a predicted arrangement of the substrate crimping jig 1 so that the magnetic lines of force are substantially perpendicular to the upper door 9. The magnet 10 has holes arranged in advance in a lattice shape in the entire upper door 9, and is fixed by a snap retainer or the like after being inserted into an arbitrary hole that matches the mounting shape of the substrate crimping jig 1. Further, a handle 11 is provided on the upper door 9.
[0017]
The middle door 8 is interposed between the upper door 9 and the substrate holder 5 and functions to move the substrate crimping jig 1 to the substrate holder 5 side or the upper door 9 side. In order to fulfill this function, the attracting force due to the magnetic force between the magnet 10 attached to the upper door 9 and the substrate crimping jig 1 which is a ferromagnetic body via the middle door 8 is caused to pass through the substrate holder 5 and the nonmagnetic substrate 6. It sets so that it may become larger than the adsorption | suction force by the magnetic force with the board | substrate crimping | compression-bonding jig 1 performed.
Further, the middle door 8 is attached with a resilience adjusting member 8a for adjusting its resilience, for example, a plastic material so that the substrate crimping jig 1 can be peeled while being fixed on the non-magnetic substrate 6. Further, a handle 11 is provided on the inner door 8.
[0018]
Since the gantry 7 has four legs having different lengths, one corner of the gantry 7 is lowered, and the upper surface of the gantry 7 is inclined. By using this inclination and the stopper 7a installed on the gantry 7, the nonmagnetic substrate 5 can be accurately placed at a predetermined place.
[0019]
A substrate crimping jig mounting method using the substrate crimping jig mounting apparatus 4 will be described with reference to FIG. FIG. 4A to FIG. 4D are process diagrams for attaching a substrate crimping jig.
(1) An unprocessed nonmagnetic substrate 6 is placed on the substrate holder 5 (FIG. 4A). At this time, the board | substrate crimping | compression-bonding jig | tool 1 is adsorb | sucking in the reverse state at the inner door 8 side.
(2) The middle door 8 and the upper door 9 on which the substrate crimping jig 1 is reversely attached at a predetermined position are simultaneously stacked on the non-processed nonmagnetic substrate 6 (FIG. 4B).
(3) The upper door 9 is peeled from the middle door 8 in a state where the middle door is overlapped on the non-processed nonmagnetic substrate 6 (FIG. 4C). By this operation, the substrate crimping jig 1 is released from the magnetic force of the upper door 9.
(4) By peeling the middle door 8 from the substrate crimping jig 1, an unprocessed non-magnetic substrate 6 is mounted on the substrate holder 1 by the magnetic force of the substrate crimping jig 1 (FIG. 4D).
[0020]
In this way, the untreated nonmagnetic substrate 6 attached on the substrate holder 5 is subjected to a surface treatment such as a transparent conductive film treatment while being attached.
The processed nonmagnetic substrate 6 is removed from the substrate holder 5 by a process reverse to the attaching process shown below.
(5) The processed nonmagnetic substrate 6 is mounted on the substrate holder 5 fixed to the gantry 7.
(6) Both the upper door 9 and the middle door 8 are closed, and the substrate crimping jig 1 is attracted to the door side by the magnetic force of the magnet disposed on the upper door 9.
(7) The substrate crimping jig 1 can be removed from the non-magnetic substrate 6 while maintaining the attached shape by lifting both the upper door 9 and the middle door 8 simultaneously. When pulling up both doors, the middle door 8 is slightly curved, so that it can be easily removed from the nonmagnetic substrate 6.
(8) The processed nonmagnetic substrate 6 is removed, and the process returns to (1).
By the operations (1) to (8), the substrate crimping jig 1 can be attached to the same position of the nonmagnetic substrate 6 and removed continuously.
[0021]
The initial arrangement of the substrate crimping jig 1 is manually mounted on the nonmagnetic substrate 6. This operation is only performed once in a continuous operation for processing a nonmagnetic substrate having the same shape. Thereafter, the substrate crimping jig 1 can be removed from the non-magnetic substrate 6 while maintaining the attached shape by the action of the upper door and the middle door.
[0022]
【The invention's effect】
A substrate crimping jig according to the present invention includes a thin plate-shaped holder and a plurality of magnetic bodies held independently of each other by a holding portion of the plate-shaped holder, and the magnetic body is at least a non-magnetic substrate. The surface in contact with is coated with a heat-resistant resin, and a concave portion having a semicircular cross section is formed on the outer periphery of the magnetic body . The plate-shaped holder has a hole having a protrusion on the inner peripheral surface. The plurality of magnetic bodies coated with the heat-resistant resin are not fixed to each other because the recesses of the magnetic body have gaps and are held by the protrusions of the plate holder . As a result, even a thin glass substrate can be held without being cracked or damaged in the process of forming a transparent conductive film or the like.
[0023]
A substrate crimping jig mounting apparatus according to the present invention includes a gantry on which a ferromagnetic substrate holder can be placed, an intermediate door and an upper door that can be placed on the substrate holder in order, and the upper door is made of a ferromagnetic material. Since the inner door is made of a non-magnetic material, the inner door and the upper door are hinged to one side of the frame, so that the substrate crimping jig can be connected via the non-magnetic inner door. The attachment location can be reversed and the next glass substrate can be processed while maintaining the arbitrarily set location of the substrate crimping jig. As a result, different types of glass substrates can be processed with a single substrate holder.
[0024]
The substrate crimping jig mounting method according to the present invention includes (1) a step of placing an untreated nonmagnetic substrate on a substrate holder, (2) a magnetic surface coated with the heat resistant resin, and the untreated nonmagnetic material. A step of stacking the middle door and the upper door on which the substrate crimping jig is attached at a predetermined position so as to come into contact with the substrate surface on the untreated nonmagnetic substrate; A step of peeling the upper door from the middle door while being stacked on the magnetic substrate; and (4) peeling the middle door from the substrate crimping jig to place the untreated non-magnetic substrate on the substrate holder. And the step of attaching by magnetic force, glass substrates having different sizes and shapes can be processed with one production line or one substrate holder without changing the substrate holder.
[Brief description of the drawings]
FIG. 1 is a diagram illustrating a substrate crimping jig.
FIG. 2 is a cross-sectional view of a magnetic body.
FIG. 3 is a perspective view of a substrate crimping jig attaching device.
FIG. 4 is a process diagram for attaching a substrate crimping jig.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Board | substrate crimping jig 2 Plate-shaped holder 3 Magnetic body 4 Board | substrate crimping jig mounting apparatus 5 Board | substrate holder 6 Nonmagnetic board | substrate 7 Base 8 Middle door 9 Upper door 10 Magnet 11, 12 Handle

Claims (4)

A substrate crimping jig for a non-magnetic substrate comprising a thin plate-shaped holder and a plurality of magnetic bodies held independently of each other by a holding portion of the plate-shaped holder,
The magnetic body has at least a surface in contact with the non-magnetic substrate covered with a heat-resistant resin, and a concave portion having a semicircular cross section is formed on the outer periphery of the magnetic body .
The plate-like holder is formed with a hole having a protrusion on the inner peripheral surface,
The magnetic material substrate crimping jig, characterized in that a gap in a recess of the magnetic body is held by the protrusion of the plate-like holder. A substrate holding apparatus for holding a nonmagnetic substrate by attaching a substrate crimping jig made of a magnetic material having a magnet surface coated with a heat-resistant resin at a predetermined position of a nonmagnetic substrate placed on a substrate holder on a gantry. A substrate crimping jig mounting device used for
The substrate crimping jig mounting apparatus includes a gantry on which a ferromagnetic substrate holder can be placed, an intermediate door and an upper door that can be placed in order on the substrate holder, and the upper door is made of a ferromagnetic material. A substrate crimping jig attaching device, wherein the inner door is formed of a non-magnetic material.   3. The substrate crimping jig mounting device according to claim 2, wherein the middle door and the upper door are hinged to one side of the frame. 2. A substrate crimping jig mounting method for mounting a substrate crimping jig according to claim 1, comprising a magnetic body having a magnet surface coated with a heat-resistant resin at a predetermined position of a nonmagnetic substrate placed on a ferromagnetic substrate holder. Because
(1) placing an untreated nonmagnetic substrate on a substrate holder;
(2) The untreated middle door and the upper door on which the substrate crimping jig is attached at a predetermined position so that the surface of the magnetic material coated with the heat resistant resin and the surface of the untreated nonmagnetic substrate are in contact with each other. A process of stacking on a non-magnetic substrate;
(3) peeling the upper door from the middle door in a state where the middle door is overlaid on the untreated non-magnetic substrate;
(4) attaching the unprocessed nonmagnetic substrate onto the substrate holder by peeling the inner door from the substrate crimping jig by the magnetic force of the substrate adsorption jig, and mounting the substrate crimping jig Method.

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