JPH0999268A - Liquid applying method - Google Patents

Liquid applying method

Info

Publication number
JPH0999268A
JPH0999268A JP25749695A JP25749695A JPH0999268A JP H0999268 A JPH0999268 A JP H0999268A JP 25749695 A JP25749695 A JP 25749695A JP 25749695 A JP25749695 A JP 25749695A JP H0999268 A JPH0999268 A JP H0999268A
Authority
JP
Japan
Prior art keywords
liquid
height
work
nozzle
liquid application
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25749695A
Other languages
Japanese (ja)
Other versions
JP2774785B2 (en
Inventor
Kazumasa Ikushima
和正 生島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Musashi Engineering Co Ltd
Original Assignee
Musashi Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Musashi Engineering Co Ltd filed Critical Musashi Engineering Co Ltd
Priority to JP7257496A priority Critical patent/JP2774785B2/en
Publication of JPH0999268A publication Critical patent/JPH0999268A/en
Application granted granted Critical
Publication of JP2774785B2 publication Critical patent/JP2774785B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1241Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)

Abstract

PROBLEM TO BE SOLVED: To make it possible to surely control the height of nozzle to an existing installation, etc., with high accuracy by interrupting the measurement by height sensors only during the time a liquid applying nozzle passes at least one point of the moving locus of the liquid applying nozzle with respect to a work. SOLUTION: The liquid applying nozzle is first lowered onto the point 16a in order to apply the liquid on the surface of the work W according to the prescribed locus 14. For example, a Z-axis actuator 7 is then controlled by an operation control section 13 of a control means 12 in accordance with the detection signals of the height sensors 11 to control the height of the liquid applying nozzle. In succession, the liquid applying nozzle is moved on the locus 14 while the liquid is applied on the work. The measurement operation of the height sensors 11 is interrupted by the operation control section 13 and the liquid applying nozzle is relatively moved while the height is maintained constant when the liquid applying nozzle arrives at the position 16c just before the existing installation 15. The measurement operation of the height sensors 11 is thereafter resumed when the liquid applying nozzle arrives at the pass point 16d of the existing installation 15.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、液体塗布ノズルの高
さをコントロールしながらワーク表面に液体を塗布する
方法に関するものであり、液状, ペースト状, クリーム
状等を呈する電子材料, 接着剤その他の液体材料の、プ
リント基板, セラミック板, ガラス板などからなるワー
クへの、それ自身の反り、うねり等の他、そこへの既配
設物、既存塗膜等に影響されることのない定常塗布を可
能とするものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for applying a liquid to a surface of a work while controlling the height of a liquid application nozzle, such as an electronic material in the form of liquid, paste or cream, adhesive, etc. Steady state of the liquid material, which is not affected by the warp or swell of itself on the work consisting of printed circuit board, ceramic plate, glass plate, etc. It enables coating.

【0002】[0002]

【従来の技術】液体塗布ノズルから吐出した液体材料
を、ワーク表面に連続的に、もしくは間欠的に定常塗布
するに際し、ワークに反り等があって、塗布ノズルの先
端とワーク表面との間隔が変化すると、塗布液量, 塗布
形状等が不安定になることから、特開平2−52742 号公
報に開示されているように、塗布ノズルの先端とワーク
表面との間隔を所定の範囲内に調整しながら液体材料を
塗布することが提案されている。ところが、この提案技
術では、ワーク表面上に、既配設物、既存塗膜等がある
場合には、塗布ノズルの高さが、ワーク表面ではなく、
既配設物等の表面を基準として調整されることになっ
て、塗布液量、塗布形状等に変動が生じることから、特
開平6−114313号公報に開示されているように、既配設
物等に対するセンサ計測値が閾値を越えている間は、塗
布ノズルの高さを、計測値が閾値を超える直前の値に保
持する液体塗布方法が提案されている。
2. Description of the Related Art When a liquid material discharged from a liquid coating nozzle is constantly or intermittently coated on a work surface continuously or intermittently, the work is warped and the distance between the tip of the coating nozzle and the work surface is small. If it changes, the amount of coating liquid, the coating shape, etc. become unstable. Therefore, as disclosed in JP-A-2-52742, the interval between the tip of the coating nozzle and the work surface is adjusted within a predetermined range. However, it has been proposed to apply a liquid material. However, in this proposed technique, when there is an already disposed object, an existing coating film, etc. on the work surface, the height of the coating nozzle is not the work surface,
Since the amount of the coating liquid, the coating shape, and the like are changed by adjusting the surface of the already-arranged object as a reference, as already disclosed in JP-A-6-114313. A liquid application method has been proposed in which the height of the application nozzle is maintained at a value immediately before the measured value exceeds the threshold while the sensor measured value for an object or the like exceeds the threshold.

【0003】[0003]

【発明が解決しようとする課題】しかるに、後者の従来
技術は、センサの現実の計測値のフィードバック制御に
よって塗布ノズルの高さコントロールが行われるもので
あるため、近年の作業速度の高速化の要請の下で、ワー
クと塗布ノズルとの相対速度を高めた場合には、そのフ
ィードバック制御のタイムラグその他に起因して、例え
ば、塗布ノズルが既配設物の中腹位置に達して初めて、
ノズル高さの閾値制御が行われることになり、その結果
として、ノズルがワーク表面に対して不必要に上昇する
ことになる等の不都合があった。そしてこのことは、相
対速度を一層高めた場合により重大であり、相対速度の
増加につれて、ワークの反り等と、既配設物等との判別
が次第に困難になるという問題もあった。この一方にお
いて、上記従来技術をもってワーク表面に多数の不連続
な液体塗布を行う場合には、各塗布位置毎の間欠的な高
さ計測を行い、その計測結果に基づいて塗布ノズルの高
さをフィードバック制御することが必要になるため、作
業能率の向上には自ずから限界があった。
However, in the latter prior art, since the height of the coating nozzle is controlled by the feedback control of the actual measurement value of the sensor, there is a recent demand for a higher working speed. If the relative speed between the workpiece and the coating nozzle is increased, due to the time lag of the feedback control and the like, for example, only after the coating nozzle reaches the middle position of the already installed object,
The nozzle height threshold control is performed, and as a result, there is an inconvenience that the nozzle is unnecessarily raised above the work surface. This is more serious when the relative speed is further increased, and there is also a problem that as the relative speed increases, it becomes gradually difficult to distinguish between the work warp and the like, and the already-arranged objects. On the other hand, when a large number of discontinuous liquid coatings are applied to the surface of the work using the above-mentioned conventional technique, intermittent height measurement is performed for each coating position, and the height of the coating nozzle is determined based on the measurement result. Since feedback control was necessary, there was a limit to improving work efficiency.

【0004】この発明は、従来技術の有するこのような
問題点を解決することを課題として検討した結果なされ
たものであり、この発明の目的は、ワークそれ自身の反
り、うねり等に対して、高い精度をもって対処し得るこ
とはもちろん、ワーク表面に、既配設物, 既存塗膜等が
ある場合には、液体塗布ノズルの昇降変位を、既配設物
等の存在位置にて、タイムラグなしに正確に中断するこ
とで、高速作業においてなお塗布液量, 塗布形状等の変
動を十分に防止することができる液体塗布方法および、
多数個所への液体の不連続塗布に際し、とくには高さ計
測効率を高めて、作業能率を大きく向上させることがで
きる液体塗布方法を提供するにある。
The present invention has been made as a result of studies aimed at solving such problems of the prior art, and the object of the present invention is to prevent warping, undulation, etc. of the work itself. Not only can it be handled with high accuracy, but if there is an already installed object, existing coating film, etc. on the surface of the work, the vertical displacement of the liquid application nozzle will not occur at the existing position of the already installed object, etc. A liquid coating method that can sufficiently prevent fluctuations in the coating liquid amount, coating shape, etc. during high-speed work by accurately interrupting
It is another object of the present invention to provide a liquid coating method which can enhance the efficiency of height measurement particularly when discontinuously coating a liquid on a large number of locations and greatly improve the work efficiency.

【0005】[0005]

【課題を解決するための手段】この発明の液体塗布方法
は、ワーク表面に液体を塗布するに際し、とくに、予め
プログラムした、液体塗布ノズルの、水平面内での、ワ
ークに対する相対移動軌跡中の少なくとも一個所、いい
かえれば、既配設物等が存在する個所で、そこを液体塗
布ノズルが通過し終えるまでの間、これもまた予めプロ
グラムに基づいて、高さセンサによる計測を中断してア
クチュエータを不作動状態とし、そして、その特定個所
を通過後は、信号の反転その他によって、高さ計測を再
開し、アクチュエータを再作動させるものである。
According to the liquid application method of the present invention, at the time of applying a liquid to the surface of a work, in particular, at least in a pre-programmed relative movement locus of the liquid application nozzle in the horizontal plane with respect to the work. In one place, in other words, in the place where there is an existing object, etc., until the liquid application nozzle finishes passing therethrough, this is also based on the program in advance, and the measurement by the height sensor is interrupted and the actuator is stopped. After the inoperative state, and after passing through the specific portion, the height measurement is restarted and the actuator is reactivated by reversing the signal or the like.

【0006】また、この発明の他の液体塗布方法は、と
くに、ワーク表面を複数の液体塗布領域に区画し、それ
らの各液体塗布領域への液体の塗布に先立って、その液
体塗布領域内の少なくとも一個所で、液体塗布ノズル
の、ワーク表面からの高さを計測するとともに、その計
測結果に応じて液体塗布ノズルの高さを補正し、そし
て、その補正後のノズル高さを維持したまま、その液体
塗布領域の全ての液体塗布を行うものである。
According to another liquid application method of the present invention, in particular, the surface of the work is divided into a plurality of liquid application areas, and prior to application of the liquid to each of the liquid application areas, the liquid application area in the liquid application areas is divided. At least at one point, measure the height of the liquid application nozzle from the surface of the work, correct the height of the liquid application nozzle according to the measurement result, and keep the corrected nozzle height. The entire liquid application area is applied.

【0007】なお、この後者の方法において、好ましく
は、液体塗布ノズルの高さ計測を、各液体塗布領域の中
央付近にて行い、また好ましくは、その高さ計測を、各
液体塗布領域内の二個所以上の位置にて行う。
In this latter method, the height of the liquid application nozzle is preferably measured near the center of each liquid application area, and preferably the height is measured in each liquid application area. Perform at two or more locations.

【0008】[0008]

【作用】この発明の前者の方法によれば、液体塗布ノズ
ルの相対移動軌跡をプログラムする時点においてはすで
に、その軌跡中のどの位置に、どの程度の距離にわたっ
て既配設物等が存在するかが明らかであるので、そのよ
うな各個所にては、センサによる高さ計測を中断する旨
を、これも予めプログラムすることにより、液体塗布ノ
ズルとワークとの相対速度のいかんにかかわらず、その
塗布ノズルが、既配設物等の存在域に達すると、塗布ノ
ズルの昇降運動が確実に停止されることになる。そし
て、その塗布ノズルの、ワーク表面からの高さは、それ
が既配設物等の存在域を通過するまでの間、昇降運動の
停止時のままに維持されるので、ワーク表面、ひいて
は、既配設物等の表面に対する液体材料の塗布は、塗布
速度のいかんにかかわらず、液体塗布ノズルの、ワーク
表面に対する不要な昇降変位なしに行われることにな
る。従って、ワークそれ自身の反り、うねり等に対して
は、塗布ノズルを高い精度をもって昇降変位させて、塗
布液量, 塗布形状等を十分定常ならしめ得ることはもち
ろん、塗布ノズルが既配設物等の中腹位置に達するま
で、その塗布ノズルの高さ調整が行われることになる従
来技術に比し、ワーク表面に、それらの既設配設物等が
存在しないかの如くに液体塗布を行うことで、所期した
とおりの量, 形状等に対して常に正確な液体塗布を行う
ことができる。
According to the former method of the present invention, at the time of programming the relative movement locus of the liquid application nozzle, at what position and over what distance in the locus the already-arranged object and the like already exist. Therefore, at each such location, by pre-programming that height measurement by the sensor is interrupted, regardless of the relative speed of the liquid application nozzle and the work, When the coating nozzle reaches the existing area of the already-arranged object, the ascending / descending movement of the coating nozzle is surely stopped. Then, the height of the coating nozzle from the work surface is maintained at the time of stopping the lifting motion until it passes through the existing area of the already arranged object, so that the work surface, and by extension, The application of the liquid material to the surface of the already-arranged object or the like is performed without unnecessary vertical displacement of the liquid application nozzle with respect to the work surface regardless of the application speed. Therefore, when the work itself warps or swells, the coating nozzle can be displaced up and down with high accuracy to make the coating liquid amount, coating shape, etc. sufficiently steady, and the coating nozzle already installed. Compared with the prior art in which the height of the coating nozzle is adjusted until the middle position is reached, liquid coating is performed on the work surface as if there are no existing arrangements, etc. With this, it is possible to always perform accurate liquid application for the desired amount, shape, etc.

【0009】また、この発明の後者の方法では、各液体
塗布領域内の、既配設物等の存在しない代表的な少なく
とも一個所で、液体塗布ノズルの、ワーク表面からの高
さを計測し、そして、その計測結果に応じて塗布ノズル
の高さを補正して、その補正後の状態を維持したまま、
液体塗布領域内の全ての位置に液体材料を塗布すること
により、とくには、多数の不連続な液体塗布を行う場合
に、各塗布位置ごとに、塗布ノズルの高さ計測および高
さ調整のそれぞれを行う従来技術に比して、液体塗布作
業の作業能率を大きく向上させて、作業を十分に高速化
することができる。
In the latter method of the present invention, the height of the liquid application nozzle from the surface of the work is measured at at least one representative position in each liquid application region where there is no existing object. Then, the height of the coating nozzle is corrected according to the measurement result, and the state after the correction is maintained,
By applying the liquid material to all positions in the liquid application area, especially when performing a large number of discontinuous liquid applications, the height of the application nozzle is measured and the height is adjusted for each application position. It is possible to greatly improve the work efficiency of the liquid application work and to sufficiently speed up the work, as compared with the conventional technique for performing the above.

【0010】ところで、この方法において、液体塗布ノ
ズルの高さ計測を、液体塗布領域の中央付近にて行う場
合は、とくに、一個所のみにて高さ計測を行うときに
は、その塗布領域における代表的な、いいかえれば平均
的なノズル高さを求め得る可能性が高く、従って、塗布
領域内のそれぞれの塗布位置に対する、ノズル高さ精度
を十分高く維持することができる。
By the way, in this method, when the height of the liquid coating nozzle is measured near the center of the liquid coating area, especially when the height is measured only at one location, a typical coating area in the coating area is obtained. In other words, there is a high possibility that the average nozzle height can be obtained, and therefore, the nozzle height accuracy for each coating position in the coating region can be maintained sufficiently high.

【0011】またここで、塗布領域内の二個所以上の位
置にて高さ計測を行って、それらの平均値に基づいてノ
ズル高さを補正した場合には、高さ精度を一層向上させ
ることができる。
Further, when the height is measured at two or more positions in the coating area and the nozzle height is corrected based on the average value thereof, the height accuracy is further improved. You can

【0012】[0012]

【実施例】以下に、この発明の実施例を図面に基づいて
説明する。図1は、この発明の実施装置を示す略線正面
図であり、図中1は基部フレームを示す。ここではこの
基部フレーム1にY軸アクチュエータ2を取付け、この
Y軸アクチュエータ2によって、基部フレーム上に配設
したY軸ベース3を、紙面と直交する方向に駆動可能な
らしめるとともに、そのY軸ベース3に装着したX軸ア
クチュエータ4により、Y軸ベース上に配設したX軸ベ
ース5を図の左右方向に駆動可能ならしめる。ここで、
X軸ベース上には、たとえば板状をなすワークWを、負
圧吸着, 磁気吸着, フランプなどによって位置決め載置
可能ならしめる。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic line front view showing an embodiment of the present invention, in which 1 denotes a base frame. Here, a Y-axis actuator 2 is attached to the base frame 1, and the Y-axis actuator 2 can drive a Y-axis base 3 arranged on the base frame in a direction orthogonal to the plane of the drawing. The X-axis actuator 4 mounted on the device 3 drives the X-axis base 5 arranged on the Y-axis base in the lateral direction of the drawing. here,
On the X-axis base, for example, a plate-shaped work W can be positioned and mounted by negative pressure suction, magnetic suction, flapping, or the like.

【0013】またここでは、Z軸フレーム6にZ軸アク
チュエータ7、たとえばパルスモータを取付け、このパ
ルスモータによって、Z軸ベース8、ひいては、そこに
シリンジ9とともに取付けた液体塗布ノズル10の、所要
に応じた昇降変位を可能ならしめる。なお、Z軸ベース
8、図に示すところではシリンジ9に、塗布ノズル10と
ともに昇降変位する高さセンサ11を取付け、この高さセ
ンサ11によって、塗布ノズル10の先端の、ワークWの表
面からの高さを、好ましくは、塗布ノズル10に幾分先行
する位置で計測する。すなわち、塗布ノズル10の昇降制
御の若干のタイムラグを考慮するならば、そのノズル10
に幾分先行する位置で計測を行うことで、タイムラグの
影響を有効に吸収することができる。
Further, here, a Z-axis actuator 7, for example, a pulse motor is attached to the Z-axis frame 6, and by this pulse motor, the Z-axis base 8 and, by extension, the liquid application nozzle 10 attached together with the syringe 9 are required. If possible, move up and down. A height sensor 11 that is displaced up and down together with the coating nozzle 10 is attached to the Z-axis base 8, which is a syringe 9 as shown in the figure, and the height sensor 11 allows the tip of the coating nozzle 10 to move from the surface of the workpiece W. The height is preferably measured at a position slightly ahead of the application nozzle 10. That is, if a slight time lag in the elevation control of the coating nozzle 10 is taken into consideration, the nozzle 10
By measuring at a position slightly ahead of, it is possible to effectively absorb the influence of the time lag.

【0014】ところで、各アクチュエータ2, 4, 7
は、制御手段12に接続され、そこからの指令に基づい
て、所定の速度で、所定時間作動され、また、高さセン
サ11は、これもまた制御手段12に接続されて、そこへ高
さの計測結果を入力するとともに、そこから高さ計測の
中断および再開信号を受ける。
By the way, each actuator 2, 4, 7
Is connected to the control means 12, and is operated at a predetermined speed and for a predetermined time based on a command from the control means 12, and the height sensor 11 is also connected to the control means 12, and the height sensor While inputting the measurement result of, the height measurement stop and restart signals are received from the input.

【0015】図2は、他の実施装置を例示する略線正面
図であり、この例は、Z軸フレーム6に、二個づつの、
Z軸アクチュエータ7a, 7b、Z軸ベース8a, 8bおよびシ
リンジ9a, 9bを取付けることにより、それらのシリンジ
9a, 9bに設けたそれぞれの液体塗布ノズル10a, 10bおよ
び高さセンサ11a, 11bの、相互に独立した作動を可能ら
しめたものであり、ここでもまた、それぞれのアクチュ
エータ2, 4, 7a, 7bお高さセンサ11a, 11bを、制御手
段12に接続する。
FIG. 2 is a schematic front view illustrating another embodiment of the device. In this example, two Z-axis frames 6 are provided.
By attaching Z-axis actuators 7a, 7b, Z-axis bases 8a, 8b and syringes 9a, 9b, those syringes
The respective liquid application nozzles 10a, 10b and the height sensors 11a, 11b provided in 9a, 9b can be operated independently of each other, and here again, the respective actuators 2, 4, 7a, 7b Height sensors 11a, 11b are connected to the control means 12.

【0016】図3は、以上に述べた装置の制御手段12、
なかでもZ軸アクチュエータ7, 7a, 7bの作動制御部13
の作用を示すブロック線図である。ここで、この制御手
段12には、液体塗布ノズル10, 10a, 10bの相対移動軌跡
の他、その移動軌跡中の、既配設物等の急峻な凹凸部の
存在個所が予めプログラムされており、これにより、Y
軸アクチュエータ2およびX軸アクチュエータ4のそれ
ぞれは、制御手段12からの指令に基づき、Y軸ベース3
およびX軸ベース5のそれぞれ、ひいては、X軸ベース
上のワークWを、水平面内で、プログラムされた移動軌
跡に従って変位させ、また、作動制御部13は、塗布ノズ
ル10, 10a, 10bの相対移動中に、それが、プログラムさ
れた既配設物等の存在個所に達したときに、高さセンサ
11, 11a, 11bに計測中断信号を出力し、この結果とし
て、Z軸アクチュエータ7, 7a, 7bを不作動状態とし
て、液体塗布ノズル10, 10a, 10bの高さを、既配設物等
の存在個所に達する以前の高さに維持する。この一方
で、作動制御部13は、塗布ノズル10, 10a, 10bが、プロ
グラムされた既配設物等の存在個所を通過したときに、
高させンサ11, 11a, 11bに計測再開信号を出力し、その
後は、高さセンサ11, 11a, 11bからの計測結果に基づい
て、Z軸アクチュエータ7, 7a, 7bの作動を制御する。
FIG. 3 shows the control means 12 of the device described above,
Among them, the operation control unit 13 of the Z-axis actuators 7, 7a, 7b
It is a block diagram showing the action of. Here, in this control means 12, in addition to the relative movement loci of the liquid application nozzles 10, 10a, 10b, the location of the sharp uneven portion such as an already-arranged object in the movement locus is programmed in advance. , Because of this, Y
Each of the axis actuator 2 and the X-axis actuator 4 is based on a command from the control means 12 and the Y-axis base 3
Each of the X-axis base 5 and the work W on the X-axis base is displaced in the horizontal plane according to the programmed movement locus, and the operation control unit 13 causes the relative movement of the coating nozzles 10, 10a, 10b. Inside, when it reaches the location of the programmed pre-arrangement etc., the height sensor
A measurement interruption signal is output to 11, 11a, 11b, and as a result, the Z-axis actuators 7, 7a, 7b are made inoperative, and the heights of the liquid application nozzles 10, 10a, 10b are set to those of the already installed objects. Maintain the height before reaching the existing location. On the other hand, the operation control unit 13, when the coating nozzles 10, 10a, 10b pass through the existing location of the programmed already installed object,
A measurement restart signal is output to the height sensors 11, 11a, 11b, and thereafter, the operation of the Z-axis actuators 7, 7a, 7b is controlled based on the measurement results from the height sensors 11, 11a, 11b.

【0017】なお、ここにおける作動制御は、たとえ
ば、液体の塗布幅、塗布量などの条件に従って決定され
る、液体塗布ノズル10, 10a, 10bの、ワーク表面からの
高さを基準値とし、高さセンサ11, 11a, 11bによる計測
結果がその基準値, より正確には、その基準値を中心と
する一定領域より大きいか、小さいかを作動制御部13に
て判定し、ワークWの反り、うねりなどに起因して、そ
の判定結果が大小いずれかの側に偏っている場合には、
作動制御部13からZ軸アクチュエータ7, 7a, 7bに補正
信号を出力してZ軸アクチュエータ7, 7a, 7bの作動を
もたらし、これよって、液体塗布ノズル10, 10a, 10b
の高さを、基準値に一致もしくは近接させることにより
行い、この結果として、液体の十分定常な塗布が実現さ
れる。
The operation control here is based on, for example, the height of the liquid application nozzles 10, 10a, 10b from the work surface, which is determined in accordance with the conditions such as the liquid application width and the application amount. The measurement result by the height sensors 11, 11a, 11b is the reference value, more accurately, the operation control unit 13 determines whether the measurement value is larger or smaller than a certain area around the reference value. If the judgment result is biased to either the large or small side due to swell, etc.,
A correction signal is output from the operation control unit 13 to the Z-axis actuators 7, 7a, 7b to cause the operation of the Z-axis actuators 7, 7a, 7b, and thus the liquid application nozzles 10, 10a, 10b.
Is performed by matching or approaching the height of the reference value with the reference value, and as a result, sufficiently steady application of the liquid is realized.

【0018】図4は、このことを、ワークWの表面に、
予めプログラムされた軌跡14に従って液体を塗布する場
合について示す平面図であり、図5は、その場合のフロ
ーチャートである。なお、図4中15は、軌跡14中に存在
する既配設物を示す。
FIG. 4 shows this on the surface of the work W,
FIG. 6 is a plan view showing a case where a liquid is applied according to a pre-programmed trajectory 14, and FIG. 5 is a flowchart in that case. It should be noted that reference numeral 15 in FIG. 4 denotes an existing object existing in the trajectory 14.

【0019】ここでたとえば、図中の点16a から点16b
まで右廻りに塗布を行うときには、液体塗布ノズル10,
10a, 10bを点16a 上に下降させる。この場合において、
塗布ノズル10, 10a, 10bが高さの制御範囲内に入ると、
高さセンサ11, 11a, 11bの計測結果が作動制御部13へ入
力され、作動制御部13はその計測結果に応じた補正信号
をZ軸アクチュエータ7, 7a, 7bに出力して、そのアク
チュエータ7, 7a, 7bを作動させ、これによって、塗布
ノズル10, 10a, 10bを、基準高さもしくはその近傍にも
たらす。その後は、液体塗布ノズル10, 10a, 10bからの
液体の塗布と、その塗布ノズル10, 10a, 10bの、ワーク
Wに対する相対移動とを開始して、塗布ノズル10, 10a,
10bを、高さセンサ11, 11a, 11bの作動下で、軌跡14上
に移動させる。そして、その塗布ノズル10, 10a, 10b
が、既配設物15の手前位置16c に達した時に、入力プロ
グラムに基づいて、作動制御部13から高さセンサ11, 11
a, 11bへ、計測中断信号が出力され、それらのセンサ1
1, 11a, 11bは高さ計測を中断する。従って、この中断
後は、作動制御部13からZ軸アクチュエータ7, 7a, 7b
への補正信号の出力はなく、塗布ノズル10, 10a, 10bの
高さは、高さ計測の中断時のままに維持される。
Here, for example, points 16a to 16b in the figure
When applying clockwise to the liquid application nozzle 10,
Lower 10a and 10b above point 16a. In this case,
When the coating nozzles 10, 10a, 10b are within the height control range,
The measurement results of the height sensors 11, 11a, 11b are input to the operation control unit 13, and the operation control unit 13 outputs a correction signal corresponding to the measurement result to the Z-axis actuators 7, 7a, 7b, and the actuator 7 , 7a, 7b are actuated to bring the application nozzles 10, 10a, 10b to or near the reference height. After that, the application of the liquid from the liquid application nozzles 10, 10a, 10b and the relative movement of the application nozzles 10, 10a, 10b with respect to the work W are started, and the application nozzles 10, 10a, 10a,
10b is moved on the locus 14 under the operation of the height sensors 11, 11a, 11b. And the coating nozzles 10, 10a, 10b
However, when it reaches the front position 16c of the already installed object 15, the height sensors 11, 11 are supplied from the operation control unit 13 based on the input program.
A measurement interruption signal is output to a and 11b, and those sensors 1
1, 11a, 11b interrupt the height measurement. Therefore, after this interruption, the Z axis actuators 7, 7a, 7b from the operation control unit 13
There is no correction signal output to the coating nozzles 10, and the heights of the coating nozzles 10, 10a, 10b are maintained as they were when the height measurement was interrupted.

【0020】このようにしてノズル高さを一定に維持さ
れたまま塗布ノズル10, 10a, 10bが相対移動して、それ
が既配設物15の通過点16d に達すると、作動制御部13か
ら高さセンサ11, 11a, 11bへ計測再開信号が出力され、
それ以後は、高さセンサ11,11a, 11bの計測結果に応じ
て作動計測部13からZ軸アクチュエータ7, 7a, 7bへ補
正信号が出力されて、ノズル高さの修正が行われ、そし
て、塗布ノズル10, 10a, 10bが点16b に達すると、液体
の塗布の停止と、塗布ノズル10, 10a, 10bの元位置への
上昇とが行われて一連の塗布作業が終了する。
In this way, when the coating nozzles 10, 10a, 10b relatively move while maintaining the nozzle height constant and reach the passing point 16d of the already installed object 15, the operation control unit 13 A measurement restart signal is output to the height sensors 11, 11a, 11b,
After that, a correction signal is output from the operation measuring unit 13 to the Z-axis actuators 7, 7a, 7b according to the measurement results of the height sensors 11, 11a, 11b, the nozzle height is corrected, and When the coating nozzles 10, 10a, 10b reach the point 16b, the coating of the liquid is stopped and the coating nozzles 10, 10a, 10b are moved up to their original positions, and the series of coating operations is completed.

【0021】以上のようにして液体を塗布する場合に
は、塗布ノズル10, 10a, 10bの相対移動速度のいかんに
かかわらず、既配設物15の存在部分では、塗布ノズル1
0, 10a,10bの昇降変位を、タイムラグなしに正確に停止
することができるので、センサの計測結果に基づいてノ
ズル高さをフィードバック制御する従来技術に比して、
塗布量, 形状等につき、はるかにすぐれた精度をもたら
すことができる。
In the case of applying the liquid as described above, regardless of the relative moving speed of the application nozzles 10, 10a, 10b, the application nozzle 1 can be used in the existing portion 15 regardless of the relative movement speed.
The vertical displacement of 0, 10a, 10b can be stopped accurately without a time lag, so compared with the conventional technology that feedback-controls the nozzle height based on the measurement result of the sensor,
It is possible to bring much higher accuracy in terms of coating amount, shape, etc.

【0022】図6は、液体の他の塗布方法を例示する平
面図である。ここでは、はじめに、ワークWの表面に複
数の液体塗布領域21〜26を区画し、次いで、高さセンサ
11, 11a, 11bの作用下で、各塗布領域内、図ではそのほ
ぼ中央部に位置する代表計測点21a 〜26a の各点で、塗
布ノズル10, 10a, 10bの、ワーク表面からの高さを計測
するとともに、作動制御部13により、それらの計測結果
に基づき、代表計測点21a 〜26a に対するノズル高さの
補正値、たとえば、塗布ノズル10, 10a, 10bの基準下降
量に対する増減量を演算し、そして記憶する。しかる後
は、上昇姿勢とした塗布ノズル10, 10a, 10bを、領域21
内の塗布点21b へ、代表計測点21a に対する補正値を考
慮して下降させて、その塗布点21b に対する液体の塗布
を行い、続いて、そのノズル10, 10a, 10bを上昇させ
る。以後は、領域21内の他の全ての塗布点21c 〜21i に
対し、同様の下降、塗布および上昇を順次に繰返す。
FIG. 6 is a plan view illustrating another method for applying a liquid. Here, first, a plurality of liquid application areas 21 to 26 are partitioned on the surface of the work W, and then the height sensor
Under the action of 11, 11a, 11b, the height of the coating nozzles 10, 10a, 10b from the work surface at each of the representative measurement points 21a to 26a located in the respective coating areas, that is, substantially in the center thereof in the figure. In addition to measuring, the operation control unit 13 calculates the correction value of the nozzle height for the representative measurement points 21a to 26a, for example, the increase / decrease amount with respect to the reference descent amount of the coating nozzles 10, 10a, 10b based on the measurement results. And then remember. After that, the application nozzles 10, 10a, and 10b in the raised posture are moved to the area 21
The liquid is applied to the application point 21b by taking the correction value for the representative measurement point 21a into consideration, the liquid is applied to the application point 21b, and then the nozzles 10, 10a, 10b are raised. After that, the same descending, coating, and ascending steps are sequentially repeated for all other coating points 21c to 21i in the area 21.

【0023】ところで、この場合のノズル下降量は、全
ての塗布点21b 〜21i において、予め設定した基準下降
量に対して代表計測点21a についての補正増減量を加算
もしくは減算した一定値となる。このようにして一の領
域21内での塗布を終了した後は、隣接する領域22内の塗
布点22bへ、代表計測点22aに対する補正値を考慮して
ノズルを下降させて塗布を行い、このことを他の全ての
塗布点22c〜22iについて繰返し、これらのことを、他
の全ての領域23〜26にて行うことによって一連の塗布作
業を終了する。なお、上述したところでは、全ての代表
計測点21a 〜26a の高さ計測および、補正値演算を予め
行った後に塗布作業を開始することとしたが、各領域毎
に、高さ計測等と塗布作業とを順次に行うこともでき
る。
By the way, the nozzle descent amount in this case is a constant value obtained by adding or subtracting the correction increasing / decreasing amount at the representative measurement point 21a to the preset reference descent amount at all the coating points 21b to 21i. After finishing the coating in one area 21 in this way, the nozzle is lowered to the coating point 22b in the adjacent area 22 in consideration of the correction value for the representative measurement point 22a. This is repeated for all the other application points 22c to 22i, and these operations are performed in all the other areas 23 to 26 to end the series of application operations. In the above description, the height measurement of all the representative measurement points 21a to 26a and the coating work is started after performing the correction value calculation in advance, but the height measurement and the coating are performed for each area. The work and the work can be performed sequentially.

【0024】以上のようにして液体の塗布を行う場合に
は、各点毎の高さ計測および高さ補正が不要となること
から、作業能率を大きく向上させることができる。
When the liquid is applied as described above, it is not necessary to measure the height and correct the height at each point, so that the working efficiency can be greatly improved.

【0025】[0025]

【発明の効果】この発明の第1の方法によれば、高さ計
測の中断位置情報を予めプログラム入力しておくことに
より、液体塗布ノズルの相対移動速度の大小にかかわら
ず、既配設物等に対するノズル高さを高い精度をもって
確実に制御することができ、これにより、ワーク表面に
既設配設物等が存在しないかの如くの塗布作業を行っ
て、液体の塗布量, 形状等を高い精度でコントロールす
ることができる。また、第2の方法によれば、複数の液
体塗布領域の各々の、代表的なノズル高さを計測するだ
けで足りるので、作業能率を大きく向上させることがで
きる。なお、この後者の方法において、液体塗布領域の
中央付近にて高さ計測を行った場合には、仕上がり精度
をより向上させることができ、このことは、塗布領域内
の二個所以上の位置で高さ計測を行った場合に一層顕著
である。
According to the first method of the present invention, the interruption position information of the height measurement is pre-programmed and inputted, regardless of the relative movement speed of the liquid application nozzle, the existing object is not provided. It is possible to reliably control the nozzle height with respect to the workpieces with high accuracy, so that the coating work can be performed as if there are no existing objects on the surface of the workpiece, and the amount of liquid applied, the shape, etc. can be increased. It can be controlled with precision. Further, according to the second method, since it is sufficient to measure the typical nozzle height of each of the plurality of liquid application areas, the work efficiency can be greatly improved. In this latter method, when the height is measured near the center of the liquid application area, the finishing accuracy can be further improved. This means that at two or more positions within the application area. It is more remarkable when the height is measured.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の実施装置を例示する略線正面図であ
る。
FIG. 1 is a schematic front view illustrating an embodiment of the present invention.

【図2】この発明の他の実施装置を例示する略線正面図
である。
FIG. 2 is a schematic front view illustrating another embodiment of the present invention.

【図3】制御手段の作用を示すブロック線図である。FIG. 3 is a block diagram showing the operation of the control means.

【図4】発明方法の説明図である。FIG. 4 is an explanatory diagram of an invented method.

【図5】図4に示す方法のフローチャートである。5 is a flow chart of the method shown in FIG.

【図6】他の発明方法の説明図である。FIG. 6 is an explanatory diagram of another inventive method.

【符号の説明】[Explanation of symbols]

1 基部フレーム 2 Y軸アクチュエータ 3 Y軸ベース 4 X軸アクチュエータ 5 X軸ベース 6 Z軸フレーム 7, 7a, 7b Z軸アクチュエータ 8, 8a, 8b Z軸ベース 9, 9a, 9b シリンジ 10, 10a, 10b 液体塗布ノズル 11, 11a, 11b 高さセンサ 12 制御手段 13 作動制御部 14 軌跡 15 既配設物 16a, 16b 点 16c 手前位置 16d 通過点 21〜26 液体塗布領域 21a 〜26a 代表計測点 21b 〜21i 塗布点 W ワーク 1 base frame 2 Y-axis actuator 3 Y-axis base 4 X-axis actuator 5 X-axis base 6 Z-axis frame 7, 7a, 7b Z-axis actuator 8, 8a, 8b Z-axis base 9, 9a, 9b Syringe 10, 10a, 10b Liquid application nozzle 11, 11a, 11b Height sensor 12 Control means 13 Operation control unit 14 Locus 15 Existing object 16a, 16b Point 16c Front position 16d Pass point 21 to 26 Liquid application area 21a to 26a Typical measurement point 21b to 21i Dispensing point W work

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 ワークを位置決め載置する、水平面内で
変位可能なテーブルおよび、このテーブルに対して昇降
変位される液体塗布ノズルと、液体塗布ノズルの先端か
らワーク表面までの距離を計測する高さセンサおよび、
高さセンサの計測結果に基づいて、液体塗布ノズルの昇
降変位信号を出力する制御手段と、この制御手段からの
信号に応じて液体塗布ノズルを昇降変位させるアクチュ
エータとを具える液体塗布装置をもって、ワーク表面に
液体を塗布するに際し、 液体塗布ノズルの、予め設定した、ワークに対する、水
平面内での相対移動軌跡中の少なくとも一個所で、そこ
を液体塗布ノズルが通過するまでの間、高さセンサによ
る計測を中断して、アクチュエータを不作動状態とする
ことを特徴とする液体塗布方法。
1. A table on which a work is positioned and displaceable in a horizontal plane, a liquid application nozzle which is displaced up and down with respect to the table, and a height for measuring a distance from the tip of the liquid application nozzle to the surface of the work. Sensor and
Based on the measurement result of the height sensor, a liquid application device comprising a control means for outputting an up-and-down displacement signal of the liquid application nozzle, and an actuator for up-and-down displacement of the liquid application nozzle according to the signal from the control means, When applying liquid to the surface of the work, at least one position in the preset relative movement locus of the liquid application nozzle in the horizontal plane with respect to the work, until the liquid application nozzle passes the height sensor. A method for applying liquid, characterized in that the actuator is made inoperative by interrupting the measurement by.
【請求項2】 ワークを位置決め載置する、水平面内で
変位可能なテーブルおよび、このテーブルに対して昇降
変位される液体塗布ノズルと、液体塗布ノズルの先端か
らワーク表面までの距離を計測する高さセンサおよび、
高さセンサの計測結果に基づいて、液体塗布ノズルの昇
降変位信号を出力する制御手段と、この制御手段からの
信号に応じて液体塗布ノズルを昇降変位させるアクチュ
エータとを具える液体塗布装置をもって、ワーク表面に
液体を塗布するに際し、 ワーク表面を複数の液体塗布領域に区画し、各液体塗布
領域への液体の塗布に先立って、その液体塗布領域内の
少なくとも一個所で、液体塗布ノズルの、ワーク表面か
らの高さを計測するとともに、その計測結果に応じて液
体塗布ノズルの高さを補正し、この補正後の液体塗布ノ
ズル高さを維持したまま、その液体塗布領域内での液体
塗布を行うことを特徴とする液体塗布方法。
2. A table for positioning and placing a work, which is displaceable in a horizontal plane, a liquid application nozzle which is displaced up and down with respect to the table, and a height for measuring the distance from the tip of the liquid application nozzle to the surface of the work. Sensor and
Based on the measurement result of the height sensor, a liquid application device comprising a control means for outputting an up-and-down displacement signal of the liquid application nozzle, and an actuator for up-and-down displacement of the liquid application nozzle according to the signal from the control means, When applying the liquid to the work surface, the work surface is divided into a plurality of liquid application areas, and prior to the application of the liquid to each of the liquid application areas, at least one position in the liquid application area, of the liquid application nozzle, The height from the work surface is measured, the height of the liquid application nozzle is corrected according to the measurement result, and the liquid application nozzle height is maintained while the liquid application nozzle height is maintained. A method of applying a liquid, which comprises:
【請求項3】 液体塗布ノズルの、ワーク表面からの高
さの計測を、各液体塗布領域の中央付近にて行うことを
特徴とする請求項2記載の液体塗布方法。
3. The liquid coating method according to claim 2, wherein the height of the liquid coating nozzle from the surface of the work is measured near the center of each liquid coating region.
【請求項4】 液体塗布ノズルの、ワーク表面からの高
さの計測を、各液体塗布領域内の二個所以上の位置にて
行うことを特徴とする請求項2記載の液体塗布方法。
4. The liquid coating method according to claim 2, wherein the height of the liquid coating nozzle from the surface of the work is measured at two or more positions in each liquid coating region.
JP7257496A 1995-10-04 1995-10-04 Liquid application method Expired - Lifetime JP2774785B2 (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7267839B2 (en) 2003-08-26 2007-09-11 Tdk Corporation Method of and apparatus for applying liquid material
JP2008126152A (en) * 2006-11-21 2008-06-05 Ulvac Japan Ltd Coating apparatus
US7678410B2 (en) 2002-12-20 2010-03-16 Lg Display Co., Ltd. Dispenser for liquid crystal display panel and dispensing method using the same
KR101421549B1 (en) * 2012-09-24 2014-07-23 주식회사 제우스 Flatness auto compensation device and method thereof
JP2017523034A (en) * 2014-07-09 2017-08-17 ノードソン コーポレーションNordson Corporation Dual applicator type fluid dispensing method and system
CN113578667A (en) * 2021-01-14 2021-11-02 珠海市运泰利自动化设备有限公司 Automatic dispensing control system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06106113A (en) * 1992-09-28 1994-04-19 Hitachi Techno Eng Co Ltd Coating and drawing device
JPH06114313A (en) * 1992-10-02 1994-04-26 Hitachi Techno Eng Co Ltd Paste applicator
JP3070775U (en) * 1999-10-05 2000-08-15 直美 樋熊 Bed pad integrated sheet

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06106113A (en) * 1992-09-28 1994-04-19 Hitachi Techno Eng Co Ltd Coating and drawing device
JPH06114313A (en) * 1992-10-02 1994-04-26 Hitachi Techno Eng Co Ltd Paste applicator
JP3070775U (en) * 1999-10-05 2000-08-15 直美 樋熊 Bed pad integrated sheet

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7678410B2 (en) 2002-12-20 2010-03-16 Lg Display Co., Ltd. Dispenser for liquid crystal display panel and dispensing method using the same
US7267839B2 (en) 2003-08-26 2007-09-11 Tdk Corporation Method of and apparatus for applying liquid material
JP2008126152A (en) * 2006-11-21 2008-06-05 Ulvac Japan Ltd Coating apparatus
KR101421549B1 (en) * 2012-09-24 2014-07-23 주식회사 제우스 Flatness auto compensation device and method thereof
JP2017523034A (en) * 2014-07-09 2017-08-17 ノードソン コーポレーションNordson Corporation Dual applicator type fluid dispensing method and system
US10737286B2 (en) 2014-07-09 2020-08-11 Nordson Corporation Dual applicator fluid dispensing methods and systems
US11919020B2 (en) 2014-07-09 2024-03-05 Nordson Corporation Dual applicator fluid dispensing methods and systems
CN113578667A (en) * 2021-01-14 2021-11-02 珠海市运泰利自动化设备有限公司 Automatic dispensing control system

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