JPH0994911A - Rigid carbon film molded product - Google Patents
Rigid carbon film molded productInfo
- Publication number
- JPH0994911A JPH0994911A JP7252114A JP25211495A JPH0994911A JP H0994911 A JPH0994911 A JP H0994911A JP 7252114 A JP7252114 A JP 7252114A JP 25211495 A JP25211495 A JP 25211495A JP H0994911 A JPH0994911 A JP H0994911A
- Authority
- JP
- Japan
- Prior art keywords
- film
- carbon film
- steel base
- rigid carbon
- hard carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
- F16C2206/02—Carbon based material
- F16C2206/04—Diamond like carbon [DLC]
Landscapes
- Sliding-Contact Bearings (AREA)
- Laminated Bodies (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、摺動部材や転が
り軸受に適用することができる、鉄鋼母材の表面に、硬
質カーボン膜（ダイヤモンドライクカーボン膜）を被覆
した硬質カーボン膜成形体に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hard carbon film molded body which can be applied to sliding members and rolling bearings and has a hard carbon film (diamond-like carbon film) coated on the surface of a steel base material. Is.
【０００２】[0002]
【従来の技術とその課題】従来、高荷重で耐久性を要求
されるすべり部品や転がり部品では、鉄鋼母材の表面に
硬質カーボン膜を被覆することが行われている。2. Description of the Related Art Conventionally, in sliding parts and rolling parts which are required to have high durability under high load, the surface of a steel base material is coated with a hard carbon film.
【０００３】ところが、鉄鋼母材の表面に直接硬質カー
ボン膜を被覆した場合、熱膨張率の違い等により、硬質
カーボン膜が鉄鋼母材の表面から剥離するという問題が
ある。However, when the hard carbon film is directly coated on the surface of the steel base material, there is a problem that the hard carbon film is separated from the surface of the steel base material due to a difference in thermal expansion coefficient and the like.
【０００４】このため、従来、鉄鋼母材と硬質カーボン
膜との間に、有機シリコン化合物やＳｉＣ系の中間層を
介在させることにより、鉄鋼母材と硬質カーボン膜との
密着性を改善して高荷重での耐久性を向上させようとす
ることが提案されている（特開平７−４１７７９号）。Therefore, conventionally, by interposing an organic silicon compound or SiC-based intermediate layer between the steel base material and the hard carbon film, the adhesion between the steel base material and the hard carbon film is improved. It has been proposed to improve the durability under high load (JP-A-7-41779).
【０００５】しかしながら、この従来のものも、高荷重
における耐久性がいまだ不十分なものである。However, this conventional one is still insufficient in durability under high load.
【０００６】そこで、この発明は、従来のものよりも、
高荷重における耐久性をさらに向上させようとするもの
である。Therefore, the present invention is more than the conventional one.
It is intended to further improve the durability under high load.
【０００７】[0007]
【課題を解決するための手段】この発明は、鉄鋼母材と
硬質カーボン膜との間に、ＷＣ膜を介在させたものであ
る。According to the present invention, a WC film is interposed between a steel base material and a hard carbon film.
【０００８】このように、鉄鋼母材と硬質カーボン膜の
中間層として、ＷＣ膜を介在させると、中間層としてＳ
ｉＣ系のものを使用する従来のものよりも、密着性が向
上し、高荷重における耐久性が向上する。これは、Ｓｉ
Ｃ系のものを被膜処理する場合、ＳｉＣ以外にＳｉＯ2
を含んだ中間形態の被膜が形成され、これが密着性に悪
影響を及ぼしていると推測されるのに対し、ＷＣの被膜
形成では、ＷＣのみ被膜が得られ、密着性に悪影響を及
ぼす酸化膜が形成されないためであると推測される。As described above, when the WC film is interposed as the intermediate layer between the steel base material and the hard carbon film, S is used as the intermediate layer.
Adhesion is improved and durability under high load is improved as compared with the conventional one using iC type. This is Si
When coating a C-based material, in addition to SiC, SiO 2
It is presumed that an intermediate-form coating containing TiO2 is formed, which adversely affects the adhesion, whereas in the case of WC film formation, only WC is obtained and an oxide film that adversely affects adhesion is formed. It is presumed that this is because it is not formed.
【０００９】[0009]
【発明の実施の形態】この発明では、鉄鋼母材として、
マルテンサイト系ステンレス鋼、析出硬化系ステンレス
鋼あるいはＳＵＪ２、Ｍ５０といった鉄鋼材料を使用す
る。BEST MODE FOR CARRYING OUT THE INVENTION In the present invention, as a steel base material,
A martensitic stainless steel, a precipitation hardening stainless steel, or a steel material such as SUJ2 or M50 is used.
【００１０】そして、この発明では、図１に示すよう
に、この鉄鋼母材１の表面に、まず、ＷＣ膜２を形成
し、このＷＣ膜２の上に、硬質カーボン膜３を形成して
いる。According to the present invention, as shown in FIG. 1, a WC film 2 is first formed on the surface of the steel base material 1, and a hard carbon film 3 is formed on the WC film 2. There is.
【００１１】ＷＣ膜２は、例えば、マグネトロンスパリ
ング装置を使用して形成することができる。The WC film 2 can be formed, for example, by using a magnetron spalling device.
【００１２】また、硬質カーボン膜３は、例えば、真空
容器内に炭化水素系ガスを導入し、２極の電極間に直流
電圧を印加して、グロー放電を発生させ、その放電下で
被膜処理を行うというイオンプレーティング法によって
形成することができる。Further, the hard carbon film 3 is produced, for example, by introducing a hydrocarbon gas into a vacuum container, applying a DC voltage between the electrodes of two electrodes to generate glow discharge, and subjecting the hard carbon film 3 to film treatment under the discharge. Can be formed by the ion plating method.
【００１３】〔実施例〕φ５０mmのディスク型の鉄鋼母
材の表面に、ＷＣ粉体をマグネトロンスパッタリング装
置（処理時の入力電力１５０〜２５０Ｗ）で被膜処理し
て、膜厚０．１μｍ以下のＷＣ膜の中間層を形成する。[Example] A WC powder having a thickness of 0.1 μm or less was formed by coating WC powder on the surface of a φ50 mm disk type steel base material with a magnetron sputtering device (input power during processing: 150 to 250 W). Form the intermediate layer of the membrane.
【００１４】次いで、上記中間層の上に、イオンプレー
ティング装置で、Ｃ2 Ｈ2 （アセチレン）ガスを用い
て、膜厚０．５μｍ前後の硬質カーボン膜を形成する。
処理時の電圧は、−１．２ｋＶである。Next, a hard carbon film having a thickness of about 0.5 μm is formed on the intermediate layer by using an ion plating apparatus using C 2 H 2 (acetylene) gas.
The voltage at the time of processing is -1.2 kV.
【００１５】上記のようにして形成した中間層にＷＣ膜
を形成したものと、中間層に、ＳｉＣ膜又は有機シリコ
ン化合物によるＳｉＣ膜を形成したものについて、ピニ
オンディスク型摩擦摩耗試験機を使用して、耐久性試験
を行った結果を図２に示す。試験条件は表１に示す通り
である。A pinion disk type friction wear tester was used for the WC film formed on the intermediate layer formed as described above and the SiC film formed by the SiC film or the organic silicon compound on the intermediate layer. The result of the durability test is shown in FIG. The test conditions are as shown in Table 1.
【００１６】[0016]
【表１】 [Table 1]
【００１７】図２から明らかなように、各鉄鋼材料にお
いて、中間層をＷＣ膜にすると、硬質カーボン膜の耐久
性が著しく増大している。As is clear from FIG. 2, in each steel material, when the intermediate layer is the WC film, the durability of the hard carbon film is significantly increased.
【００１８】次に、内外輪の材質がＳＵＳ４４０Ｃで、
その表面に、膜厚０．５μｍ前後の硬質カーボン膜を、
膜厚０．１μｍ以下のＷＣ膜を介在させて被覆したアン
ギュラ形の軸受と、中間層がＳｉＣ系であるものとにつ
いて、大気発塵特性を比較した結果を図３に示す。試験
条件は表２の通りである。Next, the material of the inner and outer rings is SUS440C,
A hard carbon film with a thickness of about 0.5 μm was formed on the surface
FIG. 3 shows a result of comparison of atmospheric dust generation characteristics between an angular bearing coated with a WC film having a thickness of 0.1 μm or less interposed therebetween and a SiC type intermediate layer. The test conditions are as shown in Table 2.
【００１９】[0019]
【表２】 [Table 2]
【００２０】図３から明らかなように、中間層をＷＣ膜
とすることで大気発塵量が低下している。また、中間層
をＷＣ膜とした場合、テスト後膜剥がれは発生しなかっ
たが、ＳｉＣ系の場合、一部膜剥がれが発生していた。
ＷＣ膜を使用する場合の大気発塵量の総個数は５００個
以下と少なく、クリーンルームのような塵の発生をきら
う環境下で使用される転がり軸受には好適といえる。As is apparent from FIG. 3, the amount of dust generated in the atmosphere is reduced by using the WC film as the intermediate layer. Further, when the intermediate layer was a WC film, film peeling did not occur after the test, but in the case of the SiC type, film peeling partially occurred.
When the WC film is used, the total amount of dust generated in the atmosphere is as small as 500 or less, and it can be said that it is suitable for a rolling bearing used in an environment such as a clean room where the generation of dust is unfavorable.
【００２１】[0021]
【発明の効果】この発明の硬質カーボン膜成形体は、鉄
鋼母材の表面に、ＷＣ膜を挟んで、硬質カーボン膜を被
覆してあるので、硬質カーボン膜が剥離しにくく、高荷
重における耐久性が良好である。EFFECTS OF THE INVENTION Since the hard carbon film molded body of the present invention is coated with the hard carbon film on the surface of the steel base material with the WC film sandwiched between them, the hard carbon film does not easily peel off and is durable under high load. Good property.
【図１】この発明の硬質カーボン膜成形体の部分断面図FIG. 1 is a partial sectional view of a hard carbon film molded body of the present invention.
【図２】耐久試験の結果を示すグラフFIG. 2 is a graph showing the results of a durability test.
【図３】大気発塵特性試験の結果を示すグラフFIG. 3 is a graph showing the results of an atmospheric dust emission characteristic test.
１ 鉄鋼母材 ２ ＷＣ膜 ３ 硬質カーボン膜 1 Steel base material 2 WC film 3 Hard carbon film
Claims (1)
カーボン膜を被覆した硬質カーボン膜成形体。1. A hard carbon film molded body in which a hard carbon film is coated on the surface of a steel base material with a WC film interposed therebetween.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7252114A JPH0994911A (en) | 1995-09-29 | 1995-09-29 | Rigid carbon film molded product |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7252114A JPH0994911A (en) | 1995-09-29 | 1995-09-29 | Rigid carbon film molded product |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0994911A true JPH0994911A (en) | 1997-04-08 |
Family
ID=17232677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7252114A Pending JPH0994911A (en) | 1995-09-29 | 1995-09-29 | Rigid carbon film molded product |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0994911A (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001033091A1 (en) * | 1999-10-29 | 2001-05-10 | The Timken Company | Antifriction bearing for use in a corrosive environment |
| WO2005047737A1 (en) * | 2003-11-10 | 2005-05-26 | The Timken Company | Differential with thin film coating at cross shaft and processes for manufacturing the same |
| EP1262674A3 (en) * | 2001-05-29 | 2006-10-04 | NSK Ltd. | Rolling sliding member and rolling apparatus |
| JP2007119907A (en) * | 2005-09-10 | 2007-05-17 | Schaeffler Kg | Wear-resistant coating, and its manufacturing method |
| US7270719B2 (en) | 2003-01-13 | 2007-09-18 | Sandvik Intellectual Property Ab | Method for manufacturing surface hardened stainless steel with improved wear resistance and low static friction properties |
| US7569799B2 (en) * | 2002-10-11 | 2009-08-04 | Gunther Gmbh & Co., Metallverarbeitung | Compound body and method for manufacturing it |
| EP2110199A1 (en) * | 2008-04-18 | 2009-10-21 | Continental Automotive GmbH | Interference fit assembly, a thermal compensation arrangment of an injection valve and method for producing an interference fit assembly |
| US20100034495A1 (en) * | 2005-08-01 | 2010-02-11 | Aktiebolaget Skf | Bearing and method of producing the same |
| US7721642B2 (en) | 2007-01-30 | 2010-05-25 | Kabushiki Kaisha Toyota Jidoshokki | Sliding member |
| DE102005014484B4 (en) * | 2004-03-30 | 2012-06-28 | Honda Motor Co., Ltd. | A method of forming a hard carbide layer and a roller chain and a silent chain with a hard carbide layer |
| JP2014122415A (en) * | 2012-06-29 | 2014-07-03 | Kobe Steel Ltd | Dlc film formed body |
| CN104512480A (en) * | 2013-09-28 | 2015-04-15 | 江苏锋华车辆科技有限公司 | Wear-resistant coating for automobile |
-
1995
- 1995-09-29 JP JP7252114A patent/JPH0994911A/en active Pending
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001033091A1 (en) * | 1999-10-29 | 2001-05-10 | The Timken Company | Antifriction bearing for use in a corrosive environment |
| EP1262674A3 (en) * | 2001-05-29 | 2006-10-04 | NSK Ltd. | Rolling sliding member and rolling apparatus |
| EP1870609A1 (en) * | 2001-05-29 | 2007-12-26 | NSK Ltd. | Rolling sliding member and rolling apparatus |
| EP1873412A1 (en) * | 2001-05-29 | 2008-01-02 | NSK Ltd. | Rolling sliding member and rolling apparatus |
| US7569799B2 (en) * | 2002-10-11 | 2009-08-04 | Gunther Gmbh & Co., Metallverarbeitung | Compound body and method for manufacturing it |
| US7270719B2 (en) | 2003-01-13 | 2007-09-18 | Sandvik Intellectual Property Ab | Method for manufacturing surface hardened stainless steel with improved wear resistance and low static friction properties |
| WO2005047737A1 (en) * | 2003-11-10 | 2005-05-26 | The Timken Company | Differential with thin film coating at cross shaft and processes for manufacturing the same |
| DE102005014484B4 (en) * | 2004-03-30 | 2012-06-28 | Honda Motor Co., Ltd. | A method of forming a hard carbide layer and a roller chain and a silent chain with a hard carbide layer |
| US20100034495A1 (en) * | 2005-08-01 | 2010-02-11 | Aktiebolaget Skf | Bearing and method of producing the same |
| US8383239B2 (en) * | 2005-08-01 | 2013-02-26 | Aktiebolaget Skf | Bearing and method of producing the same |
| JP2007119907A (en) * | 2005-09-10 | 2007-05-17 | Schaeffler Kg | Wear-resistant coating, and its manufacturing method |
| US7721642B2 (en) | 2007-01-30 | 2010-05-25 | Kabushiki Kaisha Toyota Jidoshokki | Sliding member |
| EP2110199A1 (en) * | 2008-04-18 | 2009-10-21 | Continental Automotive GmbH | Interference fit assembly, a thermal compensation arrangment of an injection valve and method for producing an interference fit assembly |
| JP2014122415A (en) * | 2012-06-29 | 2014-07-03 | Kobe Steel Ltd | Dlc film formed body |
| CN104512480A (en) * | 2013-09-28 | 2015-04-15 | 江苏锋华车辆科技有限公司 | Wear-resistant coating for automobile |
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