JPH0989328A - Partition structure of clean room - Google Patents
Partition structure of clean roomInfo
- Publication number
- JPH0989328A JPH0989328A JP7271914A JP27191495A JPH0989328A JP H0989328 A JPH0989328 A JP H0989328A JP 7271914 A JP7271914 A JP 7271914A JP 27191495 A JP27191495 A JP 27191495A JP H0989328 A JPH0989328 A JP H0989328A
- Authority
- JP
- Japan
- Prior art keywords
- partition wall
- clean room
- floor
- room
- partition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Panels For Use In Building Construction (AREA)
- Ventilation (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明はクリ−ンル−ムの間
仕切構造に関するものである。The present invention relates to a partition structure for a clean room.
【０００２】[0002]
【従来の技術】従来のクリ−ンル−ムは、それに隣接す
るル−ム等と、横１列に並べられた複数枚の間仕切壁で
天井から床まで完全に仕切られていて、クリ−ンル−ム
の全面にわたって、清浄空気が天井から吹き出され床に
吸引される。2. Description of the Related Art A conventional clean room is completely divided from a ceiling or a floor to a room or the like adjacent thereto by a plurality of partition walls arranged in a row. -Clean air is blown out of the ceiling and sucked into the floor over the entire surface of the room.
【０００３】[0003]
【発明が解決しようとする課題】上記従来の間仕切の構
成により、天井から吹き出される清浄空気は、クリ−ン
ル−ム内の作業者の人数や装置の数，大きさ，配置等の
関係や、床の全面に分布する各通気孔の吸引力の強弱の
差の関係にて、クリ−ンル−ムの全面にわたって床方向
に一定の流速で整然と均一に流れず、乱流が発生する。
その結果、間仕切構造に振動が発生したり、クリ−ンル
−ム内の清浄度が低下したりして、作業環境が悪化し、
そのために特に超精密加工の作業に支障が生じる。ま
た、従来の間仕切壁は組立後は簡単に取外せないので、
間仕切壁と機械装置との間の狭い隙間にはいって、機械
装置の修理や微調整をすることが困難である。さらにま
た、従来の間仕切壁はその壁部が框に対してがたつかな
いように、壁部と框の間にパッキングを介在させている
が、その取付構造が複雑であり、かつその取付作業が面
倒である。According to the above-mentioned conventional partition structure, the clean air blown out from the ceiling cannot be used in relation to the number of workers in the clean room, the number of devices, the size, the arrangement, and the like. Due to the difference in the suction force of each ventilation hole distributed over the entire surface of the floor, the flow does not flow uniformly and uniformly at a constant flow rate in the floor direction over the entire surface of the clean room, and turbulent flow occurs.
As a result, vibrations are generated in the partition structure, the cleanliness inside the clean room is reduced, and the working environment deteriorates.
For this reason, there is a problem particularly in the operation of ultra-precision machining. Also, since the conventional partition cannot be easily removed after assembly,
It is difficult to repair or fine-tune the machinery by entering the narrow gap between the partition and the machinery. Furthermore, in the conventional partition wall, packing is interposed between the wall and the frame so that the wall does not rattle against the frame, but the mounting structure is complicated and the mounting work is difficult. Is troublesome.
【０００４】本発明は上記に鑑み、クリーンルーム内の
作業者の人数や装置の数，大きさ，配置等が変化した
り、床の全面に分布する各通気孔の吸引力に強弱の差が
生じても、清浄空気が天井面から床面方向に一定の流速
で整然と均一に流れるように調節できて、振動の発生や
清浄度の低下を阻止して、特に超精密加工に適する良好
な作業環境が得られるクリ−ンル−ムの間仕切構造を提
供するものである。また、間仕切壁は組立後においても
簡単に取外すことができて、間仕切壁に面する側の機械
装置の修理や微調整を簡単にすることができる間仕切構
造を提供するものである。さらにまた、間仕切壁の壁部
と框の間にパッキングを介在させるその取付構造が簡単
で、かつその取付作業が容易にできる間仕切構造を提供
するものである。[0004] In view of the above, in the present invention, the number of workers in the clean room, the number, size, arrangement, and the like of the apparatuses change, and a difference in suction power between the ventilation holes distributed over the entire floor occurs. Even so, it can be adjusted so that clean air flows from the ceiling surface to the floor surface at a constant flow rate at a constant flow rate, preventing vibrations and reducing cleanliness. Is provided to provide a clean room partition structure. It is another object of the present invention to provide a partition structure in which the partition wall can be easily removed even after assembly, and repair and fine adjustment of the mechanical device on the side facing the partition wall can be simplified. Still another object of the present invention is to provide a partition structure in which a packing is interposed between a wall portion of a partition wall and a frame, the mounting structure is simple, and the mounting operation can be easily performed.
【０００５】[0005]
【課題を解決するための手段】本発明は上記目的を達成
するために、天井から床にわたる間仕切壁は、その下端
と床との間に通気用の開口部が設けられ、この開口部の
開口面積を調節板で調節するように構成され、また、間
仕切壁はその上端と該上端を保持する上方の横枠との間
に遊びを設けて間仕切壁を上方に持ち上げて取り付けた
り又は取り外したりすように構成され、さらにまた、パ
ッキングを予め押縁に取付けてこの押縁を間仕切壁の框
部に取付けることにより、押縁と間仕切壁の壁部との間
にパッキングを介在させるように構成されている。According to the present invention, in order to achieve the above object, a partition wall extending from a ceiling to a floor is provided with an opening for ventilation between a lower end thereof and the floor. The partition wall is configured to be adjusted by an adjustment plate, and the partition wall is provided with play between its upper end and an upper horizontal frame holding the upper end, and the partition wall is lifted upward to be attached or detached. Further, the packing is attached to the ridge in advance, and the ridge is attached to the frame of the partition wall, so that the packing is interposed between the ridge and the wall of the partition wall.
【０００６】[0006]
【発明の実施の形態】図１は、クリ−ンル−ム（１）を
その隣接ル−ム（２）や隣接通路（図示せず）側から見
た間仕切構造の組立状態を示している。この間仕切構造
は、天井（３）と、柱（４）と、上方の横枠（５）と、
下方の横枠（６）と、床（７）とで骨格が形成されてい
る。この天井（３）と上方横枠（５）と一対の柱（４）
で囲まれた空間に上方の間仕切壁（８）が組込まれ、上
方横枠（５）と床（７）と一対の柱（４）で囲まれた空
間に下方の間仕切壁（９）が組込まれている。FIG. 1 shows an assembled state of a partition structure when a clean room (1) is viewed from an adjacent room (2) or an adjacent passage (not shown). This partition structure includes a ceiling (3), a pillar (4), an upper horizontal frame (5),
A skeleton is formed by the lower horizontal frame (6) and the floor (7). This ceiling (3), upper horizontal frame (5) and a pair of pillars (4)
The upper partition wall (8) is incorporated in the space surrounded by the square, and the lower partition wall (9) is incorporated in the space surrounded by the upper horizontal frame (5), the floor (7), and the pair of pillars (4). Have been.
【０００７】上方間仕切壁（８）と下方間仕切壁（９）
は、天井（３）から床（７）にかけて、クリ−ンル−ム
（１）と隣接ル−ム（２）等との間を仕切る（図３）。
この上下の一組の間仕切壁（８），（９）は、図１に示
すように複数枚横１列に並べられ、また図３に示すよう
に互いに平行に設けられて、クリ−ンル−ム（１）を形
成している。An upper partition wall (8) and a lower partition wall (9)
Separates the clean room (1) and the adjacent room (2) from the ceiling (3) to the floor (7) (FIG. 3).
A pair of upper and lower partition walls (8) and (9) are arranged in a row in a row as shown in FIG. 1 and are provided in parallel with each other as shown in FIG. (1).
【０００８】上方間仕切壁（８）は、その両側が天井
（３）と床（７）との間に立てられた1 対の柱（４）で
挟持され、また下端(10)が柱（４）間にわたされた上方
の横枠（５）で支持され、そして上端(11)は天井（３）
で拘束されている（図２）。[0008] The upper partition wall (8) is sandwiched between a pair of columns (4) erected between the ceiling (3) and the floor (7) on both sides, and the lower end (10) has a column (4). ) Supported by an upper horizontal frame (5) spanned between them and the upper end (11) at the ceiling (3)
Is restrained by (Fig. 2).
【０００９】下方間仕切壁（９）も、その両側が上記一
対の柱（４）で挟持され、また下端(12)が柱（４）間に
わたされた下方の横枠（６）支持され、そして上端(13)
が上記上方の横枠（５）の溝(14)（図４）に嵌合されて
保持されている（図２）。下方の横枠（６）は床（７）
から浮いた状態であって、この横枠（６）と床（７）の
間に通気用の開口部(15)を形成している。天井（３）の
裏側(16)は清浄空気が供給され部分であり、この部分(1
6)にフイルタ−(17)と送風機(18)が設置されている。床
（７）には吸引用の通気孔(19)が形成されている。The lower partition wall (9) is also supported on both sides by the pair of columns (4), and is supported by a lower horizontal frame (6) having a lower end (12) extended between the columns (4). And the upper end (13)
Are fitted and held in the grooves (14) (FIG. 4) of the upper horizontal frame (5) (FIG. 2). Lower horizontal frame (6) is floor (7)
And a floating opening (15) is formed between the horizontal frame (6) and the floor (7). The back side (16) of the ceiling (3) is a portion to which clean air is supplied.
A filter (17) and a blower (18) are installed in 6). The floor (7) has a ventilation hole (19) for suction.
【００１０】清浄空気は、送風機(18)でフイルタ−(17)
を経て天井（３）から床（７）方向に吹き出され、床
（７）の通気孔(19)で床（７）の下方(20)に吸引され
る。吸引され清浄空気は、床（７）の下方(20)と天井裏
（16）を連通する通気路（21）（図１）を経由して、該
通気路(21)内の送風機(22)で再び天井裏(16)に戻され
る。吹き出された清浄空気の一部は、開口部(15)が開い
ている場合には、この開口部（15）から隣接ル−ム等
（２）に流出する（図３）。[0010] The clean air is filtered by a blower (18) (17).
Then, the air is blown out from the ceiling (3) toward the floor (7) through the ventilation hole (19) of the floor (7), and is sucked downward (20) of the floor (7). The sucked clean air passes through a ventilation path (21) (FIG. 1) communicating between the lower part (20) of the floor (7) and the underside of the ceiling (16), and a blower (22) in the ventilation path (21). Then it is returned to the ceiling (16) again. When the opening (15) is open, a part of the blown clean air flows out from the opening (15) to the adjacent room or the like (2) (FIG. 3).
【００１１】上記開口部(15)の開口面積は、調節板(23)
の上下動で調節される。調節板(23)は、下方間仕切壁
（９）の下端(12)に連結手段で上下動可能に連結されて
いる。その連結手段として、第１段の第１連結孔(24)が
間仕切壁（９）の下端(12)の両側に穿設され、複数段
（4 段）の第２連結孔(25)が調節板(23)の両側に設けら
れ、これらの連結孔(24)，(25)に棒状の連結部材(26)を
通している。連結部材(26)はその一例としてねじを用
い、連結孔(24)はねじ孔を用いて、ねじ(26)を連結孔(2
5)に貫通して、ねじ孔(24)にねじ込んでいる（図４）。The opening area of the opening (15) is adjusted by the adjusting plate (23).
It is adjusted by the vertical movement of. The adjusting plate (23) is connected to the lower end (12) of the lower partition wall (9) by a connecting means so as to be vertically movable. As connecting means, first connecting holes (24) of the first step are formed on both sides of the lower end (12) of the partition wall (9), and second connecting holes (25) of a plurality of steps (four steps) are adjusted. The connecting holes (24) and (25) are provided on both sides of the plate (23), and pass through a rod-shaped connecting member (26). As an example, the connecting member (26) uses a screw, the connecting hole (24) uses a screw hole, and the screw (26) is connected to the connecting hole (2).
5) and screwed into the screw hole (24) (Fig. 4).
【００１２】図１において、右端側の調節板(23)は、そ
の最上段の連結孔(25)にねじ(26)を貫通し、このねじ(2
6)を間仕切壁（９）のねじ孔(24)にねじ込んで、開口部
(15)を完全に閉じている。左端側の調節板(23)は、その
最下段の連結孔(25)にねじ(26)を貫通して、このねじ(2
6)を間仕切壁（９）のねじ孔(24)にねじ込んで、開口部
(15)を完全に開いている。左右両端の調節板（23）間の
調節板（23）は、右端側の調節板（23）から左端側の調
節板(23)に進むに従い、漸次開口部(15)の開口面積が大
きくなるように調節板(23)で調節されている。この調節
は、送風機(22)（図１）による床（７）の通気孔(19)の
吸引力が、送風機(22)に最も近い右端側の通気孔(19)の
部分が最も強く、最も遠い左端側の通気孔(19)の部分が
最も弱く、その中間の通気孔(19)の部分は右端側の通気
孔(19)の部分から左端側の通気孔(19)の部分に進むに従
い漸次弱くなることに、対応するものである。この結
果、天井（３）から吹き出す清浄空気は、左右両端とそ
の中間のいずれの通気孔(19)に対応する部分において
も、均一の流速で整然と床（７）方向に流れて、床
（７）の下方(20)に吸引される。このことは、天井
（３）から吹き出す清浄空気が、クリーンルーム（１）
の床（７）の全面にわたって均一の流速で整然と天井
（３）から床（７）まで送られることを意味する。これ
により、クリ−ンル−ム（１）内の作業者の人数や装置
の数，大きさ，配置等が変化したり、床（７）の全面に
分布する各通気孔(19)の吸引力に強弱の差が生じても、
振動の発生や清浄度の低下を阻止して、特に超精密加工
に適する良好な作業環境のクリ−ンル−ム（１）が得ら
れる。上記通気孔(19)群の両端間の調節板(23)による間
仕切壁（９）と床（７）との間の開口面積の調節は、各
調節板(23)の複数段の連結孔(25)を適宜選択することに
よりなされる。なお、１段の連結孔(24)は逆に調整板(2
3)側に設け、複数段の連結孔(25)は間仕切壁（９）側に
設けてもよい（図示略）。その場合には、連結孔(24)が
単なる貫通孔となり、連結孔(25)がねじ孔になる。In FIG. 1, the rightmost adjustment plate (23) passes through a screw (26) through the uppermost connecting hole (25), and the screw (2)
6) is screwed into the screw hole (24) of the partition wall (9), and the opening
(15) is completely closed. The adjustment plate (23) on the left end side passes through the screw (26) through the lowermost connection hole (25), and this screw (2
6) is screwed into the screw hole (24) of the partition wall (9), and the opening
(15) is fully open. As for the adjustment plate (23) between the adjustment plates (23) at the left and right ends, the opening area of the opening (15) gradually increases as the adjustment plate (23) on the right end side moves toward the adjustment plate (23) on the left end side. It is adjusted by the adjustment plate (23). This adjustment is based on the fact that the suction force of the vent (19) of the floor (7) by the blower (22) (FIG. 1) is strongest at the right end side vent (19) closest to the blower (22), The farthest left vent (19) is the weakest, and the middle vent (19) goes from the rightmost vent (19) to the leftmost vent (19). The gradual weakening corresponds to this. As a result, the clean air blown out from the ceiling (3) flows in the direction of the floor (7) at a uniform flow velocity in the direction corresponding to the floor (7) at the left and right ends and at the portion corresponding to any of the ventilation holes (19) therebetween. ) Is sucked down (20). This means that the clean air blown out of the ceiling (3)
Means that the water is uniformly sent from the ceiling (3) to the floor (7) at a uniform flow rate over the entire surface of the floor (7). As a result, the number of workers in the clean room (1), the number, size, arrangement, etc. of the devices change, and the suction force of the ventilation holes (19) distributed over the entire surface of the floor (7). Even if there is a difference in strength,
A clean room (1) having a favorable working environment particularly suitable for ultra-precision machining can be obtained by preventing the generation of vibration and a decrease in cleanliness. Adjustment of the opening area between the partition wall (9) and the floor (7) by the adjusting plate (23) between both ends of the ventilation hole (19) group is performed by connecting a plurality of connecting holes () of each adjusting plate (23). This is done by appropriately selecting 25). Note that the connecting hole (24) of the first stage is
Provided on the 3) side, a plurality of connecting holes (25) may be provided on the partition wall (9) side (not shown). In that case, the connection hole (24) becomes a simple through hole, and the connection hole (25) becomes a screw hole.
【００１３】下方間仕切壁（９）は、その上端(13)と上
方横枠（５）の溝(14)との間に上下方向の遊び空間(27)
（図４）があり、下端(12)には溝(28)（図４）が形成さ
れている。この下方間仕切壁（９）を支持する下方横枠
（６）は、水平板状部分(29)とその後端から上方向に延
びる垂直板状部分(30)と水平板状部分(29)に起立された
レール(31)を具備している。図４においては、下方間仕
切壁（９）は、その上端(13)が上方横枠（５）の溝(14)
内に嵌合して保持され、下端(12)の溝(28)が下方横枠
（６）のレール(31)に嵌合して保持されて、柱（４）と
上方横枠（５）と下方横枠（６）で囲まれた空間に組み
込まれている。この組込の手順は、先に下方間仕切壁
（９）の上端(13)を上方横枠（５）の溝(14)内に差し込
んで上方に持ち上げながら、下方間仕切壁（９）の下端
(12)の溝(28)を下方横枠（９）のレール(31)に嵌合させ
る。下方間仕切壁（９）を逆に取り外す場合には、下方
間仕切壁（９）を上方に持ち上げながら、下端(12)の溝
(28)を下方横枠（６）のレール(31)から外して、上端(1
3)を上方横枠（５）の溝(14)から外す。この下方間仕切
壁（９）の取付け・取外しの場合には、その両側(32)に
取付けられた指掛用の取手(33)（図２）を使用すると、
その作業が容易である。The lower partition wall (9) has a vertical play space (27) between its upper end (13) and the groove (14) of the upper horizontal frame (5).
(FIG. 4), and a groove (28) (FIG. 4) is formed in the lower end (12). The lower horizontal frame (6) supporting the lower partition wall (9) is erected on a horizontal plate-like portion (29), a vertical plate-like portion (30) extending upward from its rear end, and a horizontal plate-like portion (29). Provided rail (31). In FIG. 4, the lower partition wall (9) has an upper end (13) with a groove (14) of the upper horizontal frame (5).
The groove (28) of the lower end (12) is fitted and held in the rail (31) of the lower horizontal frame (6), and the column (4) and the upper horizontal frame (5) are fitted. And a space surrounded by a lower horizontal frame (6). This assembling procedure is as follows. First, the upper end (13) of the lower partition wall (9) is inserted into the groove (14) of the upper horizontal frame (5) and lifted upward, and the lower end of the lower partition wall (9) is raised.
The groove (28) of (12) is fitted to the rail (31) of the lower horizontal frame (9). To remove the lower partition wall (9) in reverse, lift the lower partition wall (9) upwards while holding the groove in the lower end (12).
Remove the (28) from the rail (31) of the lower horizontal frame (6), and
Remove 3) from the groove (14) of the upper horizontal frame (5). When attaching and removing the lower partition wall (9), use the finger grips (33) (FIG. 2) attached to both sides (32) of the lower partition wall (9).
The work is easy.
【００１４】図５〜７は、下方間仕切壁（９）の詳細な
構造を示し、左右の縦框(34)（下方間仕切壁９の前記左
右の側部32に対応する）と、上下の横框(35,36) （下方
間仕切壁９の前記上端13と下端12に対応する）で形成さ
れた框部(37)と、この框部(37)で囲まれた空間を閉じる
板状の壁部(38)と、この壁部(38)の周縁を押さえる縦方
向の左右の押縁(39)と横方向の上下の押縁(40)を具備し
ている。各框(34,35,36)は、四角形の中空体で形成さ
れ、これらの框で囲まれた空間の開口面に平行な後面部
(41)から内側に延びる板状の受部(42)と、上記後面部(4
1)とこれに平行な前面部(43)間に存する内側面部(44)に
形成された長い連結孔(45)を有している（図６，図
７）。FIGS. 5 to 7 show the detailed structure of the lower partition wall (9). The left and right vertical frames (34) (corresponding to the left and right side portions 32 of the lower partition wall 9) and the upper and lower horizontal walls. A frame (37) formed by frames (35, 36) (corresponding to the upper end 13 and the lower end 12 of the lower partition wall 9), and a plate-like wall closing a space surrounded by the frame (37). A part (38), a vertical left and right ridge (39) and a horizontal upper and lower ridge (40) for holding the peripheral edge of the wall (38) are provided. Each frame (34, 35, 36) is formed of a square hollow body, and the rear surface parallel to the opening of the space surrounded by these frames
(41) and a plate-shaped receiving portion (42) extending inward from the rear surface portion (4
It has a long connecting hole (45) formed in the inner side surface part (44) between 1) and the front part (43) parallel to this (FIGS. 6 and 7).
【００１５】縦方向の押縁(39)は四角形の中空体で形成
され、縦框(34)の受部(42)に対面する後面部(46)に鳩尾
形の溝孔(47)が形成され、縦框(34)の連結孔(45)に対面
する内側面部(48)から一対の連結脚(49),(50) が直角に
延び、その一方の内側の連結脚(49)の先端に外側の斜面
を有するくさび(51)が形成されていてる。この縦方向の
押縁(39)は、その溝孔(47)にゴム等の弾性を有するパッ
キング(52)の鳩尾形の連結部(53)を嵌合して、パッキン
グ(52)が予め結合されている。The vertical ridge (39) is formed of a rectangular hollow body, and a dovetail-shaped slot (47) is formed in a rear surface (46) facing the receiving portion (42) of the vertical frame (34). A pair of connecting legs (49), (50) extend at a right angle from the inner side surface (48) facing the connecting hole (45) of the vertical frame (34), and extend to the tip of one of the inner connecting legs (49). A wedge (51) having an outer slope is formed. This vertical pressing edge (39) is fitted with a dovetail-shaped connecting portion (53) of a packing (52) having elasticity such as rubber into its slot (47), and the packing (52) is previously connected. ing.
【００１６】壁部(38)の左右の両縁部(54)の組立は、ま
ず両縁部(54)を両縦框(34)の受部(42)にあてがい、つい
で壁部(38)の両縁部(54)に押縁(39)のパッキング(52)を
押しつけながら押縁(39)の連結脚(49,50) を縦框(34)の
連結孔(45)内に押し込んで、一方の連結脚(49)の先端の
くさび(51)を連結孔(45)の縁(55)に係合させて、押縁(3
9)を縦框(34)に結合する（図６）。これにて、壁部(38)
の両縁部(54)はパッキング(52)を介して押縁(39)で押し
つけられ、壁部(38)の両縁部(54)のがたつきや振動は阻
止される。なお、縦方向の押縁(39)の上下両端(56)は上
下の横方向の両框(35),(36) に接触している（図７）。In assembling the left and right edges (54) of the wall (38), first, the edges (54) are applied to the receiving portions (42) of the vertical frames (34), and then the wall (38) Push the connecting legs (49, 50) of the ridge (39) into the connecting holes (45) of the vertical frame (34) while pressing the packing (52) of the ridge (39) against both edges (54) of the Engage the wedge (51) at the end of the connecting leg (49) with the edge (55) of the connecting hole (45), and
9) is connected to the vertical frame (34) (FIG. 6). With this, the wall (38)
Both edges (54) are pressed by a pressing edge (39) via a packing (52) to prevent rattling and vibration of both edges (54) of the wall (38). The upper and lower ends (56) of the vertical ridge (39) are in contact with the upper and lower horizontal frames (35) and (36) (FIG. 7).
【００１７】上下の横方向の押縁(40)は三角形の中空体
で形成され、以下縦方向の押縁(39)と同様に、上下の框
(35),(36) の受部(42)に対面する後面部(57)に鳩尾形の
溝孔(47)が形成され、上下の框(35),(36) の連結孔(45)
に対面する内側面部(58)から一対の連結脚(49),(50) が
直角に延び、その一方の内側の連結脚(49)の先端に外側
の斜面を有するくさび(51)が形成されていてる（図
７）。この横方向の押縁(40)は、その溝孔(47)にゴム等
の弾性を有するパッキング(52)の鳩尾形の連結部(53)を
嵌合して、パッキング(52)が予め結合されている（図
７）。The upper and lower horizontal ridges (40) are formed of a triangular hollow body.
A dovetail-shaped slot (47) is formed in the rear part (57) facing the receiving part (42) of (35), (36), and the connecting hole (45) of the upper and lower frames (35), (36) is formed.
A pair of connecting legs (49), (50) extend at a right angle from the inner side surface portion (58) facing the inside, and a wedge (51) having an outer slope is formed at the tip of one of the inner connecting legs (49). (Fig. 7). The dovetail-shaped connecting part (53) of the packing (52) having elasticity such as rubber is fitted into the slot (47) of the lateral pressing edge (40), and the packing (52) is previously connected. (FIG. 7).
【００１８】壁部(38)の上下の両縁部(59)の組立は、ま
ず上下の両縁部(59)を上下の横框(35),(36）の受部(42)
にあてがい、ついで壁部(38)の両縁部(59)に横方向の押
縁(40)のパッキング(52)を押しつけながら押縁(40)の連
結脚(49),(50) を横框(35),(36) の連結孔(45)内に押し
込んで、一方の連結脚(49)の先端のくさび(51)を連結孔
(45)の縁(55)に係合させて、押縁(40)を横框(35),(36)
に結合する（図７）。これにて、壁部(38)の両縁部(59)
はパッキング(52)を介して押縁(40)で押しつけられ、壁
部(38)の両縁部(59)のがたつきや振動は阻止される（図
７）。なお、横方向の押縁(40)の左右の両端(60)は左右
の縦方向の両押縁(39)に接触している（図５）。In assembling the upper and lower edges 59 of the wall 38, first, the upper and lower edges 59 are connected to the receiving portions 42 of the upper and lower horizontal frames 35, 36.
Then, while pressing the packing (52) of the horizontal ridge (40) against both edges (59) of the wall (38), connect the connecting legs (49) and (50) of the ridge (40) to the horizontal frame ( Push the wedge (51) at the end of one connecting leg (49) into the connecting hole (45).
Engage the rim (55) of (45) with the ridge (40) and the side frames (35), (36)
(FIG. 7). With this, both edges (59) of the wall (38)
Is pressed by the pressing edge (40) via the packing (52), and rattling and vibration of both edges (59) of the wall (38) are prevented (FIG. 7). The left and right ends (60) of the horizontal ridge (40) are in contact with the left and right vertical ridges (39) (FIG. 5).
【００１９】壁部(38)の左右の両縁部(54)と上下の両縁
部(59)の組立解除は、まず上下の横方向の押縁(40)を上
下の横框(35),(36) から外し、ついで左右の縦方向の押
縁(39)を左右の縦框(34)から外す。The disassembly of the left and right edges (54) and the upper and lower edges (59) of the wall portion (38) is accomplished by first connecting the upper and lower horizontal ridges (40) with the upper and lower horizontal frames (35), (36), and then remove the left and right vertical ridges (39) from the left and right vertical frames (34).
【００２０】下方間仕切壁（９）の上端(13)と上方横枠
（５）の溝(14)との嵌合構造と、下方間仕切壁（９）の
下端(12)の溝(28)と下方横枠（６）のレール(31)との嵌
合構造は、上方間仕切壁（８）の上端(11)と天井（３）
の結合構造と、上方間仕切壁（８）の下端(10)と上方横
枠（５）の結合構造にも適用されていて、その説明は重
複するので省略する。また、下方間仕切壁（９）におけ
る左右の縦框(34)と上下の横框(35,36) の受部(42)で壁
部(38)を受け止める構造と、パッキング(52)が左右の押
縁(39)と上下の押縁(40)に溝孔(47)と連結部(53)との嵌
合で予め取り付けられた構造と、上記各押縁(39,40) が
上記各框(34,35,36)に連結脚(49,50) と連結孔(45)との
嵌合で結合された構造も、上方間仕切壁（９）にも適用
されていて、その説明も重複するので省略する。さらに
また、上方間仕切壁（８）と下方間仕切壁（９）は、１
枚の間仕切壁（図示せず）にまとめることもできる。つ
まり、１枚の下方間仕切壁（９）が天井（３）から床
（７）までの空間を閉じるように寸法を大きくすること
である。The fitting structure of the upper end (13) of the lower partition wall (9) with the groove (14) of the upper horizontal frame (5), and the groove (28) of the lower end (12) of the lower partition wall (9). The fitting structure of the lower horizontal frame (6) with the rail (31) consists of the upper end (11) of the upper partition wall (8) and the ceiling (3).
And the connection structure between the lower end (10) of the upper partition wall (8) and the upper horizontal frame (5), and the description thereof is omitted because it is duplicated. Also, a structure for receiving the wall portion (38) by the receiving portions (42) of the left and right vertical frames (34) and the upper and lower horizontal frames (35, 36) in the lower partition wall (9), and the packing (52) A structure in which the ridge (39) and the upper and lower ridges (40) are attached in advance by fitting the slot (47) and the connecting portion (53), and each of the ridges (39, 40) is attached to the respective frame (34, 40). The structure in which the connecting leg (49, 50) and the connecting hole (45) are connected to the upper partition wall (9, 35) is also applied to the upper partition wall (9). . Furthermore, the upper partition wall (8) and the lower partition wall (9) are 1
It can also be put together on a partition wall (not shown). That is, the dimension is increased so that one lower partition wall (9) closes the space from the ceiling (3) to the floor (7).
【００２１】[0021]
【発明の効果】本発明は上記のように、クリ−ンル−ム
（１）とそれに隣接するル−ム（２）等を、天井（３）
から床（７）にわたって間仕切壁（８），（９）で仕切
る間仕切構造において、上記間仕切壁（９）はその下端
(12)と床（７）の間に、クリ−ンル−ム（１）とそれに
隣接するル−ム（２）等を互いに連通させる通気用の開
口部(15)が設けられ、上記間仕切壁（９）の下部に調節
板(23)を上下動可能に連結手段で連結し、該調節板(23)
の上下動にて上記開口部(15)の開口面積を調節して、天
井（３）から床（７）方向に吹き出される清浄空気が上
記開口部(15)をクリ−ンル−ム（１）側からそれに隣接
するル−ム（２）等側に通過する流量を調節するように
構成されているので、クリ−ンル−ム（１）内の作業者
の人数や装置の数，大きさ，配置等が変化しても、清浄
空気が天井（３）から床（７）方向に一定の流速で整然
と均一に流れるように調節できて、振動の発生や清浄度
の低下を阻止して、特に超精密加工に適する良好な作業
環境が得られる。本発明はまた、間仕切壁（９）が複数
枚横１列に並べられ、各間仕切壁（９）の開口部(15)の
開口面積が各調節板(23)で適宜調節されるように構成さ
れているので、床（７）の全面に分布する各通気孔(19)
の吸引力に強弱の差が生じても、清浄空気がクリ−ンル
−ム（１）の床（７）の全面にわたって、天井（３）か
ら床（７）方向に一定の流速で整然と均一に流れるよう
に調節できて、一層振動の発生や清浄度の低下を阻止し
て、一層良好な作業環境が得られる。本発明はまた、間
仕切壁（９）は、その両側が天井（３）と床（７）の間
に立てられた柱（４）で挟持され、下端(12)が一対の柱
（４）の間にわたされた下方の横枠（６）で支持され、
上端(13)が柱（４）の間にわたされた上方の横枠（５）
の溝(14)内に嵌合されて保持され、この間仕切壁（９）
の上端(13)と上方の横枠（５）の溝(14)との間の上下方
向の遊び空間(27)にて間仕切壁（９）が両側の柱（４）
と上方と下方の横枠（５），（６）で囲まれた空間内に
取外し可能に取付けられるように構成されているので、
間仕切壁（９）はその組立後においても簡単に取外すこ
とができて、間仕切壁（９）に対面する側の機械装置の
修理や微調整を簡単にすることができで便利である。本
発明はまた、間仕切壁（９）は、左右の縦框(34)と上下
の横框(35),(36) で形成される框部(37)と、該框部(37)
内に組み込まれて框部(37)の受部(42)で受け止められる
壁部(38)と、該壁部(38)の周囲を框部(37)の受部(42)に
押し付けて壁部(38)を固定する押縁(39,40) を具備し、
上記押縁(39,40) はその連結用脚部(49,50) を框部の孔
(45)に差し込んで框部(37)に取付けられ、押縁(39,40)
自身にはゴム等の弾性を有するパッキング(52)が予め取
り付けられていて、押縁(39,40) を框部(37)に取付ける
ことによりパッキング(52)で壁部(38)を押さえるように
構成されているので、間仕切壁（９）の壁部(38)と框部
(37)との間にパッキング(52)を介在させる構造が簡単
で、その取付作業が容易である。According to the present invention, as described above, the clean room (1) and the room (2) adjacent thereto are installed on the ceiling (3).
In the partition structure in which the partition wall (8) and (9) are partitioned from the floor to the floor (7), the partition wall (9) has a lower end.
An opening (15) for ventilation is provided between the floor (7) and the clean room (1) and the room (2) adjacent to the clean room (1), and the partition wall. The adjusting plate (23) is connected to the lower part of (9) by a connecting means so as to be movable up and down, and the adjusting plate (23)
The opening area of the opening (15) is adjusted by moving the opening (15) vertically so that clean air blown from the ceiling (3) toward the floor (7) cleans the opening (15) in the clean room (1). ) Side to adjust the flow rate passing to the adjacent room (2), etc., the number of workers in the clean room (1) and the number and size of devices. , Even if the arrangement is changed, the clean air can be adjusted so as to flow in an orderly and uniform manner from the ceiling (3) to the floor (7) at a constant flow rate, preventing the occurrence of vibrations and deterioration of cleanliness. In particular, a good working environment suitable for ultra-precision machining can be obtained. The present invention is also configured such that a plurality of partition walls (9) are arranged in a horizontal row and the opening area of the opening (15) of each partition wall (9) is appropriately adjusted by each adjusting plate (23). The ventilation holes (19) are distributed over the entire floor (7)
Even if there is a difference in the suction force of the clean air, the clean air is uniformly distributed over the entire floor (7) of the clean room (1) at a constant flow velocity from the ceiling (3) to the floor (7). It can be adjusted so as to flow, and further vibration and deterioration of cleanliness can be prevented, and a better working environment can be obtained. The present invention also provides that the partition wall (9) is sandwiched on both sides by columns (4) standing between the ceiling (3) and the floor (7) and the lower end (12) of the pair of columns (4). Supported by a lower horizontal frame (6) which is sandwiched between
Upper horizontal frame (5) with the upper end (13) passed between the pillars (4)
It is fitted and held in the groove (14) of the partition wall (9).
In the vertical play space (27) between the upper end (13) of the and the groove (14) of the upper horizontal frame (5), the partition wall (9) has columns (4) on both sides.
Since it is configured to be detachably mounted in the space surrounded by the upper and lower horizontal frames (5) and (6),
The partition wall (9) can be easily removed even after its assembly, and it is convenient because the mechanical device on the side facing the partition wall (9) can be easily repaired and finely adjusted. According to the present invention, the partition wall (9) also includes a frame part (37) formed of left and right vertical frames (34) and upper and lower horizontal frames (35), (36), and the frame part (37).
A wall portion (38) incorporated in the frame portion (37) and received by the receiving portion (42) of the frame portion (37) and a wall by pressing the periphery of the wall portion (38) against the receiving portion (42) of the frame portion (37). Equipped with ridges (39, 40) for fixing the part (38),
The ridge (39,40) has the connecting leg (49,50) in the frame hole.
Inserted in (45) and attached to the frame (37), the ridge (39, 40)
An elastic packing (52) such as rubber is attached to itself in advance, and by attaching the ridges (39, 40) to the frame (37), the packing (52) presses the wall (38). Since it is configured, the wall part (38) and the frame part of the partition wall (9)
The structure in which the packing (52) is interposed between (37) and (37) is simple, and its mounting work is easy.
【図１】本発明の間仕切構造を隣接ル−ム側から見た一
部縦断組立正面図である。FIG. 1 is a partially longitudinal assembly front view of a partition structure of the present invention as viewed from an adjacent room side.
【図２】図１の組立正面図の一部拡大正面図である。FIG. 2 is a partially enlarged front view of the assembled front view of FIG.
【図３】図２のＡ−Ａ線拡大概略断面図である。FIG. 3 is an enlarged schematic sectional view taken along line AA of FIG. 2;
【図４】図３の断面図の一部拡大図である。FIG. 4 is a partially enlarged view of the sectional view of FIG. 3;
【図５】本発明の間仕切壁の詳細を示す正面図である。FIG. 5 is a front view showing details of a partition wall of the present invention.
【図６】図５のＢ−Ｂ線拡大断面図である。6 is an enlarged cross-sectional view taken along the line BB of FIG.
【図７】図６のＣ−Ｃ線拡大断面図である。FIG. 7 is an enlarged sectional view taken along the line CC of FIG. 6;
１ クリ−ンル−ム ２ 隣接ル−ム ３ 天井
４ 柱 ５ 上方横枠 ６ 下方横枠 ７ 床
８ 上方間仕切壁 ９ 下方間仕切壁 14 溝 15 開口部 16 天井裏 17 フイルタ
− 18 送風機 19 通気孔 20 床下 21 通気路 22 送風機
23 調節板 24 第１連結孔 25 第２連結孔 26 連結部材
28 溝 31 レール 33 取手 34 縦框 35 上框 36 下框 37
框部 38 壁部 39 縦押縁 40 横押縁 52 パッキング1 Clean room 2 Adjacent room 3 Ceiling
4 pillar 5 upper horizontal frame 6 lower horizontal frame 7 floor 8 upper partition wall 9 lower partition wall 14 groove 15 opening 16 ceiling floor 17 filter 18 blower 19 ventilation hole 20 under floor 21 ventilation path 22 blower
23 Adjustment plate 24 First connection hole 25 Second connection hole 26 Connection member
28 Groove 31 Rail 33 Handle 34 Vertical frame 35 Upper frame 36 Lower frame 37
Frame 38 Wall 39 Vertical ridge 40 Horizontal ridge 52 Packing
Claims (5)
等を天井から床にわたって間仕切壁で仕切る間仕切構造
において、上記間仕切壁はその下端と床の間に、クリ−
ンル−ムとそれに隣接するル−ム等を互いに連通させる
通気用の開口部が設けられ、上記間仕切壁の下部に調節
板を上下動可能に連結手段で連結し、該調節板の上下動
にて上記開口部の開口面積を調節して、天井から床方向
に吹き出される清浄空気が上記開口部をクリ−ンル−ム
側からそれに隣接するル−ム等側に流出する流量を調節
するクリ−ンル−ムの間仕切構造。1. A partition structure for partitioning a clean room and a room adjacent to the clean room with a partition wall from the ceiling to the floor, wherein the partition wall has a clean room between its lower end and the floor.
An opening for ventilation is provided to connect the room and the adjacent room to each other, and the adjusting plate is connected to the lower part of the partition wall by a connecting means so that the adjusting plate can move up and down. The opening area of the opening is adjusted to adjust the flow rate of the clean air blown from the ceiling toward the floor from the clean room side to the adjacent room such as the room side. -Room partition structure.
れ、各間仕切壁の開口部の開口面積が各調節板で適宜調
節されて、清浄空気がクリ−ンル−ムの全面にわたって
均一の流速で天井から床まで送られるように構成された
請求項１記載のクリ−ンル−ムの間仕切構造。2. A plurality of the partition walls are arranged in a horizontal row, and the opening area of the opening of each partition wall is adjusted appropriately by each adjusting plate so that the clean air is evenly distributed over the entire surface of the clean room. The partition structure for a clean room according to claim 1, wherein the partition structure is configured to be fed from the ceiling to the floor at a flow rate.
は、間仕切壁と調節板のいずれか一方に設けられた１段
の第１連結孔と、他方に設けられた複数段の第２連結孔
と、これらの第１連結孔と第２連結孔に挿入される棒状
の連結部材で構成され、これらの第１連結孔と第２連結
孔を適宜選択的に組合せることにより前記通気用の開口
部の開口面積を調節する請求項１または２に記載のクリ
−ンル−ムの間仕切構造。3. The connecting means between the lower part of the partition wall and the adjusting plate is a first connecting hole provided in one of the partition wall and the adjusting plate and a second connecting hole provided in the other. The ventilation hole is composed of a connection hole and a rod-shaped connection member that is inserted into the first connection hole and the second connection hole, and the first connection hole and the second connection hole are selectively combined as appropriate. The partition structure for a clean room according to claim 1, wherein the opening area of the opening is adjusted.
間に立てられた柱で挟持され、下端が柱間にわたされた
下方の横枠で支持され、上端が柱間にわたされた上方の
横枠の溝内に嵌合されて保持され、この間仕切壁の上端
と上方の横枠の溝との間の上下方向の遊びにて間仕切壁
が両側の柱と上方と下方の横枠で囲まれた開口面に取外
し可能に取付けられる請求項１から３までのいずれかに
記載のクリ−ンル−ムの間仕切構造。4. The partition wall is sandwiched on both sides by columns standing between a ceiling and a floor, the lower end is supported by a lower horizontal frame extending between the columns, and the upper end is extended above the columns. It is fitted and retained in the groove of the horizontal frame, and the partition wall is supported by the pillars on both sides and the upper and lower horizontal frames by the vertical play between the upper end of the partition wall and the groove of the upper horizontal frame. The partition structure for a clean room according to any one of claims 1 to 3, which is removably attached to the enclosed opening surface.
框で形成される框部と、該框部内に組み込まれて框部の
内方に延出した受部で受け止められる壁部と、該壁部の
周囲を框部の上記受部に押し付けて壁部を固定する押縁
を具備し、上記押縁はその連結用脚部を框部の孔に差し
込んで框部に取付けられ、押縁自身にはゴム等の弾性を
有するパッキングが予め取り付けられていて、押縁を框
部に取付けることによりパッキングで壁部を押さえるよ
うに構成した請求項４記載のクリ−ンル−ムの間仕切構
造。5. The partition wall is a frame part formed by left and right vertical frames and upper and lower horizontal frames, and a wall part that is incorporated in the frame part and is received by a receiving part extending inwardly of the frame part. And a ridge for fixing the wall part by pressing the periphery of the wall part to the receiving part of the frame part, and the ledge is attached to the frame part by inserting the connecting leg part into the hole of the frame part. 5. The clean room partition structure according to claim 4, wherein elastic packing such as rubber is preliminarily attached to itself, and the wall portion is pressed by the packing by attaching the ridge to the frame portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7271914A JP2655399B2 (en) | 1995-09-26 | 1995-09-26 | Partition structure for clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7271914A JP2655399B2 (en) | 1995-09-26 | 1995-09-26 | Partition structure for clean room |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0989328A true JPH0989328A (en) | 1997-04-04 |
| JP2655399B2 JP2655399B2 (en) | 1997-09-17 |
Family
ID=17506641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7271914A Expired - Fee Related JP2655399B2 (en) | 1995-09-26 | 1995-09-26 | Partition structure for clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2655399B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7083515B2 (en) * | 1999-09-07 | 2006-08-01 | Speedfam-Ipec Corporation | Clean room facility and construction method |
| CN102392545A (en) * | 2011-08-24 | 2012-03-28 | 百度在线网络技术（北京）有限公司 | Data center machine room |
| CN107269038A (en) * | 2017-07-13 | 2017-10-20 | 潘坚萍 | One kind carves groove magic square building block system clean operating room and its installation method |
| CN110090670A (en) * | 2019-06-05 | 2019-08-06 | 江苏拓米洛环境试验设备有限公司 | Environmental test chamber with top air draught type air channel structure |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57158808U (en) * | 1981-03-31 | 1982-10-05 | ||
| JPS6015517U (en) * | 1983-07-12 | 1985-02-01 | 株式会社竹中工務店 | Clean room return air partition panel |
| JPS61108710U (en) * | 1984-12-22 | 1986-07-10 | ||
| JPS61113810U (en) * | 1984-12-28 | 1986-07-18 | ||
| JPS61201408U (en) * | 1985-06-07 | 1986-12-17 | ||
| JPS6240433U (en) * | 1985-08-30 | 1987-03-11 | ||
| JPS6256614U (en) * | 1985-09-30 | 1987-04-08 | ||
| JPS62147249A (en) * | 1985-12-19 | 1987-07-01 | Shimizu Constr Co Ltd | Clean room |
| JPS6375733U (en) * | 1986-11-04 | 1988-05-20 | ||
| JPS63137226U (en) * | 1987-02-28 | 1988-09-09 | ||
| JPH0868221A (en) * | 1994-08-29 | 1996-03-12 | Sanki Eng Co Ltd | Partition device |
-
1995
- 1995-09-26 JP JP7271914A patent/JP2655399B2/en not_active Expired - Fee Related
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57158808U (en) * | 1981-03-31 | 1982-10-05 | ||
| JPS6015517U (en) * | 1983-07-12 | 1985-02-01 | 株式会社竹中工務店 | Clean room return air partition panel |
| JPS61108710U (en) * | 1984-12-22 | 1986-07-10 | ||
| JPS61113810U (en) * | 1984-12-28 | 1986-07-18 | ||
| JPS61201408U (en) * | 1985-06-07 | 1986-12-17 | ||
| JPS6240433U (en) * | 1985-08-30 | 1987-03-11 | ||
| JPS6256614U (en) * | 1985-09-30 | 1987-04-08 | ||
| JPS62147249A (en) * | 1985-12-19 | 1987-07-01 | Shimizu Constr Co Ltd | Clean room |
| JPS6375733U (en) * | 1986-11-04 | 1988-05-20 | ||
| JPS63137226U (en) * | 1987-02-28 | 1988-09-09 | ||
| JPH0868221A (en) * | 1994-08-29 | 1996-03-12 | Sanki Eng Co Ltd | Partition device |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7083515B2 (en) * | 1999-09-07 | 2006-08-01 | Speedfam-Ipec Corporation | Clean room facility and construction method |
| CN102392545A (en) * | 2011-08-24 | 2012-03-28 | 百度在线网络技术（北京）有限公司 | Data center machine room |
| CN102392545B (en) * | 2011-08-24 | 2016-04-13 | 百度在线网络技术（北京）有限公司 | Data center machine room |
| CN107269038A (en) * | 2017-07-13 | 2017-10-20 | 潘坚萍 | One kind carves groove magic square building block system clean operating room and its installation method |
| CN110090670A (en) * | 2019-06-05 | 2019-08-06 | 江苏拓米洛环境试验设备有限公司 | Environmental test chamber with top air draught type air channel structure |
| CN110090670B (en) * | 2019-06-05 | 2024-02-20 | 江苏拓米洛高端装备股份有限公司 | Environmental test box with top induced draft type air duct structure |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2655399B2 (en) | 1997-09-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8821726B2 (en) | Submerged membrane separator | |
| US20110181160A1 (en) | Switching cabinet and assembly method of the same | |
| CN100591488C (en) | Dust-free workstation | |
| WO2016035430A1 (en) | Structure for lower portion of vehicle | |
| JP4664941B2 (en) | Temperature control booth | |
| JP2655399B2 (en) | Partition structure for clean room | |
| JPH06173477A (en) | Wall structure for dividing chamber | |
| KR20160043163A (en) | A transparent soundproof frame | |
| JP2009174828A (en) | Booth for temperature control | |
| JP2655400B2 (en) | Partition structure for clean room | |
| JP2016033437A (en) | Clean booth | |
| CA2585895A1 (en) | Flexible size sparger for air cooled condensers | |
| CN215345674U (en) | Subway fan control cabinet | |
| KR20070099160A (en) | Combination apparatus of knock-down partition | |
| KR101289367B1 (en) | Processing apparatus and clean system including processing apparatus | |
| KR20190048277A (en) | Sound proof wall | |
| JP3223446U6 (en) | Mobile mount for air conditioner | |
| JPH11159818A (en) | Air cleaner and method for installation thereof | |
| KR102180233B1 (en) | Mesh Type Chair Seat With Adjustable Tension Using Tension Bar | |
| JP3223446U (en) | Mobile mount for air conditioner | |
| EP0450347A1 (en) | Supporting frame for bathtubs of the whirl-pool type | |
| KR200236414Y1 (en) | Structure for coupling short bars to a long bar of a clean room | |
| KR200274393Y1 (en) | Separation type partition structure | |
| KR20200032971A (en) | Installation device of double floors with frame supported by beam | |
| KR20120061120A (en) | Structure for mounting of ceiling panel |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |