JPS6375733U - - Google Patents
Info
- Publication number
- JPS6375733U JPS6375733U JP17003586U JP17003586U JPS6375733U JP S6375733 U JPS6375733 U JP S6375733U JP 17003586 U JP17003586 U JP 17003586U JP 17003586 U JP17003586 U JP 17003586U JP S6375733 U JPS6375733 U JP S6375733U
- Authority
- JP
- Japan
- Prior art keywords
- low pressure
- pressure loss
- loss filter
- window
- partition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 claims description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Ventilation (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Description
第1図は本考案のクリーンルーム用パーテイシ
ヨンの1実施例を示す縦断正面図、第2図は従来
例を示す縦断正面図である。
1,4…高性能エアフイルター、2…床面、3
…フアン、5…チヤンバー、6…循環フアン、7
…エアフイルター、8…高性能エアフイルター、
8a…低圧損フイルター、9…支持枠、10…窓
、10a…引戸、11…遮蔽板、12…後パネル
、13…前パネル、14…照明具、15…アクリ
ル透明板。
FIG. 1 is a longitudinal sectional front view showing one embodiment of the clean room partition of the present invention, and FIG. 2 is a longitudinal sectional front view showing a conventional example. 1, 4...High performance air filter, 2...Floor surface, 3
…Fan, 5…Chamber, 6…Circulation fan, 7
...Air filter, 8...High performance air filter,
8a...Low pressure loss filter, 9...Support frame, 10...Window, 10a...Sliding door, 11...Shielding plate, 12...Rear panel, 13...Front panel, 14...Lighting device, 15...Acrylic transparent plate.
Claims (1)
分を低圧損フイルターとし、該低圧損フイルター
の下方を窓付きの後パネルとこれに並行する垂壁
状の前パネルとで仕切り、特別区画を形成したこ
とを特徴とするクリーンルーム用パーテイシヨン
。 A specific part of the filters installed on the entire surface of the ceiling is a low pressure loss filter, and the lower part of the low pressure loss filter is partitioned by a rear panel with a window and a front panel with a hanging wall parallel to this to form a special section. A partition for clean rooms that is characterized by:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986170035U JPH0311650Y2 (en) | 1986-11-04 | 1986-11-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986170035U JPH0311650Y2 (en) | 1986-11-04 | 1986-11-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6375733U true JPS6375733U (en) | 1988-05-20 |
JPH0311650Y2 JPH0311650Y2 (en) | 1991-03-20 |
Family
ID=31104396
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986170035U Expired JPH0311650Y2 (en) | 1986-11-04 | 1986-11-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0311650Y2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0989329A (en) * | 1995-09-26 | 1997-04-04 | Benitsukusu Kk | Partition structure for clean room |
JPH0989328A (en) * | 1995-09-26 | 1997-04-04 | Benitsukusu Kk | Partition structure of clean room |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS597836A (en) * | 1982-07-06 | 1984-01-17 | Oshitari Kenkyusho:Kk | Vertical laminar flow type dust-free chamber |
JPS6099943A (en) * | 1983-11-02 | 1985-06-03 | Hitachi Ltd | Clean room |
-
1986
- 1986-11-04 JP JP1986170035U patent/JPH0311650Y2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS597836A (en) * | 1982-07-06 | 1984-01-17 | Oshitari Kenkyusho:Kk | Vertical laminar flow type dust-free chamber |
JPS6099943A (en) * | 1983-11-02 | 1985-06-03 | Hitachi Ltd | Clean room |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0989329A (en) * | 1995-09-26 | 1997-04-04 | Benitsukusu Kk | Partition structure for clean room |
JPH0989328A (en) * | 1995-09-26 | 1997-04-04 | Benitsukusu Kk | Partition structure of clean room |
Also Published As
Publication number | Publication date |
---|---|
JPH0311650Y2 (en) | 1991-03-20 |
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