JPS6375733U - - Google Patents

Info

Publication number
JPS6375733U
JPS6375733U JP17003586U JP17003586U JPS6375733U JP S6375733 U JPS6375733 U JP S6375733U JP 17003586 U JP17003586 U JP 17003586U JP 17003586 U JP17003586 U JP 17003586U JP S6375733 U JPS6375733 U JP S6375733U
Authority
JP
Japan
Prior art keywords
low pressure
pressure loss
loss filter
window
partition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17003586U
Other languages
Japanese (ja)
Other versions
JPH0311650Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986170035U priority Critical patent/JPH0311650Y2/ja
Publication of JPS6375733U publication Critical patent/JPS6375733U/ja
Application granted granted Critical
Publication of JPH0311650Y2 publication Critical patent/JPH0311650Y2/ja
Expired legal-status Critical Current

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  • Ventilation (AREA)
  • Devices For Use In Laboratory Experiments (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案のクリーンルーム用パーテイシ
ヨンの1実施例を示す縦断正面図、第2図は従来
例を示す縦断正面図である。 1,4…高性能エアフイルター、2…床面、3
…フアン、5…チヤンバー、6…循環フアン、7
…エアフイルター、8…高性能エアフイルター、
8a…低圧損フイルター、9…支持枠、10…窓
、10a…引戸、11…遮蔽板、12…後パネル
、13…前パネル、14…照明具、15…アクリ
ル透明板。
FIG. 1 is a longitudinal sectional front view showing one embodiment of the clean room partition of the present invention, and FIG. 2 is a longitudinal sectional front view showing a conventional example. 1, 4...High performance air filter, 2...Floor surface, 3
…Fan, 5…Chamber, 6…Circulation fan, 7
...Air filter, 8...High performance air filter,
8a...Low pressure loss filter, 9...Support frame, 10...Window, 10a...Sliding door, 11...Shielding plate, 12...Rear panel, 13...Front panel, 14...Lighting device, 15...Acrylic transparent plate.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 天井部全面に配設するフイルターのうち特定部
分を低圧損フイルターとし、該低圧損フイルター
の下方を窓付きの後パネルとこれに並行する垂壁
状の前パネルとで仕切り、特別区画を形成したこ
とを特徴とするクリーンルーム用パーテイシヨン
A specific part of the filters installed on the entire surface of the ceiling is a low pressure loss filter, and the lower part of the low pressure loss filter is partitioned by a rear panel with a window and a front panel with a hanging wall parallel to this to form a special section. A partition for clean rooms that is characterized by:
JP1986170035U 1986-11-04 1986-11-04 Expired JPH0311650Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986170035U JPH0311650Y2 (en) 1986-11-04 1986-11-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986170035U JPH0311650Y2 (en) 1986-11-04 1986-11-04

Publications (2)

Publication Number Publication Date
JPS6375733U true JPS6375733U (en) 1988-05-20
JPH0311650Y2 JPH0311650Y2 (en) 1991-03-20

Family

ID=31104396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986170035U Expired JPH0311650Y2 (en) 1986-11-04 1986-11-04

Country Status (1)

Country Link
JP (1) JPH0311650Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0989329A (en) * 1995-09-26 1997-04-04 Benitsukusu Kk Partition structure for clean room
JPH0989328A (en) * 1995-09-26 1997-04-04 Benitsukusu Kk Partition structure of clean room

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS597836A (en) * 1982-07-06 1984-01-17 Oshitari Kenkyusho:Kk Vertical laminar flow type dust-free chamber
JPS6099943A (en) * 1983-11-02 1985-06-03 Hitachi Ltd Clean room

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS597836A (en) * 1982-07-06 1984-01-17 Oshitari Kenkyusho:Kk Vertical laminar flow type dust-free chamber
JPS6099943A (en) * 1983-11-02 1985-06-03 Hitachi Ltd Clean room

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0989329A (en) * 1995-09-26 1997-04-04 Benitsukusu Kk Partition structure for clean room
JPH0989328A (en) * 1995-09-26 1997-04-04 Benitsukusu Kk Partition structure of clean room

Also Published As

Publication number Publication date
JPH0311650Y2 (en) 1991-03-20

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