CN115531993A

CN115531993A - Panel transition device

Info

Publication number: CN115531993A
Application number: CN202211185876.9A
Authority: CN
Inventors: 高日凯
Original assignee: LG Display Optoelectronics Technology China Co Ltd
Current assignee: LG Display Optoelectronics Technology China Co Ltd
Priority date: 2022-09-27
Filing date: 2022-09-27
Publication date: 2022-12-30

Abstract

The invention discloses panel transition equipment which comprises a transition cavity and an air exhaust part positioned outside the transition cavity, wherein the air exhaust part is arranged at the top of the transition cavity, the transition cavity is communicated with the air exhaust part through an air exhaust channel, a filter piece is arranged inside the air exhaust channel, the filter piece is provided with a through hole in a penetrating manner, the through hole comprises a first hole and a second hole communicated with the first hole, the first hole is positioned above the second hole, the first hole is communicated with the top of the filter piece, the sectional dimension of the first hole is larger than that of the second hole, a blocking piece capable of blocking the second hole is arranged inside the first hole, the size of the blocking piece is smaller than that of the first hole, the size of the blocking piece is larger than that of the second hole, when the blocking piece blocks the second hole, the first hole is not communicated with the transition cavity, and when the air exhaust part exhausts, the blocking piece moves to the position above the filter piece along the vertical direction so that the through hole is communicated with the transition cavity. The panel transition equipment can prevent foreign matters in the air exhaust part from falling onto the panel in the transition chamber.

Description

Panel transition device

Technical Field

The invention relates to the technical field of display device manufacturing equipment, in particular to panel transition equipment.

Background

When a panel of a display device is processed, the panel needs to be transported into a vacuum processing chamber by a panel transition device for processing (for example, a process such as drying a panel after photolithography or performing vapor deposition on the surface of the panel).

Referring to fig. 1, the panel transition apparatus includes two relatively independent transition chambers 1 ', the transition chamber 1' is used for placing a panel 100 'to be processed, the two transition chambers 1' are respectively distributed at intervals in a vertical direction, the top of the transition chamber 1 'above and the bottom of the transition chamber 1' below are both connected with an air pump 2 'and an air suction part 3', the air pump 2 'is used for pumping air in the transition chamber 1', and the air suction part 3 'is used for conveying clean air to the interior of the transition chamber 1'. After the panel 100 ' enters the transition chamber 1 ', the transition chamber 1 ' is vacuumized by the air pump 2 ', then the panel 100 ' is sent into the processing chamber, after the panel 100 ' is processed, the panel 100 ' returns to the transition chamber 1 ' from the processing chamber, clean gas is input into the transition chamber 1 ' by the air suction component 3 ', the transition chamber 1 ' is restored to the atmospheric state from the vacuum state, and then the panel 100 ' is output out of the transition chamber 1 '. When the air pump 2 'is running, the abrasion of the internal components can generate debris and other foreign matters, and the foreign matters can fall from the air pumping port 4' at the top of the transition chamber 1 'onto the panel 100' in the transition chamber 1 'under the action of gravity, thereby affecting the quality of the panel 100'.

In the prior art, in order to prevent the foreign matters in the air pump 2 'from falling into the upper transition chamber 1', a baffle 5 'is disposed in the upper transition chamber 1', the baffle 5 'is located right below the air pumping port 4', and the foreign matters falling from the air pumping port 4 'are intercepted by the baffle 5'. The prior art has the following defects: when the air suction component 3 ' operates, under the influence of the air flow of the transition chamber 1 ', the foreign matters on the baffle 5 ' are easy to fall from the edge of the baffle 5 ' to the panel 100 ' in the transition chamber 1 ', and the quality of the panel 100 ' is also influenced.

Disclosure of Invention

The invention aims to: provided is a panel transition device which can prevent foreign matters in an air exhaust part from falling onto a panel in a transition chamber.

In order to achieve the purpose, the invention adopts the following technical scheme:

the utility model provides a panel transition equipment, including the transition cavity that is used for holding the panel with be located the outside part of bleeding of transition cavity, the part of bleeding sets up the top of transition cavity, be used for right the transition cavity evacuation, the transition cavity pass through bleed passage with bleed part intercommunication, the inside filter piece that is provided with of bleed passage, filter the piece through being provided with the through-hole, the through-hole includes first hole and the second hole that communicates with first hole, first hole site in the top of second hole, just first hole intercommunication the top of filter the piece, the cross sectional dimension of first hole is greater than the cross sectional dimension of second hole, so that first hole with second jogged joint forms spacing step face, the inside of first hole is provided with and to block the piece of second hole, the size of blockking is less than first hole size, just the size of blockking is greater than the size of second hole, when blockking the second hole, first hole with the transition cavity does not communicate, when the part, the piece moves to along vertical direction of bleeding to the top of filtering in order to make the cavity communicate with the through-hole.

As a preferable solution of the panel transition device, a mesh plate is arranged above the filter element at an interval, and when the blocking element moves out above the filter element, the blocking element can abut against a lower surface of the mesh plate to limit the blocking element below the mesh plate.

As a preferable scheme of the panel transition device, the through hole has a plurality of through holes, the plurality of through holes are distributed on the filter element at intervals, the blocking member is arranged in the first hole in each through hole, the mesh plate covers all the first holes, and two adjacent first holes are communicated through a gas channel.

As a preferable scheme of the panel transition device, the panel transition device further comprises a support plate surrounding the periphery of the mesh plate, and one end of the support plate, which is far away from the mesh plate, is connected with the filter element.

As a preferred embodiment of the panel transition device, the support plate is detachably connected to the filter element by a fastening element.

As a preferable scheme of the panel transition device, the fastening member is a fastening screw, one end of the support plate, which is far away from the mesh plate, is convexly provided with a protruding portion, the protruding portion protrudes toward one side, which is far away from the center of the filter member, the protruding portion is penetratingly provided with a first fastening hole, a position of the filter member, which corresponds to the first fastening hole, is provided with a second fastening hole, and one end of the fastening screw penetrates through the first fastening hole and is screwed in the second fastening hole.

As a preferable aspect of the panel transition device, the blocking member is a blocking ball.

As a preferable scheme of the panel transition device, a guide member is arranged between the screen plate and the filter member, guide holes are arranged at the upper end and the lower end of the guide member in a penetrating manner, the guide holes are communicated with the first holes and the first air holes on the screen plate, and the blocking member can move up and down in the guide holes.

As a preferable embodiment of the panel transition device, the blocking member is connected to an inner wall of the first hole through an elastic member, one end of the elastic member is fixed to the blocking member, and the other end of the elastic member is fixed to the inner wall of the first hole.

As a preferable mode of the panel transition device, the filter member is detachably disposed in the air suction passage by a screw structure, or the filter member is detachably disposed in the air suction passage by a screw.

The invention has the beneficial effects that: the panel transition chamber with the structure can effectively block foreign matters generated by the air exhaust part by utilizing the filtering piece and the blocking piece, and the foreign matters of the air exhaust part are prevented from falling onto the panel in the transition chamber to influence the quality of the panel.

Drawings

The invention is explained in more detail below with reference to the figures and examples.

Fig. 1 is a block diagram of a prior art vacuum transition apparatus.

Fig. 2 is a schematic structural diagram of a panel transition device according to an embodiment of the present invention.

Fig. 3 is a schematic structural diagram of a panel transition device according to another embodiment of the present invention.

Fig. 4 is a diagram illustrating the construction of a filter, a blocking member, a mesh plate and a support plate according to an embodiment of the present invention (when the blocking member blocks the second hole).

Fig. 5 is an enlarged view of a portion a in fig. 4.

Fig. 6 is a diagram of a filter, baffle screen and support panel configuration according to an embodiment of the invention (with the baffle removed above the filter).

Figure 7 is a schematic view of a filter, baffle screen and support panel according to another embodiment of the present invention.

Figure 8 is a cross-sectional view of a filter element according to the present invention.

Figure 9 is a block diagram of a filter, a barrier, a mesh, a support plate, and a guide according to an embodiment of the present invention.

Fig. 10 is a block diagram of a guide according to an embodiment of the invention.

FIG. 1:

100', a panel; 1', a transition chamber; 2', an air extracting part; 3', a getter pump; 4', an air exhaust port; 5', and a baffle plate.

In fig. 2 to 10:

1. a transition chamber; 2. an air extraction part; 3. an air suction member; 4. an air extraction channel; 5. an air suction passage; 6. a filter member; 601. a through hole; 6011. a first hole; 6012. a second hole; 602. a second fastening hole; 603. an external thread; 604. a gas channel; 605. mounting a plate; 6051. a first mounting hole; 606. a second mounting hole; 607. a limiting step surface; 7. a screen plate; 701. a first air hole; 702. a body; 703. a convex column; 8. a support plate; 801. a projection; 8011. a first fastening hole; 9. a guide member; 901. a guide hole; 902. a second air hole; 10. a blocking member; 11. a traction member; 12. a fastening screw; 13. mounting screws; 100. a panel; 200. a foreign matter.

Detailed Description

Advantages and features of the present invention and methods of accomplishing the same will become apparent with reference to the following detailed description of the embodiments taken in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various forms, which are provided only to complete the disclosure of the present invention and make those skilled in the art sufficiently understand the scope of the present invention, and the present invention is limited only by the scope of the claims. Like reference numerals denote like constituent elements throughout the specification.

In the present embodiment, referring to fig. 2 to 4 and 6, a panel transition device is provided, which includes a transition chamber 1 for accommodating a panel 100 and a pumping part 2 located outside the transition chamber 1, the pumping part 2 is disposed at the top of the transition chamber 1 for pumping vacuum to the transition chamber 1, and the transition chamber 1 is communicated with the pumping part 2 through a pumping channel 4. The air exhaust channel 4 is internally provided with a filter member 6, the filter member 6 is provided with a through hole 601 in a penetrating manner, the through hole 601 comprises a first hole 6011 and a communicated second hole 6012, the first hole 6011 is located above the second hole 6012, the first hole 6011 is communicated with the top of the filter member 6, and the cross-sectional size of the first hole 6011 is larger than that of the second hole 6012, so that a limiting step surface 607 is formed at the joint of the first hole 6011 and the second hole 6012. A blocking member 10 capable of blocking the second hole 6012 is disposed inside the first hole 6011, the size of the blocking member 10 is smaller than that of the first hole 6011, and the size of the blocking member 10 is larger than that of the second hole 6012. When the blocking member 10 blocks the second hole 6012, the first hole 6011 is not communicated with the transition chamber 1, and when the air exhaust part 2 exhausts air, the blocking member 10 moves to the upper side of the filter member 10 along the vertical direction, so that the through hole 601 is communicated with the transition chamber 1. In this example, the air extracting part 2 is an air extracting pump, and in other examples, the air extracting part 2 may also be an air extracting fan, etc., and here, the air extracting part 2 is not particularly limited, and the air extracting device of the transition chamber may be implemented.

The panel transition device further comprises a suction part 3 positioned outside the transition chamber 1, the suction part 3 is arranged at the top of the transition chamber 1, and the suction part 3 is communicated with the transition chamber 1 through a suction channel 5. The air suction component 3 is used for sucking clean gas into the transition chamber 1, so that the transition chamber 1 is switched to an atmospheric state by the vacuum body. In particular, the suction member 3 may also be a suction pump or a fan.

It will be appreciated that foreign matter 200 (e.g. debris etc.) generated within the suction member 2 under the influence of gravity will fall into the suction channel 4. The filtering piece 6 is arranged inside the air exhaust channel 4, the movable blocking piece 10 is arranged inside the filtering piece 6, the blocking piece 10 has certain gravity, the blocking piece 10 is blocked at the position where the first hole 6011 is communicated with the second hole 6012 when the air exhaust part 2 is not operated, at the moment, the first hole 6011 is not communicated with the transition chamber 1, the foreign matters 200 falling from the air exhaust part 2 are intercepted in the first hole 6011 and cannot enter the transition chamber 1 through the second hole 6012, when the air exhaust part 2 is operated (namely, the air exhaust part 2 exhausts air), the intercepted foreign matters 200 are extracted out of the air exhaust channel 4 along with the air flow, meanwhile, the blocking piece 10 is moved upwards under the action of the air flow, the first hole 6011, the second hole 6012 and the transition chamber 1 are communicated, the vacuum pumping inside the transition chamber 1 is realized, and after the vacuum pumping of the transition chamber 1 is completed, the blocking piece 10 descends into the first hole 6011 and blocks the second hole 6012 under the action of gravity. The panel 100 transition chamber 1 with the structure can effectively block the foreign matters 200 generated by the air extracting part 2 by using the filter 6 and the blocking piece 10, and prevent the foreign matters 200 of the air extracting part 2 from falling onto the panel 100 in the transition chamber 1 to influence the quality of the panel 100.

Preferably, the barrier member 10 is a barrier ball having a spherical surface with no corner angles, so that the adhesion of foreign matters 200 to the surface of the barrier member 10 is prevented. In other examples, the barrier 10 may have other configurations, such as a cube or a cylinder.

In an embodiment, referring to fig. 4 and 6, a mesh plate 7 is spaced above the filter element 6, and when the blocking member 10 moves out above the filter element 6, the blocking member 10 can abut against the lower surface of the mesh plate 7 to limit the blocking member 10 below the mesh plate 7. The mesh plate 7 is provided with a plurality of first air holes 701 in a penetrating manner, and air is discharged from the first air holes 6011, passes through the first air holes 701 and enters the air exhaust channel 4 at a position above the mesh plate 7. Set up otter board 7 above filtering piece 6, when stopping piece 10 and removing to filter the top of piece 6 a certain distance, stop piece 10 butt to the lower surface of otter board 7, stop the height that piece 10 rises through otter board 7 restriction to the stroke that stopper 10 removed in vertical direction is prescribed a limit to stop, is convenient for stop piece 10 and resets.

Preferably, referring to fig. 4, 6 and 8, the through holes 601 are multiple, the multiple through holes 601 are distributed on the filter element 6 at intervals, the blocking member 10 is disposed in the first hole 6011 in each through hole 601, and the mesh plate 7 covers the orifices of all the first holes 6011. The plurality of through holes 601 are arranged, when the air extracting part 2 extracts air, the air in the transition chamber 1 can be exhausted from a plurality of positions on the filter piece 6, and under the condition that part of the through holes 601 are blocked, the filter piece 6 can be continuously and normally used through the rest of the through holes 601. The screen 7 covers all the first holes 6011, so that the number of the screen 7 can be reduced, and the assembly of the screen 7 is facilitated.

Further, adjacent two first holes 6011 communicate through the gas passage 604. After the communication port of one of the two adjacent through holes 601 is blocked, the gas can enter the first hole 6011 of the blocked through hole 601 through the gas channel 604 in the first hole 6011 of the other through hole 601, so that the gas can be discharged from the first hole 6011 through the top of the filter member 6, thereby providing the filter member 6 with good ventilation performance.

In this embodiment, referring to fig. 4 and 6, the panel transition device further includes a support plate 8 surrounding the screen plate 7, and an end of the support plate 8 away from the screen plate 7 is connected to the filter member 6. Backup pad 8 provides the effect of support for otter board 7, makes otter board 7 by the interval setting in the top of filtering piece 6, otter board 7 through backup pad 8 with filter 6 and be connected for otter board 7, backup pad 8 and filter 6 three form a set of adult, earlier through backup pad 8 with otter board 7 with filter 6 fixed formation assembly during the installation, then with this assembly monolithic stationary in the inside of bleed air passage 4, the equipment of being convenient for.

Preferably, the support plate 8 is removably connected to the filtering member 6 by means of fasteners, such connection of the support plate 8 to the filtering member 6 facilitating assembly.

Specifically, referring to fig. 5, the fastening member is a fastening screw 12, one end of the support plate 8, which is far away from the mesh plate 7, is provided with a protruding portion 801 in a protruding manner, the protruding portion 801 protrudes toward a side away from the center of the filter member 6, the protruding portion 801 is provided with a first fastening hole 8011 in a penetrating manner, the filter member 6 is provided with a second fastening hole 602 at a position corresponding to the first fastening hole 8011, and one end of the fastening screw 12 is screwed into the second fastening hole 602 through the first fastening hole 8011. The projections 801 provide space for the assembly of the support plate 8 with the filter element 6 and facilitate the opening of the holes in the projections 801.

In other examples, the screen plate 7 and the air exhaust channel 4 are welded on the inner side wall between the air exhaust part 2 and the filter piece 6, the screen plate 7 is fixed in the air exhaust channel 4 in a welding mode, the screen plate 7 is not easy to loosen under the driving of air flow, and the reliability is high.

In another embodiment, referring to fig. 7, the mesh plate 7 includes a body 702 and a protruding column 703 protruding from the lower surface of the body 702 at an interval, the body 702 is provided with a plurality of first air holes 701 through the upper and lower surfaces, one end of the protruding column 703 is connected to the mesh plate 7, the other end extends toward the filter element 6, and the protruding column 703 is spaced from the top of the filter element 6. When the blocking member 10 moves to the lower surface of the mesh plate 7, the blocking member 10 abuts against the lower end of the projection, so that the blocking member 10 is prevented from abutting against the lower surface of the body 702 to block the first air hole 701, and a ventilation space is formed between the body 702 and the blocking member 10 when the blocking member 10 abuts against the lower surface of the mesh plate 7, thereby ensuring that the transition chamber 1 is quickly vacuumized.

Preferably, the protruding pillar 703 is made of an elastic material (e.g., elastic rubber, etc.), so that the protruding pillar 703 has a certain elastic deformation capability, and the blocking member 10 is prevented from being damaged.

In an embodiment, the blocking member 10 is connected to the inner wall of the first hole 6011 through the traction member 11, and the blocking member 10 is limited by the traction member 11, so that the blocking member 10 moves within a certain range, and thus the blocking member 10 cannot move to an area far away from the orifice of the first hole 6011 from the mesh plate 7 under the driving of the airflow, so that the blocking member 10 is convenient to reset.

Preferably, the pulling member 11 is an elastic member, one end of which is fixed to the blocking member 10 and the other end of which is fixed to the inner wall of the first hole 6011. In this example, the elastic member is a compression spring. The elastic component is the part that has certain elastic deformation ability, and when air exhaust component 2 bled, the air current drove to block piece 10 and shifted out the in-process that filters 6 tops, and the elastic component is elongated gradually, and the elastic force through the elastic component can cushion the removal that blocks piece 10, prevents to block the moving speed that piece 10 from crashing otter board 7.

In another example, the pulling element 11 may be a flexible pulling rope or the like.

In another embodiment, a guide 9 may be provided between the mesh plate 7 and the filter element 6, instead of the pulling element 11. Referring to fig. 9 and 10, guide holes 901 are formed through the upper and lower ends of the guide 9, and the guide holes 901 communicate with the first holes 6011 and the first air holes 701 of the mesh plate 7. The blocking piece 10 can move up and down in the guide hole 901, the guide hole 901 is in a horn shape, the small end part of the guide hole 901 is connected to the top of the first hole 6011, the large end part of the guide hole 901 is connected to the lower surface of the screen plate 7, when the air exhaust component 2 operates, the blocking piece 10 moves in the vertical direction under the action of air flow, the blocking piece 10 sequentially abuts against the screen plate 7 from the first hole 6011 through the small end part and the large end part of the guide hole 901 sequentially, after the air exhaust component 2 stops exhausting, the blocking piece 10 sequentially enters the blocking communicating opening in the first hole 6011 from the lower surface of the screen plate 7 through the large end part and the small end part of the first hole 6011 sequentially under the action of gravity, and the blocking piece 10 is enabled to reset smoothly.

In order to prevent the guide member 9 from blocking the airflow, the guide member 9 may be configured to be a hollow structure, so that the side wall of the guide hole 901 has a plurality of second air holes 902, and it is ensured that the airflow smoothly flows between the screen 7 and the filter 6.

With the long-term use of the filter member 6, the holes in the filter member 6 may be blocked, and in order to facilitate the removal and cleaning of the filter member 6 from the air suction passage 4, the filter member 6 is detachably disposed in the air suction passage 4 in practice.

In one embodiment, referring to fig. 2, the filtering member 6 is detachably disposed in the air exhaust passage 4 through a threaded structure, the side surface of the filtering member 6 is provided with an external thread 603, the inner side wall of the air exhaust passage 4 is provided with an internal thread, and the external thread 603 is screwed with the internal thread. Set up that the helicitic texture will filter 6 and can dismantle with the inside wall of pumping channel 4 and be connected, the equipment of being convenient for, and filter 6 and pumping channel 4's inside wall connection reliably.

In another embodiment, referring to fig. 3, a mounting plate 605 is disposed at the bottom of the filtering member 6, the mounting plate 605 protrudes toward the axis far away from the air exhaust channel 4, a first mounting hole 6051 is disposed through the mounting plate 605, a second mounting hole 606 is disposed at a position, close to the air exhaust channel 4, of the inner side wall of the transition chamber 1, and the mounting screw 13 passes through the first mounting hole 6051 and is screwed in the second mounting hole 606, so that the filtering member 6 with such a structure can also be detachably disposed in the air exhaust channel 4.

Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but may be manufactured in various forms, and those skilled in the art will appreciate that the present invention may be embodied in other specific forms without changing the technical spirit or essential features of the invention. It is therefore to be understood that the above described embodiments are illustrative and not restrictive in all respects.

Claims

1. A panel transition device, including the transition chamber that is used for holding the panel and be located the part of bleeding outside the transition chamber, the part of bleeding sets up the top of transition chamber, be used for right the transition chamber evacuation, the transition chamber through bleed passage with the part of bleeding communicates, its characterized in that, the inside filter that is provided with of bleed passage, filter the piece through being provided with the through-hole, the through-hole includes first hole and the second hole that communicates with first hole, first hole is located the top of second hole, just first hole intercommunication the top of filter the piece, the cross-sectional dimension of first hole is greater than the cross-sectional dimension of second hole, so that first hole with second jogged joint forms spacing step face, the inside of first hole is provided with and can block the piece of second hole, the size of stopping piece is less than first hole size, and the size of second hole is greater than the size of second hole, when stopping piece blocks the second hole, first hole with the transition chamber does not communicate, when the part, move along the vertical direction of bleeding to the part of bleeding makes filter piece communicate with the through-hole.

2. The panel transition apparatus according to claim 1, wherein a mesh plate is spaced above the filter member, and when the blocking member moves out above the filter member, the blocking member can abut against a lower surface of the mesh plate to limit the blocking member below the mesh plate.

3. The panel transition apparatus according to claim 2, wherein the through hole has a plurality of through holes, the plurality of through holes are spaced apart on the filter, the blocking member is disposed in the first hole of each of the through holes, the mesh plate covers all of the first holes, and adjacent two of the first holes are communicated with each other through a gas passage.

4. The panel transition apparatus of claim 2, further comprising a support plate surrounding a periphery of the mesh plate, an end of the support plate remote from the mesh plate being connected to the filter element.

5. The panel transition apparatus of claim 4, wherein the support plate is removably attached to the filter element by a fastener.

6. The panel transition apparatus according to claim 5, wherein the fastening member is a fastening screw, one end of the support plate, which is away from the mesh plate, is provided with a protruding portion protruding toward a side away from a center of the filter member, the protruding portion is provided with a first fastening hole therethrough, the filter member is provided with a second fastening hole at a position corresponding to the first fastening hole, and one end of the fastening screw is screwed into the second fastening hole through the first fastening hole.

7. The panel transition apparatus of any of claims 1 to 6, wherein the stop is a stop ball.

8. The panel transition apparatus of claim 2, wherein a guide member is disposed between the mesh plate and the filter member, wherein guide holes are disposed through upper and lower ends of the guide member, the guide holes are communicated with the first holes and the first air holes of the mesh plate, and the blocking member is movable up and down in the guide holes.

9. The panel transition apparatus of any one of claims 1 to 6, wherein the blocking member is connected to the inner wall of the first hole by a resilient member, one end of the resilient member being fixed to the blocking member and the other end being fixed to the inner wall of the first hole.

10. The panel transition apparatus of any of claims 1 to 6, wherein the filter element is removably disposed in the suction channel by a threaded arrangement, or the filter element is removably disposed in the suction channel by a screw.