JPH0982068A - Cleaning liquid removing equipment for disk - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance the removing power of a cleaning liquid by providing a liquid discharge passage communicating with the lower liquid discharge ports of a plurality of holding grooves for supporting a disc vertically and coupling the liquid discharge passage with a suction unit. SOLUTION: The cleaning liquid removing equipment 20 comprises a liquid discharge port 22 and a liquid discharge passage 23 independently for each holding groove 21 and a single suction unit 24 is provided for the collective passage 25 of all liquid discharge passages 23. The suction unit 24 is coupled with the lateral branch 25A of collective passage 25 and discharges air sucked through each holding groove 21. A cleaning liquid taken into the sucked air is separated gravitationally, in the collective passage 25, from the air flowing toward the lateral branch 25A and discharged downward through the lateral branch 25B of collective passage 25. More specifically, a suction force is applied from the suction unit 24 to a disc 1 supported vertically in the holding groove 21 and the residual cleaning liquid is removed perfectly from the surface of the disc.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning liquid removing device for a disk such as a magnetic disk.

[0002]

2. Description of the Related Art In the manufacturing process of a magnetic disk, a dip type cleaning liquid removing device or a spin type cleaning liquid removing device is used to remove the cleaning liquid remaining on the disk surface after cleaning the disk with a cleaning liquid.

The dip type cleaning liquid removing device cleans the disc with a detergent and warm water, and then removes the residual water (residual cleaning liquid) on the surface of the disc when the disc is pulled out of the cleaning tank.
Is intended to evaporate.

The spin type cleaning liquid removing device is a device for cleaning the disc with a detergent and a fountain and then centrifugally removing the residual water (remaining cleaning liquid) on the disc surface by centrifugal force generated by rotating the disc at a high speed. .

[0005]

However, the prior art has the following problems. Even if the dip method is applied to a disk having a strong affinity for the cleaning liquid (for example, a magnetic disk made of a glassy carbon substrate having a strong affinity for the cleaning water),
The cleaning solution cannot be removed sufficiently.

Although the spin method has a high cleaning liquid removing ability, it is difficult to simultaneously process a large number of disks.

SUMMARY OF THE INVENTION An object of the present invention is to provide a disk cleaning liquid removing device having a high cleaning liquid removing capability and capable of simultaneously processing a large number of disks.

[0008]

According to a first aspect of the present invention, in a disc cleaning liquid removing device for removing a cleaning liquid remaining on a surface of a disc, a plurality of holding grooves for vertically supporting the disc are provided in parallel. Then, the drainage passage is communicated with the lower drainage outlet of each holding groove, and the suction device is connected to the drainage passage.

According to a second aspect of the present invention, in addition to the first aspect of the present invention, the holding groove has both side wall portions for guiding both side portions of the outer end of the disk.

According to a third aspect of the present invention, in addition to the first or second aspect of the present invention, the disk is a glassy carbon magnetic disk.

According to the present invention, the following operational effects are obtained. By applying the suction force of the suction device to the disc vertically supported in the holding groove, the residual cleaning liquid on the disc surface can be reliably removed. Therefore, the cleaning liquid can be sufficiently removed even from a disk having a strong affinity with the cleaning liquid (for example, a magnetic disk made of a glassy carbon substrate having a strong affinity with the cleaning water).

By exerting the cleaning liquid removing action on a plurality of discs vertically supported in a plurality of holding grooves, a large number of discs can be simultaneously processed and the disc productivity can be improved.

The side wall provided in the holding groove plays an important role of removing the cleaning liquid. The higher the wall surface, the higher the suction air velocity, and the easier it is to remove the cleaning liquid.

[0014]

1 is a schematic diagram showing a cleaning liquid removing device, FIG. 2 is a sectional view taken along line II-II of FIG. 1, FIG. 3 is a plan view of FIG. 1, and FIG. 4 shows a disk cleaning flow. It is a schematic diagram.

In the manufacturing process of the magnetic disk 1, the cleaning equipment 10 as shown in FIG. 4 is used. In the cleaning equipment 10, the magnetic disk 1 is supplied by a loading device, and the ultrasonic cleaning tank 11, the detergent tank 12, the shower tank 13,
The ultrasonic rinse tank 14 and the rinse tank 15 are sequentially cleaned. After the cleaning liquid remaining on the surface of the magnetic disk 1 after cleaning is removed by the cleaning liquid removing device 20,
It is discharged by the unloading device.

At this time, various cleaning liquids such as water and alcohol can be used as the cleaning liquid used in the rinse tank 15 which is the final cleaning tank of the cleaning equipment 10 and remaining on the surface of the magnetic disk 1. However, if the magnetic disk 1 is made of, for example, a glassy carbon (GC) substrate and a chemical liquid such as alcohol cannot be used as a cleaning liquid to prevent carbon modification, water will be used.

The structure of the cleaning liquid removing device 20 will be described below. As shown in FIGS. 1 to 3, the cleaning liquid removing device 20 has a plurality of holding grooves 21 arranged in parallel for vertically supporting the magnetic disk 1, and a drainage path 23 is provided at a lower drainage port 22 of each holding groove 21. And a suction device 24 such as a suction blower is connected to the drainage path 23. The holding groove 21 has both side wall portions 21 </ b> A that guide both outer end portions of the magnetic disk 1. The side wall portion 21A plays an important role of removing the cleaning liquid.
The higher the wall surface, the higher the suction air velocity, and the easier it is to remove the cleaning liquid. The drainage port 22 has an opening length L smaller than the diameter of the magnetic disk 1 and an opening width b smaller than the plate thickness a of the magnetic disk 1.

As a result, the cleaning liquid removing device 20 applies the suctioned air of the suction device 24 to the surface of the magnetic disk 1 in the holding groove 21 from the liquid discharge path 23 and the liquid discharge port 22 to remove the surface residual cleaning liquid of the magnetic disk 1. Take in this suction air and vacuum dry.

In the cleaning liquid removing device 20, each holding groove 21 is provided with an independent drainage port 22 and drainage passage 23, and a single suction device 24 is provided in the collecting passage 25 of all the drainage passages 23. (However, a plurality of independent suction devices 24 may be provided for each holding groove 21). The suction device 24 is connected to the lateral branch passage 25A of the collecting passage 25 and is connected to each holding groove 2
The air sucked from 1 is exhausted. The cleaning liquid taken into the suctioned air is separated by the action of gravity from the air toward the laterally extending branch passage 25A in the collecting passage 25, and is dropped and discharged from the vertically extending branch passage 25B of the collecting passage 25.

The operation and effect of this embodiment will be described below. By applying the suction force of the suction device 24 to the disc 1 vertically supported in the holding groove 21, the residual cleaning liquid on the disc surface can be reliably removed. Therefore, the cleaning liquid can be sufficiently removed also from the disk 1 having a strong affinity with the cleaning liquid (for example, the magnetic disk made of a glassy carbon substrate having a strong affinity with the cleaning water).

By exerting the cleaning liquid removing action on the plurality of discs 1 vertically supported in the plurality of holding grooves 21, a large number of discs can be simultaneously processed and the productivity of the discs 1 can be improved.

The side wall portion 21A of the holding groove 21 plays an important role of removing the cleaning liquid. The higher the wall surface, the higher the suction air velocity, and the easier it is to remove the cleaning liquid.

[0023]

EXAMPLE A cleaning liquid removing device 20 shown in FIGS.
It was used to remove the cleaning liquid from the magnetic disk 1 made of a GC substrate. The size of this magnetic disk 1 is 1.89 inches (outer diameter 48
mm, inner diameter 12 mm, plate thickness 0.635 mm). As a result, it was confirmed that the residual cleaning liquid (water) on the surface of the magnetic disk 1 can be sufficiently removed in a short time by simultaneously processing a large number of sheets.

The embodiment of the present invention has been described in detail above with reference to the drawings. However, the specific configuration of the present invention is not limited to this embodiment, and changes in design within the scope not departing from the gist of the present invention can be made. Even if it exists, it is included in the present invention. For example, the magnetic disk to which the present invention is applied is not limited to one made of a GC substrate, but made of tempered glass, crystallized glass, aluminum and aluminum alloys, titanium and titanium alloys, ceramics, resins, or composite materials thereof. It can also be applied to things. The present invention can also be used to remove the cleaning liquid from disks other than magnetic disks.

[0025]

As described above, according to the present invention, in the disc cleaning liquid removing device, the cleaning liquid removing ability is high,
Moreover, it is possible to simultaneously process a large number of sheets.

[Brief description of drawings]

FIG. 1 is a schematic view showing a cleaning liquid removing device.

FIG. 2 is a sectional view taken along the line II-II of FIG.

FIG. 3 is a plan view of FIG. 1;

FIG. 4 is a schematic diagram showing a disc cleaning flow.

[Explanation of symbols]

 1 Disc 20 Cleaning Liquid Removal Device 21 Holding Groove 21A Side Wall 22 Drain Port 23 Drain Channel 24 Suction Device

Claims (3)

[Claims] 1. A disc cleaning liquid removing device for removing a cleaning liquid remaining on the surface of a disc, wherein a plurality of holding grooves for vertically supporting the disc are provided in parallel.
A disc cleaning liquid removing device, characterized in that a drainage channel is connected to a lower drainage port of each holding groove, and a suction device is connected to the drainage channel. 2. The cleaning liquid removing apparatus according to claim 1, wherein the holding groove has both side wall portions that guide both outer end portions of the disc. 3. The disk cleaning liquid removing apparatus according to claim 1, wherein the disk is a glassy carbon magnetic disk.