JPH11226872A - Magnetic disk cleaning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform minute adjustment in a short time by chucking and rotating a magnetic disk after grinding by a spindle, blowing air on the magnetic disk by an air nozzle, and providing a vacuum part suctioning air blown on the magnetic disk by this air nozzle. SOLUTION: A magnetic disk 1 is chucked on a spindle 2 which is rotated and driven. An air means 5 having an air nozzle 3 and a vacuum part 4 is arranged on both faces of the magnetic disk 1, respectively. A blow-out port 6 of the air nozzle 3 is directed in such a way that the air 7 blown out from the air blow-out port 6 hits on the magnetic disk 1 and flows into the vacuum part 4. When the air 7 is blown on the magnetic disk 1 from the air nozzle 3 while rotating the spindle 2, a particle 8 adhered on the magnetic disk 1 is blown off by the air 7 and is vacuum-suctioned by the vacuum part 4.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a magnetic disk cleaning device.

[0002]

2. Description of the Related Art Magnetic disks need to be cleaned because particles such as abrasive powder are re-attached by polishing. Conventionally, a wiping device or a cleaning device has been used as a cleaning device.

[0003]

In the wiping apparatus, since the wiping tape is brought into contact with the magnetic disk by the roller, adjustment for bringing the roller into contact with the magnetic disk in parallel and at a uniform pressure is very difficult. And it takes a lot of adjustment time, and cannot satisfy delicate processing conditions. Further, since the mass of the roller is large, the ability of the roller to follow the runout of the magnetic disk is a problem.

[0004] The cleaning device is performed with the magnetic disk in a wet state, and requires ancillary equipment for using pure water or alcohol and a subsequent drying device, which increases the cost of the device and increases the number of steps.

An object of the present invention is to provide a magnetic disk cleaning apparatus which can perform fine adjustment in a short time and does not increase equipment costs and steps.

[0006]

Means for solving the above-mentioned problems include a spindle which chucks and rotates a polished magnetic disk, an air nozzle which blows air to the magnetic disk, and an air nozzle A vacuum unit for sucking air blown to the magnetic disk.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described with reference to FIGS. The magnetic disk 1 is chucked by a spindle 2 that is driven to rotate. On both surfaces of the magnetic disk 1, air means 5 having an air nozzle 3 and a vacuum part 4 are provided. Here, the air outlet 6 of the air nozzle 3 is oriented such that the air 7 blown out from the air outlet 6 hits the magnetic disk 1 and flows to the vacuum section 4. The air nozzle 3 is connected to an air supply source (not shown), and the vacuum unit 4 is connected to a vacuum source (not shown).

Next, the operation will be described. Spindle 2
When the air 7 is blown from the air nozzle 3 onto the magnetic disk 1 while rotating the magnetic disk 1, the particles 8 attached to the magnetic disk 1 are blown off by the air 7, and the particles 8 are vacuum-sucked by the vacuum unit 4.

As described above, since the magnetic disk 1 is cleaned by blowing out the air 7 from the air nozzle 3, fine adjustment can be easily performed by controlling the flow rate of the air 7. Further, since an air supply source and a vacuum source which are permanently installed in the factory can be used, the equipment cost does not increase and the number of processes does not increase.

[0010]

According to the present invention, a spindle which chucks and rotates a polished magnetic disk, an air nozzle which blows air onto the magnetic disk, and sucks air blown from the air nozzle onto the magnetic disk. Since it is configured with a vacuum section, fine adjustment can be performed in a short time, and equipment costs and steps do not increase.

[Brief description of the drawings]

FIG. 1 is a front view of an essential part showing an embodiment of a magnetic disk cleaning device of the present invention.

FIG. 2 is a right side view shown in FIG.

FIG. 3 is a front view of the air means.

FIG. 4 is an explanatory diagram showing a cleaning state of a magnetic disk.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Magnetic disk 2 Spindle 3 Air nozzle 4 Vacuum part 7 Air

Claims (1)

[Claims] An air nozzle for blowing air onto the magnetic disk; and a vacuum unit for sucking air blown from the air nozzle onto the magnetic disk. A magnetic disk cleaning device characterized by the above-mentioned.