JPH0977566A - Capsule for isotropic pressurizing treatment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain such a foil capsule for isotropic pressurizing treatment that fracture of foils due to strain during the initial deformation can be prevented and a body to be treated in the capsule can be preferentially and selectively deformed, by forming the foil capsule comprising a double-sealed capsule. SOLUTION: A body 3 to be treated such as a ceramic material, metal or resin is housed in metal foils 1, 2 having 30-300μm thickness, and the metal foils 1, 2 are laminated and welded 6 to obtain a sealed capsule 7. Further, another metal foil 8 is laminated and welded 9 on the metal foils 1, 2 which constitute the capsule. In this case, each metal foil 1, 2, 8 has preferably 30-300μm thickness, and moreover, the metal foil 8 is preferably laminated on both outer surfaces of the metal foils 1, 2.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to powders or powder compacts of ceramics, metals or resins, that is,
It is used to apply high pressure fluid pressure at high temperature to produce a high density sintered body, or to apply high pressure fluid pressure at high temperature to perform diffusion bonding of two or more kinds of materials. The present invention relates to a capsule for isotropic pressure treatment used in a hot isostatic pressing method (HIP method), a warm isostatic pressing method (WIP method) and the like.

[0002]

2. Description of the Related Art The HIP method and the WIP method are compression molding processes using a high pressure fluid of several hundreds to several thousands kgf / cm ² as a pressure medium at a high temperature. It has characteristics such as high pressure value and isotropic compression, and is a technology that has rapidly spread in recent years as a high-density sintering technology for powder materials that are difficult to process or solid-phase diffusion bonding technology. is there.

As the capsule for this isotropic pressure application, for example, JP-A-47-16308 and JP-A-57-11.
There is a so-called metal capsule disclosed in Japanese Patent No. 6702. Since this metal capsule had a sufficient thickness of the capsule, it could be HIP-treated with almost no damage at the time of HIP, but it took time to remove the capsule and due to the rigidity of the capsule itself, There were problems such as deformation of the product and cracking of the product itself.

Therefore, the applicant of the present application has filed Japanese Patent Application Laid-Open No. 4-99920.
No. 7 proposed a foil capsule for isotropic pressure pressurization treatment composed of a metal foil having a thickness of 30 μm to 300 μm, and succeeded in solving the problems of the metal capsule.

[0005]

However, this foil capsule (Japanese Unexamined Patent Publication No. 4-99207) has a problem in that, in the HIP process, due to distortion of the welded portion caused at the initial deformation due to lap welding of one metal foil and the like. Due to the strain of the welded portion due to the initial deformation (wrinkle) of the foil capsule due to the pressure, that portion may be damaged during further deformation during the HIP treatment. As a result, there is a possibility that productivity may decrease due to a decrease in yield.

Therefore, according to the present invention, by forming the foil capsule into a double capsule, it is possible to prevent the foil from being damaged due to the strain at the initial deformation, and preferentially select the deformation in the object to be treated in the capsule. It is an object to provide a capsule for isotropic pressure application processing that can be performed.

[0007]

According to the present invention, an object to be treated 3 made of ceramics, metal, resin or the like is provided in an amount of 30 μm to 3 μm.
A capsule which is housed in metal foils 1 and 2 having a thickness of 00 μm and is sealed by lap welding 6 of the metal foils 1 and 2. I am taking steps.

That is, the present invention is characterized in that a metal foil 8 different from the metal foils 1 and 2 is lap-welded 9 on the metal foils 1 and 2 constituting the capsule. . Further, in the present invention, it is desirable that the thickness of the metal foils 1, 2 and 8 is 30 μm to 300 μm, and further, that the other metal foil 8 is the metal foils 1 and 2 constituting the capsule. It is desirable to carry out lap welding on both outer surfaces.

Further, the metal foil 1 constituting the capsule,
2 lap welding 6 parts and lap welding 9 of the other metal foil 8
It is advantageous that the site and the site differ from each other in the outer peripheral area of the object 3 in terms of ensuring the encapsulation. Further, when at least one of the metal foils 1 and 2 forming the capsule has the storage recess 5 for the target 3, the position of the target is surely determined, and the plurality of storage recesses 5 are provided. As a result, one foil capsule can position and pressurize a plurality of objects to be processed.

According to the present invention, since the processing of the foil capsule can be surely performed, the yield can be improved, the cost can be reduced, and the resources can be effectively used. In addition, since the deformed part of the molded object can be selected preferentially, near net molding (post-processing can be reduced as much as possible) in consideration of post-processing of the molded object can be performed. Production efficiency is improved and cost can be reduced.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Some embodiments of the present invention will be described below with reference to the drawings. (Embodiment 1) FIG. 1 shows a series of HIP processing by a hot isostatic pressing (HIP) apparatus using the method for producing a foil capsule 4 according to a first embodiment of the present invention and the foil capsule 4. Is shown.

In FIG. 1, one of two metal foils 1 and 2 shown by a stainless steel foil having a plate thickness of 100 μm, in the figure, the metal foil 1 is drawn to form a recess 5 for accommodating an object 3 to be processed.
Is formed. In the present embodiment, the draw forming is performed by setting the flat metal foil 2 in a mold and using a pressing device.

Then, the object to be treated 3 represented by an alumina-based ceramics powder body of 154 mm square and 5 mm thick is fitted and housed in the housing recess 5, and the flat metal foil 1 is incorporated on the metal foil 2. After placing it on a turntable in a vacuum chamber and performing vacuuming at a vacuum degree of about 10 ^-3 Torr, while rotating the turntable, the metal foils 1 and 2 are vacuumed by seam welding which is a kind of resistance welding. The foil capsule 7 is manufactured by lap welding 6 and the thickness of 100 μm is provided on the outside of the foil capsule 7, that is, on the flat metal foil 1 in the embodiment.
By overlapping another metal foil 8 indicated by a stainless steel foil of m, and lap-welding 9 the flange portion 1A of the metal foil 1 and the other metal foil 8 at a position outside the lap-welding 6 portion, double welding is performed. Capsule 10 is used.

The lap welding 9 is preferably carried out in a vacuum chamber, but it can also be carried out outside the vacuum chamber. Ten double capsules 10 configured as described above are stacked and set in a HIP device 11, and a weight 12 indicated by a mild steel color disc is placed on the top to prevent deformation. , HIP temperature:
HIP treatment was carried out at 1020 ° C. and HIP pressure: 1500 kgf / cm ² for 2 hours.

The capsule (appearance condition) after HIP molding is
It was deformed uniformly in the axial direction and the radial direction. All 10 capsules had no damaged parts in appearance. After the HIP treatment, the foil capsules 10 were removed with the gold-cutting scissors 12 and the molded products were taken out. As a result, all 10 products had a predetermined shape and density and were free from internal defects.

(Embodiment 2) In FIG. 2, metal foils 1 and 2 shown as two stainless steel foils having a thickness of 100 μm are used as raw materials, and three sides thereof are seam resistance welded to have a width of 100.
An envelope-shaped bag 15 having a length of mm and a length of 150 mm and an opening portion 14 at one end was formed. Welding conditions are current 1000A,
The pressure was 50 kg and the welding speed was 1 m / min.

After inserting the object 3 to be processed, which is a TbFeCo molded body having a relative density of 65%, into the bag 15 from the opening portion 14, the bag 15 is placed on a work table in a vacuum chamber having a vacuum degree of about 10 ^-3 Torr. Set, and after vacuuming, the opening 14 side is lap-welded 6 in vacuum using a seam welding machine to manufacture a foil capsule 7, and the metal foil 1 is formed on both outer surfaces of the foil capsule 7. Larger than 2 and 100μ thick
A double capsule 10 was manufactured by stacking two sheets of another metal foil 8 represented by a stainless steel foil of m, and laminating and welding 9 of the four circumferences.

The double capsule 10 is attached to the HIP device 11
HIP with a pressure of about 10 kgf / cm ²
After the gas in the processing chamber of the apparatus 11 was replaced with a gas, the temperature was raised to 800 ° C. in vacuum and the temperature was held for 1 hour to perform heat treatment.
In this heat treatment, pressure is applied once, so foil capsule 1
0 was in a state of being sufficiently adapted to the surface of the object to be treated 3, and the wrinkle portion of the foil capsule 10 was softened by the subsequent vacuum temperature rise.

Following the above heat treatment, the same HIP
Temperature: 860 ° C, pressure: 2000 kgf / cm in the device
The HIP treatment for 2 hours was carried out under ^2. After the HIP molding, there were small wrinkles on the foil capsule, but the foil capsule shrank to a shape similar to that of the object to be treated. After the HIP treatment, the foil capsule 10 was removed with the gold scissors 12 and the object 3 to be treated was taken out, whereby the relative density could be increased to 99.5%.

(Embodiment 3) In FIG. 3, thickness 1
A storage recess 5 is formed by draw forming on one of the two metal foils 1 and 2 shown as a 00 μm stainless steel foil in the same manner as in Example 1, and the metal foils 1 and 2 are heat treated in a vacuum in a combined state. This heat treatment condition is 1050 ° C x 1
Minute (vacuum degree: 10 ^-3 Torr), heating rate 400 ° C /
h (room temperature to 900 ° C), 50 ° C / h (900 to 1050)
The cooling rate was furnace cooling.

A draw-formed foil produced through the above steps and a stainless foil are combined into a set, and an oxygen-based gettering material is formed between the foil and a Ta-foil-shaped capsule formed of an alumina ceramic powder compact (200 mmφ × 5 t). The molded body 3 shown was inserted and set in the storage recess 5. This Ta
The foil is a getter material, and in order to have airtightness as a capsule, the foil (vacuum 10
^After evacuating the capsule by placing it on a turntable at about ^-3 Torr), the foil capsule was welded in vacuum by seam welding, which is a type of resistance welding, while rotating the turntable.

As described above, it was possible to improve the reliability of the welded portion (improve the yield in the HIP process) by increasing the number of welded portions to two portions, that is, between the stainless foils and between the Ta foils. HIP the double capsule manufactured as above
And set loaded in the apparatus, the capsule in a HIP apparatus, 2 in the processing conditions of 950 ℃ x2000kgf / cm ²
HIP treatment was carried out for an hour.

Regarding the appearance of the capsule after HIP molding, the capsule was especially deformed in the axial direction and was also deformed in the radial direction. In addition, there was no damaged part in the appearance of the capsule itself. H
After the IP treatment, the foil capsule was subjected to removal processing with gold scissors. The alumina-based ceramic molded body was a product having a predetermined shape and density and having no internal defects.

(Embodiment 4) Thickness 10 in FIG.
One of the 0 μm stainless steel foils 1 and 2 was drawn by a press molding machine to form a housing recess 5, and the foils 1 and 2 were combined and heat-treated in a vacuum. This heat treatment condition is 1100 ° C. × 1 minute (vacuum degree: 10 ⁻³ Torr)
At a heating rate of 400 ° C / h (room temperature to 900 ° C), 50 ° C
/ H (1000 to 1100 ° C) The cooling rate was furnace cooling.

A metal-based sintered body (154) is formed by combining a draw-formed foil manufactured through the above steps and a stainless steel foil as a set.
mmφ × 5t) was set in a foil capsule. After placing the capsule on a turntable in a vacuum chamber (vacuum of about 10 ⁻³ Torr) to evacuate the capsule, the foil capsule is vacuumed by seam welding which is a kind of resistance welding while rotating the turntable. Welded 6 inside.

Furthermore, two flat stainless foils 8 were added and lap welded 9. As a result, the thickness of the capsule was 100 μm on the uneven surface. Flat surface is 300 μm
Due to this change in thickness, the deformation was preferentially advanced from the portion in contact with the uneven surface of the molded body, and the flat surface could be secured as it was in the portion in contact with the flat surface of the molded body.

Double-foil capsule 10 manufactured as described above.
5 pieces were set in a special case 16 made of mild steel, and the cases were stacked in three stages and set in the HIP device 11. This capsule is HIPed in the HIP device under the following processing conditions.
The treatment was carried out. (HIP treatment condition: 860 ° C x 1500 kgf / cm ²
x2h) The capsule (appearance condition) after HIP molding was uniformly deformed in the axial direction and the radial direction. All 15 capsules had no damaged parts in appearance.

Further, since five foil capsules are housed in each case, there is no drop of the capsule due to deformation of the capsule, and there is no influence such as cracks or cracks on the product. After the HIP treatment, the foil capsules were removed and processed with gold scissors. All of the 15 metal-based sintered bodies were products without internal defects that could secure a predetermined shape and density.

(Embodiment 5) As shown in FIG. 5, two stainless foils 1 and 2 each having a thickness of 50 μm are used as materials, and three sides thereof are 100 m wide by seam resistance welding 13.
An envelope-shaped bag portion 15 having a length of 100 mm was formed, and an object to be processed 3 represented by a piezoelectric ceramics molded body having a relative density of 90% was inserted from an opening 14 of the bag portion 15.

The bag portion 15 is placed in a vacuum chamber (vacuum 1
After setting the work table at about 0 ^-3 Torr) to evacuate the inside of the bag portion 15, the opening 14 side was welded 6 in a vacuum by a seam welding machine. Furthermore, the thickness of the two sheets is 100μ each
A double-capsule 10 was prepared by seam resistance welding using a stainless steel foil of m as a material to form an envelope having a width of 150 mm and a length of 150 mm. The welding conditions are the same as in the second embodiment.

After arranging the capsules 10 on a jig for setting, put the jig together with the jig into a HIP device and set the maximum pressure to 1
After the gas was replaced while limiting to 0 kgf / cm ² , 1
The vacuum temperature was raised to 050 ° C. With a pressure of about 10 kgf / cm ² , the capsule was brought into a state in which it was sufficiently conformed to the surface of the molded body. At this time, the foil was wrinkled and partially hardened, but thereafter, the foil itself was solution-treated by raising the temperature to 1050 ° C. in a vacuum.

Following the above heat treatment, the capsules were
Pressure of 1000kgf / cm ², Temperature 1150
The temperature was raised to ° C. The processing conditions at that time are shown below. 1150 ° C x 1000kgf / cm²After xlh HIP molding, the capsule had small wrinkles,
It shrank to a similar shape to the processed product.

After the HIP treatment, the foil capsule was removed with gold scissors, and the relative density of the piezoelectric ceramic compact could be increased to 99.9%. (Embodiment 6) In FIG. 6, both of two metal foils 1 and 2 shown by a titanium foil having a thickness of 125 μm are set in a mold, and a recess 5 is formed in both by foil forming using a pressing device. Formed.

The draw-formed titanium foil was heat-treated in vacuum. This heat treatment condition is 700 ° C. × 1 minute (vacuum degree;
10 ^-3 Torr, heating rate 400 ° C./h (room temperature to 7)
The cooling rate was furnace cooling. A combination of two powder-formed titanium foils (200mmφx5t) made of a titanium alloy compound and a spacer 17 of a BN molded body made of 198φx3mm discs (two upper and lower) by combining two drawn titanium foils produced through the above steps. Then, set it in a foil capsule.

This capsule is placed in a vacuum chamber (vacuum 1
The capsule was evacuated by placing it on a turntable at 0 ^-3 Torr), and then the foil capsule was welded 6 in vacuum by seam welding, which is a kind of resistance welding, while rotating the turntable. Prepare another set of two draw-formed titanium foils manufactured through the above process, and put the titanium disk (upper and lower 2
It was set in a foil capsule in a configuration in which the number of sheets) was added. Thereafter, the double capsule 10 was welded in the same manner as above.

Each of the above-mentioned double capsules was set in 10 shelves, and each of the shelves was carried into the HIP device. This capsule is 930 ℃ × 2000kg in the HIP device.
HIP processing was implemented on the processing conditions of f / cm < ² > x1h.
The capsule (appearance condition) after HIP molding was particularly deformed in the axial direction and was also deformed in the radial direction. In addition, there was no damaged part in the appearance of the capsule itself.

After the HIP treatment, the foil capsules were removed and processed with gold scissors. The titanium alloy molded body was a product having a predetermined shape and density and having no internal defects. (Embodiment 7) In FIG. 7, 12 recesses 5 are formed in one of the metal foils 1 and 2 shown as a stainless steel foil having a thickness of 100 μm, and the recesses 5 are formed of piezoelectric ceramic molded bodies having a relative density of 90%. The object to be treated 3 shown in the figure was housed, set on a workbench in a vacuum chamber (vacuum of about 10 ⁻³ Torr) and evacuated, and then all-around welding 6 was performed by a seam welding machine in the vacuum chamber. Further, a 100 μm stainless steel foil was welded 9 from the outside of the flat foil 1 to form a double capsule 10. By adopting this double capsule, the breakage rate of the capsule was reduced and the deformation from the uneven surface was prioritized.

After setting 10 capsules of the above-mentioned double capsules on a set jig with a shelf, the set jig was carried into the HIP device together with the maximum pressure of 5 kgf / cm ² , and after gas replacement. The capsules were sufficiently acclimated to the surface of the molded body by raising the temperature to 1050 ° C. in vacuum and applying a pressure of about 5 kgf / cm ² . At this time, the foil had wrinkles and was partially cured, but thereafter, the foil itself was subjected to solution treatment by heating at 1050 ° C. in a vacuum.

Subsequent to the heat treatment of the capsule, the pressure was raised to a predetermined temperature of 1000 kgf / cm ^{2 up} to 1100 ° C., and the temperature was 1100 ° C. × 1000 kgf / cm ² × ² h.
HIP processing was carried out under the processing conditions of. After the HIP molding, the capsule had small wrinkles on each product, but it shrank well to a similar shape to the treated product. After the HIP process, the relative density of the piezoelectric ceramic molded body that was taken out by removing the foil capsule with gold-cutting scissors and was taken out could be increased to 99.9%.

(Embodiment 8) In FIG. 8, thickness 1
One of two stainless steel foils having a thickness of 00 μm is drawn and prepared. The molding of this stainless steel foil is
After being set in a mold, a large number of draw-formed products were formed using a press molding machine. This draw-formed stainless steel foil was heat-treated in vacuum. This heat treatment condition is 800 ° C x 5 minutes (in air)
Temperature rising rate 400 ° C / h (room temperature to 700 ° C), 50 ° C / h
(700 to 800 ° C.) The cooling rate was furnace cooling.

The foil 3 produced by the above steps and the stainless foil were combined into a set, and the object 3 to be treated represented by metal powder was filled in the foil capsule. The capsule was placed on a turntable, and was welded 6 by seam welding with the rotation of the turntable while leaving a part. The capsule is placed in a vacuum chamber (vacuum is about 10 ^-3 Torr)
Then, it was put on the turntable and the inside of the capsule was evacuated. The vacuum deaeration at this time started vacuuming while first narrowing the route to the vacuum chamber in order to prevent the powder from blowing out. Further, in order to positively remove water and the like contained in the powder, the capsule was deaerated while heating the heater attached to the turntable to 200 ° C.

As a result, it was possible to perform degassing by heating without ejecting the powder outside the capsule. After that, the remaining portion was welded. Further, one set of draw forming / flat foil was prepared, and ordinary welding 9 was carried out to obtain a double capsule 10. As a result, the damage rate of the capsule due to the subsequent HIP treatment is 0.5% compared to 2% when the conventional single capsule is adopted.
Reduced to

Five of the double-foil capsules 10 are set in a special case made of mild steel, and the cases are stacked in three stages to form H.
It was set in the IP device. The capsules in the HIP apparatus, 2 in the processing conditions of 860 ℃ x1500kgf / cm ²
HIP treatment was carried out for an hour. The capsule (appearance condition) after HIP molding was uniformly deformed in the axial direction and the radial direction. All 15 capsules had no damaged parts in appearance. In addition, since 5 foil capsules are stored in each case, there is no drop of the capsule due to deformation of the capsule, and there is no crack in the product due to it.
There was no effect such as cracks.

After the HIP treatment, the foil capsules were removed with gold-cutting scissors and taken out. As a result, all 15 of the metal-based sintered bodies were products without internal defects, which had a predetermined shape and density. . (Failure example 1) 150m wide by seam resistance welding, using two stainless steel foils each with a thickness of 100 μm
It was formed in an envelope shape having a length of 150 mm. The welding conditions were the same as in Example 2.

The foil capsules were set to have a relative density of 9
A 0% piezoelectric ceramic compact was prepared. The capsule was set on a workbench in a vacuum chamber (vacuum of about 10 ⁻³ Torr) to evacuate the capsule, and then welded in a vacuum with a seam welder to produce a single capsule.

The above capsules were placed in a HIP device, and while the maximum pressure was limited to 10 kgf / cm ² , the gas was replaced, and then the temperature was raised simultaneously. The processing conditions at that time are shown below. After the HIP molding at 1150 ° C. × 1000 kgf / cm ² × 1h, the capsule had many small wrinkles, of which there was a broken portion in the vicinity of the weld.

After the HIP treatment, the foil capsule was removed with gold-cutting scissors and taken out. The relative density of the piezoelectric ceramic molded body was about 92%, and the density was not sufficiently improved. I couldn't keep it airtight. (2 of failure example) Cylindrical diameter 150φ, height 200m
A capsule of about m (thickness 1 mm) was prepared, and a metal sintered body 148φ × 5 mm was set in a laminated state with an alumina spacer.

An airtight capsule obtained by electron beam welding the above capsule was secured. Here, since the electron beam welding is carried out in a vacuum chamber, the inside of the capsule was kept vacuum during welding. Load the capsule into the HIP device and
² under HIP treatment conditions of 50 ° C x 1000 kgf / cm 2
HIPed for hours.

After the HIP treatment, the capsule was removed and the product was taken out. The position of the product in the capsule was not clear only after contraction from the outer surface of the capsule. Therefore, it took time to remove the capsule. , The product was partially damaged during the capsule removal process. In addition, the amount of deformation of the product was large due to the influence of the rigidity of the capsule, which required post-processing of the product itself.

In the present invention, the target processing material can be applied to various kinds of materials such as metal (sintered body) and ceramics (sintered body), and composite materials in general. The target shape is a thin molded product. Since it mainly uses (disks, square plates, etc.), products with high added value such as sputtering targets will be the main targets. In this method for producing a metal sintered body and a ceramics sintered body, 1) a molding temperature, a molding pressure corresponding to each metal powder (material),
Optimizing the HIP processing condition consisting of holding time 2) Selecting the optimum capsule material (metal material) 3) Selecting the material of the template material used as a spacer 4) Selecting the capsule thickness 5) Setting the heat treatment temperature etc. is important Becomes

Further, the capsule material is selected based on the HIP treatment temperature of the metal powder of each treatment material and the one capable of ensuring sufficient elongation at that temperature in accordance with the compatibility with the treatment material. Further, the material for the template material used as the spacer is selected based on the following items.

Products that do not react with metal powder, ceramic powder compacts, etc. Products and foil capsules as templates (sufficient templates) Those that sufficiently convey pressure medium such as gas during HIP processing The range is 30 μm to 300 μm
It is necessary to If the thickness is less than 30 μm, there are problems such as airtightness of the foil itself and damage during handling.

If the thickness exceeds 300 μm, the merit due to the original rigidity of the foil being small (the ease of removing the capsule and the small effect of the rigidity on the product) is reduced. Furthermore, problems such as damage due to surface hardening are reduced, and the effect of heat treatment is almost unnecessary.

The thickness of 40 μm to 200 μm is preferable because the foil capsule can be easily deformed and the strain treatment due to the heat treatment can be expected. Furthermore, 50 μm to 150 μm is more preferable, and particularly 70 μm to 100 μm is most effective in production efficiency due to the above effect. The capsule selection method when partially forming a plurality of capsules is determined in consideration of the shape of the molded body, the deformation process, and the like.

[0055]

According to the present invention described in detail above, reliable processing is possible, cost reduction can be expected, yield can be improved, and resources can be effectively used. In addition, since the deformed portion of the object to be processed can be preferentially selected, near net molding can be performed in consideration of the post-processing, and the post-processing time is shortened, so that the production efficiency is improved.

[Brief description of drawings]

FIG. 1 is a process drawing of a first embodiment of the present invention.

FIG. 2 is a process drawing of the second embodiment of the present invention.

FIG. 3 is a process drawing of the third embodiment of the present invention.

FIG. 4 is a process drawing of the fourth embodiment of the present invention.

FIG. 5 is a process drawing of the fifth embodiment of the present invention.

FIG. 6 is a process drawing of the sixth embodiment of the present invention.

FIG. 7 is a process drawing of the seventh embodiment of the present invention.

FIG. 8 is a process drawing of the eighth embodiment of the present invention.

[Explanation of symbols]

 1 Metal Foil 2 Metal Foil 3 Object 6 Lap Welding 8 Another Metal Foil 9 Another Lap Welding

Claims (6)

[Claims] 1. An object to be treated (3) such as ceramics, metal or resin is housed in metal foils (1) and (2) having a thickness of 30 μm to 300 μm, and the metal foils (1) and (2) are attached. A capsule encapsulated by lap welding (6), the metal foil (1) (2) being different from the metal foil (1) and (2) constituting the capsule. ) Is lap-welded (9), and a capsule for isotropic pressure application processing is characterized. 2. The capsule for isotropic pressure treatment according to claim 1, wherein the metal foils (1), (2) and (8) have a thickness of 30 μm to 300 μm. 3. The metal foil (8) according to claim 1, wherein the other metal foil (8) is lap-welded on both outer surfaces of the metal foils (1) and (2) constituting the capsule. Capsule for isotropic pressure application. 4. A metal foil (1) constituting the capsule.
The lap welding (6) part of (2) and the other metal foil (8)
The lap welding (9) part of the above is different from the inside and outside in the outer peripheral area of the object (3) to be processed.
The capsule for isotropic pressure application according to any one of 1. 5. A metal foil (1) constituting the capsule.
At least one of (2) has a storage recess (5) for the object (3) to be treated, The capsule for isotropic pressure treatment according to any one of claims 1 to 4, . 6. The capsule for isotropic pressure treatment according to claim 5, wherein a plurality of the storage recesses (5) are provided.