JPH09512326A - 外部から加圧されるベアリング・アセンブリの製造方法 - Google Patents
外部から加圧されるベアリング・アセンブリの製造方法Info
- Publication number
- JPH09512326A JPH09512326A JP7523342A JP52334295A JPH09512326A JP H09512326 A JPH09512326 A JP H09512326A JP 7523342 A JP7523342 A JP 7523342A JP 52334295 A JP52334295 A JP 52334295A JP H09512326 A JPH09512326 A JP H09512326A
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- carriage
- rails
- housing
- pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title abstract description 13
- 239000004593 Epoxy Substances 0.000 claims abstract description 28
- 239000012530 fluid Substances 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims description 17
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims 1
- 239000010687 lubricating oil Substances 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 5
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000000712 assembly Effects 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
- 230000002706 hydrostatic effect Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 239000012267 brine Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000004382 potting Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- HPALAKNZSZLMCH-UHFFFAOYSA-M sodium;chloride;hydrate Chemical compound O.[Na+].[Cl-] HPALAKNZSZLMCH-UHFFFAOYSA-M 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2322/00—Apparatus used in shaping articles
- F16C2322/39—General buildup of machine tools, e.g. spindles, slides, actuators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49636—Process for making bearing or component thereof
- Y10T29/49639—Fluid bearing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49636—Process for making bearing or component thereof
- Y10T29/49641—Linear bearing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49826—Assembling or joining
- Y10T29/49888—Subsequently coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49998—Work holding
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Bearings For Parts Moving Linearly (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1. 加圧された流体ベアリングを使用する、正確な直線運動、又は回転運動シ ステムを製造し、1つ又は1組の、正確で、加圧された流体が普通にベアリング ・レールに適用される場合に所定の領域を備える機械ベアリング・レール、正確 に製造された交換式のベアリング・パッド、及びレール上に配置されたときにベ アリング・パッドを取り囲む正確でない内側表面を有するキャリッジ/ハウジン グからなる方法であって、前記方法が、 ベアリング・パッドをその内側をレールに向けて所定の位置に配置するステ ップ、 パッドとレールの間の前記所定の領域のみに真空を適用し、キャリッジ/ハ ウジングの正確でない表面とベアリング・パッドの外側との間の隙間が残ってい る間に、好適な位置にベアリング・パッド・フラットを保持するステップ、 ベアリング・パッドの外側とキャリッジの正確でない内側表面との間の前記 隙間を充填するために、安定エポキシを注入して、ベアリング・パッドを正確に 調整された位置に保持するステップ、及び真空の供給を止め、ベアリング・パッ ドの内側とレールの間に加圧されたベアリング流体を適用して、その間に動作流 体フィルムを提供するステップを含むことを特徴とする、前記方法。 2. ベアリング・パッドが流体自己補償型であり、流体が液体であることを特 徴とする、請求項1に記載の方法。 3. ベアリング・パッドが多孔性グラファイトを含み、流体が気体であること を特徴とする、請求項1に記載の方法。 4. ベアリング・パッドがポケット、及びポケット内への流れを調整する流体 の流れを調整する装置を含むことを特徴とする、請求項1に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/208,650 | 1994-03-09 | ||
US08/208,650 US5488771A (en) | 1994-03-09 | 1994-03-09 | Method for manufacturing externally pressurized bearing assemblies |
PCT/IB1995/000152 WO1995024295A1 (en) | 1994-03-09 | 1995-03-09 | Method for manufacturing externally pressurized bearing assemblies |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH09512326A true JPH09512326A (ja) | 1997-12-09 |
JP3608792B2 JP3608792B2 (ja) | 2005-01-12 |
Family
ID=22775439
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52334295A Expired - Fee Related JP3608792B2 (ja) | 1994-03-09 | 1995-03-09 | 外部から加圧されるベアリング・アセンブリの製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US5488771A (ja) |
JP (1) | JP3608792B2 (ja) |
AU (1) | AU1821195A (ja) |
WO (1) | WO1995024295A1 (ja) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5921731A (en) * | 1996-12-31 | 1999-07-13 | The Ingersoll Milling Machine Company | High speed hydrostatic spindle |
US6036413A (en) * | 1997-01-02 | 2000-03-14 | The Ingersoll Milling Machine Company | High speed hydrodynamic spindle |
US6157870A (en) * | 1997-02-18 | 2000-12-05 | Zevatech Trading Ag | Apparatus supplying components to a placement machine with splice sensor |
US6077022A (en) * | 1997-02-18 | 2000-06-20 | Zevatech Trading Ag | Placement machine and a method to control a placement machine |
US5788379A (en) * | 1997-04-08 | 1998-08-04 | Zevatech, Inc. | High precision plate bearing structures and methods of assembly |
DE59811823D1 (de) * | 1997-09-05 | 2004-09-23 | Esec Trading Sa | Halbleiter-Montageeinrichtung zum Auftragen von Klebstoff auf einem Substrat |
EP0913857B1 (de) | 1997-10-30 | 2004-01-28 | ESEC Trading SA | Verfahren und Einrichtung für die Justierung des Bondkopfs einer Maschine für das Bonden von Halbleiterchips auf ein Trägermaterial |
EP0923111B1 (de) | 1997-12-07 | 2007-05-02 | Oerlikon Assembly Equipment AG, Steinhausen | Halbleiter-Montageeinrichtung mit einem hin und her geführten Chipgreifer |
TW424027B (en) * | 1998-01-15 | 2001-03-01 | Esec Sa | Method of making wire connections of predetermined shaped |
US6031242A (en) * | 1998-01-23 | 2000-02-29 | Zevatech, Inc. | Semiconductor die in-flight registration and orientation method and apparatus |
SG71189A1 (en) * | 1998-01-26 | 2000-03-21 | Esec Sa | Ultrasonic transducer with a flange for mounting on an ultrasonic welding device in particular on a wire bonder |
US5989444A (en) | 1998-02-13 | 1999-11-23 | Zywno; Marek | Fluid bearings and vacuum chucks and methods for producing same |
EP0937530A1 (de) * | 1998-02-19 | 1999-08-25 | ESEC Management SA | Verfahren zum Herstellen von Drahtverbindungen an Halbleiterchips |
US5967791A (en) * | 1998-05-05 | 1999-10-19 | Abrahamian; Jaques | Astronomical display apparatus |
US6150740A (en) * | 1999-01-21 | 2000-11-21 | Aesop, Inc. | Linear motion carriage system and method with bearings preloaded by inclined linear motor with high attractive force |
DE69906469T2 (de) * | 1999-01-28 | 2004-02-12 | Fujifilm Electronic Imaging Ltd. | Verfahren zur Erzeugung einer lasttragenden Oberfläche |
US6238092B1 (en) | 1999-06-01 | 2001-05-29 | Tru-Stone Corporation | Air bearing for a motion system |
US20040042689A1 (en) * | 2002-08-30 | 2004-03-04 | Hardinge Inc. | Hydrostatic bearing for linear motion guidance |
US20070034228A1 (en) * | 2005-08-02 | 2007-02-15 | Devitt Andrew J | Method and apparatus for in-line processing and immediately sequential or simultaneous processing of flat and flexible substrates through viscous shear in thin cross section gaps for the manufacture of micro-electronic circuits or displays |
US8427021B2 (en) * | 2009-02-04 | 2013-04-23 | Andrew J. Devitt | Hydrostatic bearing made of magnetic material which is also used as a motor magnet |
DE102013216175A1 (de) * | 2013-08-14 | 2015-02-19 | Hyprostatik Schönfeld Gmbh | Führung und Führungselement |
CA2834615C (en) | 2013-08-28 | 2020-04-28 | Gedex Inc. | Single axis rotational gas bearing with feed-through |
CN105537970B (zh) * | 2014-10-28 | 2018-07-27 | 东芝机械株式会社 | 机床的引导机构以及机床 |
US10704598B1 (en) * | 2019-03-05 | 2020-07-07 | Hiwin Technologies Corp. | Hydrostatic linear guideway |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3359613A (en) * | 1965-05-27 | 1967-12-26 | F Jos Lamb Company Inc | Hydrostatic bearing and method of making same |
US4571799A (en) * | 1980-12-22 | 1986-02-25 | Anorad Corporation | Method for producing air bearing pads for positioning table |
JPS58186541A (ja) * | 1982-04-22 | 1983-10-31 | Murata Warner Suueeg Kk | 工作機械における摺動面の形成方法 |
US4610020A (en) * | 1984-01-06 | 1986-09-02 | The Perkin-Elmer Corporation | X-ray mask ring and apparatus for making same |
US4626299A (en) * | 1985-06-24 | 1986-12-02 | The Warner & Swasey Company | Method of attaching guideways to a machine tool bed |
US4863149A (en) * | 1986-10-31 | 1989-09-05 | The Warner & Swasey Company | Fixture for locating elements for assembly |
DE3825508C1 (de) * | 1988-07-27 | 1989-10-19 | Dyckerhoff & Widmann Ag | Verfahren zur Justierung und Befestigung von Funktionsflächen eines Fahrwegs einer elektromagnetischen Schnellbahn und Vorrichtung zur Durchführung des Verfahrens |
US5065489A (en) * | 1988-07-28 | 1991-11-19 | Eastman Kodak Company | Apparatus for aligning and mounting machine components |
US5104237A (en) * | 1990-11-08 | 1992-04-14 | Advanced Engineering Systems Operations & Products, Inc. (Aesop) | Self-compensating hydrostatic linear motion bearing |
US5118204A (en) * | 1990-12-14 | 1992-06-02 | Roger Peters | Linear slide and method of manufacture thereof |
US5102235A (en) * | 1991-01-10 | 1992-04-07 | Thomson Industries, Inc. | Linear motion bearing |
-
1994
- 1994-03-09 US US08/208,650 patent/US5488771A/en not_active Expired - Lifetime
-
1995
- 1995-03-09 WO PCT/IB1995/000152 patent/WO1995024295A1/en active Application Filing
- 1995-03-09 JP JP52334295A patent/JP3608792B2/ja not_active Expired - Fee Related
- 1995-03-09 AU AU18211/95A patent/AU1821195A/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
AU1821195A (en) | 1995-09-25 |
US5488771A (en) | 1996-02-06 |
JP3608792B2 (ja) | 2005-01-12 |
WO1995024295A1 (en) | 1995-09-14 |
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